Brooks SLA585 Installation And Operation Manual Download

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Installation and Operation Manual

X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013

Brooks

Digital MFC's & MFM's

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Summary of Contents for SLA585

Page 1: ...Flow Controllers Models and Models SLA5860 SLA5861 SLA5863 Mass Flow Meters Model SLA5850S Analog I O MFC with RS 485 Model SLA5850S Analog I O MFC with RS 485 Elastomer Downport Model SLA5853S Analog I O MFC with RS 485 Model SLA5850D Digital I O DeviceNetTM MFC with Coplanar Valve Model SLA5850F Digital I O FOUNDATION Fieldbus MFC with Coplanar Valve ...

Page 2: ...Installation and Operation Manual X TMF SLA5800 MFC eng Part Number 541B027AAG April 2013 Brooks Digital MFC s MFM s ...

Page 3: ...arch and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of de...

Page 4: ...Installation and Operation Manual X TMF SLA5800 MFC eng Part Number 541B027AAG April 2013 Brooks Digital MFC s MFM s THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 5: ...ion 3 1 Overview 3 1 3 2 Theory of Operation for Flow Measurement 3 1 3 3 Features 3 2 3 4 Analog I O Mode of Operation 3 4 3 5 Communications Features 3 6 3 5 1 RS 485 Communications Features Analog versions only 3 6 3 5 2 RS 485 DeviceNet Communications Features 3 7 3 5 3 RS 485 FOUNDATION Fieldbus Communications Features 3 7 3 6 Alarms and Warnings Analog versions only 3 8 3 6 1 Alarms and Warn...

Page 6: ...1 9 Model SLA5853F Digital I O DeviceNet MFC and Flanged Connections 1 13 1 10 Model SLA5853 Analog I O MFC with Flanged Connections 1 13 1 11 Model SLA5860S Analog I O MFM with RS 485 1 14 1 12 Model SLA5861F Digital I O FOUNDATION Fieldbus MFM 1 14 1 13 Model SLA5863D Digital I O DeviceNet MFM 1 15 1 14 Model SLA5863 Analog I O MFM with Flanges 1 15 2 1 D Connector Shielded Cable Hookup Diagram ...

Page 7: ...gital thermal mass flow measurement and control instrument which offers unparalleled flexibility and performance The SLA5800 Series MFC is designed for use in advanced gas handling systems The result is the most accurate repeatable and responsive MFC on the market today Wide Flow Range The SLA5800 Series covers an extremely broad range of flowrates Model SLA5850 can have a full scale flow as low a...

Page 8: ...ge from 100 2500 lpm N2 eq Control Range Turndown 50 1 Turndown 100 1 with Coplanar valve option for any FS range from 1 50 lpm N2 eq Accuracy N2 eq at calibration conditions 1 0 of rate 20 100 FS 0 2 FS below 20 FS up to 1200 lpm Optional 0 7 of rate 0 2 FS S Series up to 1200 lpm Flow ranges above 1200 lpm and up to 2500 lpm 1 0 of full scale Repeatability 0 20 of rate Settling Time Response Tim...

Page 9: ... bar max Low DP valve 7 5 psi 0 52 bar to 30 psi 2 07 bar max Minimum pressure drop depends on gas and FS flow rate consult factory Leak Integrity Inboard to Outboard 1x10 9 atm scc sec Helium max Helium leak test performed without fittings Ambient Temperature Limits Operating 0 C to 65 C 32 F to 149 F Non Operating 25 C to 100 C 13 F to 212 F Fluid Temperature Limits 0 C to 65 C 32 F to 149 F 1 3...

Page 10: ...s for gases The words normal conditions and standard conditions are sometimes used interchangeably to describe the reference STP Standard Temperature and Pressure for gases Further note that temperature and pressure values for standard or normal reference conditions vary in countries and industries worldwide For example the Semiconductor Equipment Manufacturing Industry SEMI defines standard tempe...

