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Models 947, 948 and 960 Leak Detectors Operations and Service Manual

viii

B.5.2 Dry System ..............................................................................................................B-26

B.5.2.1 Removing the Dry System Forepump...........................................................B-26

B.5.2.1.1 Removing the Isolation Valve from the Forepump.........................B-26
B.5.2.1.2 Removing the Nitrogen Purge Connection from Pump .................B-27
B.5.2.1.3 Removing the Exhaust Fitting .......................................................B-27
B.5.2.1.4 Removing the Pump from the Cabinet ..........................................B-27

B.5.2.2 Replacing the Dry System Forepump...........................................................B-27

B.5.2.2.1 Examining and Cleaning Centering Rings, O-rings and Manifold..B-27
B.5.2.2.2 Re-installing the Dry System Forepump  .......................................B-28
B.5.2.2.3 Connecting the Nitrogen Purge Pump  ..........................................B-28
B.5.2.2.4 Replacing the Isolation Valve ........................................................B-28
B.5.2.2.5 Replacing the Exhaust Fitting  .......................................................B-29
B.5.2.2.6 Completing Mounting the Pump to the Cabinet Floor  ...................B-29

Appendix C. Communications Protocol .....................................................................................C-1

C.1 Protocol (RS-232)................................................................................................................C-1

Appendix D. Inputs and Outputs .................................................................................................D-1

D.1 Service Serial Interface (J1) ................................................................................................D-1
D.2 Optional Rear Panel Interface .............................................................................................D-1

D.2.1 Discrete I/O Parallel Interface (J120)  ........................................................................D-1
D.2.2 BCD Discrete Output Parallel Interface (J121) ..........................................................D-3
D.2.3 Interface (J122) for Optional Universal Remote Control  ...........................................D-4
D.2.4 Host Serial Port (J123)  ..............................................................................................D-4

Appendix E. 947/948 Specifications ............................................................................................E-1

Technische Daten für 947/948 ......................................................................................................... 4

Appendix F. Accessories ............................................................................................................. F-1

Appendix G. Leak Detection Theory .......................................................................................... G-1

G.5.1 Principles of Mass Spectrometry .............................................................................. G-4
G.5.2 Application as a Leak Detector ................................................................................ G-4
G.5.3 The Nature of Flow in a Vacuum .............................................................................. G-4
G.5.4 Facts About Leak Rates ........................................................................................... G-4

G.6 Leak Detection Methods .................................................................................................... G-5

G.6.1 Test Piece Evacuated  .............................................................................................. G-6
G.6.2 Test Piece Pressurized  ............................................................................................ G-6
G.6.3 Test Piece Already Sealed  ....................................................................................... G-7

G.7 Mass Spectrometer Leak Detector—Simplified Description .............................................. G-8

Index ................................................................................................................................................ I-1

Содержание 947

Страница 1: ...rs Part No 699909947 Revision H May 2003 Advanced Test Equipment Rentals www atecorp com 800 404 ATEC 2832 Established 1981 NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem ...

Страница 2: ...Torr are trademarks or registered trademarks of Varian Vacuum Technologies Apiezon is a registered trademark of M I Materials Ltd Alconox is a registered trademark of Alconox Inc Loctite and PST are registered trademarks of Loctite Corporation Scotch Brite is a trademark of 3M Skid Mate is a registered trademark of Hardigg ...

Страница 3: ...afety Information xviii Solvents xix Equipment General xx Power and Static xxi Vacuum Equipment and Cleanliness xxii O ring Care xxiii Spectrometer Tube xxiv Pumps xxiv Varian Services xxv Contacting Varian Vacuum Technologies xxv Informationen über Gefahren und Sicherheit xxvi Lösungsmittel xxvii Maschinen allgemein xxviii Strom und Statik xxix Vakuumgeräte und Sauberkeit xxxi Pflege von O Ringen...

Страница 4: ...stallation Services 1 13 1 8 Storage 1 14 1 9 Optional Rear Panel Interface Connections 1 14 Einführung in die Lecksucher Modell 947 948 und 960 15 1 10 Plattformelektronik 1 18 1 11 Auspacken der 947 948 960 1 18 1 11 6 Anleitungen zum Auspacken 1 19 1 11 7 Entfernen der 947 948 960 von der Palette 1 19 1 11 8 Entfernen der losen Verpackungsteile aus dem Innenraum der 947 948 960 1 20 1 12 Anzeig...

Страница 5: ...art Up 3 9 3 3 1 Startup Procedure 3 10 3 4 Calibration and Sensitivity Checks 3 11 3 4 1 Calibration and Sensitivity Checks 3 12 3 5 Operating Procedures 3 14 3 5 1 Auto Ranging 3 14 3 5 2 Manual Ranging 3 15 3 6 Standby 3 16 3 7 Shutdown 3 17 3 8 Using the Pendant for Parameter Setup 3 17 3 9 Optional Discrete I O 3 18 Betrieb 19 3 10 LED Anzeigen und Steuerelemente auf der Fronttafel 3 20 3 11 ...

Страница 6: ... 7 Spectrometer Tube Exchange 4 23 4 2 7 1 Removing and Replacing both the Spectrometer Tube Assembly and Preamplifier 4 23 4 2 7 2 Reinstalling the Spectrometer Tube 4 23 4 2 8 TC1 and TC2 Gauge Replacement and Calibration 4 26 4 2 8 1 Replacement of the TC1 Gauge in the Main Valve Block Assembly 4 26 4 2 8 2 Replacement of the TC2 Gauge in the Service Block Assembly 4 28 4 2 8 3 Thermocouple Gau...

Страница 7: ...Pump B 9 B 3 1 1 Removing the Turbo Pump B 10 B 3 1 2 Replacing the Turbo Pump B 12 B 3 1 2 1 Examining and Cleaning Centering Rings O rings and Manifold B 12 B 3 1 2 2 Connecting the Turbo Pump to the SVBA B 13 B 4 Replacing the Rough Pump B 15 B 4 1 Wet Systems B 15 B 4 1 1 Removing the Wet System Rough Pump B 16 B 4 1 1 1 Replacing the Wet System Rough Pump B 17 B 4 1 1 2 Examining and Cleaning...

Страница 8: ... 232 C 1 Appendix D Inputs and Outputs D 1 D 1 Service Serial Interface J1 D 1 D 2 Optional Rear Panel Interface D 1 D 2 1 Discrete I O Parallel Interface J120 D 1 D 2 2 BCD Discrete Output Parallel Interface J121 D 3 D 2 3 Interface J122 for Optional Universal Remote Control D 4 D 2 4 Host Serial Port J123 D 4 Appendix E 947 948 Specifications E 1 Technische Daten für 947 948 4 Appendix F Accesso...

Страница 9: ... 2 5 960 Flow Diagram 2 7 2 6 960 Flow Diagram 2 8 2 7 Rear Panel 2 12 2 8 Discrete Inputs Outputs Isolated 2 13 3 1 Front Panel LED Indicators and Controls 3 1 3 2 Start Up Controls 3 9 3 3 Exponent Display with Condition Code Indicated 3 11 3 4 Location of AUTO MAN MODE Switch 3 14 3 5 Service Pendant Keypad 3 18 3 6 LED Anzeigen und Steuerelemente auf der Fronttafel 3 20 3 7 Steuerelemente zur ...

Страница 10: ...f the 947 948 960 B 4 B 5 Ion Source Replacement B 6 B 6 Location of the Turbo Pump B 9 B 7 Turbo Power and Foreline to Turbo Connections B 10 B 8 The Turbo Power Connection B 11 B 9 Radiator Clamp holding Fan to Turbo B 11 B 10 Location of Forepump and Rough Pump Wet and Dry Configurations B 15 B 11 Rough Pump Manifold and Exhaust Connections B 16 B 12 Rough Pump Manifold and Exhaust Connections ...

Страница 11: ...ondition Codes 5 2 5 2 Troubleshooting 5 3 5 3 Fehlerzustandscodes 5 5 5 4 Fehlersuche 5 6 C 1 Internal Operating Parameters C 2 C 2 Non volatile Operating Parameters C 5 C 3 Spectrometer Operating Parameters C 6 C 4 Command Parameters for Leak Detection Actions C 7 D 1 Service Serial Interface J1 D 1 D 2 Optional Discrete I O Parallel Interface J120 D 1 D 3 Optional BCD Discrete Output Parallel I...

Страница 12: ...Models 947 948 and 960 Leak Detectors Operations and Service Manual This page intentionally left blank ...

Страница 13: ...flogenden Norm en oder Richtlinie n übereinstimmt auquel se réfère cette déclaration est conforme à la auz norme s ou au x document s normatif s al que se refiere esta declaración es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn en beantwoodt a cui se rifersce questa dichiarazione è conforme alla e sequente I norma o d...

Страница 14: ...y person including representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty...

Страница 15: ...icher Hinsicht Von einer jeglichen Person einschließlich Vertretern des Anbieters abgegebene Erklärungen die nicht mit den Bedingungen dieser Garantie übereinstimmen oder ihnen widersprechen sind für den Anbieter nicht bindend solange sie nicht in schriftlicher Form vorliegen und von einem leitenden Angestellten des Anbieters anerkannt wurden Ersatz und Einstellung unter Garantie Alle Ansprüche im...

Страница 16: ...Models 947 948 and 960 Leak Detectors Operations and Service Manual This page intentionally left blank ...

Страница 17: ... may be verified as required The data recorded below includes readings taken during the final test prior to shipment They are convenient for reference purposes if tuning adjustments are altered Slight changes may occur when using Filament No 2 or after an ion source is replaced Ion Chamber Voltage VDC Emission Current mA Fixed Focus Voltage VDC Repeller Voltage VDC Filament Bias Voltage VDC Variab...

Страница 18: ... all hazards associated with this equipment They must know how to recognize hazardous and potentially hazardous conditions and know how to avoid them The consequences of unskilled improper or careless operation of the equipment can be serious This product must only be operated and maintained by trained personnel Every operator or service person must read and thoroughly understand operation mainten...

Страница 19: ...a large well ventilated room Alcohol methanol or other solvents are irritants narcotics depressants and or carcinogens Their inhalation and or ingestion may produce serious side effects Prolonged or continued contact with the skin results in absorption through the skin and moderate toxicity Always ensure that cleaning operations are carried out in large well ventilated rooms and wear eyeshields gl...

Страница 20: ...c containment exhaust Exposure to hazardous gases could result in serious injury or death WARNING Equipment tightness is guaranteed for normal operating conditions when the equipment leaves the factory It is the user s responsibility to maintain the level of tightness particularly when pumping dangerous products CAUTION The performance and operating safety of this equipment can be guaranteed only ...

Страница 21: ... and a reliable earth ground Do not use an extension cord Use only the power cord that was provided with your leak detector The use of extension cords is not recommended and could result in damage to the equipment and loss of warranty To avoid electric shock connect the product power cord to a grounded power receptacle A protective ground connection by way of the grounding conductor in the power c...

Страница 22: ... leak detector Operation of this equipment in a residential area is likely to cause harmful radio communications interference in which case the user will be required to correct the interference at his own expense Vacuum Equipment and Cleanliness Cleanliness is vital when servicing the leak detector or any vacuum equipment There are some techniques that are more important in leak detector servicing...

Страница 23: ...other substances on O rings that will come in contact with the spectrometer tube Do not use alcohol methanol or other solvents on O rings To do so causes deterioration and reduces the O ring s ability to hold a vacuum In allowable situations apply a small amount of Apiezon L grease and wipe the O rings shiny dry NOTE VacuSolv included in the Component and Spectrometer Tube Cleaning Kit Part No 670...

Страница 24: ...et comes in contact with a magnetic surface the magnet may lose its field strength causing the spectrometer tube to lose sensitivity WARNING Store the ion source in a cool dry area in a tightly sealed container Wash hands thoroughly after handling the ion source especially before smoking or eating Pumps WARNING To avoid injury use proper lifting techniques when moving pumps Your system may have pu...

Страница 25: ...ails Rebuilt spectrometer tubes are available on an exchange basis NIST traceable calibrated leak testing and verification services Contacting Varian Vacuum Technologies In the United States you can contact Varian Vacuum Technologies Customer Service at 1 800 8VARIAN Internet users Send email to Customer Service Technical Support at vpl customer support varianinc com Visit our web site at www vari...

