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WARNING

WARNING

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Alcatel Vacuum Technology France --- IPUP A100 Instruction manual

Safety instructions

GENERAL

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Our products are designed to comply with current EEC regulations.

Any modification of the product made by the user is liable to lead to
non---compliance with the regulations, or even to put into doubt the
EMC (Electro Magnetic Compatibility) performance and the safety
of the product. ALCATEL declines any responsability for such
operations.

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The EMC perfomance of the product is obtained on the condition

that the installation complies with the EMC rules. In particular, it is
essential to:

--- use shielded cables and connections for interfaces,
--- stabilize the power supply line with meshing from the power

supply source to a distance of 3 m from the product inlet.

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This pump is not equipped with an emergency stop EMO device

because it is designed for use on process tools and integration
with the process tool EMO.

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This pump is not equipped with a lock out / tag out (LO/TA) device

because it is designed for use on process tools.
In order to properly secure the pump for installation and/or
maintenance, the entire tool needs to be properly locked---out /
tagged---out in accordance with OSHA requirement
29 CFR.1910.147.

When the electrical switch (RT1) is set to “0“, the part supply
power/filter and filter/electrical switch RT1, is energized.

Risk of electrical shock in case of contact.
Disconnect main electrical cable before any intervention.

Hazardous voltage enclosed.

Voltage or current hazard sufficient to cause shock.
Disconnect and lockout power before servicing.
Any intervention must be done by trained personnel only.

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Summary of Contents for IPUP A100

Page 1: ...ALCATEL VACUUM TECHNOLOGY FRANCE 98 avenue de Brogny BP 2069 74009 ANNECY Cedex France TEL 33 4 50 65 77 77 FAX 33 4 50 65 77 89 IPUP A100 Instruction manual Edition 10 Date 09 00 Manual P N 107782 ...

Page 2: ...y pumping For optimum performance and to obtain full satisfaction from this equipment we recommend that you study this manual before any intervention on your pump in particular the chapter on installation and start up Applications l P PI version for corrosive reactive flammable pyrophoric oxidizing processes l L LI version for clean pumping Advantages l Reduced volume and footprint l Low operating...

Page 3: ... Low noise and vibration Genuine dry pump l Total tightness with the environment Compact footprint l Reduced size 23 84 inches x 11 02 inches x 11 81 inches 605 5 mm x 280 mm x 300 mm Reduced cost of ownership l Design for reliability l Reduced power consumption l Reduced water consumption l Reduced weight New control interface l Amat SPI interface l Amat device net interface l RS 232 485 interfac...

Page 4: ...ty instructions B 00 Unpacking Handling Storage B 10 Positioning the pump in the pumping installation B 20 Connection to the cooling circuit B 30 Inert gas purge connection N2 connection B 40 Electrical connection B 50 Amat smart pump interface connection B 60 RS 232 or RS 485 link wiring B 70 Connection to the pumping circuit B 80 Operation Operating mode C 10 Start up of the monitoring system C ...

Page 5: ...leshooting First level of troubleshooting D 10 Diagnosis and troubleshooting D 20 Message numbers D 30 Pump does not start Hand held display module is not illuminated D 40 Pump does not start IPUP A100 without hand held display module D 50 Pump does not start Hand held display module is illuminated D 60 Pump does not start Display is showing a message or an alarm D 70 Fault message display Facilit...

Page 6: ...or contaminated pumps E 20 Maintenance components N2 pressurization kit F 10 Appendix IPUP A100 electrical block diagram G 10 Safety data sheet G 20 Accessory part numbers G 30 NOTE Warningsareusedwhen failure to observe instructionscould result in injury or death Cautions are used when failure to observe instructions could result in significant damage to equipment and or facilities GB 00513 ...

Page 7: ... IPUP A100 instruction manual Introduction IPUP A100 operating principle A 10 IPUP A100 description A 20 IPUP A100 monitoring system A 30 IPUP A100 technical characteristics A 40 Table of IPUP A100 part numbers A 50 CE marking certificate A 60 SEMI S2 certificate A 70 GB 00514 ...

Page 8: ...as P version only l by regulating the pump temperature and adjusting it to each process in order to limit gas condensation P version only l by integrating the silencer inside the pump to reduce by product deposition MULTI STAGE PUMP WITH ROOTS TECHNOLOGY IPUP A100 pump consists of 5 Roots type stages The two rotors rotate without touching each other EXHAUST INLET Stage 5 High pressure stage exhaus...

Page 9: ...orinated grease An overpressure zone is created around the bearing by injecting a neutral gas The pressurization and the seals prevent pumped gases and powders from migrating towards the bearings Neutral gas purging for the bearings is imperative for corrosive processes Tightness at high pressure side The bearings are lubricated by splashing oil The oil trap is sealed from stage 5 by a trap and a ...

Page 10: ...vacuum tightness is ensured by the motor design with built in jacket hermetically sealed This system provides total safety regarding leaks outside the pump and requires no maintenance Motor casing Electrical liner Incorporated liner Tightness at shutdown The pump is fitted with an antisuckback valve in the exhaust tube which prevents the exhaust from being sucked back GB 00515 ...

Page 11: ...ocated on the front panel l the facilities panel located on the rear panel An Amat SPI connector located on the rear facilities panel allows pump control and communication with the process tool A hand held display module can be connected to the front panel to display and program the pump parameters EXHAUST Rear facilities panel Front panel Amat SPI interface connector INLET Hand held display modul...