Page 11: ...eously are supported Flow output types are selectable as follows 0 5 Vdc 1 5 Vdc 0 20 mA 4 20 mA Flow Output Voltage Specifications Nominal Range 0 5 Vdc 1 5 Vdc Calibrated Accuracy 0 1 of F S Full Range 0 5 5 5 Vdc 0 5 Vdc 0 6 5 5 Vdc 1 5 Vdc Min Load Resistance 2 kΩ Flow Output Current Specifications Nominal Range 4 20 mA or 0 20 mA Calibrated Accuracy 0 1 of F S Full Range 0 22 mA 0 20 mA 3 8 2...

Page 12: ...pen Collector Max Closed ON Current 25 mA Max Open OFF Leakage 1 μA Max Open OFF Voltage 30 Vdc 0 3 Vdc VOR 4 8 Vdc Undefined Valve Override Signal Specifications Analog I O Versions only Input Impedence 800 kΩ Absolute Max Input 25 Vdc VOR 25 Vdc without damage 5 Volt Reference Signal Analog I O versions only A 5 Vdc reference output is provided to the customer for use in generating a setpoint an...

Page 13: ...nd linear ramp up and or ramp down control characteristics Calibration Curve Selection Analog I O versions only Select one of ten gases and select PID tuning settings in analog mode Requires external connection of resistors between Pin 13 and Pin 9 Reference Tables 1 2 and 1 3 Selectable Soft Start Processes requiring injection of gases can be adversely affected by excessive initial gas flow This ...

Page 14: ...485 ports as standard An RS 232 to RS 485 converter or RS 485 interface board is therefore required to connect an RS 485 network to a standard pc The RS 485 bus a daisy chain network meaning that the wires are connected at the units as in Figure 1 2 DEFAULT CAL 1 External resistor not installed CAL Resistor Value k ohms CAL Resistor Value k ohms 1 Not Installed 6 124 2 Shorted 7 80 6 3 665 8 52 3 ...

Page 15: ...tion protocol FOUNDATION Fieldbus is a digital network allowing usage of existing 4 20mA cables avoiding costly re wiring Fully certified by passing ITK this device has passed several Interoperability requirements over a broad range of hosts When combined with DeltaV and using the power of PlantWeb those devices provide intelligent alerts allowing accurate device maintenance and service Value Rang...

Page 16: ...e enclosure providing a degree of protection of at least IP54 according to EN60529 taking into account the environmental conditions under which the equipment will be used Pressure Equipment Directive 97 23 EC See Table 1 1 for further pressure information PC based Support Tools Brooks Instrument offers a variety of PC based process control and service tools to meet the needs of our customers Smart...

Page 17: ...tal MFC s MFM s Installation and Operation Manual X TMF SLA5800 MFC eng Part Number 541B027AAG April 2013 Figure1 5 Model SLA5850D Digital I O Devicenet MFC Figure 1 6 Model SLA5850S Analog I O MFC with RS 485 Elastomer Downport Connections ...

Page 18: ...n 1 Introduction Installation and Operation Manual X TMF SLA5800 MFC eng Part Number 541B027AAG April 2013 Figure 1 8 Model SLA5851D Digital I O DeviceNet MFC Figure 1 7 Model SLA5850F Digital I O FOUNDATION Fieldbus MFC with Coplanar Valve ...

Page 19: ...igital MFC s MFM s Installation and Operation Manual X TMF SLA5800 MFC eng Part Number 541B027AAG April 2013 Figure 1 10 Model SLA5853S Analog I O MFC with Flanged Connections Figure 1 9 Model SLA5853F Digital I O FOUNDATION Fieldbus MFC ...

Page 20: ...s Section 1 Introduction Installation and Operation Manual X TMF SLA5800 MFC eng Part Number 541B027AAG April 2013 Figure 1 12 Model SLA5861F Digital I O FOUNDATION Fieldbus MFM Figure 1 11 Model SLA5860S Analog I O MFM with RS 485 ...

Page 21: ...on Brooks Digital MFC s MFM s Installation and Operation Manual X TMF SLA5800 MFC eng Part Number 541B027AAG April 2013 Figure 1 13 Model SLA5863D Digital I O Devicenet MFM Figure 1 14 Model SLA5863 Analog I O MFM with Flanges ...