Страница 26: ...s wissen wie gefährliche und potenziell gefährliche Bedingungen erkannt werden und wie sie vermieden werden können Eine unwissende unsachgemäße oder fahrlässige Bedienung der Maschine kann schwerwiegende Folgen haben Dieses Produkt ist ausschließlich von ausgebildetem Personal zu bedienen und zu warten Mit der Bedienung und Wartung beauftragte Personen müssen die Betriebs und Wartungshandbücher so...

Страница 27: ...läse und arbeiten Sie in einem großen gut entlüfteten Raum Alkohol Methanol und andere Lösungsmittel sind Reiz Betäubungs oder Beruhigungsmittel und oder karzinogen Die Inhalation und oder Ingestion dieser Substanzen kann schwerwiegende Nebenwirkungen auslösen Eine anhaltende oder fortlaufende Berührung mit der Haut führt zu einer Absorption durch die Haut und mäßiger Toxizität Sorgen Sie immer da...

Страница 28: ...ssetzung gegenüber toxischen Gasen kann zu schwerwiegenden Verletzungen mit möglicher Todesfolge führen WARNUNG Wenn die Maschine das Werk verlässt ist ihre Dichtigkeit für normale Betriebsbedingungen garantiert Es obliegt der Verantwortung des Benutzers die Dichtigkeit der Maschine insbesondere beim Pumpen gefährlicher Produkte zu wahren VORSICHT Die Leistung und Betriebssicherheit dieser Maschin...

Страница 29: ...darf nicht verlängert werden Benutzen Sie nur das Netzkabel das mit Ihrem Lecksucher geliefert wurde Die Verwendung von Verlängerungskabeln wird nicht empfohlen und kann zu einer Beschädigung der Maschine wie auch einem Garantieverlust führen Um einen Stromschlag zu vermeiden muss das Netzkabel des Produkts an eine geerdete Steckdose angeschlossen werden Eine Schutzerdung in Form eines Erdungsstec...

Страница 30: ...ungen Diese Maschine generiert u U keine schädlichen Störungen und Diese Maschine muss alle empfangenen Störungen aufnehmen einschließlich Störungen Hochfrequenz und elektrostatische Entladung die einen unerwünschten Betrieb herbeiführen könnten Diese Maschine muss nach aufgetretenen Hochfrequenz oder ESD Ereignissen durch eine wiederholte Betätigung des Netzschalters bzw Trennschalters an der Rüc...

Страница 31: ...oder Schmiermittel auf Silikonbasis Benutzen Sie ungepuderte Butyl oder Polykarbonat Handschuhe um zu verhindern dass Hautöle auf Vakuumflächen geraten Aluminiumteile dürfen nicht mit Alconox gereinigt werden Alconox ist nicht geeignet für Aluminium und verursacht Schäden HINWEIS Es ist in der Regel nicht erforderlich Vakuumschmiermittel zu verwenden Sollte ihre Verwendung jedoch unumgänglich sein...

Страница 32: ...kein Schmiermittel oder andere Substanzen auf O Ringen die mit dem Spektrometerrohr in Berührung kommen Benutzen Sie auf O Ringen kein Alkohol Methanol oder andere Lösungsmittel Dies beeinträchtigt die Dichtleistung und die Fähigkeit des O Rings ein Vakuum zu wahren Tragen Sie in zulässigen Situationen eine kleine Menge Apiezon L auf und reiben Sie die O Ringe trocken bis sie glänzen HINWEIS VacuS...

Страница 33: ...liert der Magnet evtl seine Feldstärke und das Spektrometerrohr somit seine Empfindlichkeit WARNUNG Wahren Sie die Ionenquelle an einem kühlen trockenen Ort in einem dicht verschlossenen Behälter auf Waschen Sie sich nach der Handhabung der Ionenquelle gründlich Ihre Hände insbesondere bevor Sie rauchen oder essen Pumpen WARNUNG Befolgen Sie beim Bewegen von Pumpen angemessene Hubverfahren um Verl...

Страница 34: ...uerte Spektrometerrohre sind auf Austauschbasis erhältlich NIST nachweisbare kalibrierte Leckprüf und Verifizierungsdienste Kontaktieren von Varian Vacuum Technologies Für weitere Informationen zu diesem Thema wenden Sie sich bitte an Ihren nächsten Varian Händler Angaben dazu befinden sich auf der letzten Seite dieses Handbuchs Internetbenutzer Senden Sie ein E Mail an Kundendienst Technische Unt...

Страница 35: ...on is listed at the start of this book This information should be read before operating the equipment The 947 948 960 has rugged metal enclosures that are mounted on casters for greater mobility A key is used to access the lockable turret that houses the service pendant The 947 948 960 has the following basic components Mechanical backing pump Mechanical roughing pump Spectrometer tube Contra Flow...

Страница 36: ...f the turret and operational buttons identified in Figure 1 1 follow the figure Models 948 960 are shown in Figure 1 2 Figure 1 1 947 Leak Detector Turret Enclosure for Service Pendant and electronics Operational buttons Start and Vent buttons Test Port Attachment Standard Leak label Label with internal standard leak value ...

Страница 37: ...960 provides access to the nitrogen cold trap Descriptions of the turret operational buttons and nitrogen trap identified in Figure 1 2 follow the figure Figure 1 2 948 960 Leak Detector Turret Enclosure for Service Pendant and electronics Operational buttons Start and Vent buttons Liquid nitrogen trap Access to Liquid nitrogen trap Test port Attachment ...

Страница 38: ...m in EPROM This provides for fast recovery after a momentary loss of line voltage 1 2 Unpacking the 947 948 960 When receiving the 947 948 960 the following pieces are included Models 947 948 960 leak detector Service Pendant Power cable 115 VAC or 230 VAC Pump manuals for the purchased configuration Refer to the Unpacking Instructions located on the outside of the shipping container before openin...

Страница 39: ...s Personal injury or damage to the leak detector could result from improper handling The 947 948 960 is heavy and can cause personal injury if not handled carefully when removing it from the skid Method 1 1 With the assistance of a helper carefully roll the leak detector toward the front of the skid 2 Lift the front end of the unit and gently lower it onto the floor 3 Lift the rear of the unit and...

Страница 40: ...ont panel of the 947 948 960 which is the main access to service the pumps and the spectrometer tube 2 Take out and remove all loose packing from inside the leak detector 1 3 Front Panel Controls and Indicators The front panel controls and indicators are identified by number in Figure 1 3 Descriptions of each numbered item follow Figure 1 3 Figure 1 3 Front Panel Controls and Indicators 1 2 3 4 5 ...

Страница 41: ... the transfer pressure set point on the Test Port Pressure bar graph 8 Test Port Pressure Bar Graph Displays the test port pressure as measured by a thermocouple gauge mounted near the test port Used as an indicator to help prevent damage to the detector due to over pressure situations 9 Leak Rate Exponent Display Indicates the leak rate range exponent in a two digit numeric display Capable of sho...

Страница 42: ... Press to initiate vent mode This allows a test device to be connected to the 947 948 960 for leak detection 16 Zero Button Press to initiate auto zero sequence The leak detector automatically zeroes a negative signal 17 Std Leak Button Press to initiate Std leak check Opens the standard leak test valve so that the calibrated leak can be measured to check the leak detector 18 Auto Cal Button Press...

Страница 43: ...de of the lockable turret door Figure 1 4 provides An abbreviated list of leak detector operating instructions to be used when the operator is familiar with normal operation of the 947 948 960 Error codes and solutions The leak detector s standard leak setting as measured at the factory Figure 1 4 Turret Door Instruction Label ...

Страница 44: ...ure Figure 1 5 Rear Power Panel Rear panel power and circuit breakers Power Inlet 115 VAC or 230 VAC power connection see Section 1 7 1 Power on page 1 12 Power Switch Circuit Breaker Mains power and Circuit breaker Rough Pump Circuit breaker for the Rough Pump Forepump Circuit breaker for the Forepump Turbo Pump Circuit breaker for the Turbo Pump Auxiliary Auxiliary Circuit breaker 24 V Power Sup...

Страница 45: ...nd connects to the 947 948 960 using a six foot cable that connects to an RS 232 serial port J1 a 9 pin D sub connector located inside the lockable turret The service pendant is used to monitor and set up Reject set point Crossover pressures Auto sequence parameters Ion Source parameters System setup parameters such as the value of the calibrated leak Refer to Section 3 8 Using the Pendant for Par...

Страница 46: ...60 leak detector against unidirectional transients caused by the following phenomena Switching phenomena in the power network e g switching of capacitor banks Faults in the power network Indirect lightning strikes Mains supply 115 VAC 50 60 Hz 20 A service or 230 VAC 50 60 Hz 15 A service must be ordered CAUTION Mains supply voltage fluctuations shall not exceed 10 of the nominal voltage Transient...

Страница 47: ...he leak detector includes detailed instructions 1 7 4 Special Installation Requirements Additional services recommended for clean room use include Roughing foreline pump exhaust hose Vent to the outside of the room using the KF 25 ISO NW 25 connection on the back of the leak detector This reduces particulate count and the helium background signal Cooling fan air exhaust hose Connect to the optiona...

Страница 48: ...ace connection panel of the 947 948 960 Descriptions of the rear panel connectors follow the figure Figure 1 7 Rear Panel Interface Connectors The ports available on the rear panel for connection are J122 Remote Box Interface 9 pin female D connector for the optional Universal Remote Control J120 Parallel Interface 37 pin female D connector for the Discrete I O for PLC control J121 Parallel Interf...

Страница 49: ...d vor Inbetriebnahme der Maschine zu lesen Die 947 948 960 verfügen über stabile Metallgehäuse die auf Rollen montiert sind um eine bessere Mobilität zu gewährleisten Der Zugang zum verschließbaren Aufsatz in dem die Hängebedienungstafel untergebracht ist erfolgt mittels eines Schlüssels Die 947 948 960 bestehen aus folgenden Grundkomponenten Mechanische Vorvakuumpumpe Mechanische Grobvakuumpumpe ...

Страница 50: ...er Betriebstasten die in Abbildung 1 8 gekennzeichnet sind entsprechen der Abbildung Modelle 948 960 sind in Abbildung 1 9 zu sehen Abbildung 1 8 947 Lecksucher Aufsatz Aufbewahrungsort für Hängebedienungstafel und Elektronik Betriebstasten Start und Ablasstasten Prüfausgang Anschlussstelle Standard Leckkabel Etikett mit internem Standard Leckwert ...

Страница 51: ...ur Stickstoff Kühlfalle Beschreibungen des Aufsatzes der Betriebstasten und Stickstoff Kühlfalle die in Abbildung 1 9 gekennzeichnet sind entsprechen der Abbildung Abbildung 1 9 948 960 Lecksucher Aufsatz Aufbewahrungsort für Hängebedienungstafel und Elektronik Betriebstasten Start und Ablasstasten Flüssigstickstoff Falle Zugang zur Flüssigstickstoff Falle Prüfausgang Anschlussstelle ...

Страница 52: ... betätigt werden um die verschiedenen Funktionen eines Helium Spektrometer Lecksuchers zu auszuführen Der Mikroprozessor speichert weiterhin die wichtigsten Einstellparameter und sichert sie auf dem EPROM Auf diese Weise wird eine schnelle Wiederherstellung nach vorübergehendem Verlust der Leitungsspannung gewährleistet 1 11 Auspacken der 947 948 960 Beim Versand der 947 948 960 werden folgende Te...

Страница 53: ...n Sie diese zur Seite Bewahren Sie die Originalverpackung für den Fall auf dass eine Rücksendung des Lecksuchers an Varian Vacuum Technologies erforderlich ist 6 Entfernen Sie vorsichtig die vordere Klammer indem Sie die beiden Bolzen lösen 7 Entfernen Sie vorsichtig die Plastiktüte welche den Lecksucher umgibt Jetzt kann der Lecksucher von der Palette genommen werden 1 11 7 Entfernen der 947 948 ...

Страница 54: ...r gegen die hintere Klammer zu drücken und lösen und entfernen Sie die beiden vorderen Skid Mates die blauen ringförmigen Vorrichtungen an der Vorderseite der Palette indem Sie sie gegen den Uhrzeigersinn drehen 3 Vergewissern Sie sich dass die zweite Person den Lecksucher nach wie vor gegen die Rückseite der Palette drückt und senken Sie dann vorsichtig die Vorderkante der Palette auf den Boden 4...

Страница 55: ...rwendung des Leckraten Balkendiagramms mit 50 Unterteilungen und des entsprechenden Bereichsexponenten den ausgewählten Rückweisungsgrenzwert des Lecksuchers an 3 Netzschalter der Grobvakuumpumpe Steuert die Stromversorgung der Grobvakuumpumpe 4 Netzschalter des Lecksuchers Steuert die Stromversorgung der Vorvakuumpumpe und der Hochvakuumpumpe 5 Systemdruck Balk endiagramm Zeigt den am Eingang des...

