GB 02914 - Edition 05 - 03/2013
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ATP 2300 M - Turbopump
Welcome
A
PPLICATIONS
:
Semiconductor applications
Plasma etching, Ion implantation, Sputtering,
Plasma deposition.
Others Applications
Electron microscopes, Surface analysis,
Research and development, High energy physics,
Space simulation, Accelerators, Coating.
A
DVANTAGES
:
High pumping speed for light gases - High throughput - Quiet
and clean vacuum - Corrosion proof - High MTBF - Minimum size,
volume and weight - Smart and compact electronic controller -
Reliability - Maintenance free - Battery free - Easy integration.
Dear Customer,
You have just purchased
an adixen Magnetically
turbopump.
We would like to thank you
and are proud to count you
as one of our customers.
This product has benefited
from adixen Vacuum
Products many years of
experience in the field of
Turbopump design.
In order to ensure the best
possible performance of
the equipment and your
complete satisfaction in
using it, we advise you to
read this manual carefully
before any intervention
on your pump and to pay
particular attention to the
equipment installation and
start-up section.
This operating instruction manual includes only the instructions to connect
the pump to the equipment. Refer to the controller operating instructions
to power and use the pump (chapter B, C and D).
This pumping component is designed to gererate vacuum by pumping on
gases, but no liquids neither solids. It is dedicated for running in industrial
environments.
The integrator of this component must provide all operator safety measures
mainly against hot surfaces.
This pumping component must not operate in an area with risk of
explosion. Consult us to study a solution.
adixen Vacuum Products - Operating Instructions - ATP 2300 M