Page 12: ...l intermediate port for specific applications where a permanent pumping flow of about 35 m3 h is required example dynamic seal pumping P IPUP A100P PI EQUIPMENT Pump Low pressure stage Transfer stages High pressure stage INLET EXHAUST Tc M 2 1 3 4 5 6 9 9 7 Monitoring Pump Motor Frequency converter Anti suckback valve Inert gas Water IN SILENCER Supply block Gas circuit Gas solenoid valve Pressure...

Page 13: ...en purge is needed The IPUP A100LI pump is equipped with an additional intermediate port for specific applications where a permanent pumping flow of about 35 m3 h mbar is required example dynamic seal pumping IPUP A100L LI EQUIPMENT Pump Low pressure stage Transfer stage High pressure stage EXHAUST M 2 1 3 4 5 Monitoring Motor Frequency converter Anti suckback valve Water IN Cooling circuit nozzle...

Page 14: ...guration and displays the sensor parameters It is linked to the indicator lights located on the front panel It allows data to be exchanged with the hand held display module Hand held display module This allows users to review operating parameters It allows users to access and modify configured parameters It allows users to start and stop the pump see C 10 if configured Electrical electronic cabine...

Page 15: ... and hazards l RS 232 RS 485 Network links Note the monitoring system can be interfaced with the process tool via the Amat SPI connector or the RS 232 485 connector Electrical electronic cabinet Sensors Actuators valves Indicator lights Hand held display module Amat SPI connector Mains Converter RS 232 485 connector MAIN FUNCTIONS l Motor protection l Pump temperature monitoring and control l Exha...

Page 16: ... kW 1 8 1 8 2 05 2 05 v Average sound level at full speed dbA 55 50 55 50 speed v Guaranted sound level at full speed dbA 58 58 v N2 Flowrate range slm min 20 max 50 v Ambient temperature C 15 to 50 15 to 50 v Water flow l h min 100 v Water temperature C min 10 max 25 v Gear box fluid capacity 2 cm3 cc 150 v Weight without hand held display module lbs Kg 220 4 100 v Inlet flange DN 50 iso KF v Exh...

Page 17: ... Technology France IPUP A100 Instruction manual IPUP A100 technical characteristics IPUP A100 DIMENSIONS AND INTERFACING 1 2 Front view Bottom view Right view Left view Hand held display module connector See detail S GB 00518 ...

Page 18: ...A 40 Alcatel Vacuum Technology France IPUP A100 Instruction manual 3 9 IPUP A100 technical characteristics IPUP A100 DIMENSIONS AND INTERFACING 2 2 Front view Right view ipup A100 GB 00518 ...

Page 19: ...A 40 4 9 Alcatel Vacuum Technology France IPUP A100 Instruction manual IPUP A100 technical characteristics IPUP A100 STACKING DIMENSIONS AND INTERFACING 1 2 Left view Front view Right view GB 00518 ...

Page 20: ...uum Technology France IPUP A100 Instruction manual 5 9 IPUP A100 technical characteristics IPUP A100 STACKING DIMENSIONS AND INTERFACING 2 2 Right view Front view A100 STACKING CG WEIGHT DISTRIBUTION ipup A100 GB 00518 ...

Page 21: ...A 40 6 9 Alcatel Vacuum Technology France IPUP A100 Instruction manual IPUP A100 technical characteristics IPUP A100P DIMENSIONS Front view Left view Right view GB 00518 ...

Page 22: ...A 40 Alcatel Vacuum Technology France IPUP A100 Instruction manual 7 9 IPUP A100 technical characteristics IPUP A100PI DIMENSIONS Front view Left view Right view GB 00518 ...

Page 23: ...A 40 8 9 Alcatel Vacuum Technology France IPUP A100 Instruction manual IPUP A100 technical characteristics IPUP A100L DIMENSIONS Front view Left view Right view GB 00518 ...

Page 24: ...A 40 Alcatel Vacuum Technology France IPUP A100 Instruction manual 9 9 IPUP A100 technical characteristics IPUP A100LI DIMENSIONS Front view Left view Right view GB 00518 ...

Page 25: ...y Secondary Inlet Port at 3rd Stage 800588 3620 00095 4 IPUP A100P Point of Use Pump Harsh Duty 800589 3620 01617 5 IPUP A100PI Point of Use Pump Harsh Duty Secondary Inlet Port at 3rd Stage 800584 3620 98017 6 CDN118 DeviceNet Module 107902 3620 01618 7 IPUP A100 Hand Held Display Module 108343 8 IPUP A100P Point of use Pump Harsh Duty High Voltage Option 800677 9 IPUP A100 Point of use Pump Inst...

Page 26: ...A 60 Alcatel Vacuum Technology France IPUP A100 Instruction manual 1 1 CE marking certificate GB 00520 ...

Page 27: ...A 70 Alcatel Vacuum Technology France IPUP A100 Instruction manual 1 1 SEMI S2 certificate GB 00521 ...

Page 28: ...ions B 00 Unpacking Handling Storage B 10 Positioning the pump in the pumping installation B 20 Connection to the cooling circuit B 30 Inert gas purge connection N2 connection B 40 Electrical connection B 50 Amat smart pump interface connection B 60 RS 232 or RS 485 link wiring B 70 Connection to the pumping circuit B 80 GB 00522 ...

Page 29: ...pply source to a distance of 3 m from the product inlet l This pump is not equipped with an emergency stop EMO device because it is designed for use on process tools and integration with the process tool EMO l This pump is not equipped with a lock out tag out LO TA device because it is designed for use on process tools In order to properly secure the pump for installation and or maintenance the en...

Page 30: ... can be sent to the pump then an exhaust monitor should be used in the secondary exhaust to ensure that gas flow to the pump is stopped when secondary exhaust is lost In addition an interlock should be provided to ensure that gas flow to the pump is stopped when nitrogen is lost If flammable materials are sent to the pump the customer will need to provide a hardware based LEL detection in the seco...

