13
4. Film Formation Steps
4-1 Preparation
1) Opening bell jar: Steps of 3-1
2) Attaching the evaporation source (substrate or filament) to the
electrode
3) Provide the evaporation material to evaporation source
4) Shutter: CLOSE
5) Attaching the material (substrate)
6) Vacuum evacuation of bell jar: Steps of 3-2
- Executing the vacuum evacuation up to a certain pressure
4-2 Film formation
1) User side breaker: ON
2) Evaporation power supply MAIN switch: ON
3)
Turn on the evaporation select switch.
4) HIGH (Lamp on): Confirm
5) MANUAL (Lamp off): Confirm
6) POWER (Lamp on): ON
7) The current is gradually thrown to the evaporation source pushing
the UP
▲
key.
8) Observe the condition of the evaporation source. When the
evaporation source starts melting or subliming, allow the impurities
and dirt to adhere to the shutter so as to remove them.
9) Open the shutter and form the film on the material (substrate)
10) Run evaporation test.
11) After film is formed, close the shutter.
12) POWER (Lamp off) : OFF
13) Evaporation power supply MAIN switch: OFF
14)
Open the vacuum chamber, as described in section 3-1, and
remove the coated material (substrate).
Repeat as necessary from step 4-1.
Note
- Film thickness:
Adjusted by the time of formation
- Sputtering speed:
Adjusted by the current flown through the
evaporation source
5. Measures upon Abnormal Conditions
5-1 Instantaneous power outage
OK lamp only lights up after 15min.
Other equipment will return to the state before the power failure
automatically.
- All devices automatically return to the conditions before the power
outage.
5-2 Long power outage
1) Main valve: PROMPT and COMPLETE
CLOSE
2) All switches on the operation panel:
OFF
5-3 Operation after power recovery
Please refer to 2-1 Preparation and 2-2 Operations in
“2. Evacuation
Device Operation Procedure
”.