Страница 56: ... Exponentenanzeige Gibt den Exponenten des Leckratenbereichs als zweistellige numerische Anzeige wieder Kann einen Bereich von 10 11 bis 100 in atm cc Sek anzeigen Der BEREICHSEXPONENT dient auch zur Angabe des Fehlerzustandscodes 10 Leckraten Mantissenbalkendiagramm Ein Balkendiagramm mit 50 Unterteilungen Die Unterteilung links außen zeigt 0 0 an und ist immer aktiviert 11 Anzeige für Leckraten ...

Страница 57: ...en Anschluss eines Prüfgeräts an die 947 948 960 zwecks Lecksuche 16 Null Taste Drücken Sie diese Taste um eine automatische Nullstellung durchzuführen Der Lecksucher stellt ein negatives Signal automatisch auf Null ein 17 Standardleck Taste Drücken Sie diese Taste um eine Standard Lecksuche zu initiieren Das Standard Lecksuchventil wird geöffnet um das kalibrierte leck messen und den Lecksucher p...

Страница 58: ...ießbaren Aufsatztür Abbildung 1 11 enthält folgende Angaben Eine verkürzte Liste der Betriebsanleitungen des Lecksuchers die dann zu benutzen ist wenn der Bediener mit dem normalen Betrieb der 947 948 960 vertraut ist Fehlercodes und Lösungen Die Standard Leckeinstellung des Lecksuchers nach Werksmessung Abbildung 1 11 Anweisungsschild auf Aufsatztür ...

Страница 59: ... Rückseitige Schalttafel Strom und Trennschalter auf der rückseitigen Schalttafel Stromeinspeisung 115 VAC oder 230 VAC Stromanschluss siehe Abschnitt 1 16 1 Strom auf Seite 1 27 Netzschalter Trennschalter Netzstrom und Trennschalter Grobvakuumpumpe Trennschalter für die Grobvakuumpumpe Vorvakuumpumpe Trennschalter für die Vorvakuumpumpe Turbovakuumpumpe Trennschalter für die Turbovakuumpumpe Zusä...

Страница 60: ...fbewahrt und wird anhand eines 2m langen Kabels an einen seriellen Anschluss J1 ein 9 Pin D Neben verbinder im verschließbaren Aufsatz an die 947 948 960 angeschlossen Die Hängebedienungstafel dient zur Überwachung und Einstellung folgender Werte Rückweisungs Sollwert Crossover Druckwerte Parameter der automatischen Sequenz Parameter der Ionenquelle Parameter der Systemeinstellung wie der Wert des...

Страница 61: ...it der Lecksucher 947 948 960 bei durch folgende Ereignisse verursachten einseitigen Überschwankungen zu verbessern Schaltereignisse im Stromnetz z B Schalten von Kondensatorbatterien Fehler im Stromnetz Indirekte Blitzschläge Netzstromversorgung 115 VAC 50 60 Hz 20 A Versorgung oder 230 VAC 50 60 Hz 15 A Versorgung muss geordnet sein VORSICHT Schwankungen in der Netzstromversorgung dürfen um maxi...

Страница 62: ...mechanischen Pumpen ist Abbildung B 10 zu entnehmen Sollten Sie detailliertere Informationen benötigen nehmen Sie bitte Bezug auf das mit dem Lecksucher gelieferte Pumpenhandbuch 1 16 4 Spezielle Anforderungen bei der Installation Zur Verwendung in Reinräumen sind folgende zusätzliche Leitungen erforderlich Ablassleitung für Grob Vorvakuumpumpe Ablass aus dem Raum unter Verwendung des KF 25 ISO NW...

Страница 63: ...Technologies Niederlassung um einen Termin für eine Installation vor Ort zu vereinbaren 1 17 Aufbewahrung Soll der Lecksucher nicht sofort benutzt werden kann er nach dem Empfang ohne besondere Vorkehrungen aufbewahrt werden Ein trockener relativ staubfreier Ort ist vorzuziehen Die erforderlichen Umgebungsbedingungen zur Aufbewahrung sind 0 bis 95 relative Feuchtigkeit ohne Kondensation 34 C bis 6...

Страница 64: ...tstelle für die Fernsteuerungs Box 9 Pin Buchse D für die optionale Universal Fern steuerung J120 parallele Schnittstelle 37 Pin Buchse D für den diskreten E A zur SPS Steuerung J121 parallele Schnittstelle 25 Pin Buchse D für die diskrete BCD und die analoge Leckratenausgabe zur SPS Steuerung J123 RS232C Schnittstelle 25 Pin Buchse D RS 232C serieller Port zur Steuerung des Hostrechners zur Überw...

Страница 65: ...48 960 into a production line or for use as automated equipment rather than stand alone equipment 2 1 Physical Considerations An integrated 947 948 960 has the same physical considerations as a manually operated unit 2 2 Common Configuration The 947 948 960 is ordered as needed from Varian Vacuum Technologies with the pumps installed If changes are needed for integration into a system contact Vari...

Страница 66: ...bers in black circles The key parts are identified below the figure The valve numbers are used in Table 2 1 The valve name and type are defined in the upper portion of the table the state of each valve based system status is shown in the lower portion of each table Figure 2 1 947 Flow Diagram Thermocouple Gauge TC2 Thermocouple Gauge TC1 Spectrometer Tube Test Port Turbo Pump Reservoir Forepump St...

Страница 67: ...eile werden in der nachfolgenden Abbildung identifiziert Die Ventilnummern werden in Table 2 1 Table 2 1benutzt Name und Typ des Ventils werden im oberen Teil der Tabelle definiert der Zustand der einzelnen Ventile je nach Systemzustand werden im unteren Teil der einzelnen Tabellen angezeigt Abbildung 2 2 947 Ablaufdiagramm Thermoelement Messgerät TC2 Thermoelement Messgerät TC1 Spektrometerrohr P...

Страница 68: ...ons are used in Table 2 1 Refer to Figure 2 3 on page 2 5 for valve locations V Vacuum S Solenoid O Open C Closed All valves are normally closed Table 2 1 Valve Operation Valve Name Rough Rough Valve Operator Test Test Valve Operator Vent Reservoir Rough Gross Leak Standard Test Leak Standard Leak Rough Valve Type V S V S S S S S S Valve Number System Status Valve State Vent C C O O C C O Start Ro...

Страница 69: ...signate the location of valves Other key parts of the vacuum system represented by numbers in black circles are identified after Figure 2 3 Figure 2 3 948 Flow Diagram Thermocouple Gauge TC2 Thermocouple Gauge TC1 Spectrometer Tube Test Port Turbo Pump Reservoir Forepump Standard Leak Rough Pump Nitrogen Cold Trap ...

Страница 70: ...tion der Ventile Andere wichtige Teile des Vakuumsystems angezeigt durch Nummern in schwarzen Kreisen werden nach Abbildung 2 4 identifiziert Abbildung 2 4 948 Ablaufdiagramm Thermoelement Messgerät TC2 Thermoelement Messgerät TC1 Spektrometerrohr Prüfport Turbopumpe Speicher Vorvakuumpumpe Standard Leck Grobvakuumpumpe Stickstoffkühlfalle ...

Страница 71: ...resented by numbers in black circles are identified after Figure 2 5 Figure 2 5 960 Flow Diagram Reservoir Thermocouple Gauge TC1 Rough Valve Turbo Diffusion Pump Thermocouple TC2 Test Valve Forepump System Pressure Gauge Vent Valve Rough Pump Standard Leak Gross Leak Valve Manifold Nitrogen Cold Trap Test Port Spectrometer Tube 1 2 4 5 6 7 8 9 3 10 1 1 12 1 7 2 8 3 9 4 10 5 1 1 6 12 ...

Страница 72: ...resented by numbers in black circles are identified after Figure 2 6 Figure 2 6 960 Flow Diagram Reservoir Thermocouple Gauge TC1 Rough Valve Turbo Diffusion Pump Thermocouple TC2 Test Valve Forepump System Pressure Gauge Vent Valve Rough Pump Standard Leak Gross Leak Valve Manifold Nitrogen Cold Trap Test Port Spectrometer Tube 1 2 4 5 6 7 8 9 3 10 1 1 12 1 7 2 8 3 9 4 10 5 1 1 6 12 ...

Страница 73: ...ak rate signal is higher than reject set point 3 Stop 200 msec high pulse Unit goes to vent mode 4 Start 200 msec high pulse Goes to fine test via rough gross modes 6 Parallel Enable Active High Enables rear panel PLC Interface 7 Zero 200 msec high pulse Begins Auto Zero routine 9 Auto Cal 200 msec high pulse Begins Auto Calibrate 10 Decrement 200 msec high pulse Decrements the exponent when in ma...

Страница 74: ...d for J121 3 LSD A Active High BCD Leak Rate 4 LSD B Active High BCD Leak Rate 5 LSD C Active High BCD Leak Rate 6 LSD D Active High BCD Leak Rate 7 MSD A Active High BCD Leak Rate 8 MSD B Active High BCD Leak Rate 9 MSD C Active High BCD Leak Rate 10 MSD D Active High BCD Leak Rate 11 LSD A Active High BCD Leak Rate 12 LSD B Active High BCD Leak Rate 13 LSD C Active High BCD Leak Rate 14 LSD D Ac...

Страница 75: ...hassis ground and are not isolated Electrical characteristics comply with EIA TIA Standard EIA TIA 232 E 18 MSD D Active High BCD Leak Rate 20 21 24 VDC for Output Sourcing 24 25 Ground for J121 Table 2 4 J123 Pinout Summary Pin on J123 Signal Name Description 1 Shield Shield for J123 System Ground 2 RXD RS 232 Data 3 TXD RS 232 Data 4 CTS RS 232 Flow Control 5 RTS RS 232 Flow Control 6 DTR RS 232...

Страница 76: ...rs in the 947 948 960 Platform J123 female 25 pin connector Discrete I O port for PLC control J120 female 37 pin D connector Discrete BCD and analog leak rate output port for PLC control J121 female 25 pin D connector Optional Universal Remote Control Box port the J122 female 9 pin D connector Refer to Appendix D Inputs and Outputs for available rear panel ports pinouts and signal designations The...

Страница 77: ... is assembled and tested Other parameters are changed when a gauge is changed or when the ion source or preamplifier is changed Some parameters are changed automatically during power up or when functions such as the Auto Cal or Auto Zero run 2 4 3 Discrete I O J120 and J121 connectors contain the discrete I O lines This section provides the information necessary to be able to use discrete I Os The...

Страница 78: ... Opto isolated with the negative side of the inputs combined and tied to the return pins of the associated connector The input voltage range is 5 VDC to 24 VDC The maximum input current at 24 VDC drawn by each input is 7 mA The discrete outputs are Opto isolated Darlington transistor emitter followers with the collectors combined and tied to the 24 VDC pins of the associated connector The maximum ...

Страница 79: ... O for efficient operation Once PARALLEL ENABLE is asserted operations can be monitored using the host serial port but most parameter values cannot be changed If a command is issued that is not allowed once PARALLEL ENABLE is asserted the system response is cant See Appendix C Communications Protocol Operations can be monitored on the front panel display but the parameter values cannot be changed ...

Страница 80: ...Models 947 948 and 960 Leak Detectors Operations and Service Manual This page intentionally left blank ...

Страница 81: ...n accurate readings Operate the 947 948 960 to obtain precision leak readings using helium Put the 947 948 960 in STANDBY mode and or shut it down entirely for maintenance or storage Parameter setup using the service pendant applies to both stand alone manual and in line production operation 3 1 Front Panel LED Indicators and Controls Figure 3 1 shows the LED indicators and controls on the front p...

Страница 82: ...T Illuminates when the reject function is on and when the leak rate reading exceeds the selected set point Goes off when the leak rate falls below the set point HOLD Illuminates if the machine is in the HOLD mode with the test and roughing valves closed The HOLD mode is selected by momentarily pressing the VENT button if the machine is in TEST When in HOLD pressing either the START or VENT button ...

Страница 83: ...e the type of test and sensitivity of testing performed The discussion below includes an explanation of what the parameter or function means For additional information on how to set a parameter or select a function refer to Section 3 3 Start Up on page 3 9 and Appendix A Service Pendant Keypad Functions or if the optional rear panel interface is installed Section C Communications Protocol RANGE Th...

