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-ASC 2000 User's Guide

Circuit Breaker

UPS Power Cord (Plug
into AC Line Conditioner)

Uninterruptable Power Supply - Rear View

Plug computer
and monitor
into AC
receptacles.

Computer
Interface Port

Sensitivity
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Site Wire
Fault Light

Sensitivity LED

P-0025

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Summary of Contents for ASC 2000

Page 1: ...this document is subject to change without notice No part of this document may be reproduced or transmitted in any form or by any means electronic or mechanical for any purpose without the express written permission of ADE Corporation The ADE logo is a registered trademark of ADE Corporation in the United States and other countries 02 10 00 ...

Page 2: ...2 ASC 2000 User s Guide ...

Page 3: ...serial number 13 Back up Tapes 14 Handling Compact Disks 15 Using The Keyboard 16 Using The Trackball 17 Uninterruptable Power Supply 18 Software Overview 21 The ade usr SYS0 Directory 23 Booting The System 24 Autostarting The STANDARD USER INTERFACE 27 Using The Desktop 28 What Is An Icon 29 What Is A Window 29 How To Start An Application 29 MinimizingAWindow 30 The Window Title Bar 30 The Window...

Page 4: ...ADEApplications 35 The ADE SYSTEM CONTROLLER CSA 37 The System Status Log 38 Using the View Menu 39 Enabling DECnet 40 EnablingHCA 41 Soft and Hard Resets 42 The STANDARD USER INTERFACE 43 Manual Starting The STANDARD USER INTERFACE 44 Minimizing The STANDARD USER INTERFACE 44 Stopping The STANDARD USER INTERFACE 44 The SYSTEM SHUTDOWN Application 45 System Administrator Tasks 46 Logging In As The...

Page 5: ... up tapes see procedure 600210 04 which includes separate procedures for the different controller versions different method for restoring disk image back up tapes see procedure 600210 05 which includes separate procedures for the different controller versions corrected typographical errors and used better examples in procedure 600210 07 added tar copying method to procedure 600210 09 02 10 00 Revi...

Page 6: ...C 2000 you should never duplicate or exchange serial numbers and or activation keys 3 WARNING The UNIX operating system requires that a system shutdown routine be performed before the computer can safely be powered off If power is lost before a system shutdown is performed the UNIX filesystem may become corrupted causing the operating system to have to be reloaded 4 NOTE Note that ADE equipment it...

Page 7: ...ANDARD USER INTERFACE Universal System Controller to characterize wafers is explained in the ADE Operation Manual for your system provided under separate cover Use Of Third Party Hardware Software ADE Corporation does not endorse or recommend the use of third party hardware or software with the Advanced System Controller 2000 Use of third party hardware or software will invalidate your warranty Un...

Page 8: ...ored inside the controller chassis and is recorded along with the activation key at ADE Corporation before your system ships The combination of serial number and activation key is unique to your system and is periodically checked by the operating system during operation For that reason if you own more than one ADE system with the ASC 2000 you should never exchange or duplicate serial numbers and o...

Page 9: ... the operating system rtVAX ADDRESSES These are the Internet and Hardware addresses of the rtVAX controller The Hardware address appears in the System Options screen in the ADE SYSTEM CONTROLLER CSA The Internet address appears under the View menu DECNET KEY If you have purchased DECNET networking software for your system you will be provided with a code which must be entered in order to use DECNE...

Page 10: ...andard hardware includes one hard disk drive 3 5 inch diskette drive CD ROM drive tape drive keyboard trackball rtVAX300 board Ethernet capability parallel serial ports and optional DECNET and HCA capability An Uninterruptable Power Supply UPS is also provided with your system to protect against a power failure The UPS prevents the operating system from being harmed by keeping the computer powered...

Page 11: ...vated CD ROM Drive Tape Drive Power ON OFF P 0104 Power LED Keyboard Lock ASC 2000 Front View TW xx serial number ASC 2000 Front View SC xx serial number 3 5 inch Floppy Diskette Drive Power ON OFF Tape Drive CD ROM Drive Hard Disk Drive LED Power LED Reset Switch Deactivated Keyboard Lock P 0150 ...

Page 12: ...rts Keyboard Trackball Port use Y adapter Cognex Reader UPS DECNET Port 8 Port Serial I O UNIX Networking Port Parallel Printer Port SCSI Port Secondary GPIB Port VAX Diagnostic Port Power Cord COM 1 Digital I O T 0386 Line Voltage Selection should always be 115 VAC ASC 2000 Rear View TW xx serial number ...

