1-1
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
1-1 Scope
Thank you for purchasing a Brooks Instrument Mass Flow Product. This
manual, X-TMF-SLA5800-MFC-eng is an installation and operation manual
for your instrument.
If you have purchased a Brooks
®
Digital Mass Flow Product with DeviceNet
Communications, a separate DeviceNet Instruction Manual shall also be
provided as part of the operating documentation.
1-2 Purpose
The Brooks Digital Products are mass flow measurement devices
designed for accurately measuring (MFM's) and rapidly controlling (MFC's)
flows of gases. This instruction manual is intended to provide the user with
all the information necessary to install, operate and maintain the Brooks
MFC and MFM. This manual is organized into the following sections.
Section 1
Introduction
Section 2
Installation
Section 3
Operation
Section 4
Maintenance
Section A
Essential Instructions
Back Cover
Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair these Brooks Digital products.
1-3 Description
Brooks Instrument’s SLA5800 Series is an elastomer sealed digital thermal
mass flow measurement and control instrument, which offers unparalleled
flexibility and performance. The SLA5800 Series MFC is designed for use
in advanced gas handling systems. The result is the most accurate,
repeatable, and responsive MFC on the market today!
Wide Flow Range
The SLA5800 Series covers an extremely broad range of flowrates. Model
SLA5850 can have a full scale flow as low as 3 ccm. With a high turndown
ratio of 50:1, accurate gas flow can be measured or controlled down to
0.06 ccm! Model SLA5853 can meter or control gas flow up to 2500 lpm.
Fast Response Performance
The all-digital electronics and superior mechanical configuration in the
SLA5800 series provide for ultra fast response characteristics. Settling
times are specified as less than one second, but Brooks’ Adaptive Valve
Control can achieve response times of 0.2 sec.
Broad Array of Communication Options
Brooks
®
offers traditional 0-5 volt and 4-20mA analog options as well as
RS-485 digital communications (“S-protocol”, based on HART). Brooks
also offers control interface via digital network protocols like DeviceNet, a
high-speed (up to 500k baud) digital communication network, or
F
OUNDATION
®
Fieldbus. Brooks’ communication capabilities and device-
profiles have been certified by the ODVA (Open DeviceNet Vendor’s
Association) and the ITK Interoperability Test Kit. Other network protocols
are in development. Talk to your Brooks representative about your specific
needs.