Страница 84: ...on the turret of the leak detector and on the Cal Leak Certification When a calibration is performed the system compares the leak rate signal with the stored value The tuning process involves independently scanning the ion source chamber voltage and the variable focus voltage and optimizing each value for a maximum helium signal Once the tuning process is complete the system gain is adjusted to br...

Страница 85: ...e the audio tone from the turret The audio tone frequency increases as the size of the measured leak increases The audio volume control is located on the turret BAR GRAPH DISPLAY The 50 segment bar graph display on the front control panel represents the mantissa value of the leak rate spanning from 0 to 10 The scale shows above the bar graph The numerical display located to the far right of the ba...

Страница 86: ...at is enabled ON If more than one set point is enabled then the pass fail criterion is based on the most stringent reject set point value A Pass condition is indicated by the system reverting to the VENT mode upon completion of the test cycle A fail condition results in REJECT being displayed in the LED display area and a reject set point activation upon completion of the test cycle A Fail conditi...

Страница 87: ...TIME variable determines the amount of time that the leak detector remains in test before it compares the measured leak rate with the selected reject set point Sufficient time must be allowed for the leak rate reading to stabilize before the system makes a pass fail decision This is a function of the part configuration and the leak rate specification In AUTO SEQUENCER mode the 947 948 960 remains ...

Страница 88: ...imits prevent the operator from inadvertently setting the 947 948 960 to transfer into test at too high a pressure resulting in excessive spectrometer tube contamination or ion source filament failure GROSS LEAK XFER The GROSS LEAK XFER set point determines the test pressure cross over point at which the 947 948 960 transfers into the GROSS LEAK TEST mode In the GROSS LEAK TEST mode the majority o...

Страница 89: ...ropriate to the unit under test Helium tank with spray gun or hook up for auto test Helium for the 948 960 Figure 3 2 shows the important 947 948 960 operation controls for start up and power For circuit breaker descriptions refer to Section 1 5 Rear Panel Power Connection and Circuit Breakers on page 1 10 Figure 3 2 Start Up Controls 4 5 ...

Страница 90: ...est fixture or a plug is inserted for storage AC Power Input View of back of unit Refer to Figure 3 2 and follow the start up procedure listed in the next Section and in Section 3 4 Calibration and Sensitivity Checks procedure to put the 947 948 960 in a Ready for Operation state from the All Systems off condition 3 3 1 Startup Procedure To perform the start up procedure 1 Locate the main power sw...

Страница 91: ...quired refer to Section 4 Maintenance for the cold trap cleaning procedure 5 Wait 30 minutes for the 947 948 960 to warm up to operating temperature 6 The detector is now on and ready for normal operation NOTE Perform the calibration and sensitivity check before taking readings with the 947 948 960 3 4 Calibration and Sensitivity Checks At the beginning of each workday or shift or as conditions re...

Страница 92: ...nt Replace ion source if necessary Refer to Section 4 Maintenance c5 Auto calibrate function is out of range Notify Varian Vacuum Technologies Customer Service Leak detector requires maintenance c6 Auto tune function is out of range Tap the AUTO CAL button A brief tap may clear this code to allow the leak detector to operate If this clears c6 then the leak detector is operable If c5 appears with c...

Страница 93: ...hin 20 of the number on the calibrated leak label perform an AUTO CAL 9 Be sure the TEST LED is on and press the AUTO CAL button Do not continue if a condition code is displayed Consult the NOT READY Condition Code Chart Table 3 1 on page 3 12 and follow instructions The STD LEAK LED is on AUTO CAL is also on The LEAK RATE display mantissa and exponent values change as a function of auto tuning Th...

Страница 94: ... two operating procedures Auto Ranging below Manual Ranging on page 3 15 Requirements After shutdown of a leak detector a complete startup is necessary as outlined in Start up Procedure Verify the integrity of the leak detector with the Calibration and Sensitivity Checks Procedure on a daily basis or as necessary 3 5 1 Auto Ranging To use auto ranging for outside in testing 1 Press the VENT button...

Страница 95: ... lights up 5 Press and hold the VENT button approximately 1 second until the 947 948 960 is in VENT mode Test LED goes off Vent LED illuminates 6 Remove the unit under test from the test port VENT LED is on Auto ranging procedure is complete 3 5 2 Manual Ranging Manual ranging is used when the range of the failure level for the part under test is known To range manually 1 Press the VENT button TES...

Страница 96: ...nd until the unit switches to the VENT mode The TEST LED turns off The VENT LED illuminates NOTE If the VENT button is pressed for less than one second the leak detector moves to HOLD 8 Remove the tested part from the test port The Leak test is now complete 3 6 Standby When continued use of 947 948 960 is not anticipated STANDBY mode a partial shutdown can be used to save energy To put the 947 948...

Страница 97: ...ndant for Parameter Setup The service pendant is stored in the turret and is connected to Models 947 948 960 at J1 in the turret for parameter changes monitoring or diagnostics The pendant must be connected to the 947 948 960 to operate any of the functions Refer to Appendix G Leak Detection Theory for information on turret connectors The service pendant is used to set up and monitor Reject set po...

Страница 98: ...during power up Auto Cal or Auto Zero functions See Appendix G Leak Detection Theory for details 3 9 Optional Discrete I O To use the optional discrete I O connections connect to J120 and J121 on the rear panel Refer to Appendix D Inputs and Outputs for detailed information When operating the 947 948 960 from the optional discrete I O it is necessary to make the PARALLEL ENABLE J120 pin 6 active T...

Страница 99: ... der 947 948 960 Kalibrieren der 947 948 960 Einstellen der Parameter um genaue Werte zu erhalten Bedienung der 947 948 960 um bei der Verwendung von Helium präzise Leckwerte zu erhalten Einstellen der 947 948 960 auf den Bereitschaftsmodus und oder vollständiges Abschalten der Maschinen zwecks Wartungsarbeiten oder Aufbewahrung Die Parametereinstellung unter Verwendung der Hängebedienungstafel be...

Страница 100: ...l Während des Betriebs leuchten die LED Funktionen auf um anzuzeigen dass ein Vorgang stattfindet Die Definition der Betriebvorgänge ist wie folgt VENT Ablass Leuchtet auf wenn das Ablassventil geöffnet ist Die LED leuchtet nicht auf wenn das Ventil geschlossen ist START Leuchtet auf wenn die START Taste gedrückt wird Sie erlischt eine Sekunde nach Aufleuchten der TEST LED oder unmittelbar nach de...

Страница 101: ... die Maschine im Modus TEST befindet ausgewählt Im Haltemodus wird durch Drücken der Tasten START oder VENT der nächste Betriebsvorgang ausgelöst NOT READY Leuchtet immer dann auf wenn die Betriebsbereitschaft verhindert ist Der jeweilige Fehlercode von c0 bis c9 erscheint auf der Bereichsanzeige Für Informationen über die Fehlercodes siehe Table 3 2 on page 3 31 AUTO CAL automatische Kalibrierung...

Страница 102: ... und Betriebsmod Parameter und Betriebsmodi sind zur Durchführung der Lecksuche aufeinander angewiesen die eingegebenen Parameter bestimmen die Art der durchgeführten Prüfung und die Prüfempfindlichkeit Die nachstehende Liste enthält eine Erklärung der Parameter und Funktionen Für zusätzliche Informationen über die Einstellung von Parametern oder Auswahl einer Funktion siehe Abschnitt 3 12 Inbetri...

Страница 103: ...während jedes Prüfzyklus seine empfindlichste Dekade 10 9 erreicht AUTO CAL automatische Kalibrierung Diese Funktion dient zur automatischen Kalibrierung auf der Grundlage der eingestellten Parameter Die Kalibrierung wird mit einem bekannten internen Leck verglichen Drücken Sie zur Durchführung einer automatischen Kalibrierung die Taste AUTO CAL oder bestätigen Sie die Kalibrierungseingabe über de...

Страница 104: ...n dazu den Bediener darauf aufmerksam zu machen dass die gemessene Leckrate den Sollwert überschritten hat Es stehen vier Sollwerte zur Verfügung Jeder Sollwert muss aktiviert werden bevor er betriebsfähig ist Ebenso muss er deaktiviert werden um seinen Betrieb anzuhalten Es kann nur jeweils ein Sollwert aktiv sein AUDIO VOLUME Lautstärke Die Lautstärkenregelung dient zur Aktivierung des Audiotons...

Страница 105: ...terien beruhen auf dem Rückweisungs Sollwert der gerade aktiv eingeschaltet ist Wurden mehrere Sollwerte aktiviert beruhen die Annahme Rückweisungskriterien auf dem strengsten Rückweisungs Sollwert Ein Annahmezustand wird dadurch angezeigt dass das System nach Abschluss des Prüfzyklus wieder zum Ablassmodus VENT zurückkehrt Ein Rückweisungszustand führt dazu dass auf dem LED Anzeigefeld REJECT ers...

Страница 106: ...rderlich ist Wird der annehmbare Prüfdruck nicht innerhalb der vorab ausgewählten Grobzeit erreicht ist dies ein Anzeichen für ein Großleck im Prüfobjekt oder im Prüfanschluss oder dafür dass die zugemessene Zeit unzureichend war TEST TIME Prüfzeit Die Prüfzeit Variable bestimmt die Zeitdauer für die sich der Lecksucher im Prüfmodus befindet bevor die gemessene Leckrate mit dem vorab ausgewählten ...

Страница 107: ...ruckwerte für die verschiedenen Prüfmodi Die Übertragungsdruck Einstellungen können für spezifische Anwendungen auf niedrigere Werte geändert werden Die 947 948 960 verfügen über vorprogrammierte Übertragungsdruck Höchstwerte die leicht über den Vorgabewerten liegen Diese Grenzwerte verhindern dass der Bediener die 947 948 960 versehentlich so einstellt dass sie bei zu hohem Druck auf den Prüfmodu...

Страница 108: ...heit Heliumtank mit Spritzpistole oder Anschluss für automatische Prüfung Helium für 948 960 Abbildung 3 7 zeigt die wichtigen Steuerelemente der 947 948 960 für Inbetriebnahmen und Netzanschluss Für Einzelheiten über den Trennschalter siehe Abschnitt 1 14 Rückseitige Schalttafelstromanschluss und Trennschalter auf Seite 1 25 Abbildung 3 7 Steuerelemente zur Inbetriebnahme 4 5 ...

Страница 109: ...n können Drücken Sie diese Taste und halten Sie sie eine Sekunde lang nieder um das Verfahren zu aktivieren HINWEIS Wird die Taste VENT nicht eine Sekunde lang gedrückt geht der Lecksucher auf HOLD über Prüfport Die zu prüfende Einheit ist mittels einer Prüfvorrichtung an diesen Port angeschlossen bei der Aufbewahrung wird hier ein Blindstecker eingesetzt AC Netzeingang Ansicht der Rückseite der E...

Страница 110: ...dass sie im Vakuumsystem auftaut Im Durchschnitt muss die Falle alle 14 Stunden aufgefüllt werden Überwachen Sie den Füllstand und geben Sie bei Bedarf häufiger Flüssigstickstoff hinzu VORSICHT Enthält die Kühlfalle in den 948 960 keine Flüssigkeit mehr und ist das Vakuumsystem abgetaut erfolgt eine Kontamination des Spektrometerrohrs was wiederum zu einer instabilen Leckratenerfassung führt Wird ...

Страница 111: ... Exponentenbereich mit angezeigtem Zustandscode Table 3 2 zeigt eine Liste von Zustandscodes für das nicht betriebsbereite System und zur Behebung des Fehlerzustandes erforderlich Maßnahmen an Tablelle 3 2 Zustandscodes für nicht betriebsbereites System Code Problem Lösung c0 Verstärker Offset liegt außerhalb des Bereichs Setzen Sie sich mit dem Kundendienst von Varian Vacuum Technologies in Verbi...

Страница 112: ...n Wird der Fehlerzustand c6 dadurch behoben ist der Lecksucher einsatzbereit Erscheint c5 mit c6 handelt es sich um den Prioritätszustandscode Drücken Sie VENT um den Zustand zu beheben HINWEIS Ein c6 Zustandscode bedeutet dass in Kürze eine Wartung des Lecksuchers erforderlich ist Wenden sie sich unter der Nummer 1 800 8VARIAN an den Kundendienst von Varian Vacuum Technologies c7 Automatische Nul...

