Ametek Dycor 100 AMU Multiplier User Manual Download Page 84

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6-18 | DYCOR LCD RESIDUAL GAS ANALYZER WITH SYSTEM 2000 SOFTWARE

pumping Systems

part #

model #

description

90526VE

VPS70

Oil Vane Pumping System.

Includes turbomolecular pumping station with

70 l/s compound turbopump and control with

1.4 CFM roughing pump and autovent valve,

compactly packaged in aluminum frame. To be

used with user’s vacuum or process chamber.

Call Factory

VPS70D

Dry Pumping System.

Includes wide-range turbomolecular pumping

station with 70 l/s compound turbopump and

control with 0.42 CFM diaphragm roughing

pump and autovent valve, compactly pack-

aged in aluminum frame. To be used where an

oil-free pumping system is needed on user’s

vacuum or process chamber.

Summary of Contents for Dycor 100 AMU Multiplier

Page 1: ...Dycor LCD Residual Gas Analyzer With System 2000 Software User Manual 9000 167 VE REV D Process Instruments 150 Freeport Road Pittsburgh PA 15238...

Page 2: ...A Delaware AMETEK Process Instruments 455 Corporate Boulevard Newark Delaware 19702 USA Phone 302 456 4400 Main 800 537 6044 Service 800 222 6789 Ordering Fax 302 456 4444 USA Texas AMETEK Process Ins...

Page 3: ...on 6 Ethernet LCD 6 Communications 6 LEDs 7 CPU 7 Comm 7 RF 8 Filament 8 CHAPTER 2 Specifications CHAPTER 3 Installation Mechanical Installation 2 Check Sensor Filament 2 Connect Sensor to the Vacuum...

Page 4: ...oving the old filament 6 Disassembling the Source 8 Open Source 8 Assembly and installation of the open source 8 Cleaning the open source 8 Mass filter 9 Closed Source 10 Cleaning the conductance limi...

Page 5: ...Configurations 3 Digital Output Jumper Configurations 4 Analog Input Jumper Configurations 5 I O Option Board Specifications 11 Digital Outputs 11 Digital Inputs 11 Analog Inputs 11 Analog Outputs 11...

Page 6: ...troubleshooting Only a qualified electrician should make electrical connections and ground checks Any use of the equipment in a manner not specified by the manufacturer may impair the safety protectio...

Page 7: ...ent and to conserve our natural resources AMETEK recommends that you arrange to recycle this product when it reaches its end of life Waste Electrical and Electronic Equipment WEEE should never be disp...

Page 8: ...arad ceramic capacitor is a technique allow ing high frequency shield bonding while avoiding the AC ground metal connection In the case of shield ed cables the drain wire or braid connection must be k...

Page 9: ...adiated and Conducted Class A Group 2 ISM Device EN61000 3 2 Harmonic Current EN61000 3 3 Voltage Fluctuation Flicker EN61326 1 EN50082 1 Immunity EN61000 4 2 Electrostatic Discharge 4kV 8kV contact a...

Page 10: ...statement should appear on the documentation accompanying the equipment being returned declaring that the goods being returned for repair are American goods the name of the firm who purchased the good...

Page 11: ...spectrom eter in 100 200 or 300 AMU range Faraday cup detector or microchannel plate electron multiplier detector Options for Ethernet LCD System Optional integrated System 2000 Software that provides...

Page 12: ...systems All of these systems are configured to bring the required number of sample streams into the ProMaxion at the specified pressure while maintaining the high vacuum neces sary for proper mass sp...

Page 13: ...old the molecule together When a single electron is removed a positive ion is cre ated this is referred to as a molecular ion When the bombarding electrons cause the molecular bonds to break fragment...

Page 14: ...n ion passes through the quadrupole where it is neutralized on the walls of the vacuum housing Ions meeting the m z criteria have stable trajecto ries and emerge from the mass filter assembly Figure 1...

Page 15: ...l glass capillaries fused together in the shape of a disk The inside wall of each channel has a resistive electrically semi con ductive layer forming independent electron multipliers As the ions are a...

Page 16: ...ions The Ethernet LCD software communicates directly to the PC using an Ethernet crossover CAT 5 cable plugged into an Ethernet port on the PC Communication can also be established through a network L...