Page 13: ...X Networking Port Parallel Printer Port SCSI Port VAX Diagnostic Port COM 1 UPS DSP Board optional for E Plus E Squared GPIB Port SMIF Port Robot AutoLoader Port ASCII Port Cognex Reader Port Trackball Keyboard not used DECNet Port not used T 0386E DXF E Squared Data Port optional ASC 2000 Rear View SC xx serial number ...

Page 14: ...e back up and two tapes BOOT and ROOT for the SCO UNIX operating system These tapes allow you to restore the system software in case your hard disk drive fails ADE software is also be contained separately on a CD ROM which will be shipped with your system You should periodically create your own back up tapes according to procedure 600210 04 Creating A Disk Image Back Up in the appendices section o...

Page 15: ...elps protect the data from scratches on the CD surface 3 Do not leave the CD in direct sunlight or in a hot humid environment These conditions can warp and damage the CD 4 Use only a felt tip permanent pen when labeling Write only on the printed area or on the clear inner diameter of the CD Never use a ballpoint or hard point writing utensils these may damage the CD 5 Clean the CD with a soft lint...

Page 16: ...d to select menu items Two important notes about the keyboard 1 Do not enable NUMLOCK when you are in the desktop or STANDARD USER INTERFACE When NUMLOCK is on some keyboard function keys will not respond 2 Do not use the keyboard PRINT SCREEN key while in the STANDARD USER INTERFACE To print a display screen from the STANDARD USER INTERFACE press F2 Pause Lot F7 End Lot F8 Stop Step F9 Resume Lot...

Page 17: ... precisely position the pointer on the screen using the trackball You should also practice clicking and double clicking the leftmost button A single click of Button 1 with the trackball pointer on an icon or window will make that item active That is it will be the currently selected icon or window in the desktop It will appear highlighted A double click of Button 1 performed quickly will open star...

Page 18: ...he operating system to have to be reloaded The UPS prevents the operating system from being harmed by keeping the computer powered on after a power failure or brown out long enough for a proper shutdown to occur Power is supplied to the computer and monitor from the batteries stored within the UPS This allows plenty of time for an orderly shutdown of the UNIX operating system which automatically i...

Page 19: ...The UPS automatically performs a self test at power up and every two weeks OFF 0 Button Press this front panel button located below the ON 1 Test Button to deactivate the UPS Front Panel Indicators Periodically check the front panel lights for Overload Low Battery and Replace Battery conditions Audible alarms will also beep if any of these conditions occur The On line indicator will light during n...

Page 20: ...cuit Breaker UPS Power Cord Plug into AC Line Conditioner Uninterruptable Power Supply Rear View Plug computer and monitor into AC receptacles Computer Interface Port Sensitivity Switch Site Wire Fault Light Sensitivity LED P 0025 ...

Page 21: ...the rtVAX 300 board located inside the ASC 2000 chassis start and stop ADE s wafer characterization software and configure various aspects of the entire system It also provides a status log of messages that describe what the system is currently doing The ADE SYSTEM CONTROLLER CSA is the system software s coordinating mechanism and for that reason must remain open when the STANDARD USER INTERFACE i...

Page 22: ...will blank as the operating system shuts down Having this application available in the desktop prevents you from having to type the shutdown y g shutdown y g shutdown y g shutdown y g shutdown y g0 0 0 0 0 command at the UNIX prompt Uninterruptable Power Supply Desktop Printer Home ade Accessories Controls Trash ADE Tools Folder System Shutdown ADE Tools VAXeln Operating System Advanced System Con...

Page 23: ...access Note that names of files and directories are case sensitive for example sys0 0 0 0 0 is not the same as SYS0 The system software uses the following directories during operation They are located in the SYS0 directory under your account To explore the SYS0 directory double click the SYS0 icon Note that all directories in the SYS0 account are capitalized because the VAXeln filesystem requires ...

Page 24: ...isplays the login screen Each step is explained below 1 Loading the Operating System from the Hard Disk Drive When you power up the ASC 2000 the operating system boots and the controller displays the following Boot The system is preset at the factory to boot automatically with no keystrokes necessary Do not hit a key at this time Booting to continue automatically in a few seconds WARNING If a key ...

