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Agilent 16451B DIELECTRIC MATERIAL TEST FIXTURE Operation Manual

マニュアルチェンジ

Agilent Part No. N/A

June 2008

変更 1

下記脚注を以下に指定するページに追加してください。

記:

電極の表面は汚したりキズをつけることのないよう取り扱いには十分注意してください。電極表面上の汚れやキズ

によって容量を測定する際、“電極の調節” (Page 3-33) で提示されるリミットの範囲に収まらない可能性が発生し

ます。

このような状況が発生した場合には電極を交換するかお近くのアジレントテクノロジーの営業、もしくはサービスまで

お問い合わせください。

容量を測定した際、その測定結果がリミットに収まっている場合には、電極を交換する必要はありません。

追加箇所：

1. Page 3-26

2. Page 3-33 電極の平行度の粗調節の項の前

3. Page 3-37 電極水平置きの微調節の項の前

4. Page 3-39

5. Page 4-8

変更 2

1-4 ページの表 1-2 を以下の表に差し替えてください。

適合測定機器

測定周波数

4192A LF Impedance Analyzer

5 Hz - 13 MHz

4194A Impedance/Gain-Phase Analyzer

100 Hz - 40 MHz

4263B LCR Meter

100Hz - 100kHz

4268A 120Hz/1kHz Capacitance Meter

120Hz/1kHz

4278A 1 kHz/1 MHz Capacitance Meter

1 kHz/1 MHz

4279A 1 MHz C-V Meter

1 MHz

4284A Precision LCR Meter

20 Hz - 1 MHz

4285A Precision LCR Meter

75kHz - 30MHz

4288A 1 kHz/1 MHz Capacitance Meter

1 kHz/1 MHz

4294A Precision Impedance Analyzer

40Hz - 110MHz

E4980A Precision LCR Meter

20 Hz – 20 MHz

Summary of Contents for 16451B

Page 1: ... 29 2 Page 3 37 3 Page 3 41 4 Page 3 44 5 Page 4 8 Change 2 Correct Table 1 2 Page1 4 as follows Compatible Instrument Model Measurement Frequency Range 4192A LF Impedance Analyzer 5 Hz 13 MHz 4194A Impedance Gain Phase Analyzer 100 Hz 40 MHz 1 4263B LCR Meter 100Hz 100kHz 4268A 120Hz 1kHz Capacitance Meter 120Hz 1kHz 4278A 1 kHz 1 MHz Capacitance Meter 1 kHz 1 MHz 4279A 1 MHz C V Meter 1 MHz 4284...

Page 2: ...ilable 4279A OPEN SHORT LOAD available 4284A OPEN SHORT LOAD available 4285A OPEN SHORT LOAD available 4288A OPEN SHORT LOAD available 4294A OPEN SHORT LOAD available E4980A OPEN SHORT LOAD available Change 5 Correct the text in page 2 3 as follows Function Test fixture for measuring dielectric constant and dissipation factor Permits connecting solid materials to the unknown terminals 4 terminal p...

Page 3: ...ies Change 6 Replace the contents of page 2 4 by the following Dissipation Factor Accuracy Δ tan δ The surfaces of material are assumed to be ideally parallel flat and smooth The above equation is only compatible for electrodes A and B m ...

Page 4: ...ric materials when connected to Agilent s LCR meters or impedance analyzers and is usable up to 30 MHz Change 8 Correct the sentence of step 8 in Page 3 43 Keep pressing the Guarded Guard electrode pressure adjuster shown in Figure 3 25 and turn the three screws in a clockwise sequence until the measured capacitance value is within the limits listed in Table 3 5 ...

Page 5: ...ん追加箇所 1 Page 3 26 2 Page 3 33 電極の平行度の粗調節の項の前 3 Page 3 37 電極水平置きの微調節の項の前 4 Page 3 39 5 Page 4 8 変更 2 1 4 ページの表 1 2 を以下の表に差し替えてください適合測定機器測定周波数 4192A LF Impedance Analyzer 5 Hz 13 MHz 4194A Impedance Gain Phase Analyzer 100 Hz 40 MHz 1 4263B LCR Meter 100Hz 100kHz 4268A 120Hz 1kHz Capacitance Meter 120Hz 1kHz 4278A 1 kHz 1 MHz Capacitance Meter 1 kHz 1 MHz 4279A 1 MHz C V Meter 1 MHz 4284A Precis...

Page 6: ...le 4278A OPEN SHORT LOAD available 4279A OPEN SHORT LOAD available 4284A OPEN SHORT LOAD available 4285A OPEN SHORT LOAD available 4288A OPEN SHORT LOAD available 4294A OPEN SHORT LOAD available E4980A OPEN SHORT LOAD available 変更 5 2 3 ページ下記箇所を下記文章に変更してください機能誘電率および誘電正接測定用テストフィクスチャ 4192A 4194A 4263B 4268A 4278A 4279A 4284A 4285A 4288A 4294A and E4980A の測定端子 4 端子対構成に固体試料を接続することを可能とする周波数範囲 30 ...

Page 9: ...オープンショートロード変更 7 3 章 16451B の概要のテキストを以下に変更してください 16451B の概要 16451B は Agilent 製 LCR メータやインピーダンスアナライザに接続して板状およびフィルム状の誘電材料を測定するためのテストフィクスチャで最高 30MHz までの周波数で使用できます 16451B はフィクスチャアセンブリと 4 種の交換可能はガード付主電極および誤差補正用治具によって構成されています図３１は 16451B のフィクスチャアセンブリを図３２は 16451B に付属しているアクセサリを示しています ...

Page 10: ......

Page 11: ... 1 of 5 Reference Designator Part Number Qty Description 8 16451 25010 1 Insulator CHANGES 2 Change the Part Number as follows Page 4 3 Table 4 1 Replaceable Parts List 1 of 5 Reference Designator Part Number Qty Description 8 16451 25025 1 Insulator 9 16451 24018 1 Plate Page 4 4 Table 4 2 Replaceable Parts List 2 of 5 Reference Designator Part Number Qty Description 1 16451 04013 1 Cover Bottom ...

Page 12: ...Page 4 5 Table 4 3 Replaceable Parts List 3 of 5 Reference Designator Part Number Qty Description 1 16451 20022 1 Base ...

Page 13: ...ERIAL NUMBERS This manual applies directly to instruments with serial number pre x 2916J For additional important information about serial numbers read Chapter 2 Serial Number of this Operation and Service Manual Agilent Part No 16451 90020 Printed in JAPAN October 2000 ...

Page 14: ...pyright All rights are reserved No part of this document may be photocopied reproduced or translated to another language without the prior written consent of the Agilent Technologies Agilent Technologies Japan Ltd Component Test PGU Kobe 1 3 2 Murotani Nishi ku Kobe shi Hyogo 651 2241 Japan c Copyright 1989 1992 1993 1999 2000 Agilent Technologies Japan Ltd ...