Страница 113: ...em Schild für das kalibrierte Leck führen Sie eine AUTO CAL durch 9 Vergewissern Sie sich dass die LED TEST aufleuchtet und drücken Sie die Taste AUTO CAL Fahren Sie nicht fort wenn ein Zustandscode angezeigt wird Siege die Zustandcodetabelle NOT READY Table 3 2 on page 3 31 und befolgen Sie die Anleitungen Die LED STD LEAK und die LED AUTO CAL leuchten auf Die Anzeigemantissen und Exponentenwerte...

Страница 114: ...instellung auf Seite 3 34 Abschnitt 3 14 2 Manuelle Bereichseinstellung auf Seite 3 36 Anforderungen Nach Abschalten eines Lecksuchers ist eine vollständige Inbetriebnahme erforderlich wie unter Anleitungen zur Inbetriebnahme beschrieben Verifizieren Sie täglich oder je nach Bedarf die Integrität des Lecksuchers anhand der Kalibrierungs und Empfindlichkeitsprüfungen 3 14 1 Automatische Bereichsein...

Страница 115: ...rd Helium zu Die 947 948 960 verfolgen das Prüfhelium beim Aufstieg durch den Bereich automatisch anhand des Rückweisungs Sollwerts Sollte es den vorgegebenen Rückweisungswert übersteigen zeigt das Leckratensignal den Höchststand an Die LED REJECT leuchtet auf 5 Drücken Sie die Taste VENT und halten Sie diese ca 1 Sekunde lang nieder bis sich die 947 948 960 im Modus VENT befinden Die LED TEST erl...

Страница 116: ...ie 947 948 960 sich im Modus VENT befinden 5 Drücken Sie die Taste START Die LED VENT erlischt Eine Sekunde später leuchten die LED START und TEST auf Die LED START erlischt und die LED RATE RANGE Exponent zeigt den ausgewählten Bereich an 6 Führen die dem Teil das geprüft wird Helium zu Der Lecksucher verfolgt automatisch das Heliumsignal innerhalb des ausgewählten Bereichs Sollte es den vorgegeb...

Страница 117: ...ecksucher wieder auf den Modus READY FOR OPERATION zurückzustellen HINWEIS Wenn die Einheit nach einem Standby wieder betriebsbereit gemacht wird brauchen die Warmlaufzeiten nicht eingehalten zu werden 3 16 Abschalten Wenn der Standort der Maschine geändert oder sie vorübergehend nicht benutzt wird kann sie wie folgt abgeschaltet werden 1 Setzen Sie den Prüfportstecker sicher in die Prüfportbuchse...

Страница 118: ...Für Informationen über die Aufsatzanschlüsse siehe Anhang G Leak Detection Theory Die Hängebedienungstafel dient zur Überwachung und Einstellung folgender Werte Rückweisungs Sollwert Crossover Druckwerte Parameter der automatischen Sequenz Parameter der Ionenquelle Parameter der Systemeinstellung wie der Wert des kalibrierten Lecks Beim Antrieb der Hängebedienungstafel über die 947 948 960 erschei...

Страница 119: ...hen Kalibrierung oder Nullstellung automatisch Für Einzelheiten siehe Anhang G Leak Detection Theory 3 18 Optionale diskrete E A Sollen die optionalen diskreten E A Verbindungen benutzt werden nehmen Sie die Anschlüsse an J121 und J121 an der rückseitigen Schalttafel vor Für detaillierte Informationen siehe Anhang D Inputs and Outputs Bei einem Betrieb der 947 948 960 über die optionalen diskreten...

Страница 120: ...Models 947 948 and 960 Leak Detectors Operations and Service Manual This page intentionally left blank ...

Страница 121: ...rs Heed the following notes cautions and warnings when performing maintenance WARNING Disconnect power from the 947 948 960 before performing any maintenance procedure that requires physically disconnecting any part of the system WARNING The mechanical components of leak detectors are typically cleaned with alcohol or other solvents When heated sprayed or exposed to high temperature equipment thes...

Страница 122: ...NOTE Normally the use of vacuum grease is unnecessary If it must be used use it sparingly and avoid silicone types Apiezon L grease is recommended Varian P N 695400004 When removing checking or replacing O rings CAUTION Remove O rings carefully with your fingers Do not use metal tools which could scratch the sealing surfaces Do not use alcohol methanol or other solvents on O rings To do so causes ...

Страница 123: ...heduled maintenance functions in this section are grouped by recommended frequency as shown in Table 4 1 based on assumed everyday use The 947 948 960 operates at its peak when maintenance preventive procedures are performed at their scheduled intervals Read the pump manuals that came with your 947 948 960 leak detector for more complete maintenance information specific to the pumps See Spare Part...

Страница 124: ... page 4 34 TC1 gauge needs replacement as indicated by the fact that Test port pressure does not come down atmosphere indication when start button is pushed test mode assuming no leaks Test port pressure comes down slightly 1 4 to 1 2 scale when test port plug is installed once again assuming no leaks can be heard or seen gross leak TC2 gauge needs replacement as indicated by the fact that Spectro...

Страница 125: ...specifications cannot be met Manual Tuning is required Manual Tuning is restricted to trained qualified customer technicians Contact Varian Vacuum Technologies Customer Service at 1 800 8VARIAN if manual tuning is necessary 4 1 1 1 Leak Checking The accuracy reliability and stability of any mass spectrometer leak detector depends on the leak free integrity of its own vacuum system Inherent helium ...

Страница 126: ...k checks are completed 2 If vent grooves exist at flanges or other assembled seals apply helium to these points rather than spraying a general area to Obtain the most positive response Minimize the use of helium Save time in checking 3 Locate and repair large leaks before attempting to locate extremely small leaks 4 Limit the search to a general area of the test piece by isolation methods to short...

Страница 127: ... stated on its label Failure to check the leak could result in unreliable testing You can arrange for testing and re calibration at a lab of your choice Varian Vacuum Technologies provides NIST traceable calibrated leak testing and verification services Contact Customer Service at 1 800 8VARIAN to arrange for re calibration 4 2 2 1 Removing the Internal Calibrated Leak The calibrated leak is locat...

Страница 128: ...er to Liquid Nitrogen Cold Trap Models 948 960 only on page 4 10 2 Remove the top panel of the 947 948 960 3 Vent the turbo by turning the knurled nut on the turbo pump turn clockwise and then close it 4 Loosen the thumbscrew on the top of the cross bar by turning it clockwise but do not remove it completely 5 Grasp the calibrated leak and pull it straight back to remove it 6 If the O ring and cen...

Страница 129: ...the centering ring onto the calibrated leak 4 Insert the calibrated leak into the cavity orienting the leak so the value can be read easily NOTE To ensure reliable testing after servicing any part of the vacuum system the 947 948 960 must be leak checked again Refer to Leak Checking on page 4 5 for guidelines 5 Replace the top panel and connect mains power 6 Turn the leak detector on and wait for ...

Страница 130: ...ap to vent the trap 3 Don protective gear such as loose fitting gloves and eye or face shield and remove the cold trap WARNING Liquid nitrogen causes burns upon contact 4 Clean the trap with soap and water only after it has warmed up to room temperature 5 Rinse it well and dry it completely inside and out using a lint free cloth CAUTION The outside of the cold trap must be completely dry or ice wi...

Страница 131: ...chuhe und Augen bzw Gesichtsschutz und entfernen Sie die Kühlfalle WARNUNG Flüssigstickstoff verursacht Verbrennungen durch Berührung 4 Reinigen Sie die Falle erst dann mit Seife und Wasser wenn sie Raumtemperatur erreicht hat 5 Spülen Sie die Falle gut aus und reiben Sie die Innen und Außenflächen mit einem fuselfreien Tuch vollkommen trocken VORSICHT Die Außenflächen der Kühlfalle müssen vollkom...

Страница 132: ...ap Models 948 960 only on page 4 10 for the procedure to empty the Cold Trap steps 1 2 and 3 Do not refill the Cold Trap until service is complete There are three basic sub assemblies in the spectrometer tube Ion Source Preamplifier Magnetic Poles Table 4 3 lists the tools and parts required during spectrometer tube overhaul Table 4 3 Tools and Parts Required for Spectrometer Tube Overhaul Tools S...

Страница 133: ... 960 only on page 4 10 for the procedure to empty the Cold Trap steps 1 2 and 3 Do not refill the Cold Trap until service is complete To remove the spectrometer tube 1 Insert the plug in the test port and tighten the test port securely 2 Shut down the leak detector via the Main switch circuit breaker on the rear of the lower cabinet 3 Disconnect power from the leak detector 4 Remove the lower fron...

Страница 134: ... must be pushed to unlock the connector then pull the connector to the right to remove it Figure 4 2 947 948 960 Spectrometer Tube Removal 7 Hold the spectrometer tube and loosen the wing nut holding the KF clamp 8 Remove the clamp that holds the spectrometer tube to the Service Block Assembly SBA 9 Rock the tube to slowly break any residual vacuum 10 Place the spectrometer tube and O ring on a cl...

Страница 135: ...er tube body 6 Firmly but gently separate the flange cap from the ion source 7 Remove both the O ring on the ion source and the ion source 8 Remove the ground slit plate from the ion source cavity with a long thin screw holding screwdriver 9 Remove the four slotted screws on each side of the spectrometer tube body and slip out both deflection pole pieces The deflection pole pieces are interchangea...

Страница 136: ...n a tightly sealed container Wash hands thoroughly after handling the Ion Source and especially before smoking or eating CAUTION Do not use methanol or other solvents on O rings To do so causes deterioration and reduces their ability to hold a vacuum Do not clean any aluminum parts with Alconox Alconox is not compatible with aluminum and will cause damage 1 1 12 ...

Страница 137: ...tep 8 and Figure 4 6 on page 4 20 for step 9 through step 13 1 Place a new metal seal on the collector housing assembly with the ends of the seal crossed under one of the screw holes Figure 4 4 View A 2 Mount the collector housing assembly to the spectrometer tube body with the four socket head cap screws sized 8 32 3 Tighten all four screws in an opposing sequence until a 0 007 clearance is attai...

Страница 138: ... Figure 4 5 Spectrometer Tube Reassembly Ground Slit Plate 7 With the new O rings on each of the two deflection pole pieces insert the pole pieces into the spectrometer tube body tighten the four slotted screws on each side of the spectrometer tube and note the positions of both the roll pin in the body and the notch in the pole piece flange used for alignment A A A A ...

Страница 139: ...he guide hole Ensure that pins 1 and 8 are parallel to the side wall of the spectrometer tube as shown in Figure 4 6 on page 4 20 View A Tighten the flange cap evenly and firmly with the four Phillips head screws CAUTION A short could result at power up if the alignment pin touches the sides of the alignment hole 10 Fit the magnet assembly back onto the spectrometer tube body 11 With the grounding...

Страница 140: ...Models 947 948 and 960 Leak Detectors Operations and Service Manual 4 20 Figure 4 6 Spectrometer Tube Reassembly Magnet Assembly A A ...

Страница 141: ... refill the Cold Trap until service is complete To reinstall the spectrometer tube 1 Place the cleaned new ungreased centering ring and O ring on the vacuum flange of the spectrometer tube 2 Hold the spectrometer tube in place and attach the KF clamp and tighten as required 3 Reconnect the four electrical connections that were disconnected from the spectrometer tube Pay special attention when atta...

Страница 142: ... removal of the front lower panel exposes the air filter as shown in Figure 4 8 When buildup of dirt dust or other contaminants is apparent replace the filter with a commercial filter size 16 x 20 x 1 Figure 4 8 Air Filter Replacement Front lower panel Removable front panel of the 947 948 960 Air filter Commercial filter 16 x 20 x 1 The air filter should be replaced at least every 12 months to ens...

Страница 143: ... preamplifier Both procedures require that calibration tuning and leak checking be performed prior to using the 947 948 960 for testing CAUTION Use powder free butyl or polycarbonate gloves to prevent skin oils from getting on vacuum surfaces The preamplifier is a static sensitive device Wear a grounding device while the preamplifier is being handled WARNING Store the Ion Source in a cool dry area...

Страница 144: ...ctor to the heater and the suppressor a When attaching the locking connector Figure 4 9 press the tabs on the sides of the connector b Push the connector onto its mating part c Slide the tabs to lock the connector in place Figure 4 9 947 948 960 Spectrometer Tube Installation NOTE To ensure reliable testing after servicing any part of the vacuum system the 947 948 960 must be leak checked again Re...