Page 25: ...nd is issued you will see the following messages as each phase of filechecking is completed Phase 1 Check Blocks and Sizes Phase 2 Pathnames Phase 3 Connectivity Phase 4 Reference Counts Phase 5 Check Free List Phase 6 Salvage Free List 3 Recognizing the system hardware At boot time a table of hardware information is always displayed The table represents your hardware configuration as recognized b...

Page 26: ...trackball pointer on the Password box or simply press ENTER and type your password After you have entered your password press ENTER or place the trackball pointer on the Login button and click once The screen will then display a window with your SCO license agreement Click the OK button Both the login name and password are set to ade at the factory before shipment Login names and passwords may be ...

Page 27: ...n screen After both are entered the system is configured to automatically start the STANDARD USER INTERFACE display The ADE SYSTEM CONTROLLER CSA an ADE interface program which includes the ADE System Status Log appears first Its status log lets you know about system activity until the STANDARD USER INTERFACE s main menu appears When the STANDARD USER INTERFACE starts the top level SYSTEM MODE Men...

Page 28: ...urrounded by icons with a menu bar at the top In the desktop you can use the trackball rather than the keyboard to perform most operations although sophisticated users can also use keystrokes to manipulate icons and windows To get to the desktop workspace you must minimize the STANDARD USER INTERFACE by pressing the ALT F9 keys simultaneously Desktop Note that your desktop may differ from the exam...

Page 29: ...pts and typed commands SCO UNIX uses a simple point and click operating method similar to Windows and Macintosh computers This makes SCO UNIX much easier to use than a standard UNIX system To learn more about using SCO UNIX s desktop read the brief tutorial below How To Start An Application To start an application first select its icon with the pointer Move the pointer to the application s icon an...

Page 30: ...input although the application may still be running If the menu bar is gold the window is active and can receive input from the operator Within each menu various items are displayed For example in the File menu the items Open and Close are shown To select an item place the trackball pointer on the item and click the leftmost trackball button An item that isn t available for use because it is an il...

Page 31: ...er on the title bar The icon or window will move as you roll the trackball Adjust the trackball until the icon or window is in the desired location on the desktop then release the trackball button The window or icon will settle in its new location An experienced operator can use dragging and dropping to shortcut common operations such as printing saving files to diskette and moving files from one ...

Page 32: ...r using the trackball pointer You may be prompted for confirmation before the application closes OR 2 Access the lefthand window menu button either by pressing the ALT and Spacebar keys simultaneously or by moving the trackball pointer Select Close by moving the trackball pointer to it and clicking once You may be prompted for confirmation before the application closes Windows Menu Button OR 3 Pre...

Page 33: ...ne directory to another drag and drop the file s icon Open the directory that contains the file and click the file s icon with the trackball pointer Drag the icon to the directory that is to receive the file and release the trackball button The file will be moved to the new directory WARNING Be careful not to move any ADE system files from the SYSEXE directory Deleting A File Using The Trash To de...

Page 34: ...OK box and click once The login screen will then appear Logging Back Into The Desktop To return to the desktop after you have exited log back in at the login box The system requires a login to gain access to the desktop Place the trackball pointer on the Login box and type the account name assigned by your system administrator Place the trackball pointer on the Password box or simply press ENTER a...

Page 35: ...he STANDARD USER INTERFACE will launch when the ADE SYSTEM CONTROLLER CSA is activated The ADE SYSTEM CONTROLLER CSA lets you reset the rtVAX 300 board located inside the controller chassis start and stop ADE s wafer characterization software and configure various aspects of the entire system It also provides a status log of messages which describe what the system is currently doing The ADE SYSTEM...

Page 36: ...inal receiving input from the keyboard and passing it to the Universal System Controller software through a communications channel The bootable portion of the Universal System Controller is contained on PROMs located on the rtVAX 300 board inside the chassis of the computer When keyboard input is received it is processed by the Universal System Controller which executes under the VAXeln realtime o...

Page 37: ...he shutdown y g shutdown y g shutdown y g shutdown y g shutdown y g0 command The ADE SYSTEM CONTROLLER CSA The ADE SYSTEM CONTROLLER CSA provides control over the rtVAX 300 board starts and stops the STANDARD USER INTERFACE and configures various aspects of the entire system It also provides a status log of messages which describe what the system is currently doing If you need online assistance in...