Page 15: ...corporated at reprint do not cause the date to change The manual part number changes when extensive technical changes are incorporated December 1989 First Edition part number 16451 90000 May 1992 Second Edition part number 16451 90000 December 1993 Third Edition part number 16451 90010 December 1999 Fourth Edition part number 16451 90010 October 2000 Fifth Edition part number 16451 90020 iii ...

Page 16: ...ies Sales and Service O ce for service and repair to ensure the safety features are maintained Dangerous Procedure Warnings Warnings such as the example below precede potentially dangerous procedures throughout this manual Instructions contained in the warnings must be followed Warning Dangerous voltages capable of causing death are present in this xture Use extreme caution when handling testing a...

Page 17: ...tion on the 16451B Chapter 3 Operation This chapter provides basic operation procedures with measurement techniques and practical measurement examples Chapter 4 Service This chapter provides 16451B parts replacement and troubleshooting information Appendix A Manual Changes Appendix A contains the Manual Changes and provides information for using this manual with a 16451B manufactured before this m...

Page 18: ...oftkeys located to the right of the display of an instrument are enclosed in NNNNN Warranty This Agilent Technologies xture is warranted against defects in material and workmanship for a period if one year from the date of shipment except that in the case of certain components listed in Chapter 1 of this manual the warranty shall be for the speci ed period During the warranty period Agilent Techno...

Page 19: ...echnologies speci cally disclaims the implied warranties of merchantability and tness for a particular purpose Exclusive Remedies The remedies provided herein are buyer s sole and exclusive remedies Agilent Technologies shall not be liable for any direct indirect special tract tort or any other legal theory Assistance Product maintenance agreements and other customer assistance agreements are avai...

Page 20: ......

Page 21: ...ting Humidity 2 3 Weight 2 3 Furnished Accessories and Quantity 2 3 Supplemental Performance Characteristics 2 4 Measurement Accuracy when using contact electrode method 2 4 Permittivity Measurement Accuracy including 4294A Supplemental Characteristics 2 5 Electrode Dimensions 2 7 Guarded Guard Electrode 4 types changeable 2 7 Unguarded Electrode 2 9 Available Test Material Dimensions 2 9 Micromet...

Page 22: ...cting Electrode Method Air Gap Method 3 21 Principle 3 21 Electrodes of the 16451B 3 23 Applicable Size of Test Material for Electrode A 38 mm Guarded Guard Electrode 3 24 Applicable Size of Test Material for Electrode B 5 mm Guarded Guard Electrode 3 25 Preparation of Test Material 3 26 Shape and Size of Test Material 3 26 Thickness of Test Material 3 26 Flatness of Test Material s Surface 3 27 T...

Page 23: ... using Non contacting Electrode Method 3 62 Capacitance measurement Error 3 62 Gap Error 3 62 Compensation Result Example 3 64 E ective Area of Electrode 3 64 4 Service Introduction 4 1 Assembly Replacement 4 1 Assembly and Disassembly Hints 4 1 Slide Stand Assembly 4 1 Micrometer Stand Replacement 4 2 Micrometer Replacement 4 2 Replaceable Parts List 4 3 Troubleshooting 4 8 Mechanical Trouble 4 8...

Page 24: ...D Sample program Sample ASP Program for the 4194A D 1 Sample Program for the 4284A D 2 E Bibliography Index Contents 4 ...

Page 25: ...15 3 11 Contacting Electrode Method Thin Film Electrode 3 16 3 12 Electrode of the 16451B for Contacting Electrode Method Thin Film Electrode 3 18 3 13 Applicable Size of Test Material for Electrode C 3 19 3 14 Applicable Size of Test Material for Electrode D 3 20 3 15 Non contacting method Air Gap method 3 21 3 16 Electrode of the 16451B for Non Contacting Electrode Method Air Gap Method 3 23 3 1...

Page 26: ... Result of Cp D Measurement Using the 4194A 3 54 3 34 Sample Result of Dielectric Constant Using the 4194A 3 54 3 35 Airgap E ects 3 59 4 1 Slide Stand Assembly 4 1 4 2 Micrometer Stand Replacement 4 2 4 3 Micrometer Replacement 4 2 4 4 Cable Connection Diagram 4 9 B 1 Recommended Capacitance Range Using Electrode A B 1 B 2 Recommended Capacitance Range Using Electrode B B 2 Contents 6 ...

Page 27: ...essure Adjuster 3 43 3 5 Capacitance Limits at Vertical Position 3 43 3 6 Capacitance Limits at Horizontal Position 3 43 3 7 Measured Capacitance Limits for Check Electrode Parallelism 3 51 3 8 Tolerance of Electrode Diameter 3 58 3 9 Measurement Error Caused by Airgap 3 59 3 10 E ective Area Constant 3 61 3 11 Compensation Result Example 3 64 4 1 Replaceable Parts List 1 of 5 4 3 4 2 Replaceable ...

Page 28: ......

Page 29: ...ut this document must be carefully followed to ensure the operator s safety and to not damage the 16451B Product Description The 16451B is a Dielectric Test Fixture used with LCR meters and impedance analyzers for accurate measurement of insulating and dielectric materials The 16451B can be used with LCR meters and impedance analyzers which use the 4 terminal pair measurement con guration Installa...

Page 30: ...rrier and Agilent Technologies Your Agilent Technologiessales o ce will arrange for repair and replacement without waiting for the claim to be settled 1 Inspect the shipping container for damage and keep the shipping materials until the inspection is completed 2 Verify that the shipping container contains everything shown in Figure 1 1 and listed in Table 1 1 of this Operation and Service Manual 3...

Page 31: ...over PN 16451 60013 1 3 Electrode C and cover PN 16451 60012 1 4 Electrode D and cover PN 16451 60014 1 5 Attachment for error compensation and cover PN 16451 60021 1 6 Hex key for replacing electrodes PN 8710 1181 1 7 Carrying Case PN 16451 60001 1 The Electrode A and the Unguarded electrode are installed on the test xture when the 16451B is shipped from the factory Installation 1 3 ...

Page 32: ...tance Meter 1 kHz 1 MHz 4279A 1 MHz C V Meter 1 MHz 4284A Precision LCR Meter 20 Hz 1 MHz 4285A Precision LCR Meter 75kHz 30MHz 4294A Precision Impedance Analyzer 40Hz 110MHz 2 1 The upper frequency of the 4194A is 40 MHz but it is limited to 30 MHz when used with the 16451B 2 The upper frequency of the 4294A is 110 MHz but it is limited to 15 MHz when used with the 16451B Error Correction Each of...

Page 33: ...available 4194A OPEN SHORT available 4263B OPEN SHORT LOAD available 4268A OPEN SHORT LOAD available 4278A OPEN SHORT LOAD 1 available 4279A OPEN SHORT LOAD available 4284A OPEN SHORT LOAD 1 available 4285A OPEN SHORT LOAD available 4294A OPEN SHORT LOAD available 1 A working standard is required to perform the LOAD compensation Installation 1 5 ...

Page 34: ......

Page 35: ... relative dielectric constant In common usage the word relative is frequently dropped The term dielectric constant is often called permittivity in other documents This manual will unify it to dielectric constant Safety Considerations The 16451B conforms to the safety requirements of an IEC International Electrotechnical Commission Publication 348 1971 Safety Class 1 instrument and is shipped from ...