Page 22: ...1 16 Brooks Digital MFC s MFM s Section 1 Introduction Installation and Operation Manual X TMF SLA5800 MFC eng Part Number 541B027AAG April 2013 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 23: ...ment com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 81 0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 0 318 549 309 E mail BrooksEu BrooksInstrument com Remove the envelope containing the packing list Carefully remove the instrument f...

Page 24: ...ned to Brooks requires completion of Form RPR003 1 Brooks Instrument Decontamination Statement as well as a Material Safety Data Sheet MSDS for the fluid s used in the instrument This is required before any Brooks Personnel can begin processing Copies of the form can be obtained from any Brooks Instrument location listed above 2 5 Transit Precautions To safeguard against damage during transit tran...

Page 25: ...ld be located in a clean dry atmosphere relatively free from shock and vibration b Leave sufficient room for access to Self zero function push button c Install in such a manner that permits easy removal if the instrument requires servicing d The Brooks Digital MFC or MFM can be installed in any position However mounting in orientations other than the original factory calibration see calibration da...

Page 26: ...rce delta P 30 and 300 psig The selection of the bellows spring is mainly determined by the differential pressure as specified on the customer order This should reflect your actual process conditions The low force bellows consists of a softer bellows spring which is required to allow flow control at lower differential pressures During startup conditions when a process line is being pressurized the...

Page 27: ...ld process fluid is being measured ensure that the piping system is designed to allow the gas temperature to equalize with the flow controller ambient temperature For more information please contact the Brooks Technical Service group 2 10 Electrical Interface The setpoint signal is supplied as a 0 1 to 5 Vdc or 0 4 20 mA analog signal All signals are supplied via the 15 pin D Connector For an anal...

Page 28: ... SUB D 15 PIN PIN COLOR 6 1 Setpoint Common Input BLACK 10 2 Flow Signal 0 1 5 volt Output WHITE 9 3 TTL Alarm Open Collector Output RED 2 4 Flow Signal 0 4 20 mA Output GREEN 13 5 Power Supply 13 5 Vdc to 27 Vdc ORANGE 14 6 Not Connected BLUE 3 7 Setpoint 0 4 20 mA Input WHT BLK 5 8 Setpoint 0 1 5 volt Input RED BLK 12 9 Power Supply Common GRN BLK 8 10 Flow Signal Common Output ORG BLK 4 11 Refe...

Page 29: ...ion and Operation Manual X TMF SLA5800 MFC eng Part Number 541B027AAG April 2013 Figure 2 3 Recommended I O Wiring Configuration for Current Signals Non Isolated Power Supply Figure 2 4 Recommended I O Wiring Configuration for Current Signals Isolated Power Supply ...

Page 30: ...tible PCs are not equipped with RS 485 ports as standard An RS 232 to RS 485 converter or RS 485 interface board is therefore required to connect an RS 485 to a standard PC Figure 2 5 is an interconnection diagram showing two TMFs linked to an IBM compatible PC via RS 485 and RS 485 to RS 232 converter The RS 485 bus a daisy chain network meaning that the wires are connected at the units as in Fig...

Page 31: ...000 mA 40 μA 0 20 mA output 4 000 mA 40 μA 4 20 mA output f Turn on the gas supply A positive flow signal may be present due to slight valve leak thru MFC only g Supply a setpoint signal between 0 to 5 Vdc 0 5 Vdc setpoint 1 to 5 Vdc 1 5 Vdc setpoint 0 to 20 mA 0 20 mA setpoint 4 to 20 mA 4 20 mA setpoint h Check the analog output signal The output signal should match the setpoint signal in accord...

Page 32: ...urrogate gas ensure that there is enough pressure to the MFC in order to flow the correct amount of the surrogate gas Example Checking an MFC calibrated for 100 ccm SF6 sulfur hexafluoride The sensor factor N2 nitrogen is 0 27 therefore the equivalent N2 needed is 100 0 27 370 4 ccm This may require a pressure increase to make this flow rate 2 13 DeviceNet I O Assemblies Other problems that may oc...

