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Intro-1 

INTRODUCTION 

About this manual 

This Maintenance Manual explains the maintenance and inspection items and 
data setup checkout that are necessary for customer-side maintenance of 
Automatic Dicing/Cutting Saws 3*1 Series Models DAD321, DAC351 and 
DAD361. This manual is written for the maintenance personnel. 

To ensure safety 

To ensure safety, be sure to thoroughly read and understand the contents of this 
manual before performing maintenance or adjustment. Note that this manual is 
based on the software versions of 5.4 series. 

When installing or adjusting the machine, be sure to follow the procedures set 
forth in this manual. 

Be sure that the maintenance should be done by a qualified person who has 
completed DISCO's education curriculum (hereinafter referred to as the 
maintenance personnel). 

Definition of a manager and an operator 

This manual defines a manager and an operator as follows: 

 

Category 

Applicable 

personnel 

Job 

Manager

 

Management 
representative 

The person who is responsible for overall 
management of machines and operators. 

 Maintenance 

personnel 

The qualified person who received DISCO 
machine maintenance training. 

Operator

 

Data maintenance 
personnel 

The qualified person who is responsible 
for management of software data of the 
machine. 

 

Operator 

The person who operates the machine to 
process workpieces. 

Minimum retention period of the maintenance functional parts 

Maintenance functional parts required for repair or modification will be 
retained by Disco for at least seven years after the B/L date. 

 

Sample

Summary of Contents for DAD321

Page 1: ...oduced in any form or by any means without the express written permission of Disco Also this document may not be disclosed or transferred to third parties This document is printed on recyclable Lint F...

Page 2: ...To assure safety in the operation and maintenance of the machine it is important that you know the location of potential safety hazards It is difficult for DISCO to foresee each and every potential sa...

Page 3: ...critical situation in which either critical injury or death is very likely to result This symbol is used for the incident in which the injury is critical and there is high probability of occurrence WA...

Page 4: ...lade Observe the following precautions for at least 15 seconds until the spindle comes to a complete stop Do not place your hands or fingers near the blade or flange Ensure that the splash cover is ke...

Page 5: ...be done by a qualified person who has completed DISCO s education curriculum hereinafter referred to as the maintenance personnel Definition of a manager and an operator This manual defines a manager...

Page 6: ...the B L date Documentation for this machine The following five written manuals are provided for this machine This manual is the Maintenance Manual indicated by the arrow Manual Who should read Content...

Page 7: ...Intro 3 Notation of part number In this document the part numbers are shown as follows New style part no Former style part no XXXX XXXXXX X YYYYYYYY Y S a m p l e...

Page 8: ...Cutting section Name Function Cutting Section Cuts workpieces Operation Control Section Keys on the operation panel are used for data entries and the function keys perform operations Also the monitor...

Page 9: ...ndicates the flow rate of the wheel coolant water Disk Drive Functions as an external storage device Optional accessory Pilot lamp Indicates the machine operating status with the green and yellow lamp...

Page 10: ...axis Z axis Y axis Main body frame Front Name Function X axis Moves the chuck table to the right and the left Y axis Moves the spindle axis and the microscope forward and backward Z axis Moves the sp...

Page 11: ...ardous Areas and Ways to Avoid Hazards A 10 3 1 Inherently Hazardous Areas for Operation and Ways to Avoid Hazards A 11 3 2 Inherently Hazardous Areas for Maintenance and Ways to Avoid Hazards A 13 4...

Page 12: ...of the splash cover C 27 4 2 Machine Protection C 28 4 2 1 Air pressure sensor C 29 4 2 2 Flow rate sensor Optional accessory C 30 D ADJUSTMENT OPERATION D 1 1 Chuck Table Replacement D 2 1 1 Chuck Ta...

Page 13: ...ng E 6 2 1 1 Flange conditioning E 7 2 1 2 Wheel mount conditioning E 8 2 2 Executing Conditioning E 9 2 2 1 Replacing the chuck table E 11 2 2 2 Verifying CONDITIONING screen data E 12 2 2 3 Executin...

Page 14: ...e Whose Interval Differs Depending on the Use Conditions of the Device G 3 1 1 Cleaning the Non contact Setup Sensor Detection Surface Optional Accessory G 4 1 1 1 Calling up the NON CONTACT SENSOR CL...

Page 15: ...4 1 Conditioning the Flange G 42 5 Maintenance to Be Performed at 90 Day Recommended Intervals G 43 5 1 Cleaning the Electrical box Filter in case this machine is used outside the cleanroom G 44 6 Mai...

Page 16: ...Filters for Air H 3 1 2 Replacing the Halogen Lamp H 6 1 3 Replacing the Spindle Carbon Brush H 9 1 4 Replacing the Waterproof Sponge H 12 1 5 Replacing the Spindle Waterproof Plate Ring H 14 1 5 1 Re...

Page 17: ...uck Table Waterproof Cover Chuck Table O ring Bellows H 39 3 1 1 Removing the chuck table H 40 3 1 2 Replacing the waterproof cover O ring bellows H 41 3 1 3 Completion of replacing the waterproof cov...

Page 18: ...before operation Safety precautions that operators should observe during performing any work 3 Inherently Hazardous Areas and Ways to Avoid Hazards Potentially hazardous sections and the ways to avoi...

Page 19: ...forth in the Maintenance Manual before proceeding to work Also if the operator performs various tasks direct them to read the points of note concerning the safety given in the respective manuals The w...

Page 20: ...low connection port Rc PT 1 8 female View A Duct A Sampling port Rc PT 1 8 female Facility side interlock connection terminal Special user specification To permit the facility side to provide air exha...

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