Page 36: ...ber pre x indicates the 16451B is di erent from those described in this manual The manual for this new 16451B may be accompanied by a yellow Manual Change supplement or have a di erent manual part number The Manual Change Sheet contains change information that explains how to adapt manual to a newer 16451B In addition to change information the supplement may contain information for correcting erro...

Page 37: ...id materials to the unknown terminals 4 terminal pair con guration of the 4192A 4194A 4263B 4268A 4278A 4279A 4284A 4285A and 4294A Frequency Range 30 MHz Applicable Voltage Range 642 V peak max AC DC Cable Length setting 1 m Operating Temperature 0 C to 55 C Operating Humidity 95 RH 40 C Weight 3 7 kg including accessories Furnished Accessories and Quantity Description Quantity Attachment for err...

Page 38: ...r 0Accuracy 1 0 rm 0rm tan 0 1 Az 0 04f2 0 rm 0 d 2 2 t 100 0rm 01 0rm t 0 01 typical tan 0 1 Ad Ea Eb Ea 0 005 0 0004f2 0 rm 0 d 2 2 t typical Eb tan 100 1 0rm 0rm typical f measured frequency Hz f 30 MHz rm measured permittivity tan measured dissipation factor 0 permittivity of air 8 854 2 10 12 F m d diameter of electrode fA Bg t thickness of material mm Az Impedance measurement error of instru...

Page 39: ...Permittivity Measurement Accuracy including 4294A Supplemental Characteristics Figure 2 2 Electrode A MUT Thickness 1mm General Information 2 5 ...

Page 40: ...Figure 2 3 Electrode B MUT Thickness 1mm 1 OSC LEVEL 500 mV 2 BW 5 3 ADAPTER TYPE 4TP 1M 4 COMPENSATION OPEN SHORT LOAD 2 6 General Information ...

Page 41: ...rode Dimensions Guarded Guard Electrode 4 types changeable 1 For materials without applied thin lm electrodes Figure 2 4 Dimensions of Electrode A Figure 2 5 Dimensions of Electrode B General Information 2 7 ...

Page 42: ...2 For materials with applied thin lm electrodes Figure 2 6 Dimensions of Electrode C Figure 2 7 Dimensions of Electrode D 2 8 General Information ...

Page 43: ...Dimensions Electrode Used Diameter Thickness Guarded Electrode Diameter Electrode A 40 to 56 mm 10 mm 38 mm Electrode B 10 to 56 mm 10 mm 5 mm Electrode C 56 mm 10 mm 1 5 to 50 mm 2 Electrode D 20 to 56 mm 10 mm 1 5 to 14 mm 2 1 Including thickness of thin lm electrodes 2 As a diameter of the thin lm electrode General Information 2 9 ...

Page 44: ...Micrometer Resolution 10 m Dimensions of Fixture Assembly Figure 2 9 Dimensions of Test Fixture Assembly 2 10 General Information ...

Page 45: ...umber Mark the container FRAGILE to help ensure careful handling In any correspondence refer to the xture by model number and its full serial number Other Packaging The following general instructions should be used when repacking with commercially available materials 1 Wrap the 16451B in heavy paper or plastic When shipping to a Agilent Technologies sales o ce or service center attach a tag indica...

Page 46: ......

Page 47: ...ew The 16451B is a test xture for measuring disc and lm dielectric materials when connected to Agilent s LCR meters or impedance analyzers and is usable up to 15 MHz The 16451B provides the xture assembly four interchangeable Guarded Guard electrodes and accessories Figure 3 1 shows the 16451B xture assembly and Figure 3 2 shows the accessories furnished with the 16451B Fixture Assembly The 16451B...

Page 48: ...Figure 3 1 Fixture Assembly The name and description of the xture assembly shown in Figure 3 1 are listed in the following table Table 3 1 3 2 Operation ...

Page 49: ...the Unguarded electrode or test material 6 Ratchet knob small knob This knob is used to bring the Guarded Guard electrode into contact with the Unguarded electrode or material 7 Cable assembly This cable assembly connects the 16451B to 4 terminal pair UNKNOWN terminals on the instrument s front panel 8 Unguarded electrode adjustment screws These screws are used to make the Unguarded electrode para...

Page 50: ...es some accessories such as 4 types of changeable electrodes and their covers an attachment for error correction Hex key and Carrying case Figure 3 2 and Table 3 2 show the furnished accessories Figure 3 2 Furnished Accessories 3 4 Operation ...

Page 51: ...ode for large thin lm electrodes This electrode is used to measure test materials which already have thin lm electrodes applied and consists of a Guarded electrode 3 a and a Guard electrode 3 b The electrode is provided with a cover 3 c to protect its surface 4 Electrode D Electrode for small thin lm electrodes This electrode is used to measure test materials which already have thin lm electrodes ...

Page 52: ...ric A practical measurement procedure is described in Typical Measurement Procedure by the Measurement Methods For the dielectric constant calculation consider a solid material which is shaped into a disc as shown in Figure 3 3 Figure 3 3 Basic Model for Dielectric Measurement The dielectric constant can be obtained using the following equation o r t A Cp Where Dielectric constant permittivity F m...

Page 53: ...equation r t 2 Cp A 2 o t 2Cp 2 d 2 2 2 o Where d Diameter of electrode m The dielectric dissipation factor tan loss tangent of test material Dr can be obtained directly by measuring the dissipation factor If the diameter of electrode is 38 mm the denominator of the above mentioned equation becomes simple 2 d 2 2 2 o 1 210014 Then the equation to obtain the dielectric constant is r t 2Cp 21 2 1014...

Page 54: ...aterial as shown in the left of gure of Figure 3 4 When the guard electrode as used by the 16451B surrounds the guarded electrode as used by the 16451B it is possible to measure the capacitance of the test material accurately because the guard electrode can avoid the stray capacitance at the edge of the electrode as shown in Figure 3 5 Figure 3 4 Capacitance Measurement using Unguarded Electrode S...

Page 55: ...e capacitance of a solid material Three measurement methods are applicable to the 16451B they are the Contacting Electrode method Rigid Metal electrode the Contacting Electrode method Thin Film electrode and the Non Contacting Electrode method Air Gap method You should select the suitable measurement method and the suitable electrode for your test material in order to measure it accurately Figure ...

Page 56: ...Figure 3 6 Summary of Measurement Methods 3 10 Operation ...

Page 57: ...d demerits of this method are as follows Merits Procedure to measure capacitance is simple It is not necessary to apply thin lm electrodes Equations to obtain dielectric constant are simple Demerits Air lm error caused by air gap between electrodes and surface of the test material causes error Principle Figure 3 7 shows the schematic electrode structure for this method Figure 3 7 Contacting Electr...

Page 58: ...nt parallel capacitance F D Dissipation factor ta Average thickness of test material m A Area of Guarded electrode m2 d Diameter of Guarded electrode m 38210 3 m or 5210 3 m o 8 854210 12 F m Equations r ta 2Cp A 2 o ta 2Cp 2 d 2 2 2 o Dt D Where r Dielectric constant of test material Dt Dissipation factor of test material 3 12 Operation ...