Page 33: ...e linear pressure difference versus flow relationship The ratio of sensor flow to the flow through the restrictor remains constant over the range of the MFC MFM A B constant The full scale flow rate of the MFC MFM is established by selecting a restrictor with the correct pressure differential for the desired flow The flow sensor is a very narrow thin walled stainless steel tube Onto this tube are ...

Page 34: ...uipment is capable of storing up to 10 different sets of gas calibration data Each set includes a calibration curve PID controller settings valve performance data and information about the calibration conditions The Brooks Digital equipment can contain calibrations for different gases or for the same gas at multiple conditions pressures full scale flow rates Section 3 4 Analog I O Mode of Operatio...

Page 35: ...tion Installation and Operation Manual X TMF SLA5800 MFC eng Part Number 541B027AAG April 2013 Figure 3 2 Externally Accessible Adjustment for all Meters Controllers Figure 3 1 Flow Sensor Operational Diagram VCRTM End Connections Shown Zero Button ...

Page 36: ...s of the ten calibrations are determined from the customer order Only those calibrations ordered will be available in the instrument Unless otherwise specified a Brooks Digital MFC MFM ordered with only one calibration will have that calibration stored in calibration 1 Before operating the MFC MFM apply power and warm up the instrument for approximately 45 minutes After warm up apply gas pressure ...

Page 37: ...uired processing to change the calibration then returns to normal operation If the device determines that the selected calibration is not valid where applicable the valve is driven to the closed state and the flow signal is set to zero Typical time required to change calibrations is approximately 1 0 second NOTE It is recommended to change calibration curve selection during no flow conditions Zero...

Page 38: ...ailable on the Brooks Digital Series via RS 485 This form of multi drop capable communication provides access to many of the Brooks Digital Series functions for control and monitor operations including Accurate setpoint adjustment flow output measurement including units of measure selection Valve Override controller only Flow Totalizer Alarm status and settings Soft Start Control controller only R...

Page 39: ...controller only Valve Override controller only Calibration Gas Select Soft Start Control controller only 3 5 3 FOUNDATION Fieldbus Communications Features The Brooks SLA5800 Digital Series is supporting FOUNDATION Fieldbus communication protocol FOUNDATION Fieldbus is a digital network allowing usage of existing 4 20mA cables avoiding costly re wiring Fully certified by passing ITK this device has...

Page 40: ...arm warning situation and the alarm settings Alarms and Warnings are a user configurable feature This feature may be adjusted via the Service Port using a special software application available from Brooks Reference the Brooks Service Suite User Manual for more information about the Service Port and Service Tool software applications Each alarm has the following common user configurable traits Sev...

Page 41: ... condition This attribute not valid for alarms that monitor a state condition of the device High Limit The value of the monitored value above which is considered an alarm warning condition This attribute not valid for alarms that monitor a state condition of the device Delay The time in seconds that the value must remain above the high limit or below the low limit before an alarm warning condition...

Page 42: ...e Mode the following behavioral characteristics of the device apply Flow Output Signal will be set to its defined Safe State for the following output signal types 0 to 5 Vdc 0 Vdc 1 to 5 Vdc 1 Vdc 0 to 20 mA 0 mA 4 to 20 mA 0 mA In the Safe State the valve will be unpowered This means that for Normally Closed valves the valve will stay closed and for Normally Open valves the valve will stay open D...

Page 43: ...iation Alarm monitors the difference between Setpoint and Flow and sets the alarm when the difference exceeds the specified limits for more than the specified delay period The user specifies a minimum and maximum limit in percent of Setpoint This alarm is disabled if the valve override is active No Flow Indication Alarm The No Flow Indication Alarm will occur when the measurement of flow indicates...

Page 44: ...n the device Non Volatile Memory as sets Up to 10 sets of calibration configuration sets can be saved in order to have a unit pre configured for multiple gas calibration different pressure conditions multiple scalings of the same gas Calibration and configuration data sets may be adjusted by an advanced user via the Service Port using a special software application available from Brooks Reference ...

