3-12
Brooks
®
Digital MFC's & MFM's
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Flow Analog Output Out of Range Alarm
The Flow Analog Output Out of Range Alarm will occur when the measured
flow results in an Analog Output which exceeds the specified range for
either the Voltage or Current Output. See Section 1.
Flow Sensor Out of Range
The Flow Sensor Out of Range Alarm will occur when the device detects
that the signal received from the sensor is not within the allowable
tolerance band. This alarm could be the result of a flow sensor failure.
3-7 Calibration/Configuration Sets
All Flow Calibration parameters and some of the device configuration
parameters are saved in the device Non-Volatile Memory as “sets”. Up to
10 sets of calibration/configuration sets can be saved in order to have a
unit pre-configured for multiple gas calibration, different pressure
conditions, multiple scalings of the same gas.
Calibration and configuration data sets may be adjusted by an advanced
user via the Service Port using a special software application available
from Brooks. Reference the Brooks Service Suite User Manual for more
information about the Service Port and Service Tool software applications.
Flow Calibration Options
In addition to the factory calibration polynomial, the following calibration
options are provided to modify the factory calibration:
-
Gas Correction Factor
-
Calibration Scaling
-
User Calibration Polynomial
Configuration Options
The following configuration parameters are stored in the Calibration/
Configuration Sets:
-
P, I, and D
-
Valve Offset, Span, and Leaktight Offset
-
Pole Compensation and filtering