Page 59: ...ize of test material as shown in Figure 3 8 When these electrodes are used the diameter of test materials should be much greater than the inner diameter of the Guard electrode and smaller than or equal to 56 mm Figure 3 9 and Figure 3 10 show the applicable size of test material for these electrodes Figure 3 8 Electrode of the 16451B for Contacting Electrode Method Rigid Metal Electrode Operation ...

Page 60: ...de A 38 mm Guarded Guard Electrode Diameter of material greater than or equal to 40 mm and smaller than or equal to 56 mm Thickness of material less than or equal to 10 mm Figure 3 9 Applicable Size of Test Material for Electrode A 3 14 Operation ...

Page 61: ...5 mm Guarded Guard Electrode Diameter of test material greater than or equal to 10 mm and smaller than or equal to 56 mm Thickness of test material less than or equal to 10 mm Figure 3 10 Applicable Size of Test Material for Electrode B Operation 3 15 ...

Page 62: ...measurement The merits and demerits of this method are as follows Merits Air lm error caused by air gap between the electrode and surface of the test material causes minimum error Procedure to measure capacitance is simple Equations to obtain dielectric constant are simple Demerits It is necessary to apply the thin lm electrodes Not applicable to materials which change their characteristics becaus...

Page 63: ...rea of Guarded thin lm electrode m2 d Diameter of Guarded thin lm electrode m o 8 854210 12 F m Equations r ta 2Cp A 2 o ta 2 Cp 2 d 2 2 2 o Dt D Where r Dielectric constant of test material Dt Dissipation factor of test material Thin Film Electrode When this method is used a metallic thin lm is applied on surface of the test material For more details refer to Thin Film Electrode in Preparation of...

Page 64: ...igure 3 12 When these electrodes are used the diameter of the thin lm guarded electrode must be smaller than the inner diameter of the guarded electrode of the 16451B and the diameter of the thin lm guard electrode must be greater than the inner diameter of the guarded electrode of the 16451B Figure 3 13 and Figure 3 14 show the applicable size of test material for these electrode Figure 3 12 Elec...

Page 65: ...m and less than or equal to 50 mm Inner diameter of guard thin lm electrode less than or equal to 52 mm and greater than a diameter of guarded thin lm electrode Gap distance between guarded thin lm electrode and guard thin lm electrode as small as practical 0 5 mm is possible Thickness of material less than or equal to 10 mm Figure 3 13 Applicable Size of Test Material for Electrode C Operation 3 ...

Page 66: ...ater than or equal to 5 mm and less than or equal to 14 mm Inner diameter of guard thin lm electrode less than and equal to 16 mm and greater than a diameter of guarded thin lm electrode Gap distance between guarded thin lm electrode and guard thin lm electrode as small as practical 0 5 mm is possible Thickness of material less than or equal to 10 mm Figure 3 14 Applicable Size of Test Material fo...

Page 67: ...lm materials highly compressible materials such as foam rubber or soft materials The merits and demerits of this method are as follows Merits Air lm error caused by air gap between the electrode and the surface of test material does not cause error It is not necessary to apply thin lm electrodes Demerits It is necessary to measure capacitance twice Equation to derive the dielectric constant is com...

Page 68: ...e test material is not inserted tg Gap between Guarded Guard electrode and Unguarded electrode m Cs2 Series capacitance when the test material is inserted F D2 Dissipation factor when the test material is inserted ta Average thickness of test material m Equations r 1 1 0 1 0 Cs1 Cs2 2 tg ta Dt D2 r 2 D2 0 D1 2 tg ta 0 1 Where r Dielectric constant of test material Dt Dissipation factor of test mat...

Page 69: ...d to match the size of test material as shown Figure 3 16 When these electrodes are used the diameter of test materials must be much greater than the inner diameter of the Guard electrode Figure 3 17 and Figure 3 18 show the applicable size of test materials for these electrodes Figure 3 16 Electrode of the 16451B for Non Contacting Electrode Method Air Gap Method Operation 3 23 ...

Page 70: ...e A 38 mm Guarded Guard Electrode Diameter of material greater than or equal to 40 mm and smaller than or equal to 56 mm Thickness of material less than or equal to 10 mm Figure 3 17 Applicable Size of Test Material for Electrode A 3 24 Operation ...

Page 71: ...de B 5 mm Guarded Guard Electrode Diameter of material greater than or equal to 10 mm and smaller than or equal to 56 mm Thickness of material less than or equal to 10 mm Figure 3 18 Applicable Size of Test Material for Electrode B Operation 3 25 ...

Page 72: ... when low dielectric constant material is measured you should change the thickness of test material so that the capacitance value is large more than 0 1 pF For more detail refer to next section Thickness of Test Material Thickness of Test Material A thickness of a test material is limited to the 10 mm by the range for moving the electrode of the 16451B Because thickness is needed to obtain the die...

Page 73: ...f the surface of the test material is not at an air lm gap between an electrode and a test material increases and this causes measurement error Measurement error caused by non atness will increase when the test material is thin For example if the atness error is 10 m the dielectric constant measurement error will be 0 3 for a material of 1 mm thickness but the error of capacitance measurement will...

Page 74: ...t putting ngerprints on it Also put the covers on both of the electrodes before removing one The removed electrode should be stored in the carrying case The electrode replacement procedure is as follows 1 Turn the small knob of the micrometer ccw counterclockwise to move the Guarded Guard electrode away from the Unguarded electrode 2 Put the covers on both electrodes to protect their surface 3 Rem...

Page 75: ...rew using a hex key 6 Turn the small knob until it slips when the covered electrodes touch each other Note After the electrode is changed you should adjust it for parallelism For the detailed adjustment procedure refer to Electrode Adjustment Operation 3 29 ...

Page 76: ... of the 16451B ccw to move the Guarded Guard electrode away from the Unguarded electrode 2 After removing the covers of both electrodes connect the attachment with the cover to the Guarded Guard electrode as shown in Figure 3 20 As shown in Figure 3 21 the inner electrode of the Guarded Guard electrode is completely surrounded by the guard Figure 3 20 Connecting the Attachment to the Guarded Guard...

Page 77: ...measurement The procedure to perform the OPEN correction depends on the measurement instrument for the details of this procedure refer to Appendix C 5 Turn the small knob ccw to move the electrodes away from each other and remove the attachment Operation 3 31 ...

Page 78: ...mpedance contained in the 16451B can be reduced by performing the following SHORT correction procedure 1 Turn the small knob ccw to move the Guarded Guard electrode away from the Unguarded electrode 2 After removing the cover from both electrodes also remove the cover from the attachment Then connect the attachment to the Unguarded electrode as shown in Figure 3 22 Figure 3 22 Connecting the Attac...

Page 79: ...on measurement The procedure to perform the SHORT correction depends on the measurement instrument for the details of this procedure refer to Appendix C 5 After the measurement turn the small knob ccw to move the electrodes away from each other and remove the attachment Operation 3 33 ...

