1-5
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
supported.
Setpoint input types are software selectable as follows:
0 - 5 Vdc
1 - 5 Vdc
0 - 20 mA
4 - 20 mA
Voltage Setpoint Input Specifications
Nominal Range:
0 - 5 Vdc
Full Range:
0 - 5.5 Vdc
Absolute Max.:
20 V
(Without Damage)
Input Impedence:
>990 k
Ω
Calibrated Accuracy: +0.1% of F.S.
Current Setpoint Input Specifications
Nominal Range:
4 - 20 mA or 0 - 20 mA
Full Range:
0 - 22 mA
Absolute Max.:
25 mA
(Without Damage)
Input Impedence:
125
Ω
Calibrated Accuracy: +0.1% of F.S.
Flow Output
(Analog I/O version only)
Voltage and current type outputs (but not both simultaneously) are
supported. Flow output types are selectable as follows.
0 - 5 Vdc
1 - 5 Vdc
0 - 20 mA
4 - 20 mA
Flow Output (Voltage) Specifications
Nominal Range:
0 - 5 Vdc, 1 - 5 Vdc
Calibrated Accuracy: +0.1% of F.S.
Full Range:
-0.5 - 5.5 Vdc (@ 0-5 Vdc); 0.6 - 5.5 Vdc (@ 1-5 Vdc)
Min. Load Resistance: 2 k
Ω
Flow Output (Current) Specifications
Nominal Range:
4 - 20 mA or 0 - 20 mA
Calibrated Accuracy: +0.1% of F.S.
Full Range:
0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA)
Max. Load:
380
Ω
(for supply voltage < 16 Vdc)
580
Ω
(for supply voltage > 16 Vdc)
Valve Override Signal (Analog I/O version only)
The Valve Override Signal (VOR) is implemented as an analog input which
measures the voltage at the input and controls the valve based upon the
measured reading as follows:
Valve Override Signal Drive Settings (Analog I/O Versions only)
Floating / Unconnected: Instrument controls valve to command setpoint
VOR < 0.3 Vdc:
Valve Closed
VOR > 4.8 Vdc:
Valve Open
