CKD Rapiflow FSM2-N Series Instruction Manual Download Page 8

 

 

<Hysteresis fixed value selection>

 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 

<Setting of flow rate unit.>

 

 
 
 
 
 
 
 
 
 
 
 
 

<Setting of Eco mode>

 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 

<Reset to the initial setting>

 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 

<Model number display>

 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 

[6]Troubleshooting

 

Error displays and corrective action

 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 

Troubleshooting (Other than error displays)

 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 

Error indication 

Cause 

Corrective action 

 

The supplied power voltage 
is not within the rating. 

Check controller power 
specifications, set power voltage 
within the rating range, and turn 
power ON again. 

 

If fluid flows during zero 
adjustment setting, “E 02” is 
indicated.  

Please check that fluid doesn’t 
flow at the time of zero adjustment
setting. 

 

An error occurred during 
EEPROM reading or writing. 

Contact your nearest CKD Sales 
Office or dealer. 
 
 

 

An error occurred during 
memory reading or writing. 

Contact your nearest CKD Sales 
Office or dealer. 
 
 

Reading exceeds the upper 
limit of detection range. 

Reduce the flow. 

 

Sensor chip is broken. 

Replace FSM2. 
 

Reading exceeds the lower 
limit of detection range. 

Reduce the flow. 

 

Sensor chip is broken. 

Replace FSM2. 
 

Switch output indicator
is blinking 

Switch output over current 
protection circuit is activated. 

Check whether load current 
exceeds the rating, correctly 
connect the controller, and turn 
power ON again. 

Model number display 

To instantaneous flow rate display 

Press once. 

mL

 

/

 

min

 

<Flow rate unit & flow direction> 

<0 point adjustment value> 

<Model number> 

Full scale flow rate 

<Working fluid>
Ai : Air,N2 
Ar : Argon 
C2 : CO2 

<Switch output>
N : NPN output 
P : PNP output 

Model number display

Trouble Cause  Corrective 

action 

Breakage of wire. 

Replace FSM2. 
Recheck/repair external wiring. 

Wrong connection of power 
source. 

Connect the rated power source 
correctly. 

Malfunction caused by noise. 

Keep FSM2 main body and cable 
away from noise source. 

Output circuit is broken. 

Replace FSM2. 

No flow display   
(No analog output) 

FSM2 is broken. 

Replace FSM2. 

Flow display remains 
0. (Analog output 
remains 1V or 3V) 

Flow path clogged by foreign 
matter. 

Remove foreign matter and install 
filter at primary side of FSM2. 

Leakage 

Check and correct piping. 

Foreign matter sticking to 
sensor chip. 

Replace FSM2. 

Flow display does not 
reach 0. (Analog 
output does not make 
1V or 3V) 

Malfunction caused by noise. 

Keep FSM2 main body and cable 
away from the noise source. 

Sensor chip is broken. 

Replace FSM2. 

Foreign matter sticking to 
sensor chip. 

Replace FSM2. 

Poor precision 

Malfunction caused by noise. 

Keep FSM2 main body and cable 
away from the noise source. 
Reduce pulsation by installing 
tank, etc. 
Change the response time. 
Change the display speed. 

Pulsation of air. 
Fault in power source (not 
enough voltage/capacity) 
Pulsation of air. 

Change the hysteresis. 

Fault in power source (not 
enough voltage/capacity) 

Supply rated voltage. 
Provide power source with 
enough capacity. 

Flow display is not 
stable. (Analog output 
is not stable. Output is 
chattering.) 

Malfunction caused by noise. 

Keep FSM2 main body and cable 
away from noise source. 

It doesn’t move at 
power supply on by 
abnormal display. 

It turned on power with the 
button had been pushed. 

The power supply is put again   
without pushing the button. 

 

Hysteresis fixed value setting display 

Hysteresis fixed value selection 

To instantaneous flow rate display 

Press once. (determination) 

… 

<Approx. 1%F.S.> 

<Approx. 2%F.S.> 

<Approx. 8%F.S.> 

When window operation or auto reference is 
selected. 
Press   or   key to select hysteresis fixed value.
Press   key to set. 

Flow rate unit setting display 

Setting of flow rate unit 

To instantaneous flow rate display 

Press once. (determination) 

<ANR: Standard condition> 

<NOR: Reference condition> 

Note: NOR display is calculation value.

Press   or   key to select flow rate unit. 
Press   key to set. 

Eco mode setting display 

Setting of Eco mode 

Press once. (determination) 

mL

 

/

 

min

 

 

 

 

 

Eco mode ON : If any key is not carried out for approx. 1 min., the display is turned off.   
                            Press any key to show the indication. 

<Eco mode OFF> 

<Eco mode ON> 

Press   or   key to select eco mode. 
Press   key to set. 

Reset setting 

To instantaneous flow rate display 

Press once. (determination) 

Reset setting display 

<Reset is not executed> 

<Reset is executed> 

Setting at shipping out of factory 

Item Setting 

at 

shipping out of factory 

Switch out put 

OFF 

Zero adjustment value 

Zero 

Integrating flow rate value 

Zero 

Flow direction   

One-direction 

Auto reference (CH2 setting) 

Switch output 

Response time 

SP1

50msec

 

Display speed   

250msec 

Sub-display 

Flow direction display 

Displayed color 

Red when ON. Green when OFF. 