Page 80: ...d and is designed to contact earlier than the Guard electrode But do not turn the knob until the Guard electrode contacts with the Unguarded electrode Figure 3 24 SHORT Correction for Thin Film Electrodes Note When the Guard electrode contacts to the Unguarded electrode before the Guarded electrode contacts to the Unguarded electrode the electrodes deviates from the parallel position Perform a rou...

Page 81: ...requency 100 kHz It is assumed that the air capacitor has no dependence on frequency Electrodes Value of Load Air Capacitor A 50 pF 6 0 5 pF B 5 pF 6 0 05 pF C and D 1 5 pF 6 0 05 pF Actual measurement procedure for the LOAD standard is as follows Adjust the distance between the 16451B s electrodes measure Cp at 100 kHz and sets it as the LOAD compensation standard value Cp measured value and G 0 ...

Page 82: ... Accurate Adjustment in Vertical Position Contacting electrode method Thin Film electrode Using Electrode C Electrode D 1 Perform Rough Adjustment to Make Electrodes Parallel Non contacting electrode method Air Gap method Using Electrode A Electrode B 1 Perform Rough Adjustment to Make Electrodes Parallel 2 Perform Accurate Adjustment in Horizontal Position Caution DO NOT use the large knob to bri...

Page 83: ...because a change of temperature causes mechanical dimensions to change Operation 3 37 ...

Page 84: ...of the micrometer cw to bring the Guarded Guard electrode into contact with the Unguarded electrode until the clutch slips 3 Check if the micrometer s scale indicates less than zero If the clutch slips above zero turn the small knob ccw to remove the electrodes and then turn three Unguarded electrode adjustment screws shown in Figure 3 25 ccw until the micrometer s scale indicates below zero when ...

Page 85: ...ep Accurate Adjustment to Make Electrodes Parallel when using the Contacting electrode method Rigid metal electrode and Non contacting Electrode method Air Gap method Figure 3 26 Rough Adjustment Procedure Operation 3 39 ...

Page 86: ...cted by dust Refer to Changing the Guarded Guard Electrode 2 Perform OPEN SHORT correction Refer to Appendix C 3 Connect the 16451B to an LCR meter or an impedance analyzer and select the capacitance measurement function Cp for Circuit mode Refer to Connecting to the Instrument 4 Place the 16451B so that the surfaces of electrodes are vertical as shown in Figure 3 27 Figure 3 27 Vertical Position ...

Page 87: ...ectrode Capacitance Value Electrode A 700 pF to 1000 pF Electrode B 12 pF to 17 pF 9 Carefully turn the three adjustment screws cw or ccw until the measured capacitance value is within the limits listed in Table 3 3 Caution Stop turning the screw if the capacitance value becomes negative or extremely high or the dissipation factor D increases suddenly the electrodes are shorted In this case immedi...

Page 88: ...nction Cp for Circuit mode Refer to Connecting to the Instrument 4 Place the 16451B so that the surface of electrodes is vertical as shown in Figure 3 27 5 Turn the large knob of the micrometer ccw to make enough room between the Guarded Guard electrode and the Unguarded electrode and then remove the cover from both electrodes 6 Turn the small knob of the micrometer cw and adjust it until the micr...

Page 89: ...wise sequence until the measured capacitance value is within the limits listed in Table 3 5 Table 3 5 Capacitance Limits at Vertical Position Electrode Capacitance Value Electrode A 700 pF to 1000 pF Electrode B 12 pF to 17 pF Stop turning the screw if the capacitance value becomes negative or extremely high or the dissipation factor D increases suddenly In this case immediately turn the screw ccw...

Page 90: ... turn the screw in the pressure adjuster cw to strengthen the pressure After that return the plug and redo the procedure from step 8 Note If the capacitance value measured is not within the limits shown in Table 3 5 even though you repeated steps 7 and 8 change the measured capacitance limits of Table 3 5 to the limits listed in the following table and repeat steps 7 and 8 Electrode Capacitance Va...

Page 91: ... torque Note You should perform the adjustment in the same environmental conditions as you will measure the test material using the 16451B because a change of temperature causes mechanical dimensions to change When you change temperature condition you should perform the accurate adjustment after temperature conditions have changed because a change of temperature causes mechanical dimensions to cha...

Page 92: ...you should apply Thin Film electrodes on the surface of the material to be measured For more information refer to Preparation of Test Material 2 Connect the 16451B to the instrument For more information refer to Connecting to the Instrument 3 Set up the instrument to measure capacitance Cp D 4 Change to the electrode you will use and perform the rough adjustment Refer to Changing the Guarded Guard...

Page 93: ...he accurate adjustment When you use the Electrode C and Electrode D you can skip this step Refer to Electrode Adjustment 7 Set the test material between the electrodes 8 Measure the capacitance Cp and dissipation factor D and then calculate the dielectric constant r and dissipation factor Dt of test material using the following equations Operation 3 47 ...

Page 94: ...rode m o 8 854210 12 F m r Dielectric constant of test material Dt Dissipation factor of test material Note After you measure the test material or move the electrode several times it is recommended that you check electrode for parallelism refer to Check Electrode Parallelism and clean the surface of electrodes Note For more information on measuring accurately refer to Measurement Error Analysis 3 ...

Page 95: ...3 Set up the instrument to measure capacitance Cs D 4 Change to the electrode you will use and perform the Rough Adjustment Refer to Changing the Guarded Guard Electrode 5 Perform an OPEN SHORT correction 6 Adjust the electrodes to be parallel using the Accurate Adjustment Refer to Electrode Adjustment 7 Set the test material between the electrodes 8 Adjust the small knob of the micrometer to set ...

Page 96: ...serted F D2 Dissipation factor with test material inserted ta Average thickness of test material m r Dielectric constant of test material Dt Dissipation factor of test material Note After you measure the test material or move the electrode several times it is recommended to check for electrode parallelism refer to Check Electrode Parallelism and clean the surface of electrodes Note For more inform...

Page 97: ...he small knob of the micrometer cw and adjust it until the micrometer scale indicates 0 01 mm 10 Measure the capacitance If the measured capacitance value is within the limits listed in Table 3 7 the check is nished If the capacitance value is out of limits perform the Accurate Adjustment as shown in Accurate Adjustment to Make Electrodes Parallel Table 3 7 Measured Capacitance Limits for Check El...

Page 98: ...mpedance UNKNOWN terminals and place the 16451B so that the surfaces of electrodes are vertical 5 Press 4LINE5 to turn the 4194A ON if it is already ON you must turn it OFF once and then turn it ON again Then press the blue 4 5 and press 4R5 4S5 4T5 4ENTER EXECUTE5 to reset the 4194A 6 Press 4FUNCTION5 NNNNNNNNNNNNNNNNNNNNNNNNNNNNN IMPEDANCE NNNNNNNNNNNNNN more NNNNNNNNNNNNNN Cp D Parallel capacit...

