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The stage lowers to leave enough free space for
the BSD4 detector. The BSD4 detector moves in.
4
Go to the
Detectors
tab in the
SEM Control
panel.
5
Select
BSD4 A
from the drop-down menu.
6
The software switches to the BSD4 detector
image.
5.2.2. Selecting a BSD mode
Preconditions:
•
The BSD4 detector is inserted
Procedure:
1
Select an operation mode with the buttons.
a
BSD: COMPO
(
1
)
selects composition imaging.
b
BSD:TOPO
(
2
)
selects surface topography
1
2