Page 31: ...y connected to the equipment see B 50 Safety interlock The pump motor is protected against overload through the drive start stop and enable control circuitry of the variable speed controller The drive start stop includes solid state components If hazards due to accidental contact with moving machinery or unintentional flow or liquid gas or solids exist an additional hardwired stop circuit is requi...

Page 32: ...ld not be handled manually but always through appropriate handling devices Located on the upper cover this label indicates that some of the internal parts are energized and could cause electrical shocks in case of contact It advizes to disconnect the pump before any intervention or to properly lock out and tag out the equipment breaker before any intervention on the pump Located on the upper cover...

Page 33: ...normal range 10 However precautions should be taken against the risk of tilting during product handling installation and operation PACKAGING DIMENSIONS inch 2 mm 50 A B C IPUP A100 33 66 855 22 05 560 17 91 455 UNPACKING Open the crate Remove additional packages from the crate and set aside These packages contain l 3 C HC M8 16 screws l 3 M8 washers l 3 shackles 8430 WMA 107 l 1 label this product...

Page 34: ...ng of the lateral panel l Loosen the five captive screws from the lateral panel located at the right of the front panel l Rotate the lateral panel 1 l Remove the lateral panel by lifting it 2 5 captive screws Lateral panel 1 2 2 1 Loosen the functional block Locate two C CH M8x45 screws highlighted in yellow 6 loosen these two screws two to three turns Replace the cover When unit is to be shipped ...

Page 35: ...e it from the crate The pump is equipped with three brackets screwed on the pump top cover These brackets are used for handling the pump as well as fixing two pumps stacking see B 20 It is highly recommended that a hoist is used for lifting l Fit a shackle delivered in the crate in separate packaging on each lifting bracket l With a hoist and a sling with three arms lift the pump using shackles Pu...

Page 36: ...on manual Unpacking Handling Storage Move the pump by pushing it The pump is equipped with 2 fixed wheels 1 swivelling front wheel a removable handle provided to move the pump easily Fixed wheel Swiveling front wheel Removable handle Interlocking device GB 00524 ...

Page 37: ... it 1 Install the handle on the upper part of the front panel as follows see figure next page l pull manually the spring connecting pin l install the handle and release the spring connecting pin check that the spring connecting pin is correctly positionned in the handle hole Push the handle to move the pump When the pump is in the desired location position it see B 20 Then store the handle under t...

Page 38: ...ge Move the pump by pushing it cont d Removable handle Spring connecting pin Handle support EQUIPMENT STORAGE l If the pump is going to be put into storage the inlet and exhaust connections should be blanked off This equipment can be stored at an ambient temperature between 10 C and 60 C GB 00524 ...

Page 39: ...mend installing maintenance accessories such as isolation valves on the inlet exhaust and purge lines l For safety reasons the materials and sealing properties of the accessories used on the inlet and exhaust lines must be compatible with the gases being used HANDLING THE PUMP Determine where the pump will be placed Refer to the technical specification section for dimensions if needed see A 40 Use...

Page 40: ...at the six brackets are correctly secured 3 on the top of the pump cover and 3 under the pump frame l Lock the lower pump by adjusting its jacks solidly on the floor l Raise the upper pump using the four screw jacks The wheels should not be in contact with the floor l Lift the upper pump as described in B 10 and position it on the lower pump cover l Check that the upper pump screw jacks are positi...

Page 41: ...p in the pumping installation Upper pump frame Lower pump cover 4 tapped holes M10 for stackable frame or specific fixation system anti earthquake 3 M8 Chc screw Lower pump Upper pump Upper pump frame Lower pump cover Note All handling devices are designed for handling one pump only GB 00525 ...

Page 42: ...sive industrial water l pH level between 7 5 and 11 l Hardness 7 milli equivalent dm3 l Resistivity 1500 Ω cm l Solid particle size max 0 03 mm2 l Solid pollution 100 mg dm3 l Temperature 25 C max 10 C min l Pressure range between 29 and 85 PSIG 3 and 7 bar absolute l Pressure inlet outlet 2 bar minimum l Water flow min 100 l h l Deionized water compatible If the solid particle size and solid poll...

Page 43: ...female connector 1 4 inch NPT quick male connector OUT IN 6 mm min 6 mm min Supplied by the customer Install the two quick connect connectors packaged separately on the self sealing quick connect connectors Connect the water pipes to the quick connect connectors l Water inlet marked IN 1 4 inch NPT quick female connector l Water outlet marked OUT 1 4 inch NPT quick male connector GB 00526 ...

Page 44: ... point 22 C l Dust 1 µm l Oil 0 1 ppm l Pressure between 30 and 105 absolute PSIG 2 and 7 absolute bar l Flowrate see A 40 A sudden inrush of N2 into the pressurization circuit may result in damage to internal parts Close the pressure regulator by turning the knob counter clockwise before pressurizing the circuit CONNECTION 1 4 Swagelock Pipe 6 35 mm OD Supplied in the pump Rear panel Pressure reg...

Page 45: ... N2 connection N2 FLOWRATE ADJUSTMENT IPUP A100P only Nitrogen needs to be used to reduce the concentration of pyrophoric material to below the LEL The N2 flow rate can be adjusted with the pressure regulator depending on processes see C 60 Rear panel N2 purge Pressure regulator Manometer GB 00527 ...

Page 46: ...rrected automatically by the pump electronics IPUP A100 does not include any operator replaceable fuses PROTECTIVE EARTH CONNECTION An IEC 417q5019 symbol is located inside the enclosure under the monitoring cooling plate near the main protective conductor terminal PROCESS TOOL ELECTRICAL PROTECTION The pump is not equipped with a 10000 AIC main breaker Electrical shock may result in severe injury...