Page 17: ...that follow are listed in the order in which they appear top to bottom on the back of the electronics unit CPU Indicates CPU and system status OFF LCD power is off RED CPU has stopped FLASHING RED Bat...

Page 18: ...F tune RF tune files are preset at the factory and are customized for each instrument and customer If you are having a problem in this area contact your service engineer Filament Indicates the status...

Page 19: ...1 300 AMU Operating Pressure Range 10 4 Torr to ultrahigh vacuum Minimum Detectable Partial Pressure 5 x 10 12 Torr 5 x 10 14 Torr for electron multiplier units Resolution Adjustable to constant peak...

Page 20: ...ass 28 with peak width 0 5 at 10 height and 1 x 10 3 amps emission current Power Requirements 24 volts DC 3 amps 100 240 VAC 50 60 Hz adapter available Stability Mass stability 0 1 AMU after 30 minute...

Page 21: ...ters Relative Humidity 10 to 90 non condensing Bake Out Temperature 375 C without electronics attached 80 C with attached electronics Operating the instrument at temperatures above 80 C with the elec...

Page 22: ...1V DC or AC Analog Inputs Number of channels 2 Resolution 12 bits 4096 steps Input Range 0 10 VDC Isolation Differential Voltage input range 0 10 VDC Minimum undervoltage 15V Maximum overvoltage 15V A...

Page 23: ...he following Mechanical installation Communications setup LEDs Electronics and Sensor Before connecting the 24 VDC power to the electronics ensure that the electronics are connected to the sensor Othe...

Page 24: ...the sensor Before connecting the 24 VDC power to the electronics ensure that the electronics are connected to the sensor Otherwise damage to the electronics is possible 4 Connect the LCD electronics...

Page 25: ...ock position Figure 3 1 3 Bolt the source flange in place using the 6 28 x 1 screws and washer provided Tighten in a star pattern to ensure a good seal Figure 3 2 Connecting the open source to the AME...

Page 26: ...ing a new copper gasket install the sensor into the nipple so that the repel ler clears the chamber walls 3 Orient the barrel notch in the 12 o clock position Figure 3 1 3 Bolt the source flange into...

Page 27: ...they have not already been installed These will consist of a 1 thick VCR flange a blank flange a manual high conductance valve or electro pneumatic EP high conductance valve two copper gaskets and fas...

Page 28: ...on the collar end of the source assembly 3 Insert the electronics onto the source until firmly seated do not twist 4 Lock the electronics unit to the source using the tightening knobs Figure 3 5 on th...

Page 29: ...If you purchased the Dycor DC power supply module follow the directions below to connect to the AC line power 1 Connect the DIN connector from the DC power supply module to the power input connection...

Page 30: ...heck battery GREEN Normal operation Comm Shows the status of communications between the Ethernet LCD and the PC It flashes green when receiving data from the PC It remains off when the LCD is inactive...

Page 31: ...dEC 0 IS En no SP Lo 0 SP hi 250 Ftr E OFF Ot 1 hEAt Ctr1 Ftb Ftb1 5 0 PL 1 100 0 PSL1 0 0 PSH1 100 0 nLF1 OFF Ot 2 OFF Unit SI I Err nLAt FAIL bPLS dSP Pro rP OFF LOC 0 OPERATIONS A M Auto Aut OFF C...

Page 32: ...Watlow EZ Zone PM3 Controller SETUP Ai SEt SEn tC Lin H FiL 0 5 i Er oFF dEC 0 LooP SEt h Ag Pid C Ag oFF t tUn no t Agr Crit UFA bPLS FAiL bPLS L dE no rP oFF L SP 0 h SP 250 SP Lo 100 SP hi 100 otPt...

Page 33: ...on 3 11 1 ALM A ty oFF A Sr A hy A Lg A Sd A LA A bL A Si A dSP A dL ALM SEt 2 ALM A ty oFF A Sr A hy A Lg A Sd A LA A bL A Si A dSP A dL ALM SEt 3 ALM A ty oFF A Sr A hy A Lg A Sd A LA A bL A Si A dS...

