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READ CAREFULLY BEFORE USING THIS 
MANUAL 

Introduction 

This machine is a dicing saw for cutting silicon wafers and glass circuit boards 
(workpieces, hereafter). 
It has the rotary sections which rotate at high speed, the high-voltage sections 
which may cause electric shock hazards and the drive sections which may 
catch the operator's body and clothing. 
If the machine is not properly operated, safety hazards may cause serious 
injury or death. 

Read before using the machine 

Before using the machine, thoroughly read this manual and follow the 
instructions set forth in this manual. 

To assure safety in the operation and maintenance of the machine, it is 
important that you know the location of potential safety hazards. It is difficult 
for DISCO to foresee each and every potential safety hazard. However, this 
manual carries various precautionary notes and warnings to indicate the 
presence of all foreseeable potential safety hazards. For increased safety 
assurance, it is therefore essential that you observe all the precautions and 
other relevant instructions set forth in this manual. 

If you modify the machine without prior consent of DISCO or repair it in a 
manner not stated in this manual, the safety assurance features of the machine 
may be seriously affected. 

Never attempt to modify or repair the machine in a manner not approved by 
DISCO. 

 

Sample

Summary of Contents for DAD321

Page 1: ...oduced in any form or by any means without the express written permission of Disco Also this document may not be disclosed or transferred to third parties This document is printed on recyclable Lint F...

Page 2: ...To assure safety in the operation and maintenance of the machine it is important that you know the location of potential safety hazards It is difficult for DISCO to foresee each and every potential sa...

Page 3: ...critical situation in which either critical injury or death is very likely to result This symbol is used for the incident in which the injury is critical and there is high probability of occurrence WA...

Page 4: ...lade Observe the following precautions for at least 15 seconds until the spindle comes to a complete stop Do not place your hands or fingers near the blade or flange Ensure that the splash cover is ke...

Page 5: ...be done by a qualified person who has completed DISCO s education curriculum hereinafter referred to as the maintenance personnel Definition of a manager and an operator This manual defines a manager...

Page 6: ...the B L date Documentation for this machine The following five written manuals are provided for this machine This manual is the Maintenance Manual indicated by the arrow Manual Who should read Content...

Page 7: ...Intro 3 Notation of part number In this document the part numbers are shown as follows New style part no Former style part no XXXX XXXXXX X YYYYYYYY Y S a m p l e...

Page 8: ...Cutting section Name Function Cutting Section Cuts workpieces Operation Control Section Keys on the operation panel are used for data entries and the function keys perform operations Also the monitor...

Page 9: ...ndicates the flow rate of the wheel coolant water Disk Drive Functions as an external storage device Optional accessory Pilot lamp Indicates the machine operating status with the green and yellow lamp...

Page 10: ...axis Z axis Y axis Main body frame Front Name Function X axis Moves the chuck table to the right and the left Y axis Moves the spindle axis and the microscope forward and backward Z axis Moves the sp...

Page 11: ...ardous Areas and Ways to Avoid Hazards A 10 3 1 Inherently Hazardous Areas for Operation and Ways to Avoid Hazards A 11 3 2 Inherently Hazardous Areas for Maintenance and Ways to Avoid Hazards A 13 4...

Page 12: ...of the splash cover C 27 4 2 Machine Protection C 28 4 2 1 Air pressure sensor C 29 4 2 2 Flow rate sensor Optional accessory C 30 D ADJUSTMENT OPERATION D 1 1 Chuck Table Replacement D 2 1 1 Chuck Ta...

Page 13: ...ng E 6 2 1 1 Flange conditioning E 7 2 1 2 Wheel mount conditioning E 8 2 2 Executing Conditioning E 9 2 2 1 Replacing the chuck table E 11 2 2 2 Verifying CONDITIONING screen data E 12 2 2 3 Executin...

Page 14: ...e Whose Interval Differs Depending on the Use Conditions of the Device G 3 1 1 Cleaning the Non contact Setup Sensor Detection Surface Optional Accessory G 4 1 1 1 Calling up the NON CONTACT SENSOR CL...

Page 15: ...4 1 Conditioning the Flange G 42 5 Maintenance to Be Performed at 90 Day Recommended Intervals G 43 5 1 Cleaning the Electrical box Filter in case this machine is used outside the cleanroom G 44 6 Mai...

Page 16: ...Filters for Air H 3 1 2 Replacing the Halogen Lamp H 6 1 3 Replacing the Spindle Carbon Brush H 9 1 4 Replacing the Waterproof Sponge H 12 1 5 Replacing the Spindle Waterproof Plate Ring H 14 1 5 1 Re...

Page 17: ...uck Table Waterproof Cover Chuck Table O ring Bellows H 39 3 1 1 Removing the chuck table H 40 3 1 2 Replacing the waterproof cover O ring bellows H 41 3 1 3 Completion of replacing the waterproof cov...

Page 18: ...before operation Safety precautions that operators should observe during performing any work 3 Inherently Hazardous Areas and Ways to Avoid Hazards Potentially hazardous sections and the ways to avoi...

Page 19: ...forth in the Maintenance Manual before proceeding to work Also if the operator performs various tasks direct them to read the points of note concerning the safety given in the respective manuals The w...

Page 20: ...low connection port Rc PT 1 8 female View A Duct A Sampling port Rc PT 1 8 female Facility side interlock connection terminal Special user specification To permit the facility side to provide air exha...

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