Intro-6
Axis arrangement diagram
The diagram and the table below show axis arrangement, names and functions
of each axis.
X-axis
θ
-axis
(except 351)
Spindle axis
Z-axis
Y-axis
Main body frame
Front
Name
Function
X-axis
Moves the chuck table to the right and the left.
Y-axis
Moves the spindle axis and the microscope forward
and backward.
Z-axis
Moves the spindle up and down.
θ
-axis
Rotates the chuck table.
Spindle-axis
Rotates a blade at a high speed.
Main Body Frame
Supports the machine main body.
Sample
