Product description
Use
The COBRA BC vacuum pumps are designed for use in the field of
microelectronics and similar industries.
They can be used to suck gases and gas mixtures.
WARNING
When using toxic, inflammable and/or explosive gases, make sure
that the system corresponds in design to applicable local and na-
tional safety regulations and that all applicable safety measures are
followed.
All product-specific safety regulations must be observed.
Solid particles must not get into the vacuum pump. Procedural errors
can result in the pump sucking in a certain quantity of liquid. If the
pump has sucked in liquid, a short drying time is necessary at the end
of the procedure.
The allowed maximum inlet gas temperature depends on the inlet
pressure and the type of gas: the lower the inlet pressure (Pa), the
higher the drawn gas temperature (TGas) can be.
The following indicative values for air can be considered:
– Pa > 50 mbar, TGas < 80°C
– Pa < 50 mbar, TGas < 200°C
The vacuum pump is intended for use in a potentially non-explosive
environment.
As far as temperature is concerned, the vacuum pump is suitable for
evacuation of a 300 liters tank. The vacuum pump is not suitable for
continuous duty at a pressure more or equal than 150 (hPa) mbar.
Caution, the operating cycle of 150 (hPa) mbar must not exceed more
than 5 min.
For other applications, contact your Busch representative.
- Maximum inlet pressure: 1 bar (abs).
- With pump running at full speed, do not expose to inlet pressure
> 300 (hPa) mbar.
The vacuum pump is tight down to ultimate pressure.
Operating principle
The COBRA BC 0101 G vacuum pumps are COBRA NW screw
vacuum pumps with cooling water.
The COBRA NW screw vacuum pumps operate according to the
principle of screw pumps. Two parallel screws (5) rotate in opposite
directions in the pump body. Entering gases are trapped between the
Product description
BC 0101 G
Page 4
0870704904 (En)
1
Inlet
2
Discharge
3
Oil
4
Cooling water
5
Screw rotors
6
Temperature switch Motor
CWR Cooling water regulating valve
DGR 1 Dilution gas (option)
OSG Oil sight glass
CWM Cooling water flow meter
TSA
Temperature sensor PT100
MV
Nitrogen solenoid valve
MOT Motor
TS
Temperature switch
(
Motor
)
VFD Variable freequency device
DP
OSG
Cooling water outlet
Cooling water inlet
Nitrogen inlet
TS
MOT
CWR
TSA
Process gas outlet
Process gas inlet
CWM
MV
VFD
DGR 1
Summary of Contents for COBRA BC 0101 G
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