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10. Index

Abbreviations 40
Adjusting the BSD4 position 17
Adjustment knob for X-axis 10
Adjustment knob for Y-axis 10
Adjustment knob for Z-axis 10
Automatically adjusting the image 28
Automatically setting the gain range 26

BSD COMPO 14, 24
BSD modes 13
BSD Set TOPO 14
BSD TOPO 14, 24
BSD4 4
BSD4 detector diagram 12

Customer service 16

Definition of terms 4
De-installation and disposal 39
Description 10
Detector head 11
Diode status 14

Electronic box 10

Fine 15
Finishing the work with the BSD4 detector 34

Gain range 27

Hazards not related to personal injury 7
Hazards related to personal injury 7

Installation 16
Intended use 5

Lubricating the rod 38
M
Maintenance and repair 37

Obtaining an image 23

Operation 17
Optimising the image 26

Prevention of accidents 6
Principle of operation 12

Quad mode33

Repair 39
Repeatability 15
Retracting the BSD4 34
Rod 10

Safety devices 7
Safety instructions 3
Safety summary 5
Selecting a BSD mode 23
SmartSEM® 4
Stage position 32
STOP button 8
System requirements 15

Technical data 15
Travel 15
Travel speed 15
Typographical conventions 4

ZEISS representative 4

Содержание BSD4

Страница 1: ...BSD4 Detector Pneumatically driven detector for field emission scanning electron microscopes Instruction Manual...

Страница 2: ...or by any information or retrieval system Violations will be prosecuted The use of general descriptive names registered names trademarks etc in this document does not imply even in the absence of a sp...

Страница 3: ...s 17 3 5 Customer service 18 4 Installation 18 5 Operation 19 5 1 Preparing the work with the BSD4 detector 19 5 2 Obtaining an image 24 5 2 1 Inserting the BSD4 detector 24 5 2 2 Selecting a BSD mode...

Страница 4: ...paQ MN 6 Maintenance and repair 38 6 1 Resetting touch alarm 38 6 2 Lubricating the rod 39 6 3 Troubleshooting 40 7 De installation and disposal 40 8 Abbreviations 41 9 Directives and standards 41 10...

Страница 5: ...nt Reference to related docu ments For detailed information regarding the operating software refer to the Software Manual SmartSEM Safety instructions The safety instructions in this manual are classi...

Страница 6: ...board Click on the High voltage icon Select Aperture size from the drop down list Icons buttons menus and panels are printed in bold Select Aperture size 30 m Set FIB Fil V Target to zero Values to be...

Страница 7: ...MERLIN MERLIN Compact MERLIN VP Compact Crossbeam 340 540 Crossbeam 360 560 The BSD4 detector is used to detect backscattered electrons The BSD4 detector is suitable to produce high quality material...

Страница 8: ...e to improper operation of the FESEM Read the user documentation carefully Do not operate the FESEM until you have completely read and understood this instruction manual and the entire user documentat...

Страница 9: ...ar suitable gloves In case of contact with the eyes rinse immediately with plenty of water and seek medical advice After contact with the skin wash immediately with plenty of water and soap CAUTION Is...

Страница 10: ...nt CAUTION Risk of damaging the BSD4 detector The Z axis of the stage moves with delay Before recalling a stage position ensure that you haven t changed the Z position of the stage in between CAUTION...

Страница 11: ..._paQ MN NN QQ OK p 2 3 3 STOP button In order to avoid property damage the BSD4 detector can be stopped at any position during movement Therefore a BSD Stop button is integrated in the BSD Control pa...

Страница 12: ...f j _paQ MN PK a 3 Description 3 1 Overview Fig 1 1 Components of the BSD4 detector 1 Adjustment knob for X axis 4 Rod 2 Adjustment knob for Z axis 5 Electronic box 3 Adjustment knob for Y axis 3 5 1...

Страница 13: ...f j _paQ MN NP QQ PK a 3 1 1 Detector head Fig 1 2 Views of the detector head 1 Detector head 2 Bottom view on diodes 5 segments 2 1...

Страница 14: ...d hits the specimen 1 BSEs 2 are released from the specimen BSEs are detected by the diodes five segments 3 and generate an electrical signal The operation of the BSD4 detector is controlled via the B...

Страница 15: ...er in the image Thus backscattered electrons can be used to detect contrast between areas with different chemical compositions Fig 1 4 Material contrast Surface topography BSD TOPO Highlights changes...

Страница 16: ...TOPO selects surface topography the four segments arranged in a circle are used two in normal mode and two in inverted mode BSD Set TOPO saves the current segment configuration as a new TOPO mode At...

Страница 17: ...t no MERLIN MERLIN Compact MERLIN VP Compact Crossbeam 340 540 BSD4 detector 349506 9016 000 Crossbeam 360 560 BSD4 detector long version 349506 9016 010 Feature Specification Travel 4inch chamber 200...

Страница 18: ...Sold Carl Zeiss AG 73447 Oberkochen Germany phone 49 0 7364 202951 e mail wolfgang sold zeiss com IMPORTANT To maintain best possible performance of the FESEM it is essential to perform preventive ma...