Page 34: ...SEt 4 ALM A ty oFF A Sr A hy A Lg A Sd A LA A bL A Si A dSP A dL gLbL SEt C_F C AC LF 60 CoM SEt Ad S 1 OPERATIONS Ai oPEr Pu READ ONLY i Er READ ONLY i CA 0 Mon OPEr C MA READ ONLY h Pr READ ONLY C...

Page 35: ...Installation 3 13 C SP 50 id S 50 h Pb 5 ti 892 td 37 o SP 0 ALM OPEr 1 ALM A Lo A hi ALM OPEr 2 ALM A Lo A hi ALM OPEr 3 ALM A Lo A hi ALM OPEr 4 ALM A Lo A hi...

Page 36: ...ough the Swagelok fittings and stainless steel tube until approximately 1 inch 2 54 cm of capillary tube is exposed at each end Figures 2a and 2b Figure 2a Figure 2b Do not force the capillary tube in...

Page 37: ...onnec tions are located into the valve end of the ProLine System Figure 3 Figure 4 6 Tighten the 1 16 nut at the end of the heater assembly onto the 1 16 threaded stub of the ProLine Figure 4 7 Retigh...

Page 38: ...etighten the 1 8 Swagelok fitting located on the customer side of the capillary heater assembly Figure 6 Figure 7 11 Make sure the spiral stretch to length heater covers all the tubing and fittings be...

Page 39: ...stomer fitting Replace the Velcro straps Figure 8 13 Install the stainless steel tube clamps at each end of the heater jacket Figure 9 Figure 10 14 Plug the thermocouple wire and heater power cord int...

Page 40: ...3 18 DYCOR LCD RESIDUAL GAS ANALYZER WITH SYSTEM 2000 SOFTWARE This page intentionally left blank...

Page 41: ...of 10 4 to 10 9 Torr required by the mass spectrometer If a sample is at the same operating pressure as the mass spectrometer the sample can be analyzed directly However when the sample environment pr...

Page 42: ...Connection of the high con ductance inlet makes it possible for the Ethernet LCD to sample from the sample chamber without being directly fitted to the sample chamber When the pressure in the sampling...

Page 43: ...ystem Figures 4 1 and 4 2 show two possible inlet configurations one has manual valves and the other all electropneumatic valves for remote operation Mathematically aperture size and sample chamber pr...

Page 44: ...sample chamber pressure 5 aperture Size pressure Ratio max Sample Microns Chamber Pressure Torr 2 6 0 x 107 600 5 1 0 x 107 100 10 2 5 x 106 25 20 6 0 x 105 6 50 1 0 x 105 1 100 2 5 x 104 25 200 6 0...

Page 45: ...tmospheric pressure to the pressure required by the Ethernet LCD A heated capillary is available to prevent sample condensation desorption within the capillary Inlet Option Descriptions Capillary This...

Page 46: ...an upstream tee fitting is installed to provide fresh sample to the analyzer aperture at all times The sample is flushed past the aperture valve as a result of a pressure drop in the sample line A vac...

Page 47: ...old The turbomolecular pump can be backed by a rotary vane mechanical pump This provides a 10 3 Torr pumping capacity that brings the system into a vacuum range in which the turbomolecu lar pump can o...

Page 48: ...ng station with 70 l s compound with 1 4 CFM roughing pump compactly packaged in a steel frame Model VPS70D dry pumping system Includes a turbomolecular pumping station with 70 l s compound with 0 42...

Page 49: ...isconnect all power from the analyzer before starting these proce dures Touching any part of the quadrupole head source or mass filter with your fingers will leave dirt and oil on the parts resulting...

Page 50: ...ultrasonic cleaner The filter parts can become loose during ultrasonic cleaning This will significantly degrade analyzer performance A loosened mass filter must be re placed Filaments Open Source The...

Page 51: ...ilament plate is held in place by two 2 stainless steel rods that carry the current to the filament Using the hex wrench provided loosen the two small set screws on the barrel connectors that hold the...

Page 52: ...ains a dual wire filament so the analyzer can continue to function if one side of the filament burns out The replacement filament comes in a protective container and can easily be replaced in the fiel...