Page 47: ...2 2 5m length equipped with a female connector Connect the green lead to the ground on the connector the other 3 leads may be connected with the 3 phases The pump will automatically correct with autophase correction fixture Connect the female connector to the pump male connector and lock it as follows l Screw the ferrule l Fit the pipe clamp on the female connector collar position the fixing holes...

Page 48: ...trol function allows l control of pumping functions START STOP and variable rotation speed l monitoring the status of dry contact outputs 50 V 1 A These contacts can be monitored or used by a system external to the pump AMAT SPI CONNECTOR LOCATION IPUP A100 pump warnings and hazards are monitored on the SPI connector with exception of maintenance warnings Remote control connection is realized with...

Page 49: ...mmon Pump On Off control signal Pump running feedback signal Pump running common Pump warning signal Pump warning common Pump alarm signal hazard Pump alarm common hazard N2 flow feedback signal N2 flow common Final valve interlock signal Variable rotation speed control signal Variable rotation speed control common 24VDC ON 0VDC OFF 0 VDC 100 Hz 10 VDC 20 Hz All dry contacts are normally closed Op...

Page 50: ...ditions Pump status SPI Contacts Pump status 3 4 7 8 9 10 11 12 13 14 3 4 7 8 9 10 11 12 13 14 Pump running Close Close Close Close Close Pump stopped Open Close Close Close Open Pump running warning Close Open Close Close Close Pump stopped hazard Open Close Open Close Open N2 Flow defect Close Open Close Open Open GB 00529 ...

Page 51: ...mmon Pump On Off control signal Pump running feedback signal Pump running common Pump warning signal Pump warning common Pump alarm signal hazard Pump alarm common hazard N2 flow feedback signal N2 flow common Final valve interlock signal Variable rotation speed control signal Variable rotation speed control common 24 VDC ON 0 VDC OFF 0 VDC 100 Hz 10 VDC 20 Hz All dry contacts are normally closed ...

Page 52: ...tion Pump working conditions Pump status SPI Contacts Pump status 3 4 7 8 9 10 11 12 13 14 3 4 7 8 9 10 11 12 13 14 Pump running Close Close Close Close Close Pump stopped Open Close Close Close Open Pump running warning Close Open Close Close Close Pump stopped hazard Open Close Open Close Open GB 00529 ...

Page 53: ...fied through the corresponding monitoring menu see C 90 CONNECTOR WIRING RS 232 485 6 7 8 9 2 3 4 5 1 Reception data RS 232 RD TD Transmission Data RS 232 GND Ground V RS 485 V RS 485 9 pin male DB connector The syntax of commands and messages is dealt with in a separate chapter see C 90 EXAMPLES OF POSSIBLE CONNECTION Link RS 232 with a single monitoring system 6 6 8 9 2 3 4 5 1 6 6 8 9 2 3 4 5 1...

Page 54: ...to an exhaust stack A leak test should be performed after any pump connection Exhaust connection DN25 ISO KF Several fitting accessories are available in the Alcatel catalog AT THE PUMP INLET l Make sure that any vacuum accessories connected to the inlet of the pump can withstand a negative pressure of 1 bar relative to atmospheric pressure Inlet connection DN50 ISO KF Several fitting accessories ...

Page 55: ...tem for pumping operation C 30 Monitoring system parameters C 40 Monitoring system function table IPUP A100P version C 50 Monitoring system function table IPUP A100L version C 51 Gas purge and temperature according to the semiconductor processes C 60 Saving and loading of pump configuration with monitoring system C 70 Monitoring system setting for transport C 80 Use of the serial link C 90 GB 0053...

Page 56: ...quipped with a hand held display module connected in front of the frame This hand held display module allows the user to l set modify pump parameters l review operation parameters l start stop the pump POWER START and CONTROL REMOTE DISABLED l start stop the N2 purge if parameters are configured The indicator lights located on the cover indicates the status of the pump ON WARNING HAZARD KEYBOARD r...

Page 57: ...Control Remote disabled Hand Held Display Module controlled Start Stop the pump through hand held display module PRIORITY CONTROL MODES Control Remote selection Priority over Enabled SPI RS232 Disabled RS232 Hand Held Display Module RS232 Autostart REMOTE CONTROLLED OPERATING MODE Remote control of a single pump through Amat SPI connector The pump is monitored by the process tool in which it is in...

Page 58: ...selection key l Press control to access to the pump command through the hand held display module SET Parameter setting mode access key l Press to access the parameter setting mode l Press to exit the various menus without validating the functions Selection keys l Press to move to the next or the previous menu the next or the previous parameter in the displayed menu l Press to select or adjust the ...

Page 59: ...mes Power ON l Study the preliminary precautions See B 00 Position the electrical switch RT1 to position 1 the display lights up and the following screens appear ONLY FOR ADP 100 SERIAL XXXXXXXX RT1 electrical switch ALCATEL AVTF MONITORING VX XX PRESS ENTER FOR COMMUNICATION Press the ENTER key to continue WAITING FOR ADP 100 WAITING FOR ADP 100 OLWRTA 120 H REM N2 PUMPING STOPPED 09 30 99 10H40 ...

Page 60: ... schedules fault monitoring and customized parameters it is necessary to initialize the date and time of the machine Press the SET key to enter the menu Press the key repeatedly to have access to the SETTING menu Validate with the ENTER key With the key move through to DATE TIME menu Validate with the ENTER key Access to the selected parameters with key or Validate with the ENTER key Update the ne...