Page 99: ...the test material s diameter is 38 mm and thickness is 100 m so the dielectric constant r can be obtained by using the following equation Refer to Contacting Electrode Method used with Thin Film Electrode in Measurement Method r 1 002 1004 2 3 82 1002 2 2 28 854 2 10012 2 Cp 9 962 109 2Cp Where Cp Measured equivalent parallel capacitance value Hence press the blue 4 5 4A5 4 5 495 4 5 495 465 4EEX5...

Page 100: ...Figure 3 33 Sample Result of Cp D Measurement Using the 4194A Figure 3 34 Sample Result of Dielectric Constant Using the 4194A 3 54 Operation ...

Page 101: ...NNNNNNNNNNNNNNNNNN MEAS OPEN to perform an OPEN correction measurement 8 After indicating Open measurement completed and beeping press NNNNNNNN ON to validate the OPEN correction 9 Turn the small knob ccw to remove the attachment 10 Put the attachment for error compensation without the cover on the Unguarded electrode then turn the small knob cw to bring the Guarded Guard electrode into contact wi...

Page 102: ...nt Method r 1 1 0 1 0 Cs1 Cs2 2 tg ta For example Cs1 4 055 pF Cs2 6 780 pF ta 2 01 mm and tg 2 20 mm then the calculated dielectric constant r is 2 00 Note The Sample Program for the 4284A in Appendix D lists a sample BASIC program that runs on the 9000 series 300 Engineering Workstation The sample program controls the 4284A via GPIB and automatically performs the following operation procedure Fo...

Page 103: ...ing the following equation r ta 2 Cp 2 d 2 2 2 o Where Cp Equivalent parallel capacitance F ta Average thickness of test material m d Diameter of Guarded electrode m o 8 854210 12 F m The error factors included in the above parameters are as follow Capacitance measurement Error This error is determined by the measurement accuracy of the LCR meter or impedance analyzer used Measurement accuracy of ...

Page 104: ...When contacting the MUT directly with the electrodes an airgap is formed between the MUT and the electrodes No matter how at and parallel both sides of the MUT is fabricated an airgap will still form This airgap is the cause for measurement error because the measured capacitance will be the sum of the capacitance of the dielectric material and the airgap The relationship between the airgap s thick...

Page 105: ...ge of the electrodes as shown in Guard Electrode But the guard electrode cannot perfectly eliminate the error This error makes the apparent area of the guarded electrode larger To reduce the error divide the dielectric constant value by the e ective area constant The e ective area constant represents the increase of electrode area caused by stray capacitance and is as follows when a a 1 g d 2 Ba 2...

Page 106: ... Non contacting Electrode method gap between Guarded Guard electrode and Unguarded electrode tg m Table 3 10 lists the e ective area constants a b calculated for Electrode A 38 mm electrode and Electrode B 5 mm Electrode To reduce the error caused by stray capacitance at the edge divide a or b into equation to obtain dielectric constant as shown in following equation r ta 2 Cp 2 d 2 2 2 o 2 3 60 O...

Page 107: ...0515 1 0096 1 0497 0 8 1 0101 1 0513 1 0095 1 0493 0 7 1 0101 1 0511 1 0094 1 0488 0 6 1 0100 1 0508 1 0092 1 0482 0 5 1 0099 1 0505 1 0089 1 0473 0 4 1 0097 1 0499 1 0085 1 0460 0 3 1 0095 1 0490 1 0079 1 0438 0 2 1 0089 1 0473 1 0068 1 0397 0 1 1 0076 1 0423 1 0044 1 0293 0 09 1 0073 1 0413 1 0040 1 0274 0 08 1 0071 1 0401 1 0036 1 0253 0 07 1 0067 1 0387 1 0032 1 0230 0 06 1 0063 1 0387 1 0028 ...

Page 108: ...material Thickness measurement of the test material depends on accuracy of the micrometer used To reduce this error measure the thickness at several points of the measured area of the test material using an accurate micrometer Do not use the micrometer equipped with the 16451B Parallelism and Flatness of Electrodes and Test Materials This error is included in the thickness ta of a test material an...

Page 109: ... Calculate the equivalent distance error at each electrode distance The equivalent distance error of each electrode distance 1te can be obtained as follows 1te Ct Cm 01 2 tset m Where Cm Measured capacitance value F 4 Average equivalent distance error The average of equivalent electrode distance error 1ta is derived as follows 1ta 1t40 1t50 1t60 3 m Where 1t40 Equivalent distance error 1te at 40 m...

Page 110: ...case the equivalent electrode distance is as follows teq tset 4 5 m Use the equivalent electrode distance teq to accurately calculate accurately the dielectric constant r E ective Area of Electrode This error is included in capacitance values measured Cs1 and Cs2 It is caused by the stray capacitance at electrode s edge even though a guard electrode is used To reduce the error divide capacitance v...

Page 111: ... 16451B are secured using metric threaded fasteners All fasteners used in the 16451B can be removed using medium and small pozidrive screwdrivers and a 2 5 mm hex key A 2 5 mm hex key Agilent PN 8710 1181 is included with the 16451B Slide Stand Assembly Do not remove any part of the Slide Stand Assembly Agilent PN 16451 60002 shown in Figure 4 1 Once the Slide Stand Assembly is disassembled it can...

Page 112: ...ng the micrometer put the micrometer completely into the micrometer stand and turn the ne scale adjustment line until it is facing vertical as shown in Figure 4 3 Then tighten the micrometer stand s set screw to rmly attach the micrometer to the stand The proper tightening torque is 3 kgf cm About 3 kgf cm may be applied to the screw when the furnished hex key is used If the screw is tighten too m...

Page 113: ...umber and the quantity required Table 4 1 Replaceable Parts List 1 of 5 Reference Designator Part Number Qty Description 1 Refer to Table 4 3 1 2 Refer to Table 4 4 1 3 8710 1889 2190 0586 0515 0909 1 2 2 Angle Washer Screw 4 8750 0373 1 Micrometer 5 16451 04001 0515 0914 1 1 Cover Screw 6 16451 00602 0515 0914 1 1 Plate Screw 7 16451 24001 1 Unguarded Electrode 8 16451 25001 1 Insulator 9 16451 2...

Page 114: ... 1 16541 04003 0403 0427 0515 0914 1 8 4 Cover Bottom Bumper Foot Screw 2 16451 04002 1 Cover Top 3 16451 61002 1 Cable Assembly 4 16047 40000 2190 0206 0515 1550 1 1 1 Stopper Washer Screw 5 16451 04004 0515 0914 1 2 Cover Top Screw These parts are included in the 16451 61002 4 4 Service ...

Page 115: ...Cable Assembly 2 C 1460 2237 1 Spring 2 D 16451 25004 1 Bushing 2 E 0515 1321 1 Screw 3 0515 1321 16451 25008 3 3 Screw Spacer 4 A 1460 2238 1 Spring 4 B 16451 25009 1 Rod 4 C 0515 1321 1 Screw 4 D 16451 25011 1 Rod 4 E 6960 0147 1 Plug Hole 5 0515 1550 1 Screw Apply a drop of Lock Tite Agilent PN 0470 0013 to the screws when replacing them Service 4 5 ...