Страница 19: ...ned macros which impede the safe stage movement 5 1 Preparing the work with the BSD4 detector Before working with the BSD4 detector the detector has to be adjusted 1 Go to the Detectors tab in the SEM...

Страница 20: ...not put your hand in the travel while the BSD4 detector is being inserted 5 Click on BSD in The stage lowers to leave enough free space for the BSD4 detector The BSD4 detector moves in IMPORTANT Imag...

Страница 21: ...f j _paQ MN ON QQ RK l 6 Check that the BSD4 detector is not visible in the InLens SE2 image If the BSD4 detector is visible in the Inlens SE2 im age...

Страница 22: ...etector with the adjustment knobs so that the BSD4 detector is longer visible in the In lens SE2 image 7 Go to the Detectors tab in the SEM Control panel 8 Select BSD4 A from the drop down menu SmartS...

Страница 23: ...ues shown at the bottom of the screen with inserted BSD4 detector and retracted BSD4 detector If the stigmator values vary widely between retracted and inserted state or exceed 30 a Readjust the posit...

Страница 24: ...or 1 Select Detection BSD Control 2 The BSD Control panel opens CAUTION Risk of bruising The BSD4 detector is driven pneumatically Do not put your hand in the travel while the BSD4 detector is being i...

Страница 25: ...ors tab in the SEM Control panel 5 Select BSD4 A from the drop down menu 6 The software switches to the BSD4 detector image 5 2 2 Selecting a BSD mode Preconditions The BSD4 detector is inserted Proce...

Страница 26: ...le combinations are shown in the images Depending on the illumination the image appears differently The illumination can be controlled with the polarity of the diodes Because the BSD4 detector can be...

Страница 27: ...to Range option ticked the gain range is adjusted automatically for every BSD mode depending on brightness and contrast Four gain ranges are available in the menu low medium high very high Procedure 1...

Страница 28: ...NT Due to the manual selection of the gain ranges more user defined adjustments are possible 1 Select BSD Gain Low from the drop down menu 2 Adjust brightness and contrast 3 If the result is not satis...

Страница 29: ...possible to save segment settings as a new TOPO mode IMPORTANT Saving the setting is not needed in COMPO mode because all segments are automatically set to Procedure 1 Make the desired segment adjust...

Страница 30: ...PM QQ f j _paQ MN RK l 3 To recall the adjustments a Click on BSD TOPO The segment settings from step 2 are loaded...

Страница 31: ...ed at any position Therefore a STOP button is integrated in the BSD Control panel If you notice that the BSD4 detector has to be stopped because it is going to hit components with in the specimen cham...

Страница 32: ...e to store a list of customised stage positions together with magnification and working distance Thus you can recall these positions easily Requires the licence STAGECO 5 4 1 Saving and editing stage...

Страница 33: ...el opens a Set the desired parameters b Click on OK 5 To delete a stage position mark the position and click on Del 5 4 2 Recalling stage coordinates 1 To move the stage to a stored position a Select...

Страница 34: ...g the anchor to the second quad rant select BSD4 B and select BSD mode for example S1 S3 for BSD4 B Drag the anchor to the third quadrant select BSD4 C and select BSD mode for example S2 S4 for BSD4 C...

Страница 35: ...maging the BSD4 detector when moving the specimen stage Retract the BSD4 detector when you have finished imaging Macros may influence the movement of the stage Do not start user defined macros which i...

Страница 36: ...CAUTION Risk of bruising The BSD4 detector is driven pneumatically Do not put your hand in the travel while the BSD4 detector is being inserted 3 In the BSD Control panel click on BSD out The stage is...

Страница 37: ...f j _paQ MN PT QQ RK l The position of the BSD4 detector is displayed as BSD Position Out...

Страница 38: ...e objective lens an audible warning and an on screen message appear 1 Click on OK to accept the warning A warning appears that the stage initialisation is required 2 Click on OK to accept the warning...

Страница 39: ...s Vapours may cause drowsiness and dizziness Keep away from sources of ignition No smoking In case of contact with the eyes rinse immediately with plenty of water and seek medical advice Avoid contact...

Страница 40: ...s injection system GIS is inserted Safe BSD4 is invalid The Bruker XFlash Quad is in Initialise the stage Retract the Charge Compensator Retract the STEM Retract the GIS Call your local ZEISS represen...

Страница 41: ...10 1 2010 Safety Requirements for Electrical Equipment for Measurement Control and Laboratory Use Standard EN ISO 12100 2010 Safety of machinery General principles for design Risk as sessment and risk...

Страница 42: ...QO QQ f j _paQ MN VK a...

Страница 43: ...c box 10 F Fine 15 Finishing the work with the BSD4 detector 34 G Gain range 27 H Hazards not related to personal injury 7 Hazards related to personal injury 7 I Installation 16 Intended use 5 L Lubri...

Страница 44: ...hire CB1 3JS UK microscopy zeiss com Carl Zeiss Microscopy LLC One Zeiss Drive Thornwood NY 10594 USA microscopy zeiss com Plus a worldwide network of distributors www zeiss com microscopy Due to a po...

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