Page 61: ... The speed decreases from 0 V 100 Hz to 8 V 20 Hz and is constant between 8 V 20 Hz and 10 V 20 Hz l If no voltage is set on the Amat SPI connector pins 15 16 then the pump will run at nominal speed 100 Hz Check that the RT1 electrical switch is on the 1 position Neutral gas purge control IPUP A100P version only To ensure that the gas purge comes on as soon as the pump starts set the CMD PURGE men...

Page 62: ...00P version only if option CMD PURGE was selected see Neutral gas purge control Then adjust the gas flow rate using the pressure regulator as required by customer application see C 60 At the same time the operating parameters are displayed 19H REM N2 PRESSURE ADP TEMP 500 MBAR 110 C To configure the pump parameters use the SET key see C 50 and C 51 Only installed and configured parameters are disp...

Page 63: ...pen Pumping is stopped when an hazard threshold is reached A list of incidents is given in chapter D PUMPING SHUT DOWN If the 24 VDC power supply between pins 1 2 of the Amat SPI connector is removed the following operations occur pump stops injection of purge gas continues during the shutdown phase IPUP A100P version only if timing has been programmed 0 to 120 min The message STOP IN PROGRESS app...

Page 64: ...g is present L and P Hazard motor temperature l The pump is stopped immediately when the hazard threshold is exceeded P Pressure sensor l Indicates exhaust overpressure when the pressure reaches 1700 mbar silencer clogged and stops the pump at 2500 mbar P N2 Pressure sensor l Monitors the N2 injection into the pump When pressure is under the preset threshold a N2 warning is generated These thresho...

Page 65: ...OP PURGE ROOTS SET ENTER CONTROL The settings are defined in the factory and protected by an access code which disables parameter modifications Press the SET key When the code is displayed 0 set at factory press the ENTER key The access code can be changed ENTER PASSWORD CODE 0 Parameters can be transfered from one pump to another This can be done if the pump is to be replaced or when installing a...

Page 66: ... DISABLED only see C 10 DISABLED DE CONTROL REMOTE ENABLED DISABLED Allows pump command through SPI connector see C 10 ENABLED PURGE COMMAND ENABLED DISABLED Allows independant purge control at pump start up The purge flow is controlled by the PURGE control key or pump start up con trolled DISABLED INTERN T OPTION ENABLE DISABLED Temperature regulation validation ENABLED BUZZER ENABLED DISABLED Co...

Page 67: ... 0 N2 FLOW SENSOR WARNING TIME 0 to 60 min or DISABLED 2 min N2 FLOW SENSOR HAZARD TIME 0 to 60 min or DISABLED DISABLED PRESSURE min 550 max 1100 950 mbar NG INTERN T INPUT VALUE min 90 C max 130 C 90 C SETTING HAZARD THRESHOLD Input value 10 C min 125 C max 140 C 130 C SE F C DISPLAY CHOICE min 1 max 29 1 F C PARAME TERS min 1 max 100 30 N2 FLOW PRO LONGED 0 to 120 min 0 min DATE AND TIME day mo...

Page 68: ...e see E 10 MANAGEMENT MENU OPERATING TIME LAST TEN WARNINGS LAST TEN HAZARDS SET ENTER ENTER Initial configuration ENTER MANAGEMENT PASSWORD 0 to 65535 MANAGEMENT VERSION FRAME SERIAL N M40 SERIAL N M40 OTP VERSION M40 FLASH VERSION ADP 100 SERIAL N OTP DISP VERSION FLASH DISP VERSION STORAGE ENABLED DIS ABLED DIS ABLED CONFIG SAVE Save the pump configuration into the remote display memory Valid b...

Page 69: ...STOP PURGE ROOTS SET ENTER CONTROL The settings are defined in the factory and protected by an access code which disables parameter modifications Press the SET key When the code is displayed 0 set at factory press the ENTER key Access code can be changed ENTER PASSWORD CODE 0 Parameters can be transfered from one pump to another This can be done if the pump is to be replaced or when installing a n...

Page 70: ...NITION SYSTEM SELECT A 100L A 100P Select the pump type A 100L DEFIN POWER START ENABLED DISABLED Allows automatic pump start when powered ON control remote DISABLED only see C 10 DISABLED DE CONTROL REMOTE ENABLED DISABLED Allows pump command through SPI connector see C 10 ENABLED BUZZER ENABLED DISABLED Controls buzzer ON OFF in case of fault Buzzer stop by pressing ENTER ENABLED Do not set an L...

Page 71: ...odd no TTIN 2 STOP BITS ENABLED DISABLED DISABLED SET ADDRESS min 0 max 999 0 DATE AND TIME day month year hour minute Contrast Press or Contrast display setting MAINTENANCE MENU SET ENTER ENTER ENTER Initial configuration CE RUN TIME 0 to 65500 h x NANC OVERHAUL MAINT 0 to 65500 h x TENA PARTIAL MAINT 0 to 65500 h x AINTE OVERHAUL WARNING 1000 to 42000 h 26000 h MAI PART MAINT WARNING 1000 to 420...

Page 72: ...N M40 OTP VERSION M40 FLASH VERSION ADP 100 SERIAL N OTP DISP VERSION FLASH DISP VERSION STORAGE ENABLED DIS ABLED DIS ABLED CONFIG SAVE Save the pump configuration into the remote display memory Valid by pressing Enter Key CONFIG LOAD Allow to transfer the remote display memory into the pump memory Valid by pressing Enter Key OPERATING TIME Displays the operating times of the various components L...