Page 45: ...value reported by the analog input is below the Low Setpoint Command Cutoff parameter value then the Setpoint will be set to zero 3 8 3 Low Flow Output Cutoff Whenever the measured flow is below the Low Flow Output Cutoff parameter the Flow Output will be set to zero 3 8 4 Flow Output Damping The Flow Output can be damped from 0 to 10 seconds 3 8 5 Adaptive Control Adaptive Valve Control is a mean...

Page 46: ...rs a variety of PC based process control and service tools to meet the needs of our customers SmartDDE may be used with any unit supporting RS 485 in a multidrop configuration thus allowing users to control and monitor their Brooks devices The Brooks Service Suite Analog I O versions only may be used to monitor diagnose tune and calibrate Brooks devices The Brooks Service Suite interfaces with Bro...

Page 47: ...n and Operation Manual X TMF SLA5800 MFC eng Part Number 541B027AAG April 2013 4 1 Maintenance and Troubleshooting No routine maintenance is required on the Brooks Digital MFC s and MFM s If an in line filter is used the filtering elements should be periodically replaced or cleaned ...

Page 48: ...ion link One common problem is due to data mismatches of the Input Output I O Assemblies For proper communication ove rthe DeviceNet network the MFC must be set up with the same I O assemby as the network master Confirm these I O settings are correct 4 1 1 Troubleshooting Analog or DeviceNet version This section contains suggestions to help diagnose MFC related problems in the gas distribution sys...

Page 49: ...D labeled NET is used to indicate NETWORK status Note the NET LED can have 4 distinct operational states For more complete details on these LEDs reference the Brooks DeviceNet Supplement Instruction Manual Q What is purpose of the Rotary Switches on top of the MFC A Two of the rotary switches are labeled ADDRESS These two switches are used to configure the MAC ID of the MFCwhen used on the DeviceN...

Page 50: ...pecially if the system is new 1 Verify a low resistance common connection and that the correct power supply voltage and signals are present of the connector of the Smart TMF Remove the sensor connector from the PC Board for this procedure OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL Open circuit on ohmmeter If either heater 1 or Pin 1 or 4 to meter body sensor common 4 are shorted an ohmm...

Page 51: ...trument to warm up for 45 minutes In case of a Controller model adjust the Setpoint to zero Do not connect the device to a gas source yet Observe the output signal and if necessary perform the zero adjustment procedure See Section 3 4 zeroing function If the output signal does not zero properly please contact Brooks Instrument 2 Connect the instrument to a source of the same gas used for it s orig...

Page 52: ...ter piano wire through the flow sensor tube to remove any contamination end closest to the control valve The sensor tube can then be flushed with a solvent that leaves no residue This can be accomplished conveniently using a hypodermic needle filled with solvent NOTE Do not soak the sensor assembly in a cleaning solvent If solvent seeps into the sensor assembly it will likely damage or significant...

Page 53: ... signal follows Setpoint Control valve leaks or is stuck Clean the control valve or return the device at higher Setpoints but will not open to the factory Section 4 1 2 go below 2 Output signal follows Setpoint Insufficient inlet pressure or Adjust pressures inspect in line filters and at lower Setpoints but does pressure drop clean replace as necessary not reach full scale Partially clogged senso...

