4-6
Brooks
®
Digital MFC's & MFM's
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Table 4-2 lists possible malfunctions which may be encountered during
bench troubleshooting.
For Controller Models Only
: Apply +5 Vdc to the +15 Vdc valve override pin
(pin 12) and verify that the output exceeds 100%. Connect the valve
override pin to earth and verify that the output signal falls below 2%.
4-1-3 Cleaning Procedures
When deposition makes it necessary to clean the Brooks Digital Series
Mass Flow Controller or Mass Flow Meter, use the following procedures:
1. Remove the unit from the system.
2. Purge with dry nitrogen gas, which removes virtually all particulate
matter from the device. Should contamination persist, subject all
wetted
1
components to ultrasonic cleaning. Following this, purge the
device thoroughly with dry nitrogen gas once again.
3. If the sensor is contaminated, remove the sensor and use a haemostat
or tweezers to push a 0.007" diameter piano wire through the
flow-sensor tube to remove any contamination (end closest to the
control valve). The sensor tube can then be flushed with a solvent that
leaves no residue. This can be accomplished conveniently using a
hypodermic needle filled with solvent.
NOTE: Do not soak the sensor assembly in a cleaning solvent. If solvent
seeps into the sensor assembly, it will likely damage or significantly alter
the sensor's operating characteristics.
4-1-4 Calibration Procedure
The calibration of Brooks Digital Series Mass Flow devices is not described
in this manual. Such calibration requires accurate and traceable calibration
equipment such as Brooks Vol-U-Meter
®
equipment, in addition to digital
communications.
If your device needs calibration Brooks Instrument can provide this service
at one of its service locations. Visit www.BrooksInstrument.com to locate
the service location nearest to you. However, if traceable calibration
equipment is available at your facility, Brooks service Suite Calibration
software, along with training, is available for purchase.
1
Wetted components include the body, laminar-flow element, and all valve components including the orifice, process adapters and inlet
filters (if so equipped).
