
4
4
4-78
4-78
Disassembly/Assembly > Laser Exposure System > Removing the Laser Scanner Unit > Procedure
Disassembly/Assembly > Laser Exposure System > Removing the Laser Scanner Unit > Procedure
2) Remove the Laser Scanner Unit [1].
• 1 Flat Cable [2]
• 1 Connector [3]
• 4 Screws [4]
[1]
[2]
[3]
[4]
[4]
x2
x4
F-4-170
CAUTION:
• Be sure to pass the Shutter Open/Close Lever [1] through the hole [A] of the Scanner
Cover when assembling.
[A]
[1]
[1]
[1]
• Be sure that the Shutter Open/Close Lever [1] can move vertically.
[1]
[1]
F-4-171
F-4-172