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Sales and Service Offices

France and Benelux
Varian s.a.

7 Avenue des Tropiques
Z.A. de Courtaboeuf - B.P. 12

Les Ulis cedex (Orsay) 91941
France
Tel:  (33) 1 69 86 38 84

Fax:  (33) 1 69 86 29 88
From Benelux Tel: (31) 118 67 15 70
From Benelux Fax: (31) 118 67 15 69

Canada
Central coordination through:

Varian Vacuum Technologies

121 Hartwell Avenue
Lexington, MA 02421

USA
Tel:  (781) 861 7200
Fax:  (781) 860 5437

Toll Free # 1 (800) 882 7426

China
Varian Technologies - Beijing

Rm 1648 Central Tower South Wing

Beijing Junefield Plaza
No. 10 XuanWuMenWai Street
Beijing 100052

P.R. China
Tel: (86) 10 63108550
Fax: (86) 10 63100141

Toll Free: 800 820 6556

Germany and Austria
Varian Deutschland GmbH

Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt

Germany
Tel:  (49) 6151 703 353
Fax:  (49) 6151 703 302

India
Varian India PVT LTD

101-108, 1st Floor
1010 Competent House

7, Nangal Raya Business Centre
New Delhi 110 046
India

Tel: (91) 11 28521171
Fax: (91) 11 28521173

Italy
Varian Inc.
Vacuum Technologies

Via F.lli Varian 54

10040 Leini, (Torino)
Italy

Tel:  (39) 011 997 9 111
Fax:  (39) 011 997 9 350

03/06

Japan
Varian Vacuum Technologies

Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura

Minato-ku, Tokyo 108
Japan
Tel:  (81) 3 5232 1253

Fax:  (81) 3 5232 1263
Toll Free: 0120 655 040

Korea
Varian Technologies Korea, Ltd

Shinsa 2nd Bldg. 2F
966-5 Daechi-dong
Kangnam-gu, Seoul

Korea 135-280
Tel:  (82) 2 3452 2452
Fax:  (82) 2 3452 2451

Toll Free: 080 222 2452

Mexico
Varian, S. de R.L. de C.V.

Concepcion Beistegui No 109
Col Del Valle

C.P. 03100
Mexico, D.F.
Tel:  (52) 5 523 9465

Fax:  (52) 5 523 9472

Taiwan
Varian Technologies Asia Ltd.

14F-6, No.77, Hsin Tai Wu Rd., Sec. 1

Hsi chih, Taipei Hsien
Taiwan, R.O.C.
Tel:  (886) 2 2698 9555

Fax: (886) 2 2698 9678
Toll Free: 0800 051342

UK and Ireland
Varian Ltd.

6 Mead Road

Oxford Industrial Park - Yarnton
Oxford OX5 1QU - England
Tel: (44) 1865 291570

Fax: (44) 1865 291571

United States
Varian Vacuum Technologies

121 Hartwell Avenue
Lexington, MA 02421
USA

Tel:  (781) 861 7200
Fax:  (781) 860 5437

Other Countries
Varian Inc.
Vacuum Technologies

Via F.lli Varian 54
10040 Leini, (Torino)
Italy

Tel:  (39) 011 997 9 111
Fax:  (39) 011 997 9 350

Customer Support & Service:

North America

Toll-Free: 1 800 882 7426
[email protected]

Europe

Tel: 00 800 234 234 00
[email protected]

China

Toll-Free: 800 820 8266
[email protected]

Japan

Toll-Free: 0120 655 040
[email protected]

Korea

Toll-Free: 080 222 2452
[email protected]

Taiwan

Toll-Free: 0 800 051 342
[email protected]

Worldwide Web Site, Catalog
and Order On-line:

www.varianinc.com

Representative in most countries

Содержание MiniVac 929-0190

Страница 1: ...9 01 E APRIL 2006 I MANUALE DI ISTRUZIONI D BEDIENUNGSHANDBUCH F NOTICE DE MODE D EMPLOI GB INSTRUCTION MANUAL MiniVac Controller Model 929 0190 Model 929 0290 Model 929 0191 Model 929 0291 vacuum tec...

Страница 2: ...MiniVac Controller...

Страница 3: ......

Страница 4: ......

