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Hazard level 

The safety precautions set forth in this document are classified into DANGER, 
WARNING and CAUTION categories which represent three degree of hazards 
latent in the machine. These categories are defined as detailed below in 
accordance with the seriousness and probability level of the hazard. In addition 
to the above three safety precaution levels, CAUTION without the safety alert 

symbol (

) and NOTICE are used to give safety usage instructions to the 

user. 

Before using the machine, be sure to read and understand all the associated 
safety precautions set forth in the manual. 

Hazard levels are classified as follows: 

 

DANGER

 

If you cannot avoid the incident in question, a critical 
situation in which either critical injury or death is very 
likely to result. 
This symbol is used for the incident in which the injury 
is critical and there is high probability of occurrence. 

 

WARNING

 

If you cannot avoid the incident in question, a serious 
situation in which either critical injury or death may 
result. 
This symbol is used for the incident in which the injury 
is serious but there is not high probability of occurrence.

 

CAUTION

 

If you cannot avoid the incident in question, a medium 
or slight injury may result. 
This symbol is used for the incident in which the injury 
is slight and there is not high probability of occurrence. 

CAUTION

 

If you cannot avoid the incident in question, an accident 
of physical damage may be caused. 

NOTICE

 

Indicates the safe way of using the machine as well as 
precautions to avoid accidents resulting damage to 
property. 

 

Sample

Summary of Contents for DAD321

Page 1: ...oduced in any form or by any means without the express written permission of Disco Also this document may not be disclosed or transferred to third parties This document is printed on recyclable Lint F...

Page 2: ...To assure safety in the operation and maintenance of the machine it is important that you know the location of potential safety hazards It is difficult for DISCO to foresee each and every potential sa...

Page 3: ...critical situation in which either critical injury or death is very likely to result This symbol is used for the incident in which the injury is critical and there is high probability of occurrence WA...

Page 4: ...lade Observe the following precautions for at least 15 seconds until the spindle comes to a complete stop Do not place your hands or fingers near the blade or flange Ensure that the splash cover is ke...

Page 5: ...be done by a qualified person who has completed DISCO s education curriculum hereinafter referred to as the maintenance personnel Definition of a manager and an operator This manual defines a manager...

Page 6: ...the B L date Documentation for this machine The following five written manuals are provided for this machine This manual is the Maintenance Manual indicated by the arrow Manual Who should read Content...

Page 7: ...Intro 3 Notation of part number In this document the part numbers are shown as follows New style part no Former style part no XXXX XXXXXX X YYYYYYYY Y S a m p l e...

Page 8: ...Cutting section Name Function Cutting Section Cuts workpieces Operation Control Section Keys on the operation panel are used for data entries and the function keys perform operations Also the monitor...

Page 9: ...ndicates the flow rate of the wheel coolant water Disk Drive Functions as an external storage device Optional accessory Pilot lamp Indicates the machine operating status with the green and yellow lamp...

Page 10: ...axis Z axis Y axis Main body frame Front Name Function X axis Moves the chuck table to the right and the left Y axis Moves the spindle axis and the microscope forward and backward Z axis Moves the sp...

Page 11: ...ardous Areas and Ways to Avoid Hazards A 10 3 1 Inherently Hazardous Areas for Operation and Ways to Avoid Hazards A 11 3 2 Inherently Hazardous Areas for Maintenance and Ways to Avoid Hazards A 13 4...

Page 12: ...of the splash cover C 27 4 2 Machine Protection C 28 4 2 1 Air pressure sensor C 29 4 2 2 Flow rate sensor Optional accessory C 30 D ADJUSTMENT OPERATION D 1 1 Chuck Table Replacement D 2 1 1 Chuck Ta...

Page 13: ...ng E 6 2 1 1 Flange conditioning E 7 2 1 2 Wheel mount conditioning E 8 2 2 Executing Conditioning E 9 2 2 1 Replacing the chuck table E 11 2 2 2 Verifying CONDITIONING screen data E 12 2 2 3 Executin...

Page 14: ...e Whose Interval Differs Depending on the Use Conditions of the Device G 3 1 1 Cleaning the Non contact Setup Sensor Detection Surface Optional Accessory G 4 1 1 1 Calling up the NON CONTACT SENSOR CL...

Page 15: ...4 1 Conditioning the Flange G 42 5 Maintenance to Be Performed at 90 Day Recommended Intervals G 43 5 1 Cleaning the Electrical box Filter in case this machine is used outside the cleanroom G 44 6 Mai...

Page 16: ...Filters for Air H 3 1 2 Replacing the Halogen Lamp H 6 1 3 Replacing the Spindle Carbon Brush H 9 1 4 Replacing the Waterproof Sponge H 12 1 5 Replacing the Spindle Waterproof Plate Ring H 14 1 5 1 Re...

Page 17: ...uck Table Waterproof Cover Chuck Table O ring Bellows H 39 3 1 1 Removing the chuck table H 40 3 1 2 Replacing the waterproof cover O ring bellows H 41 3 1 3 Completion of replacing the waterproof cov...

Page 18: ...before operation Safety precautions that operators should observe during performing any work 3 Inherently Hazardous Areas and Ways to Avoid Hazards Potentially hazardous sections and the ways to avoi...

Page 19: ...forth in the Maintenance Manual before proceeding to work Also if the operator performs various tasks direct them to read the points of note concerning the safety given in the respective manuals The w...

Page 20: ...low connection port Rc PT 1 8 female View A Duct A Sampling port Rc PT 1 8 female Facility side interlock connection terminal Special user specification To permit the facility side to provide air exha...

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