Page 53: ...ics from the quadrupole head Once loosened gently pull straight back on the LCD without twisting until it is free of the head Do not remove the cabling from the LCD electronics Replacing the filament...

Page 54: ...with the set screw 4 Remove the shorting tabs on the filament by gently bending them back and forth with needle nose pliers until the tabs break at the notches at their bases Be sure the filament coil...

Page 55: ...110 in lb 9 ft lb 7 Check for electrical isolation between the feedthrough pins The check should be performed on the pins on the atmosphere side of the unit Figure 5 1 The pins should be electrically...

Page 56: ...e the focus plate with its long wire in the correct barrel connector at 10 Figure 5 1 Tighten the connection 3 Install the repeller so that its plate is spaced about 0 1 above the source grid with its...

Page 57: ...peaks disappear at high scan speeds an insulating layer may have developed on the surface of the rods Unless the nature of these discolorations can be identified exactly the only sure way of removing...

Page 58: ...ds in place on the lenses Refer to Figure 5 4 2 Loosen and remove the three 3 screws that hold the lens together in sand wich form Be careful not to lose the small ceramic or metal washers from the so...

Page 59: ...eep the mass filter from operating properly This will result in a loss of sensitiv ity over the full range of the spectrum If the peaks disappear at high scan speeds an insulating layer may have devel...

Page 60: ...ceramic washer or strip the threaded parts by over tightening the source hardware tighten to snug only 1 Install the source so that Lens 2 is seated against the ceramic quadrupole collar The hardware...

Page 61: ...11 12 13 14 Figure 5 5 Breakdown of conductance limited enclosed ion source Figure 5 6 Quadrupole head pinout view of flange source side 1 Tabs break off after installation 2 Filament Assembly 3 Fila...

Page 62: ...acceptable a new multiplier will restore the original gain of the system Call AMETEK Process Instruments or your local representative to arrange for factory service to replace the multiplier Because o...

Page 63: ...The system will not work properly emission current control if the vacuum system pressure is higher than 1 x 10 4 Torr Power is automatically shut off from the unit above 2 5 x 10 3 Torr if used with...

Page 64: ...e filament assembly with a replace ment filament assembly If the problem persists after going through these steps you will have to localize the problem area These potential problem areas are Ethernet...

Page 65: ...atus of communications between the LCD and the PC It flashes green when receiving data from the PC It remains off when the LCD is inac tive A red light indicates a communications error RF Shows the st...

Page 66: ...ty between Pins 3 and 8 5 If the filament is burned out LED is red open the vacuum system and re place the filament assembly If the filament checks out OK do the following Check the LEDs on the back o...

Page 67: ...Located behind the left front panel on the front of the unit Control Board Located behind the front heat sink and LED panel on the left side Scan Board Located behind the front heat sink and LED pane...

Page 68: ...op and bottom of the unit and the 3 16 screw from the left side of the unit see Figure 6 1 These three screws hold the board in place 2 Loosen or remove the screws at the top and bottom of the option...

Page 69: ...on it to remove the assembly with the Control and Scan boards It is connected to the unit by four connectors 4 Once the assembly has been removed from the unit casing remove the upper left and bottom...

Page 70: ...nd bottom right 3 Insert the board into the unit making sure the four connectors 2 on each side are plugged in 4 Replace or retighten the screws for the option plate to put it back in place 5 Replace...

Page 71: ...nit by four connectors 4 Once the assembly has been removed from the unit casing remove the upper left and bottom right 3 8 screws with internal tooth lock washer from the front heat sink 5 Gently pul...

Page 72: ...6 DYCOR LCD RESIDUAL GAS ANALYZER WITH SYSTEM 2000 SOFTWARE There are adhesive gap pads on the back side of the front heat sink and the LED panel to ensure that all fixtures are secure and in place NO...

Page 73: ...move the assembly from the casing 4 You now have the complete RF assembly in your hand Refer to Figure 6 3 5 Remove the Amp cover by removing the two 1 4 self tapping sheet metal screws The Amp card i...

Page 74: ...p card onto the Amp card shield using the 4 1 4 screws 2 Attach the Amp card cover to the Amp card using the two 1 4 self tapping sheet metal screws 3 Insert the RF assembly into the unit casing and s...