Page 54: ...4 8 Brooks Digital MFC s MFM s Section 4 Maintenance Troubleshooting Installation and Operation Manual X TMF SLA5800 MFC eng Part Number 541B027AAG April 2013 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 55: ...ɠɟ ɞɨ ɫɩɭɤɚ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢ ɞɚ ɞɨɜɟɞɟ ɞɨ ɬɟɥɟɫɧɢ ɩɨɜɪɟɞɢ ȿɜɪɨɩɟɣɫɤɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɭɪɟɞɢ ɩɨɞ ɧɚɥɹɝɚɧɟ PED ȼɫɢɱɤɢ ɫɴɨɪɴɠɟɧɢɹ ɩɨɞ ɧɚɥɹɝɚɧɟ ɫ ɜɴɬɪɟɲɧɨ ɧɚɥɹɝɚɧɟ ɧɚɞ 0 5 bar g ɢ ɫ ɪɚɡɦɟɪ ɩɨ ɝɨɥɹɦ ɨɬ 25 mm ɢɥɢ 1 ɢɧɱ ɩɨɩɚɞɚɬ ɩɨɞ ɞɟɣɫɬɜɢɟɬɨ ɧɚ ɟɜɪɨɩɟɣɫɤɚɬɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɭɪɟɞɢ ɩɨɞ ɧɚɥɹɝɚɧɟ PED x Ƚɥɚɜɚ Ɍɟɯɧɢɱɟɫɤɢ ɞɚɧɧɢ ɧɚ ɧɚɫɬɨɹɳɨɬɨ ɪɴɤɨɜɨɞɫɬɜɨ ɫɴɞɴɪɠɚ ɫɜɴɪɡɚɧɢɬɟ ɫ ɞɢɪɟɤɬɢɜɚɬɚ PED ɢɧɫɬɪɭɤɰɢɢ x ɍɤɚɡɚɧɢɬɟ ɜ ɧɚɫɬɨ...

Page 56: ...bo k ohrožení zdraví osob Evropská smČrnice pro tlakové zaĜízení PED Na veškerá tlaková zaĜízení s vnitĜním tlakem vyšším než 0 5 baru g a velikosti vČtší než 25 mm nebo 1 palec se vztahuje platnost smČrnice o tlakovém zaĜízení PED Kapitola Technické údaje v této pĜíruþce obsahuje dĤležité bezpeþnostní a provozní pokyny související se smČrnicí PED x MČĜicí pĜístroje popsané v této pĜíruþce jsou v ...

Page 57: ...udvikling ekspanderer og dette kan forårsage skade på udstyr og personer Det Europæiske direktiv for trykudstyr PED På alt udstyr hvis indgangstryk er større end 0 5bar g og større end 25 mm eller en tomme gælder det europæiske direktiv for trykapparater Manualens afsnit tekniske data indeholder anvisninger om PED direktivet x I manualen angives måleinstrumenter der er tilpasset direktivet 97 23 E...

Page 58: ...aken PED richtlijn Pressure Equipment Directive Alle drukapparatuur met een interne druk van meer dan 0 5 barg en een diameter van meer dan 25 mm valt onder de PED richtlijn x In het hoofdstuk Specificaties van deze handleiding staan aanwijzingen die verband houden met de PED richtlijn x De meters die in deze handleiding worden beschreven voldoen aan de Europese richtlijn 97 23 EG x Alle stromings...

Page 59: ...astusi Euroopa surveseadmete direktiiv PED Euroopa surveseadmete direktiiv kohaldub kõikidele surveseadmetele mille sisesurve on üle 0 5 baari g ja läbimõõt üle 25 mm või 1 tolli x Käesoleva kasutusjuhendi spetsifikatsiooniosa sisaldab surveseadmete direktiiviga seonduvaid juhiseid x Käesolevas kasutusjuhendis kirjeldatud mõõturid vastavad EN direktiivi 97 23 EÜ nõuetele x Brooks Instrument i vool...

Page 60: ...övahingon vaaraan Eurooppalainen painelaitedirektiivi PED Painelaitteet joidenpaine on suurempi kuin 0 5 bar ja joiden koko on suurempi kuin 25 mm tai 1 tuuma kuuluvat eurooppalaiseen painelaitedirektiiviin PED x PED direktiiviä koskevat määräykset löytyvät käyttöoppaan Tekniset tiedot luvusta x Käyttöoppaassa kuvatut mittarit ovat 97 23 EC EU direktiivin mukaisia x Kaikki Brooks Instrumentin virt...

Page 61: ... européenne équipements sous pression PED Tous les équipements sous pression dont la pression interne est supérieure à 0 5 bar pression relative et dont la taille dépasse 25 mm ou un pouce entrent dans le cadre de la directive PED La section Spécifications de ce manuel contient les instructions relatives à la directive PED Les appareils de mesure de ce manuel sont conformes à la directive EN 97 23...

