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a
Adjust the position of the BSD4 detector
with the adjustment knobs, so that the
BSD4 detector is longer visible in the In-
lens/SE2 image.
7
Go to the
Detectors
tab in the
SEM
Control
panel.
8
Select
BSD4 A
from the drop-down menu.
SmartSEM
®
switches to the BSD4 detector.
9
Check the image quality.
