iL Dry Pumping Systems
2-7
Figure 2-5 - Typical pumping speeds for iL70: pumping speed against pressure
Figure 2-6 - Typical pumping speeds for iL600: pumping speed against pressure
1.
60 Hz
1.
60 Hz
2.
50 Hz
Note:
The discontinuity at inlet pressure of 20 mbar
(2 x 10
3
Pa) indicates where the LCMB pump is
automatically switched off: refer to Section 5.9.