Page 62: ...des Gerätes kommen Personenschäden können die Folge sein Europäische Druckgeräterichtlinie PED Alle Druckgeräte mit einem internen Druck von mehr als 0 5 bar g und einer Größe von mehr als 1in 1 in 25 4 mm unterliegen der Druckgeräterichtlinie x Das Kapitel zu den technischen Daten in dieser Anleitung enthält wichtige Sicherheits und Betriebsanweisungen in Bezug auf die Druckgeräterichtlinie x Mes...

Page 63: ...Ƞȓ ǼȣȡȦʌĮȧțȒ ȅįȘȖȓĮ ȖȚĮ ĲȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓİıȘ PED ȀȐșİ İȟȠʌȜȚıȝȩȢ ȣʌȩ ʌȓİıȘ ȝİ İıȦĲİȡȚțȒ ʌȓİıȘ ȐȞȦ ĲȠȣ 0 5 bar g țĮȚ ȝİȖȑșȠȣȢ ȝİȖĮȜȪĲİȡȠȣ ĲȦȞ 25 mm Ȓ ĲȘȢ 1 ȓȞĲıĮȢ İȝʌȓʌĲİȚ ıĲȚȢ įȚĮĲȐȟİȚȢ ĲȘȢ İȣȡȦʌĮȧțȒȢ ȅįȘȖȓĮȢ ȖȚĮ ĲȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓİıȘ PED x ȉȠ țİĳȐȜĮȚȠ ȆȡȠįȚĮȖȡĮĳȑȢ ĲȠȣ ʌĮȡȩȞĲȠȢ İȖȤİȚȡȚįȓȠȣ ʌİȡȚȜĮȝȕȐȞİȚ ȠįȘȖȓİȢ ıȤİĲȚțȐ ȝİ ĲȘȞ ȅįȘȖȓĮ PED x ȅȚ ȝİĲȡȘĲȑȢ ʌȠȣ ʌİȡȚȖȡȐĳȠȞĲĮȚ ıĲȠ ʌĮȡȩȞ İȖȤİȚȡȓįȚȠ ıȣȝȝ...

Page 64: ...ami károsíthatja a berendezést és személyi sérüléshez vezethet Nyomástartó berendezésekre vonatkozó európai irányelv PED Minden 0 5 bar nál g magasabb belsĘ nyomású és 25 mm nél vagy 1 hüvelyknél nagyobb nyomástartó berendezés a nyomástartó berendezésekre vonatkozó európai irányelv PED hatálya alá tartozik x A gépkönyv MĦszaki adatok fejezete tartalmaz a PED irányelvre vonatkozó utasításokat x A g...

Page 65: ...rovocare lesioni alle persone Direttiva europea relativa alle apparecchiature a pressione PED Ogni apparecchiatura a pressione con pressione interna maggiore di 0 5 bar g e più grande di 25 mm o di 1 pollice ricade nell ambito della Direttiva Europea relativa alle apparecchiature a pressione PED x Il capitolo Dati tecnici del manuale contiene le disposizioni relative alla direttiva PED x Gli strum...

Page 66: ...s var termiski izplesties pƗrraut ierƯci un radƯt traumas Eiropas spiedieniekƗrtu direktƯva PED Uz visƗm spiedieniekƗrtƗm kuru iekšƝjais spriegums pƗrsniedz 0 5 bar g un ir lielƗkas par 25 mm jeb 1 collu attiecas Eiropas spiedieniekƗrtu direktƯva PED x ŠƯs rokasgrƗmatas tehnisko parametru nodaƺƗ ir sniegtas a PED DirektƯvu saistƯtƗs instrukcijas x ŠajƗ rokasgrƗmatƗ aprakstƯtie mƝrƯtƗji atbilst EN ...