Page 38: ...hey may be useful in troubleshooting Refer to procedure 600210 09 Copying ADE SYSTEM CONTROLLER CSA Logs onto Floppy Disks Note that your system may display a few more messages than presented here ignore any other messages unless you are experiencing problems ADE System Status Log File View Commands Options Help ADE System Controller CSA Printer Type is laser CSA DECnet disabled CSA AUTOSTARTING S...

Page 39: ...l in troubleshooting the ASC 2000 Refer to procedure 600210 09 Copying ADE SYSTEM CONTROLLER CSA Logs onto Floppy Disks in the appendices section of this manual Select Controller Status from the View menu and the system will display a window like the one below Host Internet Address displays the Internet address of your ASC 2000 unit The address is set at the factory but may be changed by customers...

Page 40: ...NTROLLER CSA menu bar Your facility s DECNET administrator should be able to provide these settings If DECNET is not enabled the items Name Area and Node will appear shadowed To disable DECNET simply erase the code as long as you have stored the hard copy of your DECNET code to be able to enable it again If you change any DECNET settings be sure to select Store Current Options from the Options Men...

Page 41: ...he ASC 2000 If you have purchased HCA you will be provided with a code that you must enter in order to use the software To enter the code select ADEHCA from the Options menu Enter the code and click the OK button If you change any HCA settings be sure to select Store Current Options from the Options menu in the ADE SYSTEM CONTROLLER CSA menu bar before exiting ADEHCA HCA key OK Cancel Help T 0252c...

Page 42: ... six minutes to perform WARNING Activating a hard or soft reset will cause the STANDARD USER INTERFACE to close Wafer data not saved to disk and station calibration will be lost NOTE If you encounter a non recoverable GPIB error while in the STANDARD USER INTERFACE which causes your system to freeze or keyboard to lock up first close the STANDARD USER INTERFACE by pressing ALT F4 In the ADE SYSTEM...

Page 43: ...e Mode SYSTEMUTILITIES Used to manipulate files on disks set the internal system clock set up and test your printer load new code and set network parameters SELF TEST MODE Used to test the system for measure ment repeatability GAGE MODE Used to set up test and calibrate the components of the system e g Flatness station AutoLoader Prealigner MANUALMODE Used to examine a single wafer either one stor...

Page 44: ...atively you can launch the STANDARD USER INTERFACE from the ADE Tools folder on the desktop Double click the folder s icon Double click the CSA icon Minimizing The STANDARD USER INTERFACE Note that the STANDARD USER INTERFACE can run while minimized as an icon To minimize the STANDARD USER INTERFACE press ALT and F9 simultaneously The STANDARD USER INTERFACE will appear as an icon in the lower rig...

Page 45: ...owing 1 Double click the SYSTEM SHUTDOWN icon 2 Click the OK button on the SYSTEM SHUTDOWN window 3 Click the OK button to verify 4 The system will begin an orderly shutdown and the screen will eventually blank After a few minutes the screen will display a message indicating that it is safe to power off Do not power off until you see this message 5 Power off the computer monitor 6 Power off all AD...

Page 46: ... one high level individual should perform all System Administrator functions System Administrator tasks include the following 1 Using the Software Manager to install or remove software 2 Performing routine backups of the hard disk drive and determining hard disk usage 3 Setting system time and date 4 Creating user accounts and changing passwords 5 Deleting log file messages 6 Creating a print queu...

Page 47: ...n at a UNIX command line rather than the Login screen will stop the desktop from launching By default the account name is root and the password is 56789xyz These settings may be changed after the system has been installed As a precautionary measure the System Administrator should keep a private log of all system account passwords Note that UNIX is case sensitive For example ROOT would not be the s...

Page 48: ...e time in the dialog box Enter the hours and minutes according to military time for example 4 p m would be entered as 16 00 5 Select Set from the Time menu A dialog box will appear indicating that the time has been changed Click OK 6 Select Time Zone from the Time menu Enter the appropriate information in the dialog box and click the OK button 7 Select Exit from the Time menu to close the System T...

Page 49: ... menu 4 The screen will display a dialog box asking for the new user s account name and other information Fill in the data fields and click the OK button 5 Assign a password to the new user in the next dialog box If you want the computer to randomly assign a password select Computer Generated Password If the user is to belong to a group select the group 6 Click the OK button The new user account h...

Page 50: ...Select the user account you wish to change 4 Select Change Password from the Users menu The screen will display a dialog box Check whether you want to change the password or have the computer assign a new password by clicking the shaped box next to the option 5 If you are choosing the password enter the new password and confirm it in the appropriate fields Click the OK button 6 Close the windows o...