Page 73: ...regul not regul 95 C 95 C 95 C 95 C not regul not regul not regul 221 F 203 F not regul not regul not regul 203 F 203 F 203 F 203 F HARSH Non doped SiO2 CVD using TEOS Doped SiO2 CVD using TEOS PSG BSG BPSG SACVD oxide using TEOS Silicon nitride and nitroxide PECVD Silicon nitride LPCVD MOCVD doped using phosphorus Doped SiO2 CVD using phosphorus boron or fluorine HDPCVD IPUP A100P 1 bar 1 5 bar 1...

Page 74: ...es to the MANAGEMENT menu Validate with the ENTER key With the key move through to CONFIG SAVE menu Validate with the ENTER key The pump configuration is then transfered into the hand held dislay module memory Return to main menu and exit the setting mode by pressing SET Disconnect the hand held display module Remote loading Connect the hand held dislay module onto the pump to be configured Load t...

Page 75: ... the key move through to STORAGE menu Validate with the ENTER key Choose ENABLED Validate with the ENTER key proceed twice on the SET key STOCK appears on display The pump start up is no longer possible and the hour counter is stopped NOTE when power comes on STORAGE mode is automatically deleted Date and time reset is only necessary see C 20 MAINTENANCE MANAGEMENT OPERATING TIME LAST WARNING S VE...

Page 76: ...ER key Access to the parameter settings by the SERIAL LINK menu Press the key repeatedly to access the SERIAL LINK menu Validate with the ENTER key Access to the parameter to be modified Modify the chosen parameter with or key Validate the setting with the ENTER key Return to main menu with SET key DEFINITION MENU SETTING MAINTENANCE MANAGEMENT SETTING SERIAL LINK N2 FLOW SENSOR PRESSURE 2 STOP BI...

Page 77: ...o the working pump The pumping remote controls are however managed as a priority INSTRUCTION SYNTAX The control O R D P A R A D D ADDress of unit varies from 000 to 999 ORDer sent Associated PARameter CR A D D CR see list see list Heading character Message and character ASCII code 13 The character LF is not taken account by the unit The response Example of dialog E q000SYSON CR R q000OK CR GB 0054...

Page 78: ...reserved 01 reserved 02 reserved 03 nitrogen flow 04 reserved 05 reserved 06 purge flow prolonged 07 full overhaul 08 P out maintenance 09 reserved 10 exhaust Maintenance 11 reserved 12 reserved 13 pressure alert threshold 14 date setting Day 15 date setting Month 16 date setting Year 17 time setting Hour 18 time setting Minute 19 free 20 setpoint 0 ADP T alarm 1 21 reserved 22 reserved Y 0 alert ...

Page 79: ...served 9 water valve 10 reserved 11 reserved 12 ADP water valve 13 reserved 14 reserved 15 control in bit 3 and monitoring 0 1 2 16 separator character 17 20 pressure mbar 21 separator character 22 25 power W 26 separator character 27 29 ADP temperature C 30 separator character 31 33 reserved 34 separator character 35 37 reserved 38 separator character 39 42 analog input mV 43 separator character ...

Page 80: ... value of the ASCII code of the separator character between 1 and 255 OK or ERR3 l Change the separator charac ter between two consecutive data items in a response l The factory configuration is the decimal code 032 of the spa ce character l Memorization of the customer configuration by the software Example A command such as 000SEP044 CR where 044 is the decimal ASCII code of the character comma C...

Page 81: ...5 of the cha racter l Memorization of the customer configuration by the monitoring l The code 000 corresponds to no header character Example The value 047 the decimal ASCII code of the character command 002HDR047 CR response 002OK command 002IDN CR response 002M4ADP100X V1 XX INTERPRETING RESPONSES SUPPLIED BY THE SERIAL LINK OK or a specific response to the order if everything is correct ERR0 set...

Page 82: ...dule is not illuminated D 40 Pump does not start IPUP A100 without hand held display module D 50 Pump does not start Hand held display module is illuminated D 60 Pump does not start Display is showing a message or an alarm D 70 Fault message display Facilities problem D 80 Fault message display Temperature problem D 90 Fault message display Pressure problem D 100 Fault message display Maintenance ...

Page 83: ...2 485 link MAINTENANCE TIME MONITORING Depending on the programmed values when operating time for maintenance is reached the corresponding warning message will be displayed in alternance with the operating parameters The yellow and green indicators are illuminated on the front panel Press the SET button during the pumping and the programmed operating times for the components will be displayed This...

Page 84: ...TART Hand held display module is not illuminated D 40 IPUP A100 without hand held display module D 50 Hand held display module is illuminated D 60 Display is showing a message or an alarm D 70 FAULT MESSAGE DISPLAY Facilities problem D 80 Temperature problem D 90 Pressure problem D 100 Maintenance problem D 110 PUMP IS RUNNING No message D 120 GB 00545 ...

Page 85: ... be preceded by the letter W or D l the letter W indicates a Warning message l the letter D indicates a Hazard message FAULT NUMBER MESSAGE REFERENCE 01 EXHAUST PRESSURE D 70 01 EXHAUST PRESSURE D 100 07 FREQUENCY CON VERTER 10 MOTOR TEMP D 80 13 N2 FLOW D 80 15 INTERNAL T HIGH D 90 16 INTERNAL T LOW D 90 30 EXHAUST MAINT D 110 31 IPUP A100 LP MAINT D 110 32 IPUP A100 MAINT D 110 GB 00546 ...

Page 86: ... not start Hand held display module is not illuminated NO RT1 switch inposition 0 l Switch to positon 1 Hand held diplay module is not illuminated INCIDENT CAUSE TROUBLESHOOTING NO No main power l Check power supply Other problem l Call your Alcatel Service Representative GB 00547 ...

