MASS-STREAM
TM
Instruction Manual D-6200
9.17.112A – Date of issue: 2017-03
Page 12 off 12
The calibration is processed with a mass flow controller which functions as a reference.
The controller and the gas inlet pressure forward a defined gas flow, thus a signal of the
sensor can be allocated to each specific mass flow.
Each instrument is calibrated according to the customer’s operation conditions within the
specified accuracy limits. These customer specific information can be found on the
instrument label and the calibration certificate.
