ZIROX XS22, Руководство пользователя

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Measuring system XS22-E2010 Contents
3
XS22_E2010
Table of contents
1 Introduction .................................................................................................................... 5
1.1 How to use this manual ........................................................................................... 5
1.2 Copyright ................................................................................................................. 5
1.3 Commonly used symbols ........................................................................................ 5
1.4 Safety instructions ................................................................................................... 6
1.5 Application of the measuring system ....................................................................... 6
2 Overview of the measuring system ................................................................................. 7
3 Technical data ................................................................................................................ 8
3.1 Probe XS22 ............................................................................................................. 8
3.2 Evaluation electronics E2010 .................................................................................. 9
4 Composition and operation of E2010.............................................................................10
4.1 Front, keys .............................................................................................................10
4.2 Rear, connections ..................................................................................................11
5 Installation and initiation ................................................................................................13
5.1 Installation ..............................................................................................................13
5.2 Reference air supply for ZIROX
®
probes ................................................................13
5.3 Probe mounting ......................................................................................................13
5.4 Waiting for operating state......................................................................................13
6 Parametrization .............................................................................................................14
6.1 Menu operation – an example ................................................................................14
6.2 Display ...................................................................................................................14
6.3 Adjustable parameters ...........................................................................................15
6.4 Zero calibration ......................................................................................................16
6.5 Span gas calibration ...............................................................................................16
6.6 Reset calibration ....................................................................................................16
6.7 Error messages during calibration ..........................................................................16
6.8 Menu navigation of calibration (diagram) ................................................................17
7 Status display/error messages ......................................................................................18
8 Potential fault causes and fault clearance .....................................................................19
9 Details for the use of ZrO
2
-probes in vacuum technology ..............................................21
9.1 Theoretical relations ...............................................................................................21
9.2 Instructions for calibration ......................................................................................22
10 Warranty ....................................................................................................................25
11 Declaration of conformity ...........................................................................................27