Page 116: ...ference Designator Part Number Qty Description 1 16451 60002 1 Slide Stand Assembly 2 A 16451 25002 1 Spacer 2 B 16451 61602 1 Cable Assembly 2 C 2190 0584 1 Washer 2 D 0515 1321 1 Screw 2 E 16451 25006 1 Spacer 3 0515 1550 1 Screw 4 6 Service ...

Page 117: ... Cover 56 mm 16451 25021 Cover 20 mm 16451 25022 Hex Key 8710 1181 Carrying Case 16451 60001 Electrodes A and C include a 56 mm Cover Electrodes B and D include a 20 mm Cover Electrode A 38 mm Guarded Guard electrode Electrode B 5 mm Guarded Guard electrode Electrode C Guarded Guard electrode for large thin lm electrode Electrode D Guarded Guard electrode for small thin lm electrode Service 4 7 ...

Page 118: ...Center conductors are connected to the Unguarded Electrode The Lcur Lpot Hcur and Hpot outer conductors are connected to the body The cables shields are connected to the body with screws The Guard Electrode is connected to the body Insulation resistance between the Lpot center conductor and the Hpot center conductor is greater than 1 M Insulation resistance between the center conductors and the ou...

Page 119: ...Figure 4 4 Cable Connection Diagram Service 4 9 ...

Page 120: ......

Page 121: ... xture s serial number Fixtures manufactured after the printing of this manual may be di erent than those documented in this manual Later xture versions will be documented in a manual changes supplement that will accompany the manual shipped with that xture If your xture serial number is not listed on the title page of this manual or in Table A 1 it may be documented in a yellow MANUAL CHANGES sup...

Page 122: ......

Page 123: ...g the 16451B with Electrode A 38 mm electrode or Electrode B 5 mm electrode Using Electrode A 38 mm electrode The area surrounded by bold lines in Figure B 1 shows the recommended capacitance range when using Electrode A Figure B 1 Recommended Capacitance Range Using Electrode A Recommended Capacitance Range B 1 ...

Page 124: ... 5 mm electrode The area surrounded by bold lines in Figure B 2 shows the recommended capacitance range when using Electrode B Figure B 2 Recommended Capacitance Range Using Electrode B B 2 Recommended Capacitance Range ...

Page 125: ...l then be displayed 3 Remove the attachment from the electrode 4 Connect the attachment with the cover to the Guarded Guard electrode 5 Set the circuit mode to 6 Press 4BLUE5 4OPEN5 then the indicator lamp will come ON and G conductance and B susceptance o set adjustments are automatically performed at the spot measuring frequency displayed on DISPLAY C CAL calibration is displayed on DISPLAY A an...

Page 126: ...ut the cover to the Unguarded electrode of the 16451B 5 Press 4COMPEN5 NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN ZERO SHORT 4ENTER EXECUTE5 to start the SHORT o set measurement for correction The message Measuring zero short will be displayed for several seconds then Zero short compen complete will be displayed Measurement data will not be displayed 6 Press NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN O...

Page 127: ... turn to succeedingly lower frequencies from 100 kHz Lastly all panel control functions are restored to the settings set in step 2 about 10 seconds after pressing 4OPEN5 4 Remove the attachment from the electrode 5 Connect the attachment without the cover to the Unguarded electrode of the 16451B 6 Press 4ZERO SHORT5 to start the SHORT o set measurement This automatically sets instrument to L ESR m...

Page 128: ... 3 Remove the attachment from the electrode 4 Connect the attachment without the cover to the Unguarded electrode of the 16451B 5 Press 4ZERO SHORT5 to start the SHORT Zero O set Adjustment When 4ZERO SHORT5 is pressed the instrument will be automatically set to the jZj for the 4276A or L ESR for the 4277A measurement mode It will then measure the test xture s residual impedance at each of the 9 p...

Page 129: ...NNNNNNNNN OPEN ON then press 4TRIGGER5 The measurement result is compensated for in accordance with the OPEN admittance data and is close to zero in value Press NNNNNNNNNNNNNN NEXT 5 Remove the attachment from the electrode 6 Connect the attachment without the cover to the Unguarded electrode of the 16451B 7 Press NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN SHORT COMPEN to start the SHORT correction me...

Page 130: ...ored 4 Press NNNNNNNNNNNNNNNNNNNNNNN OPEN ON to perform the OPEN correction calculations on subsequent measurements using the OPEN interpolation correction data when the FREQ1 FREQ2 and FREQ3 elds are set to OFF When the FREQ1 FREQ2 and FREQ3 elds are set to ON and the test frequency is equal to FREQ1 2 3 the OPEN correction data at FREQ1 2 3 is used 5 Remove the attachment from the electrode 6 Co...

Page 131: ...rement at the frequency points you speci ed After which the OPEN correction measurement data are displayed on the system message line 6 Move the cursor to the OPEN eld 7 Press NNNNNNNN ON to perform the OPEN correction calculations for subsequent measurements at the speci ed frequency points 8 Remove the attachment from the electrode 9 Connect the attachment without the cover to the Unguarded elec...

Page 132: ......

Page 133: ...40 RST RESET 4194A 50 FNC1 MEAS FUNCTION IMPEDANCE 60 IMP14 CP D 40 SWT2 LOG SWEEP 50 START 1 KHZ START FREQ 1 KHZ 60 STOP 10 MHZ STOP FREQ 10 MHZ 70 ITM2 INTEG TIME MED 80 NOA 4 AVERAGE IS 4 90 DISP PUT ATTACH WITH COVER 100 BEEP 110 PAUSE 120 ZOPEN MEAS OPEN 130 DISP PUT ATTACH WITHOUT COVER 140 PAUSE 150 ZSHRT MEAS SHORT 160 OPN1 OPEN OFFSET ON 170 SHT1 SHORT OFFSET ON 180 PAUSE 190 SWTRG START...

Page 134: ... 1 no 0 F_correct 1210 1220 4284A initialization 1230 OUTPUT Hp4284a CORR LENG 1M Cable length 1 m 1240 OUTPUT Hp4284a TRIG SOUR BUS Bus trigger mode 1250 OUTPUT Hp4284a FUNC IMP CSD Ls Rs maes func 1260 OUTPUT Hp4284a INIT CONT ON 1270 OUTPUT Hp4284a DISP PAGE MEAS Meas page 1280 OUTPUT Hp4284a INIT Initialize 1290 Correction 1300 IF F_correct No THEN Skip_correct 1310 PRINT Put the Attachment fo...

Page 135: ...80 FOR Ifreq 1 TO Nfreq 1690 OUTPUT Work D Ifreq Store meas data 1700 NEXT Ifreq 1710 Graphic initialize 1720 CLEAR SCREEN Clear screen 1730 WINDOW 5 2 5 2 Set graphic window 1740 Dmax MAX D Find max value of meas dat 1750 GOSUB Axis 1760 FOR Ifreq 1 TO Nfreq Calc graphic data 1770 1780 Xp Ifreq Freq Ifreq Freq Nfreq 1790 Yp Ifreq D Ifreq Dmax 1800 1810 NEXT Ifreq 1820 MOVE Xp 1 Yp 1 1830 FOR Ifre...