Page 75: ...mp card is underneath 6 Remove the 4 1 4 screws holding the Amp Card to the Amp card shield 7 Using the 1 4 nut driver remove the 4 3 8 standoffs from the Amp card shield You can now see the RF card 8...

Page 76: ...he feedthrough is cracked a leak will develop 3 Screw in the 1 2 screw in the upper right corner of the RF card to connect to the aluminum oxide insulator Failure to install this screw and aluminum ox...

Page 77: ...removed to facilitate replacement of the Master Control and Scan boards as well Installing the I O Option Board 1 Remove the screw from the top and bottom of the option plate 2 Slide in the option boa...

Page 78: ...6 12 DYCOR LCD RESIDUAL GAS ANALYZER WITH SYSTEM 2000 SOFTWARE This page intentionally left blank...

Page 79: ...me options Start Up Normal Operation Part Model Description 95381VE M102 Spare dual filament for 8 pin or 10 pin open source GAS0001 Standard 2 conflat gasket GAS0002 Turbopump gasket 95319VE M042 Cap...

Page 80: ...ifold Kit Open source with manual high conductance valve 73806SE M250EP Sensor Manifold Kit Open source with electro pneumatic high conductance valve 73807SE M240EP Sensor Manifold Kit for closed encl...

Page 81: ...with 200 AMU Open Source Multiplier system 90388VE DM306M For use with 300 AMU Open Source Multiplier system Closed Enclosed Sources 90392VE DME106 For use with 100 AMU Enclosed Source Fara day Cup o...

Page 82: ...M106V 100 AMU V Stack Open Source 90390VE DM206V 200 AMU V Stack Open Source 90391VE DM306V 300 AMU V Stack Open Source V Stack Closed Enclosed Sources 90398VE DME106V 100 AMU V Stack Closed Enclosed...

Page 83: ...10 pin closed enclosed source 73728SE MCIV Closed ion volume 73729SE MEIV Enclosed ion volume GAS0001 Standard 2 conflat gasket GAS0002 Turbopump gasket 95319VE M042 Capillary Kit 2 1 meter sections...

Page 84: ...roughing pump and autovent valve compactly packaged in aluminum frame To be used with user s vacuum or process chamber Call Factory VPS70D Dry Pumping System Includes wide range turbomolecular pumping...

Page 85: ...ion plate is removed to insert the I O board Before installing the I O option board you must configure the jump ers on the board Refer to the charts on page 7 3 and 7 4 to set up the inputs and output...

Page 86: ...DIGITAL OUT DB 15 FEMALE 1 Relay Output 0 2 Relay Output 1 3 Relay Output 2 4 Relay Output 3 5 Relay Output 4 6 Relay Output 5 7 Not Used 8 Digital Input 1 9 Relay Output 0 10 Relay Output 1 11 Relay...

Page 87: ...Out 0 5 Volts Out JP6 JP7 Analog Out 0 10 Volts Out JP6 JP7 Analog Out 0 4 20 mA Out JP6 JP7 Analog Out 1 5 Volts Out JP9 JP10 Analog Out 1 10 Volts Out JP9 JP10 Analog Out 1 4 40 mA Out JP9 JP10 Ana...

Page 88: ...tied together using Jumpers JP16 through JP21 Jumpers shown in isolated output position RELAY RELAY RELAY RELAY RELAY RELAY 1 1 1 1 1 JP17 JP18 JP19 JP20 JP21 Pin 2 Pin 10 Pin 3 Pin 11 Pin 4 Pin 12 Pi...

Page 89: ...R CONFIGURATIONS Analog Out 0 0 10 Volts In JP13 JP12 Analog In 0 0 20 mA In JP13 JP12 Analog In 1 0 10 Volts In JP14 JP15 Analog In 1 0 20 mA In JP14 JP15 Analog Input Jumper Configurations 0 10V 0 2...

Page 90: ...7 6 DYCOR LCD RESIDUAL GAS ANALYZER WITH SYSTEM 2000 SOFTWARE JP18 JP16 JP17 JP19 JP20 JP21 JP13 JP12 JP14 JP15 JP9 JP6 JP10 JP7...