Page 87: ...hout hand held display module NO No 24 V between Amat SPI connector pins 1 2 l Connect 24 V see B 60 INCIDENT CAUSE TROUBLESHOOTING NO No main power l Check power supply NO RT1 switch in position 0 l Switch to positon 1 Other problem l Call your Alcatel Service Representative Pump does not start GB 00548 ...

Page 88: ...ction manual Pump does not start Hand held display module is illuminated NO INCIDENT CAUSE TROUBLESHOOTING No 24 V between Amat SPI connector pins 1 2 l Connect 24 V see B 60 Other problem l Call your Alcatel Service Representative Pump does not start GB 00549 ...

Page 89: ...isplay STOCK WAITING INCIDENT CAUSE TROUBLESHOOTING NO Exhaust pressure 2500 mbar l Check for clogged exhaust Other problem l Call your Alcatel Service Representative NO Controller is in slave mode l Switch RT1 to 0 for 10s then switch it on again Other problem l Call your Alcatel Service Representative NO Pump in storage mode l Switch RT1 to 0 Then switch it on again Other problem l Call your Alc...

Page 90: ...s running and displays a warning Warning then INCIDENT CAUSE TROUBLESHOOTING NO No purge flow l Check nitrogen supply NO Insufficient purge flow l Check the setting of nitrogen flow Other problem l Call your Alcatel Service Representative Hazard D13 N2 FLOW W13 N2 FLOW NO Incorrect N2 warning level setting l Check that warning level is correctly set GB 00551 ...

Page 91: ... Motor temperature is 50 C Warning W10 MOTOR TEMP INCIDENT CAUSE TROUBLESHOOTING Other problem l Call your Alcatel Service Representative l Check the water supply Pump is stopped and displays a hazard Hazard D10 MOTOR TEMP INCIDENT CAUSE TROUBLESHOOTING NO Motor temperature is 75 C l Check the water supply Wait for pump to cool Other problem l Call your Alcatel Service Representative GB 00551 ...

Page 92: ...g l Check the water supply W15 INTERNAL T HIGH Pump temperature 10 C compared to temperature control Pump temperature 10 C compared to temperature control Warning INTERNAL T HIGH or LOW INCIDENT CAUSE TROUBLESHOOTING NO Cooling problem l Call your Alcatel Service Representative setting value setting value W16 INTERNAL T LOW Other problem l Call your Alcatel Service Representative GB 00552 ...

Page 93: ...l Check the water supply Pump temperature is higher than hazard threshold Pump temperature reaches temperature control setting value Hazard D15 INTERNAL T HIGH 10 C but the display is 0 or 170 C INCIDENT CAUSE TROUBLESHOOTING l Call your Alcatel Service Representative NO Cooling problem Other problem l Call your Alcatel Service Representative GB 00552 ...

Page 94: ...TING NO Exhaust pressure 1700 mbar l Check the N2 flow rate setting value Check that the exhaust pipe is not clogged Other problem l Call your Alcatel Service Representative Pump is stopped and displays a hazard Hazard D01 EXHAUST PRESSURE INCIDENT CAUSE TROUBLESHOOTING NO Exhaust pressure 2500 mbar l Check the N2 flow rate setting value Check that the exhaust pipe is not clogged Other problem l C...

Page 95: ...enance problem IPUP A100 VERSION WITH HAND HELD DISPLAY MODULE W32 ADP MAINT W31 ADP LP MAINT W30 EXHAUST MAINT P only INCIDENT CAUSE TROUBLESHOOTING The maintenance threshold of a parameter is reached l Check maintenance threshold Perform maintenance Call your Alcatel Service Representative GB 00554 ...

Page 96: ...is running no message Bad vacuum or no vacuum INCIDENT CAUSE TROUBLESHOOTING Other problem l Call your Alcatel Service Representative NO Foreline vacuum leak l Disconnect foreline and verify vacuum with second gauge l Inspect all connections and perform helium leak test GB 00555 ...

Page 97: ...er E Alcatel Vacuum Technology France IPUP A100 Instruction manual 1 1 IPUP A100 instruction manual Maintenance instructions Maintenance frequency E 10 Shipping procedure for contaminated pumps E 20 GB 00556 ...

Page 98: ...ungsten CVD W CVD Titanium and Titanium nitride CVD Ti TiN CVD Silicon epitaxy SiO2 CVD using silane as silicon source Polysilicon CVD Undoped SiO2 HDPCVD IPUP A100P 13000h 1 5 years 13000h 1 5 years 26000 h 3 years HARSH Non doped SiO2 CVD using TEOS Doped SiO2 CVD using TEOS PSG BSG BPSG SACVD oxide using TEOS Silicon nitride and nitroxide PECVD Silicon nitride LPCVD MOCVD doped using phosphorus...

Page 99: ...g to the local statements Procedure for emptying the water circuit As the water circuit is equipped with water valve normaly closed emptying operation must be done when the pump is running so valves are opened Prepare a flexible pipe A with a 1 4 inch quick male connector to be connected to compressed air circuit and another flexible pipe B with a 1 4 inch female connector Disconnect inlet and out...

Page 100: ... DN50 ISO KF l Blank off flange DN50 equipped with male 1 8 Gconnector l Centering ring DN50 l O ring DN50KF l Quick connect clamp DN50 Exhaust port DN25 ISO KF l Blank off flange DN25 l Centering ring DN25 l O ring DN25KF l Quick connect clamp DN20 25 Pressurization Required accessories on purge port to maintain the pressure DN50 ISO KF l Blank off flange DN50 equipped with male 1 8 G connector l...

