4
4. Individual Unit Specifications
Unit
Model and Specifications
Quantity
3) Evaporation
power supply
- Model:
PSE-150C
- Dimensions:
480 mm × Depth 435.3
mm × Height 149 mm
(exclude projection and
attached component)
- Weight:
Approx. 40 kg
- Input:
Single-phase 200 V
- Output:
Max. 150 A
- Control method:
Constant
current
(Constant voltage/Fixed
electric power)
- Output control:
10 V
- Lode output:
1 - Position
- Rating:
30 minutes
- Attached component: Output cable (38 mm
2
× 2 m)
1 set
4) Oil diffusion pump
(MAIN. PUMP)
- Model:
DPF-050
- Evacuation speed:
50 L/sec
- Ultimate pressure:
10
–5
Pa
- Evacuation or
VG 25 or equivalent,
suction opening:
φ13.6 or equivalent
- Required power:
0.25 kVA
Oil for use:
SY, 0.02L
1 set
5) Oil sealed rotary
vacuum pump
(BACK. PUMP)
- Model:
G-20DA
- Evacuation speed:
20 L/min
- Ultimate pressure:
1.3 x 10
–1
Pa
- Required power:
0.1 VA
Oil for use:
SMR-100, 0.18L
1 set
6) Main valve
- Model:
Butterfly Valve
- Internal diameter:
VG-25
1 set
7) Liquid nitrogen
trap
- Bore diameter:
25 A
- Injection volume:
Approx. 0.4L
(including evaporation
amount)
1 set
8) Foreline solenoid
valve
- Model:
Slide
valve type
1 set
9) Three-way valve
- Model:
Ball valve type
1 set
Refer to the specification sheet for special models.
