Delta HPH-20KA01KAT User Manual Download Page 6 | Manualshive

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Delta Electronics. Inc.

HPH-

20KA01KAT

2

1.3.

Electromagnetic Compatibility Directives and Standard



Disturbance Characteristic: EN55011 - CRSP11 Class A, Group 1 (>20 kVA)



General Immunity Standard for Industry: EN 61000-6-2



Safety Requirement: IEC-61010-1 (CE and UL certification)

1.4.

Industry Guideline



Guideline for Semiconductor manufacturing equipment: SEMI S2 and F47

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Summary of Contents for HPH-20KA01KAT

Page 1: ...User Manual DC Power Supply Continuous 400 1000 VDC Model HPH 20KA01KAT Version Rev S 00...

Page 2: ...ems and will be billed of cost 1 To exceed the warranty period 2 Subject to misuse negligence accident or natural disaster 3 Used in a hazardous or dangerous manner either alone or in conjunction with...

Page 3: ...s and Monitor Function 8 3 5 Mechanical Specification 9 3 6 Environment Specification 10 Chapter 4 System Protection Mechanism 11 4 1 Input Breaker 11 4 2 Protection by MCU 11 Chapter 5 Installation 1...

Page 4: ...Inc HPH 20KA01KAT III Chapter 7 Operation 30 7 1 Panel Operating Steps 30 7 2 D SUB Operating Steps 31 7 3 RS232 Operating Steps 31 7 4 RS485 Operating Steps 31 7 5 Parallel Operating Steps 32 Chapter...

Page 5: ...e generator or lose important data This caution symbol advises that improper operation will cause personal injury damage the power supply or any electronic devices connected to the power supply lose d...

Page 6: ...ves and Standard Disturbance Characteristic EN55011 CRSP11 Class A Group 1 20 kVA General Immunity Standard for Industry EN 61000 6 2 Safety Requirement IEC 61010 1 CE and UL certification 1 4 Industr...

Page 7: ...arc quenching make it very suitable to be applied in most of plasma based sputtering application Figure 2 1 Delta HPH 20KA01KAT power supply 2 2 Key Feature Excellent Accuracy Load Regulation and Stab...

Page 8: ...and feedback the voltage and current information to MCU for voltage current and power control and related protection Auxiliary Power The AUX power provides low voltage source to supply the Vcc of ana...

Page 9: ...put Current Accuracy 1 of command setting or 0 5 of full scale current between output and command Within operation range at 25 C Output Voltage Reader Digital Interface Accuracy 1 of command setting o...

Page 10: ...tage current and power mode Figure 3 2 Operation curve of output V I characteristic Figure 3 3 Operation curve of output impedance characteristic 1000V 200V 400V 50A 600V 5A 20A Power Limit Current Li...

Page 11: ...age and current level are 1000 V and 50 A The output characteristic is as the figures above If the operation point is below 400 V the power supply can provide at most 50 A if the operation is more tha...

Page 12: ...etecting arc Pause Time 40 to 250 s Adjustable time between output cutoff and recovery Arc Trip Voltage Level 25 to 200 V The level to determine if arc occurs from output Over Arc Density Protection 1...

Page 13: ...Delta Electronics Inc HPH 20KA01KAT 9...

Page 14: ...Monitoring if the output reaches the setting of regulation within the setting of period Energy Mode 1 to 99999 kJ Monitoring if the output energy reaches the setting of energy Target Life Mode 1 to 15...

Page 15: ...Delta Electronics Inc HPH 20KA01KAT 11...

Page 16: ...nc HPH 20KA01KAT 12 Figure 3 5 Physical dimension of HPH 20KA01KAT power supply Cooling requirement Minimum air flow rate 7 36 m3 min 260 CFM Figure 3 6 Air Flow directions Air In Air In Air Out Air O...

Page 17: ...two fans The temperature of air inlet should not exceed 40 degree C 3 6 Environment Specification Table 3 6 Climatic specification Item Temperature Relative Humidity Air Pressure Operating 0 to 40 C...

Page 18: ...ver power A Arc Number Limit 07 Arc number is over setting parameter L Target Life Monitor 09 Power off while output reaches setting Energy L Output Interlock 11 Uninstallation of output cover L Conta...

Page 19: ...rom PSU IP 11 showing on Master L Parallel Fault IP12 112 Fault from PSU IP 12 showing on Master L Parallel Fault IP13 113 Fault from PSU IP 13 showing on Master L Parallel Fault IP14 114 Fault from P...