Page 101: ...the pump under a suction hood It must remain there throughout the operation General sweeping Fit the DN 50 blank off flange with anti suckback valve on the inlet connector Sweep with dry nitrogen using the injector at an absolute pressure of 1 1 to 1 5 bar for 30 minutes Stop the nitrogen flow Pressurize the pump Blank off the outlet port Pressurize the pump with dry nitrogen to an absolute pressu...

Page 102: ...gy France IPUP A100 Instruction manual Shipping procedure for contaminated pumps SAFETY QUESTIONNAIRE This safety questionnaire should be completedby the customer before returning the pump to a service center for maintenance GB 00558 ...

Page 103: ...E 20 5 5 Alcatel Vacuum Technology France IPUP A100 Instruction manual Shipping procedure for contaminated pumps SAFETY QUESTIONNAIRE CONT D GB 00558 ...

Page 104: ...Chapter F Alcatel Vacuum Technology France IPUP A100 Instruction manual 1 1 IPUP A100 instruction manual Maintenance components N2 pressurization kit F 10 GB 00559 ...

Page 105: ...scription P N Qty N2 pressurization kit 107956 1 Blank off flange DN50 1 Male connector 1 8G 1 Centering ring DN50 with inlet screen 1 O ring DN50KF 1 Quick connect clamp DN50 1 Blank off flange DN25 1 Centering ring DN25 1 Quick connect clamp DN20 25 1 O ring DN25KF 1 Loctite 0 05 Injector 106859 1 GB 00560 ...

Page 106: ...r G Alcatel Vacuum Technology France IPUP A100 Instruction manual 1 1 IPUP A100 instruction manual Appendix IPUP A100 electrical block diagram G 10 Safety data sheet G 20 Accessory part numbers G 30 GB 00561 ...

Page 107: ...UND FAULT RS 232 OPTIONS KEYBOARD REMOTE 1 2 3 RED BLUE 3 8 2 1 4 5 6 7 8 ORANGE BROWN 3 8 2 1 7 4 5 6 7 4 5 6 1 2 3 4 1 2 3 T PUMP BOX CONVERTER SWITCHING POWER SUPPLY D7 D6 J4 KEYBOARD D5 RT1 FILTER J2 J7 J3 J1 J P6 POWERS J20 P0235 E1 J9 J8 POWER SUPPLY 180 265V 50 60Hz RS 232 J22 J21 S P I J23 J5 J10 ELECTRICAL BOX MOT AL1 SENSORS VALVES AND CONVERTER GB 00562 ...

Page 108: ...PUP A100 therm valve 3 2 1 22 23 24 4 33 29 30 34 35 36 37 1 Frequency converter 2 Motor T 4 2 1 3 2 8 3 7 1 2 1 2 5 10 11 12 13 14 15 16 1 IPUP A100 temp 2 3 3 4 1 2 Check pressure 24 VDC Hazard Warning 2 5 3 0V OUT 15V GND 6 11 10 J5 CONTROL CONTACTS IPUP A100L VERSION 25 22 23 24 33 29 30 28 34 35 Frequency converter Motor T 4 2 1 3 2 10 8 3 7 Hazard Warning 6 11 GB 00562 ...

Page 109: ...TION Compound name Chemical name Fomblin Y Perfluorinated polyethers Molecular weight Structural formula Empirical formula 1500 7000 CF3 O CF CF2 n O CF2 m O CF3 CF3 CAS name CAS number EEC number 1 propene 1 1 2 3 3 3 exafluoro oxidized polymd 69991 67 9 2 COMPOSITION INFORMATION ON INGREDIENTS 3 HAZARDS IDENTIFICATION Adverse effects and main risks No risk is expected on the basis of toxicologic...

Page 110: ...AND STORAGE MEASURES Handling precautions Wear protective clothes when required Do not drink and eat during handling No smoking is compulsory in working areas Avoid heating above the decomposition temperature 290 C During handling electrostatic charges may be generated and therefore take the appropriate measures to avoid it Storage precautions Keep away from heat sources from flammable combustible...

Page 111: ...itions to avoid Avoid to expose the product to free flames or to temperatures above 290 C Materials to avoid Avoid the contact with alkaline metals and ammonia strong or non aqueous alkali Lewis acids like A1C13 SbF5 CoF3 above IOO C 11 TOXICOLOGICAL INFORMATION Penetration routes Ingestion inhalation Adverse effects Only the thermal decomposition products can be toxic in case of inhalation Local ...

Page 112: ... or to incinerators equipped with specific emission treatment plant 14 TRANSPORT INFORMATION General information U N number Packaging group not classified not classified International regulation for raod railway transportation ADR RID Classification not Classified National regulation for railway transportation Classification not classified International regulation for maritime transportation IMGD ...

Page 113: ...et according to EEC Directive 91 155 The information given in this safety data sheet is for safety purposes only It is given In good faith and based on the best knowledge and experience of the company at the date of issue The company is not responsible for damages caused by the use of the product in applications for which it was not intended or for conditions of use outside its control GB 00563 ...

Page 114: ...s the communication with the equipment by using the Device net protocol Part number 107902 Emergency stop This device is intented to switch off the pump power It also has one relay contact 1 normally open for external use Part number 107849 L1 L2 L3 43 31 T1 T2 T3 32 44 1 2 3 4 206430 1 AMP 1 2 3 4 206061 1 AMP LINE IPUP A100 GB 00564 ...

Page 115: ...rating parameters and to access and modify configured parameters Part number 108343 N2 pressurization kit Allows user to close and pressurize the pump for return to a service center Part number 107956 Frequency converter display Allows user to list and modify frequency converter parameters Part number 107909 Silencer kit Allows user to reduce noise level in case of free exhaust Part number 108599 ...

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