Hysteresis 1%FS 
Flow rate unit 

ANR 

Eco mode 

OFF 

Press   or   key to select reset setting. 
Press   key to set. 

-7- 

Discontinue

Summary of Contents for Rapiflow FSM2-N Series

Page 1: ...M2 N series Integrated needle valve type Read this instruction manual carefully before using this product particularly the section describing safety Retain this instruction manual with the product for further consultation whenever necessary 2 n d E D I T I O N Discontinue ...

Page 2: ...vided but damage could result if the needle is turned too far Power supply voltage and outputs must be used with the specified voltage Applying the voltage more than specified voltage may cause malfunction damage of sensor electric shock or fire Do not apply load more than the rated output Damage or fire of the output may be caused For wiring stop control unit machinery and equipment and turn off ...

Page 3: ...2 function selected switch output CH2 function selected external input PNP output Model no FSM2 P CH2 function selected switch output CH2 function selected external input 1 2 3 The panel bessel is inserted from the front side of the panel The panel Bessel is inserted from the back side of the panel and holding with the screw The separation indicator is inserted from the back side of the panel 4 5 ...

Page 4: ...ure 101kPa calculation value Eco mode setting Current consumption can be lowered When the product is left for 1 min without any operation it s shift to eco mode Reset setting Return to default settings factory settings 5 How to operate 5 1 Normal mode Displaying the integrated flow Note Integration is reset with the external input See auto reference function Note Integration is also reset or Integ...

Page 5: ...steresis operation 1 Hysteresis operation 2 Integrated output 1 Integrated output 2 Integrated pulse CH1 operation mode change Press once determination CH1 ON OFF data setting mL min Lower limit data setting Upper limit data setting Count UP Count down Press once determination CH2 operation mode change Set same as CH1 CH2 ON OFF data setting Set same as CH1 Press once determination Press once dete...

Page 6: ...lue At instantaneous flow rate display press key for 8 sec to enter to detailed setting mode To auto reference setting display To response time setting display To display speed setting display To sub display setting display To displayed color setting display To hysteresis fixed value setting display To flow rate unit setting display To eco mode setting display To reset setting display To model num...

Page 7: ...display To instantaneous flow rate display Press once determination Input point mL min Lower limit mL min Upper limit mL min Initial value 0 0 1st 123 0 123 2nd 234 123 234 3rd 45 45 234 4th 345 45 345 5th 456 345 456 Display speed setting display Setting of display speed 250msec 500msec 1000msec To instantaneous flow rate display Press once determination Press or key to select display speed Press...

Page 8: ... by noise Keep FSM2 main body and cable away from the noise source Sensor chip is broken Replace FSM2 Foreign matter sticking to sensor chip Replace FSM2 Poor precision Malfunction caused by noise Keep FSM2 main body and cable away from the noise source Reduce pulsation by installing tank etc Change the response time Change the display speed Pulsation of air Fault in power source not enough voltag...

Page 9: ...splay Dual 2 4 digit 7 segm ent Two color LCD Flow rate range 3 F 0 to 500 mL min 0 to 1000 mL min 0 to 2 00 L m in 0 to 5 00 L m in 0 to 10 00 L m in 0 to 20 0 L m in 0 to 50 0 L m in 0 to 100 0 L m in 0 to 200 L m in Flow rate display Note 1 2 Display resolution 1m L m in 0 01L m in 0 1L m in 1L m in Flow rate range 9999999m L 99999 99L 999999 9L 9999999L Display resolution 1m L 0 01L 0 1L 1L In...

Page 10: ...e8 50m A or less Lead wire φ3 7 AW G26 5 Functions Flow rate display flow rate display peak hold switch output and analog output Outside diam eter of insulator is Φ1 0 Installation attitude Both vertical and horizontal Strait piping section Not required Protective structure Note 9 IEC standards IP40 Protective circuit Note5 Power supply and switch output reverse connection protections and switch o...

Page 11: ...o FSM2 LB1 Model No FSM2 KHS N How to panel mount Panel hold matching Fig Plate thickness t0 8 to 6 Single mount Sticking mount 2 M3depth5 Model No Port size Dimension A FSM2 H04 Φ4 push in 89 FSM2 H06 Φ6 push in 90 Model No Port size Dimension A FSM2 H08 Φ8 push in 101 6 FSM2 H10 Φ10 push in 113 1 2 M3depth5 A B Model No Dimension A Dimension B FSM2 H04 H06 S06 N 28 5 40 5 FSM2 H08 H10 S08 N 30 0...

Page 12: ...ncluded H10 Φ4 push in resin K Inspection results included S06 Rc1 8 stainless S08 Rc1 4 stainless 10 Needle valve 11 Clean N Needle valve Blank none P70 Particle occurrence prevention P80 Oil treatment prohibited Combination of flow rate range port size and working fluid 5 Port size body material H04 H06 H08 H10 S06 S08 005 010 020 050 100 200 500 101 4 Flow rate range 201 Table for clean specifi...

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