TABLE OF CONTENTS
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© 2005 DH Instruments, Inc.
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T A B L E O F C O N T E N T S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . I
T A B L E S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . V
F I G U R E S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . V I
A B O U T T H I S M A N U A L . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . I X
1 .
I N T R O D U C T I O N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1
SPECIFICATIONS....................................................................................................................................1
1.1.1
ADCS SYSTEM GENERAL SPECIFICATIONS ............................................................................................1
1.1.2
PG7601 PISTON GAUGE SPECIFICATIONS ...............................................................................................2
1.1.2.1
AMBIENT AND PISTON-CYLINDER CONDITION MEASUREMENTS ....................................................2
1.1.2.2
PISTON-CYLINDER MODULE ..................................................................................................................2
1.1.2.3
MASS SET .................................................................................................................................................3
1.1.3
FPG8601 GENERAL SPECIFICATIONS.......................................................................................................3
1.1.3.1
AMBIENT AND PISTON-CYLINDER CONDITION MEASUREMENTS ....................................................3
1.1.4
PRESSURE MEASUREMENT AND CONTROL SPECIFICATIONS ............................................................3
1.1.4.1
10 TO 380 KPA, PG7601 AND PPC3-700K ..............................................................................................3
1.1.4.2
1 TO 15 KPA, FPG8601 AND PPC3-100K ................................................................................................4
2 .
S Y S T E M O V E R V I E W . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1
ADCS-601 SYSTEM.................................................................................................................................5
2.1.1
REFERENCE BENCH..................................................................................................................................12
2.1.2
CONTROL CABINET ...................................................................................................................................13
2.1.3
GAS SUPPLY PANEL .................................................................................................................................15
2.2
PRESSURE STANDARDS..................................................................................................................... 16
2.2.1
PG7601 PISTON GAUGE ............................................................................................................................16
2.2.1.1
PG7601 PLATFORM................................................................................................................................17
2.2.1.2
PG7601 TERMINAL .................................................................................................................................17
2.2.1.3
PG7601 10 KPA/KG PISTON-CYLINDER MODULE...............................................................................18
2.2.1.4
AMH-38 AUTOMATED MASS HANDLER ...............................................................................................19
2.2.1.5
AMH-38 MASS SET .................................................................................................................................21
2.2.2
FPG8601 FORCE BALANCED PISTON GAUGE .......................................................................................21
2.2.2.1
FPG8601 PLATFORM .............................................................................................................................23
2.2.3
PPC3 PRESSURE CONTROLLERS ...........................................................................................................23
2.2.4
RPM4 A116K REFERENCE PRESSURE MONITOR..................................................................................25
2.3
VACUUM PUMPS ..................................................................................................................................27
3 .
I N S T A L L A T I O N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 9
3.1
UNPACKING AND INSPECTION........................................................................................................... 29
3.1.1
ADCS CONTROL CABINET ........................................................................................................................30
3.1.2
ADCS REFERENCE BENCH AND ACCESSORIES...................................................................................30
3.1.3
PG7601 PLATFORM AND BELL JAR ........................................................................................................32
3.1.4
PG7601 PISTON-CYLINDER MODULE (PC-7100/7600-10,TC) ................................................................32
3.1.5
PG7601 MASS SET (MS-AMH-38)..............................................................................................................33
3.1.6
PG7601 AUTOMATED MASS HANDLER (AMH-38) ..................................................................................34
3.1.7
FPG8601 PLATFORM, PISTON-CYLINDER AND ACCESSORIES...........................................................34
3.1.8
FPG8601 MASS SET (MS-8601-2)..............................................................................................................35
3.1.9
SCROLL VACUUM PUMPS ........................................................................................................................35
3.1.10
TURBO MOLECULAR VACUUM PUMP .....................................................................................................35
3.1.11
SYSTEM CONTROLLER.............................................................................................................................36
3.2
SITE REQUIREMENTS.......................................................................................................................... 36
Summary of Contents for ADCS-601
Page 10: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page VIII N NO OT TE ES S ...
Page 12: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page X N NO OT TE ES S ...
Page 19: ...2 SYSTEM OVERVIEW Page 7 2005 DH Instruments Inc Figure 2 ADCS 601 system pneumatic schematic ...
Page 114: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page 102 N NO OT TE ES S ...
Page 116: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page 104 N NO OT TE ES S ...
Page 146: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page 134 N NO OT TE ES S ...
Page 168: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page 156 N NO OT TE ES S ...
Page 174: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page 162 N NO OT TE ES S ...