Страница 5: ...TIONS 15 CONTROLLER OUTLINE 16 INSTALLATION 17 Line Voltage Change Over 17 Output Polarity Selection 17 Input Output Interconnections 18 Pump Connection 18 OPERATION 19 Pressure Determination 19 Power...

Страница 6: ...li ATTENZIONE I messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura NOTA Le note contengono informazioni importanti estrapolat...

Страница 7: ...95 non condensante Per il collegamento del controller con la relativa pompa utilizzare il cavo specifico del controller stesso Per gli altri collegamenti e l installazione degli accessori opzionali ve...

Страница 8: ...ura fornito con l unit ha i pin 3 e 7 cortocircuitati Remote ON OFF Per poter accendere l HV necessario montare questo connettore se non connesso un contatto di Remote Interlock NOTA L unit settata in...

Страница 9: ...nnen ACHTUNG Die Die Warnhinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam da bei Nichteinhaltung Sch den an der Anlage entstehen k nnen ANMERKUNG Die Anmerkungen enthalten wic...

Страница 10: ...emperatur von 0 C bis 45 C Relative Luftfeuchtigkeit 0 95 nicht kondensierend F r den Anschlu des Controllers an die Pumpe mu das zum Controller geh rende Kabel benutzt werden Andere Anschl sse und di...

Страница 11: ...ie Stifte 3 und 7 kurzgeschlossen Remote ON OFF Falls kein Remote Interlock Kontakt angeschlossen ist kann die Hochspannung nur angeschaltet werden wenn dieser Stecker montiert ist ANMERKUNG Fabriksei...

Страница 12: ...ssent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage NOTE Les notes contiennent des renseignements importants isol s du texte EMMAGASIN...

Страница 13: ...ve 0 95 non condensante Pour la connexion du contr leur la pompe correspondante utiliser le c ble du contr leur pr vu cet effet Pour les autres connexions et pour l installation des accessoires en opt...

Страница 14: ...t a les pins 3 et 7 en court circuit Remote ON OFF Pour pouvoir allumer l HV il faut monter ce connecteur si un contact de Remote Interlock n est pas branch NOTE L unit est assign e l usine avec polar...

Страница 15: ...correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment NOTE The notes contain important informati...

Страница 16: ...specific cable supplied with the controller See the section Technical Information for detailed information about the above mentioned and the other connections and about the options installation USE T...

Страница 17: ...are short circuited Remote ON OFF This loopback plug must be fitted to power on the HV unless a Remote Interlock contact is connected NOTE The unit is factory set with a negative output polarity Refe...

Страница 18: ...be operated at any pressure up to 2 x 10 6 mbar Torr continuous operation Medium larger ion pumps must first be started with an appropriate control unit and pumped to a sufficiently low pressure where...

Страница 19: ...ut scale kV 4 Controller power ON OFF switch 5 Current voltage LED s bar graph indicator 6 H V ON LED 7 Recorder output connector 8 Pump current scale mA The MiniVac controller rear panel controls are...

Страница 20: ...nector 0 to 10 Vdc 10 V correspond to 1 mA resolution of 10 mV minimum corresponding to 1 A Available at pins 2 and 6 of rear panel Accessory connector Voltage Recorder Output Rec Out 0 to 5 V corresp...

Страница 21: ...TECHNICAL INFORMATION 16 87 900 049 01 E Voltage Vs Current Diagram CONTROLLER OUTLINE The outline dimensions of the MiniVac controller are shown in the following figure MiniVac Outline Dimensions...

Страница 22: ...el check back door for voltage selector set Using a small screwdriver pull out the voltage selector and fuses Select the operating voltage then firmly insert the voltage selector and fuses in place Ch...

Страница 23: ...pin 2 signal out pin 6 ground The output voltage 0 to 10 Vdc is proportional to the pump current 0 to 1 mA e g 10 Vdc correspond to 1 mA The resolution is 10 mV minimum corresponding to 1 A Pin 4 8 Vo...

Страница 24: ...ness it means that the pump current is between 2 and 3 mA and the high voltage output is between 5 and 4 kV If only the first LED of the bar graph is lit the current drawn by the pump is less than 1 m...

Страница 25: ...e lit Switch power off and disconnect the high voltage cable Switch power on and verify that only one LED is lit If this happens the high voltage cable or the pump are shorted If not replace the unit...

Страница 26: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 27: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 28: ...1263 Toll Free 0120 655 040 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico...

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