Page 20: ...Delta Electronics Inc HPH 20KA01KAT 16 Energy Mode Monitor 06 While output reaches setting Energy A...

Page 21: ...operation should be only in pollution degree 2 or better environment Do not operate this device in a dusty area or in corrosive gas environment Proper grounding For safe use must connect ground cable...

Page 22: ...Delta Electronics Inc HPH 20KA01KAT 18...

Page 23: ...ired by individual HPH 20KA01KAT A supplies are shown in table 5 1 The static pressure inches of water of the empty cabinet should not exceed 0 1 inches of water at the CFM level obtained by adding to...

Page 24: ...ding strap to connect an equi potential ground stud on the master unit to an equi potential ground stud on the first slave unit Note We recommend you use a ground wire that can conduct the current of...

Page 25: ...3 feet We recommend you connect the ground stud on the master unit to system ground See Figure 5 3 for more information 4 Continue connecting togeter subsequent slave unit chassis as done in the prev...

Page 26: ...e a host computer connected to a serial port on your master unit you can monitor the output power current or voltage of your system and the output of each individual unit 3 If you want more than two i...

Page 27: ...onstant current mode user could adjust output current regulation level by enter button and knob V Button Press the button to set the output condition in constant voltage mode In constant voltage mode...

Page 28: ...4 Figure 6 1 Front panel 6 2 Rear Panel 1 GND terminal is for chamber grounding and earth grounding should be performed for safety 2 Connect output terminal to target and connect COM to the grounding...

Page 29: ...Delta Electronics Inc HPH 20KA01KAT 25 6 3 Main Menu Map Fig 6 1 Panel tree...

Page 30: ...nnector is as follows Figure 6 3 Connector of host port 9 pin female RS232 RS485 Table6 2 Definition of RS232 485 connector RS232 Pin Definition Description RS485 Pin Definition Description 1 1 D 2 Tx...

Page 31: ...oltage IP 0x24 0x00 01 Value Value 0x00 Value 0x00 0x0D Ramp Time IP 0x25 0x00 01 Value Value 0x00 Value 0x00 0x0D Target Life IP 0x26 0x00 01 02 Value Value 0x00 Value 0x00 0x0D Delay time IP 0x28 0x...

Page 32: ...ltage IP 0x24 0x0A Value Value 0x00 Value 0x00 0x0D Ramp Time IP 0x25 0x0A Value Value 0x00 Value 0x00 0x0D Target Life IP 0x26 0x0A Value Value 0x00 Value 0x00 0x0D Delay time IP 0x28 0x0A Value Valu...

Page 33: ...aster Slave Master 00 Slave 01 A Ri Offset Plus 00 Minus 01 0 to 99 for 0 to 9 9 A Vo Offset Plus 00 Minus 01 0 to 99 for 0 to 9 9 A Io Offset Plus 00 Minus 01 0 to 99 for 0 to 9 9 Terminating Resisto...

Page 34: ...nected to the collector of photo coupler 2 VOUT_A O Pin 2 shows the reader of output voltage 0 to 10 V for V 0 to 1000 V 3 POUT_A O Pin 3 shows the reader of output Power 0 to 10 V for P 0 to 20 kW 4...

Page 35: ...nput signal a switch is utilized between the ports and isolated ground Open Floating Close Grounding Port of digital Signal output The internal resistance of the ports is 5 1 kohm and a pull up power...

Page 36: ...n in step B When in Power mode the command can be adjusted from 0 to 20 kW when in Current mode command can be adjusted from 0 to 50 A when in Voltage mode and command can be adjusted from 130 to 1000...

Page 37: ...up RS 485 2 Follow the protocol defined in chapter 6 4 to operating 7 5 Parallel Operating Steps Parallel operating example 1 Two sample parallel Operating steps 1 Connecting set up follow chapter 5 2...

Page 38: ...ummy load to ensure if it is under normal operation SW OPP 06 Output over power Take all safety precaution and then check if the mains voltage that is in specification Turn on the output power with a...

Page 39: ...the operation is normal Parallel Fault IP4 104 Fault from PSU IP 04 Check the PSU with IP 04 independently to ensure the operation is normal Parallel Fault IP5 105 Fault from PSU IP 05 Check the PSU...

Page 40: ...l Fault Slave Communication Loss 224 Slave fails to receive the ack from Master while power on Check the RJ46 cable is correctly connected between master and slave PSUs Warning Condition Code Descript...

Page 41: ...Delta Electronics Inc HPH 20KA01KAT 37...

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