Страница 145: ...d Nitrogen Cold Trap using the procedure described in Liquid Nitrogen Cold Trap Models 948 960 only on page 4 10 Follow all warnings and cautions in the procedure 8 Calibrate and tune the 947 948 960 using the procedure described in Re calibrate the Internal Calibrated Leak on page 4 7 9 Leak check the assembly before using the 947 948 960 for testing ...

Страница 146: ...lock to replace the TC1 thermocouple gauge To replace the TC1 gauge in the Main Valve Block Assembly MVBA 1 Press the VENT button on the front panel to vent the leak detector 2 Disconnect the mains power supply and make sure all pumps are off 3 Grasp the plug and remove the plug and the thermocouple gauge from the valve block Figure 4 10 4 Disconnect the plug from the thermocouple gauge 5 Remove t...

Страница 147: ...any dirt or foreign matter from the backing ring otherwise wipe it with a lint free cloth 9 Place the backing ring and then the O ring onto the end of the new thermocouple gauge and move them down toward the gauge as far as they will go 10 Place the plug connector onto the thermocouple gauge The center post is keyed so it only goes on one way 11 Insert the thermocouple gauge into the valve block m...

Страница 148: ...p until service is complete Figure 4 11 shows the valve block removed from the system To replace the TC2 gauge in the Service Block Assembly SBA 1 Press the VENT button on the front panel to vent the leak detector 2 Disconnect the mains power supply and make sure all pumps are off 3 Models 948 960 only Empty the LN2 Cold Trap Refer to the warnings listed above NOTE It is not necessary to remove th...

Страница 149: ...hand tighten it fully 11 Place the O ring onto the centering ring and onto the flange of the SBA 12 Place the adapter against the center ring 13 Replace the KF25 clamp and tighten the wing nut fully 14 Place the plug connector onto the thermocouple gauge The center post is keyed so it only goes on one way 15 Models 948 960 only Refill the Cold Trap using the procedure described in Liquid Nitrogen ...

Страница 150: ...rform this procedure 1 Verify that the leak detector is in the READY condition the NOT READY LED is not illuminated and that the test port plug is in place 2 If the system is not already in VENT mode press the VENT button Verify that the VENT LED is illuminated 3 Wait approximately five minutes for the vacuum system pressure to stabilize 4 On the Service Pendant press shift and the SY TC ZERO key ...

Страница 151: ... 960 3 Wait for the system NOT READY LED to illuminate 4 Open the turbo vent screw located on the side of the turbo pump housing 5 On the Service Pendant press shift and the SY TC ATM key The Pendant screen confirms that the calibration was successful by displaying the OK prompt The Pendant screen displays FAILED before the OK prompt indicating that the calibration was not successful This could be...

Страница 152: ...ss the VENT button and verify that the VENT LED is illuminated 3 Remove the plug from the test port and place a T Manifold 1 1 8 inches 28 mm OD into the test port 4 Attach a Tuning Leak Varian P N K1608301 and a 531 Thermocouple Gauge Tube Varian P N F0472301 as a reference TC to the T manifold 5 Connect the reference TC to an 801 Thermocouple Gauge Controller For 120 VAC order Varian P N F273930...

Страница 153: ... fully Remove the PC and connect the Service Pendant Perform the next part of the calibration procedure Atmospheric Calibration 4 2 8 7 Atmospheric Calibration To perform atmospheric calibration 1 If the system is not already in VENT mode press the VENT button and verify that the VENT LED is illuminated 2 Wait approximately ten seconds for the test port pressure to stabilize 3 On the Service Penda...

Страница 154: ...gh pump and Forepump are equipped with an oil level sight glass that can be viewed when the front lower panel cover is removed Figure 4 12 Refer to your pump manual for the proper oil level If it is low fill it to the proper level with Varian Vacuum Technologies pump oil part no 695409005 Figure 4 12 Rough Pump and Forepump Oil Level Check Oil level view port ...

Страница 155: ...ing the leak detector be sure to turn the leak detector off disconnect it from mains power and for Models 948 960 remove and empty the cold trap 4 2 10 1 Removing the Test Port CAUTION If cleaning the test port in conjunction with performing other service procedures turn the leak detector off disconnect mains power and for Models 948 960 remove and empty the cold trap Heed all warnings and caution...

Страница 156: ...tenance procedure requiring that O rings be removed 3 Before re using O rings or installing new O rings wipe them down with a lint free cloth before installation to ensure that no foreign matter is present to impair the seal 4 If applicable apply a small amount of Apiezon L grease and wipe the O rings shiny dry CAUTION Remove O rings carefully with your fingers Do not use metal tools for this task...

Страница 157: ...t tight enough to stay in place 4 Place the test port plug into the test port tightening nut making sure it is completely seated 5 Tighten the test port tightening nut completely 4 3 Spare Parts Spare and exchange parts are available in the kits listed on the following pages Contact Varian Vacuum Technologies to order parts at 1 800 8VARIAN 4 3 10 4 Exchange Assemblies NOTE Varian Vacuum Technolog...

Страница 158: ... Replacement Parts Part Part Number Where Used Spectrometer Tube Assembly K9735301 947 948 960 Service Block piece part R0028001 947 948 960 Main Block piece part K9614301 947 948 960 Gross Leak Assembly R1498301 947 948 960 Magnet Yoke Assembly K9814301 947 948 960 Cold Trap Assembly L9472301 948 960 Vacuum Valve K9615301 947 948 960 Solenoid 2 way 24 VDC V3 or V4 626571010 947 948 960 Brass Valv...

Страница 159: ...lle 4 7 Ersatzteile Teil Teilnummer Einsatzort Spektrometerrohr Einheit K9735301 947 948 960 Wartungsblock Teilstück R0028001 947 948 960 Hauptblock Teilstück K9614301 947 948 960 Grobleck Einheit R1498301 947 948 960 Magnetjoch Einheit K9814301 947 948 960 Kühlfallen Einheit L9472301 948 960 Vakuumventil K9615301 947 948 960 Solenoid 2 Weg 24 VDC V3 oder V4 626571010 947 948 960 Messingventil 3 W...

Страница 160: ...Models 947 948 and 960 Leak Detectors Operations and Service Manual 4 40 ...

Страница 161: ...ly lists error conditions in Table 5 1 on page 5 2 on the Leak Rate Exponent display item 9 in Figure 1 3 on page 1 6 To begin Verify that the leak detector is plugged into an appropriately powered and properly grounded receptacle Verify that all plugs and connectors are firmly seated spectrometer tube electronic cables pumps and power supplies For information about pumps shipped with your 947 948...

Страница 162: ...Maintenance Replace ion source if necessary c5 Auto calibrate function is out of range Leak detector requires maintenance Notify Varian Vacuum Technologies Customer Service c6 Auto tune function is out of range Tap the AUTO CAL button A brief tap may clear this code to allow the leak detector to operate If this clears c6 then the leak detector is operable If c5 appears with c6 it is the priority c...

Страница 163: ...read correctly high test port pressure reading Clean TC gauge If problem persists replace TC gauge Models 948 960 only Excessive moisture in the cold trap Dry out the cold trap A warm up period is necessary Electrical Components No power no lights on panel ON OFF switch of the rear panel is not ON Verify that the switch is ON Power cable is disconnected Verify that the power cable is plugged in So...

Страница 164: ...p manifold or vacuum lines are leaking Check for leaks Pump drain plugs are loose Tighten the drain plugs Turbo pump not running No power Check the outlets power switch and circuit breakers Leaks Tighten KF clamps Check the Forepump manifold or vacuum lines for leaking Verify that the system pressure bar graph is at minimum Verify that the thermocouple gauges TC1 and TC2 are in place and secure Ve...

Страница 165: ...enquelle ersetzt werden c5 Automatische Kalibrierung liegt außerhalb des Bereichs Der Lecksucher muss gewartet werden Setzen Sie sich mit dem Kundendienst von Varian Vacuum Technologies in Verbindung c6 Automatische Feineinstellung liegt außerhalb des Bereichs Klopfen Sie leicht auf die AUTO CAL Taste Ein kurzes Klopfen kann diesen Fehlerzustand beheben und den Betrieb des Lecksuchers ermöglichen ...

Страница 166: ...uchen Sie auf Lecks beheben Sie gefundene Lecks und wechseln Sie dann das Öl Tritt der Zustand erneut auf nehmen Sie Bezug auf das Pumpenhandbuch Das Öl der Vorvakuumpumpe ist verfärbt oder auf der Oberfläche des Öls hat sich Schaum gebildet und auf dem Prüfport Druckmesser wird 100 mTorr angezeigt Schmutziges Öl Wechseln Sie das Öl Siehe Pumpenhandbuch Untersuchen Sie auf Lecks beheben Sie gefund...

Страница 167: ...icht richtig angeschlossen Schließen Sie das Kabel an Vergewissern Sie sich das es nicht ausgefranst oder locker ist Heizerkabel ist nicht richtig angeschlossen Schließen Sie das Kabel an Vergewissern Sie sich das es nicht ausgefranst oder locker ist Mechanische Komponenten Pumpen laufen nicht Netzkabel ist nicht angeschlossen Prüfen Sie die Pumpennetzkabel und dass die Netzkabel der 947 948 960 r...

Страница 168: ...ft nicht Kein Strom Prüfen Sie Ausgänge Stromschalter und Trennschalter Lecks Ziehen Sie die KF Klemmen an Vorvakuumpumpen Manifold oder Vakuumleitung ist undicht Verifizieren Sie dass das Systemdruck Balkendiagram m den Mindestwert anzeigt Verifizieren Sie dass die Thermoelement Messgeräte TC1 und TC2 angebracht und sicher sind Verifizieren Sie dass das handbetätigte Ventil geschlossen ist Für de...

Страница 169: ... 1 Keypad Functions Figure A 1 shows the service pendant keypad Glossary of Function Keys on page A 3 explains the keys that perform special functions when entering information Glossary of Input and Data Keys on page A 3 explains the remaining keys which are used to input or show data Figure A 1 Service Pendant Keypad ...

Страница 170: ...ject set point value and see if it is enabled on or off Press 1 the number of the reject set point you want to display i e 1 though 4 Press The currently enabled set point is displayed along with its value and on or off On indicates that the displayed set point is enabled 2 Set reject set point 1 value to 5 5E 5 NOTE The pendant will display exponential values to 2 characters However the single di...

Страница 171: ...values such as in rangestop CANCEL Erases an entry if a mistake is made All digits from 2 to 9 and zero Enters the digit pressed RAW DTA 1 Enters the digit 1 SET RNG ST SHOW Displays the value of the range stop the lowest decade that the leak detector will show on the bar graph SHIFT SET RNG ST SHOW Sets the value of the range stop the lowest decade that the leak detector will show on the bar grap...

Страница 172: ...y VER B LITE Switches the display backlight If on turns it off If off turns it on SHIFT VER B LITE Displays the version date and checksum of the installed software V FOC SHOW RPLR Displays the value of the Repeller Voltage in the Ion Source SHIFT V FOC SHOW RPLR Displays the value of the Variable Focus Voltage in the Ion Source EMIS SHOW GAIN Displays the value of the System Gain SHIFT EMIS SHOW G...

Страница 173: ...ts a temporary new value for Ion Voltage Enter XXX the desired value then the function key SHIFT INIT ION V PUT Sets a permanent new value for Ion Voltage Enter XXX the desired value followed by the SHIFT key then the function key INIT V FOC PUT Sets a temporary new value for Variable Focus Voltage Enter XXX the desired value then the function key SHIFT INIT V FOC PUT Sets a permanent new value fo...

Страница 174: ...followed by the SHIFT key then the function key ZERO TP TC ATM Initiates an atmosphere calibration of the Test Port TC SHIFT ZERO TP TC ATM Initiates a zero calibration of the Test Port TC ZERO SY TC ATM Initiates an atmosphere calibration of the System TC SHIFT ZERO SY TC ATM Initiates a zero calibration of the System TC SET TST TM SHOW Displays the value of the Auto Sequencer Test Time SHIFT SET...

Страница 175: ...en press the function key SET STD LK SHOW Displays the leak rate value to which the leak detector calibrates SHIFT SET STD LK SHOW Sets the leak rate value to which the leak detector calibrates Enter X XE X the desired value followed by the SHIFT key then the function key REJ3 SET REJ 1 Sets the leak rate value for Reject Set Point 1 Enter X XE X the desired value then the function key SHIFT REJ3 ...

Страница 176: ...Models 947 948 and 960 Leak Detectors Operations and Service Manual This page intentionally left blank ...

