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2. Evacuation Device Operation Procedure
2-1 Preparation
1) Main valve , VENT. V:
CLOSE.
2) Three-way valve:
FORE
3) All switches on the operation panel:
OFF
4) Attach the probe to the gauge port when using the ionization
gauge.
5) User side breaker:
ON
2-2 Operations
Unit setup
1) MAIN.SW:
ON
2) AUTO.SW:
ON
Oil Sealed Rotary Vacuum Pump :
SETUP
MAIN. PUMP cooling fan:
ROTATE
Foreline solenoid valve:
OPEN
3) After 2-min evacuation,
Oil Diffusion Pump:
ON
4) D.P warming up in 15 mins:
COMPLETE
OK lamp illumination
5) Liquid nitrogen (when necessary):
INJECT
Note
Liquid nitrogen volume
Max. fill-in volume: Approx. 0.4 liters
(including vaporization volume upon fill-in)
The liquid nitrogen lasts approx. 4 hours when a volume of 0.4 liters
is filled.
If all of the liquid nitrogen is vaporized, the trapped condensable gases are
released, which causes an adverse effect on the pressure for about 30
minutes.
This is not a failure.
Close the MAIN valve to prevent inside of the bell jar from contamination.
2-3 Stop
Unit shutdown
1) Vacuum evacuation for maintaining vacuum condition inside the bell
jar
2) When an ionization gauge is use. Filament:
OFF
3) Main valve:
COMPLETE CLOSE
4) Three-way valve:
FORE
5) AUTO.SW:
OFF
OK lamp, MAIN. PUMP lamp:
OFF
6)
After 25 minutes
.
BACK. P:
STOP
MAIN. PUMP cooling fan:
STOP
Foreline solenoid valve:
CLOSE
（
Rough pumping piping, automatic air release
）