Page 91: ...rd into the slot in the back of the electronics unit making sure that you engage the connector on the board with the elec tronics unit itself 3 Insert the screws at the top and bottom of the I O Optio...

Page 92: ...ering Device Properties Go to the main menu of the System 2000 software and under Edit on the toolbar select Device Properties Select your LCD device from the sub menu The Device Properties screen app...

Page 93: ...and tabular modes Right click the screen that you want to display your analog input Select Scan from the context menu Click on the Device button and select the device Figure 7 8 Select the Function a...

Page 94: ...e screen on which you want to display your analog output Select Analog from the context menu Click on the Device button and select the device Figure 7 9 Select the Module Full Scale Define the value t...

Page 95: ...s 2 Resolution 12 bits 4096 steps Input Range Current 0 20 mA or Voltage 0 10 VDC Jumper selactable Isolation Differential Voltage input range 0 10 VDC Minimum undervoltage 15 V Maximum overvoltage 15...

Page 96: ...7 12 DYCOR LCD RESIDUAL GAS ANALYZER WITH SYSTEM 2000 SOFTWARE This page intentionally left blank...

Page 97: ...on how to use the modules is provided in the Opto 22 SNAP user manual that you received with the product The configuration and setup for your Opto 22 application can be found in Appendix 2 of this ma...

Page 98: ...of the SNAP I O System The components used in the Opto 22 SNAP I O System consist of SNAP Brain SNAP input output modules SNAP rack power supply The SNAP Brain is the core of the I O system Using the...

Page 99: ...Opto 22 Option A 3 Opto Rack with I O Modules Opto I O Modules Opto Power Supply Input Output Modules Opto Brain B3000 B...

Page 100: ...sing mistic interrupts wire IRQ and IRQ pins 6 and 7 See the B3000 B User s Guide for details on network wiring 2 Rotate the baud rate switch to set the desired baud rate as shown in the table below N...

Page 101: ...7 7 Lower Address 0 4 8 C 0 4 8 C 0 4 8 C 0 4 8 C Base Address 128 132 136 140 144 148 152 156 160 164 168 172 176 180 184 188 Upper Address 8 8 8 8 9 9 9 9 A A A A B B B B Lower Address 0 4 8 C 0 4 8...

Page 102: ...6 A E 2 6 A E 2 6 A E Base Address 192 196 200 204 208 212 216 220 224 228 232 236 240 244 248 252 Upper Address C C C C D D D D E E E E F F F F Lower Address 2 6 A E 2 6 A E 2 6 A E 2 6 A E Upper ad...

Page 103: ...Opto 22 Option A 7 RS 232 to RS 485 Converter Cable Figure 1 RS 232 to RS 485 converter cable Power can be applied once the I O system is connected properly NOTE...

Page 104: ...h three devices 2 digital Address 128 and 129 1 analog Address 130 Digital Input Address 128 Modules 0 1 2 3 Digital Output Address 129 Modules 12 13 14 15 Analog Input Address 130 Modules 2 3 4 5 6 7...

Page 105: ...listed click Cancel On the main screen click the Edit menu and Add Device Click Optomux Digital Once the Opto 22 SNAP System has been added you can proceed with setting the parameters Configure the G...

Page 106: ...module is installed in the first SNAP rack position the Process 2000 will refer to it as Modules 0 1 2 and 3 See Figure 2 B3000 I O Mapping and Example Add Display for Digital Module To create displa...

Page 107: ...Opto 22 Option A 11 Setting Device Properties for Analog Input Modules On the 2000 software click on the Edit menu and select Device Properties Dig Digital IN 0 1 00E 07 1 00E 11...

Page 108: ...alog Make sure that Device Enabled and Live Data boxes are checked Click on the I O Setup tab and enter the Type and Name for the input and output channels see the example on next page Older I O syste...

Page 109: ...information viewed Right click on one of the screens Click Scan Click Device and select your analog input device Click on the Display tab to configure the parameters for the display Empty Empty Analog...

Page 110: ...ANALYZER WITH SYSTEM 2000 SOFTWARE Digital and Analog Outputs 1 Refer to Chapter 8 in the 2000 software manual for setting up the Digital Outputs 2 Refer to Chapter 9 in the 2000 software manual for s...

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