Страница 177: ...for service heed the following WARNING Disconnect power from the 947 948 960 before performing any maintenance procedure that requires physically disconnecting any part of the system CAUTION Models 948 960 only Remove empty and clean the cold trap whenever power is removed Refer to Liquid Nitrogen Cold Trap Models 948 960 only on page 4 10 CAUTION Many components of the 947 948 960 are static sens...

Страница 178: ...shelf 1 Loosen the screws of the service pendant serial connection and remove the connection Figure B 1 NOTE The service pendant power cable is still attached to the electronics housed beneath the pendant shelf 2 Place the service pendant on the top of the 947 948 960 or on another nearby surface Figure B 1 Removing the Service Pendant Shelf 3 Use a Phillips head screwdriver to remove the screws l...

Страница 179: ...pendant shelf using the procedure described in Removing the Service Pendant Shelf on page B 2 3 Remove the 3 8 nuts located under the front corners of the frame of the chassis Figure B 2 Figure B 2 The Top Panel at the Rear of the Turret 4 Loosen the test port tightening nut and remove it 5 Remove the test port plug Figure B 3 the test port compression ring and the O ring from the top of the test ...

Страница 180: ...eplacing the Service Pendant Shelf To replace the service pendant shelf 1 Place the shelf into the turret guiding the power wire through the area beside the shelf near the serial connection 2 Replace the screws at either side of the shelf and tighten them using a Phillips head screwdriver 3 Plug the service pendant serial plug into the connection at the side of the turret and tighten the screw 4 P...

Страница 181: ...lace the top cover onto the frame fitting it around the front of the chassis the start and stop button panel the test port and the upper back of the turret 2 Working at the rear of the leak detector place the two 3 8 nuts onto the screws located in the back corners under the upper frame and tighten them fully 3 Working from the front of the leak detector replace the three 5 16 nuts under the front...

Страница 182: ...stment procedures WARNING Store the Ion Source in a cool dry area in a tightly sealed container Wash hands thoroughly after handling the Ion Source and especially before smoking or eating CAUTION Use powder free butyl or polycarbonate gloves to prevent skin oils from getting on vacuum surfaces To replace the ion source 1 Remove the spectrometer tube from the leak detector as described in Removing ...

Страница 183: ... in accordance with local regulations or return it to Varian Vacuum Technologies for exchange 6 Remove the ground slit plate by placing a thin slotted screwdriver into the slot and carefully twisting and prying with the screwdriver 7 Place the ground slit plate on a clean surface 8 Using the Scotch Brite pad from the spectrometer tube cleaning kit polish away any discolored areas Inside the spectr...

Страница 184: ...move he ground slit plate and using a screwdriver bend the prongs out slightly Then place it into the cavity again CAUTION A short could result at power up if the alignment pin touches the sides of the alignment hole 13 Wipe the new O ring and mating surfaces with a clean lint free cloth and place the new ion source in its cavity Place the locating pin so that it falls in the center of the guide h...

Страница 185: ...ump and two mechanical pumps a forepump and a rough pump B 3 1 Turbo Pump The turbo pump Figure B 6 is located in the middle front of the main cabinet You must remove connections to the valve block spectrometer tube and power to remove the turbo pump Figure B 6 Location of the Turbo Pump Turbo Pump hidden behind fan Rough Pump Forepump ...

Страница 186: ...ting any part of the system CAUTION Models 948 960 only Remove empty and clean the cold trap whenever power is removed Refer to Liquid Nitrogen Cold Trap Models 948 960 only on page 4 10 2 Remove the side panel 3 Disconnect the power from the turbo pump by pushing the green sleeve on the end of the connector in and then turning the sleeve to release the connector Figure B 7 Figure B 7 Turbo Power ...

Страница 187: ...wo pink connectors labeled 1 and 2 If the connections are not fully labeled label them now Figure B 8 Figure B 8 The Turbo Power Connection 5 Loosen the radiator clamp screw and remove the fan from the turbo pump Figure B 9 Figure B 9 Radiator Clamp holding Fan to Turbo Fan Power Connectors Bracket Screw Claw Clamp ...

Страница 188: ...line connection Figure B 7 on page B 10 Remove the foreline centering ring and O ring and place them on a clean surface 9 Remove the turbo pump 10 Remove the ISO50 centering ring and O ring and place them on a clean surface B 3 1 2 Replacing the Turbo Pump Before you replace the turbo pump examine and clean all O rings centering rings clamps and the SVBA B 3 1 2 1 Examining and Cleaning Centering ...

Страница 189: ...cedure 1 Place the O ring on the ISO50 centering ring 2 Place the centering ring against the top of the turbo pump 3 Hold the turbo pump against the SVBA oriented so that the flange for the foreline connection is in line with the foreline 4 While supporting the pump with one hand place the four ISO single claw clamps onto the corners of the SVBA Figure B 9 on page B 11 insert the bolts and then ti...

Страница 190: ...ot connected already 12 Place the turbo fan assembly against the turbo pump oriented so that the fan is on the front of the pump with the guard facing outward 13 Place the radiator clamp around the turbo pump Tighten the radiator clamp screw fully CAUTION To ensure reliable testing after servicing any part of the vacuum system the 947 948 960 must be leak checked again Refer to Leak Checking on pa...

Страница 191: ...side of the main cabinet Figure B 10 shows the front view of wet and dry pump configurations WARNING To avoid injury use proper lifting techniques when moving pumps Your system may have pumps that require two people to move them safely Before replacing the rough pump Refer to the appropriate pump operations manual Ensure that the replacement pump is either the same one as you are replacing or a pu...

Страница 192: ...3 Remove the right side panel 4 Disconnect the pump power plug from the 947 948 960 5 Drain the oil according to the pump manual instructions 6 If you are replacing the pump as part of a Varian exchange program return it in accordance with the program or discard it in accordance with all applicable regulations NOTE Varian Vacuum Technologies will not accept any part for return without both a prope...

Страница 193: ... the bolts that connect the pump to the bottom of the main cabinet Figure B 10 on page B 15 NOTE You may have to loosen the radiator clamps on the tygon tubing and slide it up the line to remove the pump 14 Remove the pump from the 947 948 960 B 4 1 1 1 Replacing the Wet System Rough Pump Before you replace the wet mechanical pump examine and clean all O rings centering rings clamps and the manifo...

Страница 194: ...cabinet aligning the holes in the pump over the mounting holes in the floor of the cabinet 3 Working from beneath the cabinet place the bolts into the mounting holes replace the nuts but do not tighten them fully You may have to shift the pump a bit when making the connections 4 Place the centering ring and O ring onto the pump outlet flange on the left side of the pump 5 Place the manifold agains...

Страница 195: ...ormed before closing the panels or powering up the pump CAUTION To ensure reliable testing after servicing any part of the vacuum system the 947 948 960 must be leak checked again Refer to Leak Checking on page 4 5 for guidelines 15 Replace the front and side panels 16 Reconnect the mains power supply 17 Turn the leak detector on and wait for the system to be ready Allow the pumps to warm up if th...

Страница 196: ...y have pumps that require two people to move them safely 2 Remove the front panel 3 Remove the right side panel 4 Disconnect the power plug of the pump from the 947 948 960 The plug is located behind the turbo and is best accessed from the right panel 5 Remove the NW25 clamp from the left manifold 6 Remove the centering ring and O ring and place them on a clean surface 7 Remove the NW25 clamp from...

Страница 197: ... 10 on page B 15 placing the mounting bolts into the holes in the floor of the cabinet 3 Place the centering ring and O ring against the pump outlet on the left side of the pump 4 Place the manifold against the centering ring 5 If necessary shift the pump so that the connection is clean and there is no strain on the manifold 6 Place the NW25 clamp onto the connection and tighten fully 7 Place the ...

Страница 198: ... 947 948 960 using the procedure described in Re calibrate the Internal Calibrated Leak on page 4 7 18 Leak check the assembly before using the 947 948 960 for testing B 5 Replacing the Forepump B 5 1 Wet This section includes procedures for replacing forepumps in wet systems Removing the Wet System Forepump on page B 23 and forepumps in dry systems Removing the Dry System Rough Pump on page B 20 ...

Страница 199: ... left side panel 4 Unplug the power plug of the pump from the 947 948 960 5 Drain the oil following the instruction included in the pump manual 6 Remove the NW25 clamp from the left manifold 7 Remove the centering ring and O ring and place all connections where the oil will not contaminate other parts 8 Loosen the lower radiator clamp holding the tygon tubing around the bottom section of the forel...

Страница 200: ...en moving pumps Your system may have pumps that require two people to move them safely To perform this procedure 1 Ensure the area is clean for the new pump 2 Place the new pump in the 947 948 960 oriented as shown in Figure B 10 on page B 15 placing the mounting bolts into the mounting holes in the bottom of the cabinet 3 Place the lower section of the foreline into the tygon hose section to meet...

Страница 201: ...ting after servicing any part of the vacuum system the 947 948 960 must be leak checked again Refer to Leak Checking on page 4 5 for guidelines 15 Replace the front panel 16 Replace the side panel 17 Reconnect the mains power supply 18 Turn the leak detector on and wait for the system to be ready Allow the pumps to warm up if the detector has been off for some time 19 Models 948 960 only Once the ...

Страница 202: ...rap Models 948 960 only on page 4 10 WARNING To avoid injury use proper lifting techniques when moving pumps Your system may have pumps that require two people to move them safely 2 Remove the front panel 3 Remove the right side panel 4 Disconnect the power plug of the pump from the 947 948 960 The plug is located behind the turbo and is best accessed from the right panel 5 Remove the NW25 clamp f...

Страница 203: ...d 2 Remove the centering ring and O ring and place them on a clean surface B 5 2 1 4 Removing the Pump from the Cabinet To perform this procedure 1 Working from beneath the main cabinet remove the four nuts from the mounting bolts that connect the pump to the bottom of the main cabinet Figure B 10 on page B 15 NOTE You may have to loosen the radiator clamps on the tygon tubing and slide it up the ...

Страница 204: ...p outlet on the left side of the pump 4 Place the manifold against the centering ring If necessary shift the pump so that the connection is clean and there is no strain on the manifold 5 Place the NW25 clamp onto the connection and tighten fully B 5 2 2 3 Connecting the Nitrogen Purge Pump To perform this procedure 1 Replace the VPI valve 2 Attach the NW25 clamp to the top of the pump 3 Connect th...

Страница 205: ... reliable testing after servicing any part of the vacuum system the 947 948 960 must be leak checked again Refer to Leak Checking on page 4 5 for guidelines 3 Replace the front panel 4 Replace the side panel 5 Reconnect the mains power supply 6 Turn the leak detector on and wait for the system to be ready Allow the pumps to warm up if the detector has been off for some time NOTE Allow a new pump t...

Страница 206: ...Models 947 948 and 960 Leak Detectors Operations and Service Manual This page intentionally left blank ...

Страница 207: ...ands for the controlling device to set the current state or value of a volatile leak detector parameter Words that begin with INIT are commands for the controlling device to set non volatile leak detector parameters Other commands do not require a parameter do not begin with any special character s and simply do what they say they do Successful inquiries respond with data as specified in the follo...

Страница 208: ...oltage IONCHAMBER 269 1 Reports the ion chamber voltage VARIABLEFOCUS 235 4 Reports the variable focus voltage REPELLER 402 2 Reports the repeller voltage FIXEDFOCUS 212 7 Reports the fixed focus voltage SUPPRESSOR 145 0 Reports the suppressor voltage EMISSIONCURRENT 1 040Reports the emission current OFFSET 59 Reports the preamp offset index GAIN 2 5 Reports the leak rate gain factor AZ 0 A string...

Страница 209: ...Each line begins with a CR LF First line Consists of the words test port followed by a number of mTorr Second line Consists of the words system TC followed by a number of mTorr RANGESTOP A string of three characters that tells the most sensitive range exponent when the auto range function is operating REJECT A nine character string consisting of a one digit reject number 1 2 3 4 a space a two digi...

Страница 210: ...sting of a two digit calibration standard leak rate mantissa with a decimal point after the first digit followed by E then by a two digit number which is the calibration standard leak rate range exponent e g 1 3E 07 This inquiry is used for reporting the calibration standard leak rate that was most recently input using INIT STDLEAK SUPPRESSOR Reports the suppressor voltage The format is SUPPRESSOR...

Страница 211: ...INIT FL XFER Sets the minimum pressure in Torr that must be attained to transfer from gross leak to fine leak test A seven character string two mantissa digits with a decimal point between them E and a three character signed exponent e g 5 0E 02 INIT FOCUS Sets the variable focus voltage of the ion source A three digit number of volts in the range 100 to 250 INIT GAIN Sets the gain used for adjust...