Page 67: ...nơs Europos slơginơs Ƴrangos direktyva PED Visa slơginơ Ƴranga kurios vidinis slơgis didesnis nei 0 5 bar g o dydis didesnis nei 25 mm arba 1 colis yra reglamentuojama slơginơs Ƴrangos direktyvos PED x Šios instrukcijos dalyje Techniniai duomenys pateikiami nurodymai susijĊ su PED direktyva x Šioje instrukcijoje aprašyti matuokliai atitinka Europos Sąjungos direktyvą 97 23 EB x Visi Brooks Instrum...

Page 68: ...e z ciekáego medium Niedopeánienie tego zalecenia moĪe doprowadziü do termicznego zwiĊkszenia objĊtoĞci cieczy co z kolei moĪe spowodowaü uszkodzenie urządzenia i obraĪenia personelu Europejska dyrektywa dotycząca urządzeĔ ciĞnieniowych PED Wszystkie urządzenia ciĞnieniowe pracujące przy ciĞnieniu wewnĊtrznym wzglĊdnym wiĊkszym niĪ 0 5 bara i wielkoĞci powyĪej 25 mm lub 1 cala podlegają dyrektywie...

Page 69: ...gação surge do facto de existir a possibilidade de ocorrer dilatação térmica do líquido no interior do aparelho podendo provocar danos pessoais ou materiais graves Directiva Europeia para equipamentos sob pressão PED Todos os equipamentos sujeitos a pressão interior superior a 0 5 bar g e com calibre superior a 25 mm 1 polegada estão sob a vigência da directiva europeia de equipamentos sob pressão...

Page 70: ...termică a fluidului care poate defecta instalaĠia úi poate produce răniri de persoane Directiva europeană pentru instalaĠiile sub presiune PED Toate instalaĠiile úi sistemele presurizate ce se află sub presiuni interne ce depăúesc 0 5 mbar g úi au mai mult de 25 mm sau 1 Ġol cad sub incidenĠa normei europene corespunzătoare PED x La capitolul Date tehnice din cartea maúinii se găsesc indicaĠiile c...

Page 71: ...sĢou zranenia obsluhy z dôvodu tepelnej rozĢažnosti náplne Európska smernica vzĢahujúca sa na tlakové zariadenia PED x Všetky zariadenia s vyšším vnútorným pretlakom ako 0 5 bar g a väþšieho rozmeru ako 25 mm alebo 1 anglický palec podliehajú pod Európsku smernicu vzĢahujúcu sa na tlakové nádoby PED x Kapitola Technické údaje návodu na obsluhu obsahuje príkazy vzĢahujúce sa na smernicu PED x Merac...

Page 72: ...škodbo Europske smernice za naprave ohranjanja pritiska PED Vsaka naprava ohranjanja pritiska z notranjim pritiskom veþ od 0 5 bara g in veþjim od 25 mm ali 1 palca sodi pod Europskim smernicam za ohranjanje pritiska PED x Poglavje priroþnika Tehniþni podatki vsebuje navodila ki se nanašajo na smernice PED x Merilni instrumenti navajani v priroþniku ustrezajo smernicam EU številke 97 23 EK x Vsaki...

Page 73: ...lo que puede dañar al equipo y conducir a daños personales Directriz Europea de los Equipos de Presión PED Todos los equipos de presión con una presión interna que supere a 0 5 bar g con tamaño mayor a 25 mm o 1 pulgada entran el ámbito de la Directriz Europea de los Equipos de Presión PED x El capítulo Datos Técnicos del manual incluye las instrucciones respecto a las directivas de PED x Los inst...

Page 74: ...m transportabla tryckbärande anordningar Alla utrustning för tryck med ett tryck över 0 5 Bar g bar och större demensioner än 25 mm eller 1 inch faller under Tryck direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckbärande anordningar PED x Den här Instruktionsbokens Sektion Specifikation innehåller anvisningar gällande PED Direktivet x Mätare som beskrivs i denna Instruktionsbok är i ...

Page 75: ...Installation and Operation Manual X TMF SLA5800 MFC eng Part Number 541B027AAG April 2013 Brooks Digital MFC s MFM s THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 76: ... support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards Visit www BrooksInstrument co...

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