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SAFETY SUMMARY

1

87-900-939-01 (D)

INTRODUCTION

Operators  and  service  personnel  must  be  aware  of  all
hazards  associated  with  this  equipment.  They  must
know  how  to  recognize  hazardous  and  potentially
hazardous  conditions,  and  know  how  to  avoid  them.
The  consequences  of  unskilled,  improper,  or  careless
operation of the equipment can be serious.

This product must only be operated and maintained by
trained  personnel.  Every  operator  or  service  person
must 

read 

and 

thoroughly 

understand

operation/maintenance  manuals  and  any  additional
information provided by Varian.

All warnings and cautions should be read carefully and
strictly observed. Address any safety, operation, and/or
maintenance questions to your nearest Varian office.

The  following  format  is  used  in  this  manual  to  call
attention to hazards:

 

!

Warning  are  used  when  failure  to  observe  instructions
or precautions could result in injury or death.

 

 

  

CAUTION!

Cautions are used  when  failure  to  observe  instructions
could  result  in  damage  to  equipment,  whether  Varian
supplied or other associated equipment.

NOTE

Infomation  to  aid  the  operator  in  obtaining  the  best
performance from the equipment.

 

WARNING!

Содержание Turbo-V 300 75 Vdc

Страница 1: ...87 900 939 01 D APRIL 2002 INSTRUCTION MANUAL Turbo V 300 75 Vdc Box Controller Model SQ 189 vacuum technologies...

Страница 2: ...Turbo V 300 75 Vdc Box Controller...

Страница 3: ......

Страница 4: ......

Страница 5: ...ump Connector 4 I O Specifications 4 9 pin D Type Connector Pin Assignement 4 Serial Communication Port 5 RS 232 Communication Descriptions 5 Transmission Channel Characteristics 5 Message Structure 5...

Страница 6: ...stand operation maintenance manuals and any additional information provided by Varian All warnings and cautions should be read carefully and strictly observed Address any safety operation and or maint...

Страница 7: ...and is composed of a PCB which includes all the circuitry necessary for its operation The microcomputer generates the variable output voltage according to the software and the gas load condition of th...

Страница 8: ...TECHNICAL INFORMATION 3 87 900 939 01 D CONTROLLER OUTLINE The outline dimension for the controller are shown in the following figure Controller outline...

Страница 9: ...ins A F Pump temperature sensor Pin E Ground I O Specifications START STOP START command STOP command Low 0 8 Vdc High 4 to 15 Vdc Analog output Output impedence Minimum load 0 to 10 Vdc proportional...

Страница 10: ...ommunication RS 232 serial port connections Transmission Channel Characteristics levels RS 232 RS 422 baud rate 9600 4800 programmable by a jumper on the board character length 8 bits parity none stop...

Страница 11: ...35 STX ADDR ACK ETX CRC Command SOFT START ON Source PC Destination Inverter 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Inverter Destination PC 02 80 06 03 38 35 STX ADDR ACK E...

Страница 12: ...4 brake 5 normal 6 failure 206 N X ERROR CODE Too high load No connection Short circuit Pump overtemp SoftStart Not Ended Controller overtemp RunUpTime Not Reached Power fail 211 N X PUMP SENSOR TEMPE...

Страница 13: ...9 pin D type connector To deactivate the Low Speed status it is necessary to disconnect pin 9 from pin 15 ground of the same connector The low speed frequency is equal to 622 Hz MAINTENANCE Replacemen...

Страница 14: ...TECHNICAL INFORMATION 9 87 900 939 01 D PCB JUMPERS...

Страница 15: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 16: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 17: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...

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