Страница 212: ...h a decimal point after the first digit E and a single digit which is the leak rate range exponent Values outside the working range of the leak detector are not stored INIT TEST A one to three digit number of seconds of maximum testing time for auto sequencer operation Table C 3 Spectrometer Operating Parameters Command Response PUT EMISSION Sets the emission current of the ion source A four digit...

Страница 213: ...EEP Causes the leak detector to close most valves and enter the HOLD state No parameters ROUGH Causes the leak detector to begin a roughing and testing sequence No parameters SYTCATM Sets the current system thermocouple reading to represent atmospheric pressure Success is indicated by the normal ok response SYTCZERO Sets the current system thermocouple reading to represent a pressure that is too l...

Страница 214: ...Models 947 948 and 960 Leak Detectors Operations and Service Manual This page intentionally left blank ...

Страница 215: ... Interface J120 The discrete I O DB37 connector is used to control operations via a PLC Table D 2 provides details about this connection Table D 1 Service Serial Interface J1 Pin Signal Name Description Input Output 2 DATA IN Data to the leak detector from a PC Service Pendant Input 3 DATA OUT Data from the leak detector to a PC Service Pendant Output 5 DATA GROUND Signal Return System Ground 9 De...

Страница 216: ... Range Active High Automatically changes the exponent to keep the reading in range Input 14 Hold Not used Input 15 Filament Fault Active High Active when the selected ion source filament is non functional Output 16 Not Ready Active High Not ready to run possible fault Output 18 CAL OK Active High Active when last CALIBRATE successful Output 19 Zeroing Active High Active when Auto Zeroing Output 21...

Страница 217: ...Rate Update Pulse Output Leak rate is updated on falling edge and is stable as long as output is low Output Mantissa 3 LSD A Active High BCD Leak Rate Output 4 LSD B Active High BCD Leak Rate Output 5 LSD C Active High BCD Leak Rate Output 6 LSD D Active High BCD Leak Rate Output 7 MSD A Active High BCD Leak Rate Output 8 MSD B Active High BCD Leak Rate Output 9 MSD C Active High BCD Leak Rate Out...

Страница 218: ... Table D 5 provides details about this connection Table D 4 Optional Interface J122 for Optional Universal Remote Control Pin Name Signal Description Output Input Level 1 Shield System Ground 2 DATA IN Data to the host from a Remote Control Input Logic 3 DATA OUT Data from the host to a Remote Control Output Logic 5 24 VDC RET 24 Volt Return System Ground 8 DATA GROUND Digital Ground System Ground...

Страница 219: ...a Flow Contra Flow with Cold Trap Cold Trap Capacity N A Liquid nitrogen hold for 14 hours after vacuum system cool down Helium Sensitivity atm cc sec 2 x 10 10 2 x 10 9 2 x 10 10 2 x 10 9 Response Time Less than two seconds for helium in accordance with AVS Standard 2 1 Amplifier Drift Less than 2 of full scale of the most sensitive range in accordance with AVS Standard 2 1 Noise level Less than ...

Страница 220: ...d service pendant atmospheric gross leak external calibrated helium Leaks Recommended Ambient Operating Conditions Indoor use Altitude up to 2000 m Temperature 10 C to 38 C 50 F to 100 F Maximum relative humidity HR 80 for temperatures up to 31 C 87 8 F decreasing linearly to 50 HR at 40 C No hoarfrost dew percolating water rain solar irradiation etc Atmospheric air pressure 75 kPa to 106 kPa Poll...

Страница 221: ...20300M220 V70D DS 302 DS 202 947 MacroTorr LD L94720450M120 L94720450M220 V70D DS 402 DS 202 947D Turbo Dry LD D94735350T120 D94735350T220 V70 TriScroll 300 TriScroll 300 947D Turbo Dry LD D94735550T120 D94735550T220 V70 TriScroll 600 TriScroll 300 947D MacroTorr Dry LD D94735350M120 D94735350M220 V70D TriScroll 300 TriScroll 300 947D MacroTorr Dry LD D94735550M120 D94735550M220 V70D TriScroll 600...

Страница 222: ... Typ luftgekühlt wartungsfrei V70 Turbo Pumpleistung N 2 70 l s V70D MacroTorr Pump leistung N 2 60 l s V70 Turbo Pumpleistung N 2 70 V70D MacroTorr Pumpleistung N 2 60 l s Grob Vorvakuumpumpe Nass auf Ölbasis Trocken Nass auf Ölbasis Trocken Nass auf Ölbasis Grobvakuumpumpe Typ Freie Luftverdrängung DS 202 DS 302 DS 402 TriScroll DS 202 DS 302 DS 402 TriScroll DS 202 DS 302 DS 402 DS 202 DS 302 D...

Страница 223: ...ker Programmierter Warmlauf verringert die erforderliche Zeit zur Inbetriebnahme auf 30 Minuten Die Temperatur des Rohrs bleibt durchgehend konstant um die Stabilität fortwährend zu wahren Die Ionenquelle verfügt über doppelte Glühfäden aus haltbarem thoria beschichtetem Iridium Automatische Ventilfolge Mikroprozessor gesteuerte Ventilbetätigung gewährleistet automatischen Systemzyklus Die Prüf un...

Страница 224: ...ingangsstrom Einrichtung kann vom Kunden nicht modifiziert werden Übereinstimmung mit Normen Erfüllt die jeweiligen UL CSA und CE Normen Abmessungen 559 cm B x 818 cm T x 1138 cm H Versandgewicht Ca 232 kg Table E 4 947 948 960 Model Types and Part Numbers Vakuumsystempumpen Netzstromversorgung 50 60 Hz 115 VAC 230 VAC Hohes Vakuum Niedriges Vakuum Modell Teil Nr Modell Teil Nr Turbo MacroTorr Gro...

Страница 225: ...D mit Kühlfalle 948 TURBO LD L94820200T120 L94820200T220 V70 DS 202 DS 202 948 TURBO LD L94820300T120 L94820300T220 V70 DS 302 DS 202 948 TURBO LD L94820450T120 L94820450T220 V70 DS 402 DS 202 948 MacroTorr LD L94820200M120 L94820200M220 V70D DS 202 DS 202 948 MacroTorr LD L94820300M120 L94820300M220 V70D DS 302 DS 202 948 MacroTorr LD L94820450M120 L94820450M220 V70D DS 402 DS 202 960 mit Kühlfal...

Страница 226: ...roll 300 TriScroll 300 und V70D D96035550T120 D96035550T220 V70 TriScroll 600 TriScroll 600 und V70D Table E 4 947 948 960 Model Types and Part Numbers Continued Vakuumsystempumpen Netzstromversorgung 50 60 Hz 115 VAC 230 VAC Hohes Vakuum Niedriges Vakuum Modell Teil Nr Modell Teil Nr Turbo MacroTorr Grob Vor ...

Страница 227: ...Call Varian Vacuum Technologies for further information at 1 800 8VARIAN Factory installed option Table F 1 947 948 960 Accessories Part Number Option L9558301 Universal remote control display unit with 25 ft cord requires L9596301 L9596301 Serial and parallel I O includes interface for universal remote control display unit platform series L6839301 Atmospheric gross leak accessory ...

Страница 228: ...Models 947 948 and 960 Leak Detectors Operations and Service Manual This page intentionally left blank ...

Страница 229: ... Detection There are four general classes of leak detection Hermetic Enclosures or parts thereof These are tested to prevent entrance of contaminants or loss of fluid that would affect performance of the enclosed unit Examples include electronic devices integrated circuits sealed relays motors ring pull tab can ends and multi pin feedthroughs Hermetic Systems These are tested to prevent loss of fl...

Страница 230: ... flow rate should be expressed in Torr liters second Conversions 1 std cc sec 0 76 Torr liter sec 1 Torr liter sec 1 3 std cc sec 1 std cc sec9 7 x 104 micron cubic feet per hour or practically 105 micron CFH µCFH 1 µCFHpractically 10 5 std cc sec for practical purposes equal Numerical Notation Exponential System Most leak rates of commercial significance are very small fractions of atm cc sec The...

Страница 231: ... 3 atm cc sec It tests for ultrasonic sounds coming from a gas leak and for testing high pressure lines Halogen sensitive to halogen elements or compounds especially refrigerant gases This method is good to approximately 10 5 atm cc sec in most current applications but extendable to 10 9 std cc sec under some limited situations It is critically dependent on operator judgement if leaks are below 10...

Страница 232: ...s the presence and amount of helium G 5 2 Application as a Leak Detector A mass spectrometer leak detector consists of a spectrometer tube the electronics to operate and interpret it and a high vacuum system to maintain proper vacuum In addition means are provided for connecting a test object and a rough vacuum pump and a system of roughing and test valves is provided to evacuate the test object f...

Страница 233: ...eaks unintentionally built in at joints during manufacture can vary from hour to hour and day to day Breathing on a 10 6 std cc sec leak provides enough moisture to close it temporarily perhaps for several days Atmospheric particles can close a leak of this size Never depend on an accidentally made leak to remain constant Manufactured standard leaks for calibration purposes require special techniq...

Страница 234: ... then probed with a small jet of helium to locate individual leaks or surrounded by helium hooded for an overall leak check Figure G 1 Test Piece Evacuated Tracer Probe Used to Locate Leak Figure G 2 Test Piece Evacuated and Hooded with Helium Atmosphere to Determine Overall Leak Rate G 6 2 Test Piece Pressurized Figure G 3 is an illustration of a Detector Probe used to locate a leak in a pressuri...

Страница 235: ...G 4 Test Piece Sealed with Helium and or Other Gases Bell Jar Used to DetermIne Overall Leak Rate Sometimes it is necessary to leak check a completely sealed object This can be done by placing helium inside the object either 100 or mixed with other gas used for backfilling before sealing it The object is then placed in a vacuum chamber connected to the leak detector Helium escaping from the object...

Страница 236: ...lector which neutralizes the current produced by the collection of helium ions The feedback current is presented on the leak rate bar graph Since this current is directly proportional to the number of helium ions striking the collector per unit time the panel leak rate bar graph directly reflects the concentration of helium in the vacuum system at any time Any helium entering the system causes an ...

Страница 237: ...2 D Daily maintenance 4 5 Decimal notation table G 2 Diagnostics using the service pendant 3 16 Discrete I O option 2 9 3 16 J120 inputs 2 5 Parallel enable 2 11 Parallel interface D 1 Dual mechanical pump configuration Gross test only 3 7 E Electronic communications option BCD J121 outputs 2 6 Discrete I O J120 inputs 2 5 Host serial port J123 pinouts 2 7 Electronic interface optional 2 5 Error c...

Страница 238: ... maintenance 4 1 Leak detector storage 1 13 Leak rate 3 5 G 5 G 6 Leak test methods G 3 Dye penetrant G 3 Halogen G 3 Helium G 3 Radioisotope G 3 Ultrasonic G 3 Water immersion G 3 Leak testing G 1 Auto ranging 3 13 Manual ranging 3 14 Leak types G 1 Leak value 3 4 LED indicator 3 1 Auto cal 3 2 Hold 3 2 Not ready 3 2 Reject 3 2 Start 3 2 Std leak 3 2 Test 3 2 Vent 3 2 Zero 3 2 Liquid nitrogen 1 3...

Страница 239: ... O rings 4 2 4 13 4 15 4 18 4 20 B 8 P Parallel enable 2 11 3 16 Parameter setup 3 3 3 16 Parameters 3 3 Audio reject set points 3 5 Audio reject set points enable disable 3 5 Auto range 3 3 Auto sequencer 3 5 Calibrate 3 4 Calibrated leak value 3 4 Changing and viewing 2 9 Command C 7 Definitions 3 3 Internal operating C 2 Linear analog output 3 5 Log analog output 3 5 Manual range 3 3 Non volati...

Страница 240: ... indicator 3 2 Standby mode 3 15 Start button indicator 3 2 Start up controls 3 8 Start up procedure 3 10 Storage 1 13 Symptoms and solutions 5 3 System pressure TC2 gauge calibration 4 28 System pressure gauge calibration Atmospheric 4 28 Vacuum low pressure 4 28 T TC1 gauge replacement in MVBA 4 24 TC2 gauge replacement in SBA 4 26 Test mode indicator 3 2 Test piece Already sealed G 7 Evacuated ...

Страница 241: ......

Страница 242: ... Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd ...

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