Page 136: ... 2070 LDIR 0 2080 LORG 8 2090 MOVE 05 2 Dmax 2100 DRAW Xzero 2 Dmax 2110 LABEL 2 2120 MOVE Xzero Yzero 2130 LABEL 0 2140 2150 LORG 6 2160 MOVE 1 05 2170 DRAW 1 Yzero 2180 LABEL 1 M 2190 RETURN 2200 Meas freq data 2210 DATA 10 Number of data 2220 DATA 1E4 2E4 5E4 1E5 2E5 3E5 4E5 5E5 7E5 1E6 2230 END D 4 Sample program ...

Page 137: ...Standards D150 81 Standard Test Method for A C Loss Characteristics and Permittivity Dielectric Constant of Solid Electrical Insulating Materials Annual Book of ASTM Standards Vol 10 02 July 1987 pp 21 44 Bibliography E 1 ...

Page 138: ......

Page 139: ...eries 300 3 56 A A 3 6 3 12 3 17 3 48 accessory 2 3 3 4 Accuracy 2 4 accurate adjustment 3 36 3 40 address ii vii adjuster 3 3 adjustment accurate 3 36 3 40 capacitance limit 3 41 electrode 3 36 Non contacting Electrode method 3 42 parallel 3 36 rough 3 36 3 38 vertical position 3 40 adjustment knob 3 3 adjustment screw 3 3 air lm 3 11 3 27 Air Gap method 3 9 3 21 measurement example 3 55 principl...

Page 140: ...connection diagram 4 9 Cable Length 2 3 cable length switch 3 28 capacitance 3 6 capacitance limit 3 41 capacitance measurement error 3 57 3 62 carrying case 3 5 Carrying Case 1 2 Caution iv CAUTION 1 1 ccw 3 28 changing electrode 3 28 characteristics 2 4 Cm 3 63 compatible instrument 1 4 error correction 1 4 compensation 1 4 compensation result example 3 64 Computer vi conductive paint 3 27 conne...

Page 141: ...2 3 22 3 50 cw 3 30 D d 3 6 3 12 3 17 D 3 12 3 17 3 48 D1 3 22 3 50 D150 E 1 D2 3 22 3 50 dc bias 3 1 demerit Non contacting Electrode method 3 21 Rigid Metal 3 11 Thin Film 3 16 dent 1 2 Description 1 1 diameter 2 9 3 26 Electrode A 3 14 3 24 Electrode B 3 15 3 25 Electrode C 3 19 Electrode D 3 20 test material 3 14 3 15 3 19 3 20 3 24 3 25 tolerance 3 58 dielectric 3 6 dielectric constant 2 1 re...

Page 142: ...g electrode 3 23 for small thin lm electrode 3 20 for Thin Film electrode 3 18 part number 4 7 Thin Film electrode 3 16 tolerance of diameter 3 58 Electrode Electrode A 1 2 Electrode B 1 2 Electrode C 1 2 Electrode D 1 2 for Contacting electrode method 3 13 Rigid Metal electrode 3 13 Unguarded electrode 1 2 environment iv environmental limitations 2 11 3 6 o 3 6 3 12 3 17 3 48 r 3 6 3 12 3 17 3 22...

Page 143: ...e method 3 52 Non contacting Electrode method 3 55 Rigid Metal electrode 3 55 Thin Film electrode 3 52 Exclusive Remedies vi F lm 3 26 red on silver 3 27 xture assembly 2 10 3 1 atness error 3 58 3 62 preparation 3 27 for Contacting Electrode method 3 9 for Non contacting Electrode method 3 9 frequency range 2 3 compatible instrument 1 4 function 2 3 furnished accessory 3 4 G g 3 59 gap between Gu...

Page 144: ...ob 3 3 Lc 3 3 LCR meter 1 1 limit for adjustment 3 41 lint free 3 28 LOAD 1 4 compensation 3 35 correction 3 35 loss tangent 3 7 Lp 3 3 M Manual How to use v part number iii printing history iii Manual Change 2 2 material 2 9 measurement 3 6 example 3 52 method 3 9 procedure 3 45 mechanical trouble 4 8 merit Non contacting Electrode method 3 21 Rigid Metal 3 11 Thin Film 3 16 metal foil 3 27 metal...

Page 145: ...EN circuit 3 30 OPEN SHORT LOAD 1 4 operation 3 1 operation check 4 8 overview 1 2 3 1 P packaging 2 11 parallel adjustment 3 36 parallelism error 3 58 3 62 part number 1 2 performance 2 3 2 4 permittivity 2 1 physical damage 1 2 plate 3 26 4 3 plug hole 4 5 preparation 3 26 preparing 1 1 pressure adjuster 3 3 principle Contacting Electrode method Rigid Metal electrode 3 11 Contacting Electrode me...

Page 146: ...atch 1 2 screw 3 3 3 28 4 3 4 4 4 5 4 6 Serial Number 2 2 plate 2 2 service 4 1 shape preparation 3 26 SHORT 1 4 3 32 SHORT circuit 3 32 3 34 SHORT correction for Rigid Metal electrode 3 32 for thin lm electrode 3 34 slide stand 4 1 slide stand assembly 4 6 slightly compressible 3 11 small knob 3 3 smooth 3 11 Softkey vi soft material 3 21 spacer 4 5 4 6 Speci cations 2 3 sprayed metal 3 27 spring...

Page 147: ...5 3 19 3 20 3 24 3 25 3 26 Test Material 2 9 test signal level 3 1 tg 3 50 theory 3 6 thick 3 11 thickness 2 9 error 3 58 3 62 preparation 3 26 test material 3 14 3 15 3 19 3 20 3 24 3 25 thin lm 3 5 Thin Film electrode 3 9 3 16 conductive paint 3 27 evaporated metal 3 27 red on silver 3 27 measurement example 3 52 metal foil 3 27 metal spattering 3 27 preparation 3 27 principle 3 16 sprayed metal...

Page 148: ...4 3 V vertical position adjustment 3 40 capacitance limit 3 41 visual inspection 3 36 W Warning iv iv WARNING 1 1 Warranty vi limitation vi washer 4 3 4 4 4 6 Weight 2 3 working standard 3 35 Z ZERO OPEN o set 3 30 ZERO SHORT o set 3 32 Index 10 ...

Page 149: ... 1 800 452 4844 fax 1 888 900 8921 Canada Test and Measurement Call Center tel 1 877 894 4414 fax 1 888 900 8921 China tel 800 810 0189 fax 800 820 2816 Europe tel 31 20 547 2323 fax 31 20 547 2390 Japan Call Center tel 0120 421 345 tel 81 426 56 7832 fax 81 426 56 7840 Korea tel 82 2 2004 5004 fax 82 2 2004 5115 Latin America tel 305 269 7500 fax 305 269 7599 Taiwan tel 0800 047 866 fax 0800 286 ...

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