Page 51: ...es in the root account To delete unwanted messages 1 Open the System Administration folder by double clicking its icon using the trackball 2 Open the System folder 3 Open the Logs folder 4 Double click the Systems Log Manager icon 5 The Systems Log Manager will display a list of logs Highlight the log to be deleted and select Clear Log from the Log menu 6 Close the Systems Log Manager by selecting...

Page 52: ...rm this task To determine hard disk usage do the following 1 Double click the System Administration folder 2 Double click the Filesystems folder 3 Double click the FileSystem Manager icon 4 Select Disk Usage from the View menu The window will display how much of your hard disk is in use 5 Close the windows opened in this procedure by clicking the window menu button on each window s title bar Selec...

Page 53: ...n dow 4 Double click the Printer Manager icon 5 Select Add Local from the Printer menu 6 A dialog box will appear that will allow you to configure your printer Enter information in the following fields Name Description Model Device 7 Click the OK button in the dialog box Your printer should now appear as one of the printing options listed in the Printer Manager window 8 Close the Printer Manager b...

Page 54: ...ormed using menus and icons that are available to all users on the desktop Clearing The Print Queue If printing is enabled during wafer characterization multiple print jobs are spooled to the system default printer If you wish to cancel pending print jobs you can clear the print queue very easily To clear the print queue use the following steps 1 From the desktop double click the Printer icon 2 Hi...

Page 55: ...D USER INTERFACE may lock up or display a blank screen To select system printer type use the following steps 1 Click on the Printer icon on the desktop using the rightmost trackball button Hold the button down to produce a pop up menu 2 Select Print Setup with the leftmost button 3 Choose your printer from the list presented in the dialog box Click the OK button If your printer is not listed see C...

Page 56: ...he leftmost trackball button 4 A UNIX window will appear Follow the instructions on the screen 5 When finished close the windows opened in this procedure by clicking the menu button on each window s title bar and selecting Close from the pull down menus To fomat a DOS diskette 1 Double click the UNIX icon on the desktop 2 Insert the disk in the disk drive 3 At the UNIX prompt type dosformat dev fd...

Page 57: ... select System Utilities and press PAGE DOWN 3 From the System Utilities menu select Disk Utilities and press PAGE DOWN If a diskette is not already in the drive insert it now 4 From the Disk Utilities menu select Initialize Disk and press PAGE DOWN 5 Select Disk Drive Use the INSERT key to select the disk drive that will be used to initialize the disk 6 Select Init The Disk and press PAGE DOWN Th...

Page 58: ... Directories To Tape Refer to procedure 600210 10 Copying Files And Directories To Tape in the appendices section of this manual for instructions on copying files and directories to SCSI tapes and restoring them to the hard disk from the tapes ...

Page 59: ...e ASC 2000 is first powered on The computer s low level software is loaded first followed by the SCO UNIX operating system When the login screen appears the system has completed booting and is ready to operate Clicking A click occurs when you depress the leftmost trackball button Button 1 one time This is how icons and windows are selected in the desktop workspace Clicking the rightmost trackball ...

Page 60: ...un ADE wafer characterization systems Home directory A home directory icon labelled with your login account name appears in the upper left corner of the desktop workspace When it is opened it displays all of the directories and files which are contained in your account Icon An icon is a pictorial representation of a file or program stored on the computer s hard disk drive Login screen The login sc...

Page 61: ...DE s wafer characterization software known as the UNIVERSAL SYSTEM CONTROLLER USC Menu items may be selected using the keyboard Superuser The System Administrator is also referred to as the superuser because he has access to files and menus which operator accounts do not have access to System Administrator The System Administrator is a high level individual who is responsible for all system mainte...

Page 62: ... computer powered on after a power failure occurs It is configured to initiate an automatic system shutdown after a loss of power UNIVERSAL SYSTEM CONTROLLER USC The Universal System Controller is the name of the software which runs the ASC 2000 UNIX An industrial operating system that allows users to run multiple applications simultaneously The Santa Cruz Organization s version of the UNIX operat...

Page 63: ...e Bar can be found the Window Menu Bar The Menu Bar contains the File Edit and View Menus which allow various window commands and options to be selected Window Title Bar At the top frame of every window is located the Window Title Bar The title bar contains the same name which was previously shown on the icon ...

Page 64: ...64 ASC 2000 User s Guide NOTES ...

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