Table of Contents
Items with shade include description on safety.
To Safely Use This Equipment
(1) Before Using ............................................................................. 1
1. Target Users ..................................................................... 1
2. Read the Manual Thoroughly ............................................ 1
3. Keep This Manual in a Safe Place .................................... 1
4. Warranty ............................................................................ 1
5. Statutory Requirements for Disposal ................................. 1
6. Safety during Repair ......................................................... 1
(2) Product Overview ..................................................................... 2
1. Purpose of This Product and Actions that are Prohibited .. 2
2. Safety Device and its Purpose and Functions ................... 2
3. Product Specifications....................................................... 3
4. Individual Unit Specifications ............................................ 3
5. Standard Accessories ....................................................... 5
6. How to Use Switches, Handles, and Operation Levers ..... 5
7. Layout of Switches, Handles, and Operation Levers ........ 6
Evacuation system drawing
Electrical system drawing
(3) Opening the Package and Installation ...................................... 7
1. General Cautions .............................................................. 7
2. Package upon Delivery ..................................................... 7
3. Installation Site .................................................................. 7
4. Power Supply .................................................................... 8
5. Necessary Tool List........................................................... 9
6. How to change the Oil cap into Exhaust cap ..................... 9
(4) Operations ............................................................................ 10
1. Risks and Safety Measures upon Operations ................. 10
2. Device Operation Procedure ........................................... 11
2-1 Preparation .............................................................. 11
2-2 Operations ............................................................... 11
2-3 Stop ......................................................................... 11
3. Deposition Steps ............................................................. 12
3-1 Opening bell jar ....................................................... 12
3-2 Vacuum evacuation of bell jar ................................. 12
4. Film Formation Steps ...................................................... 13
4-1 Preparation .............................................................. 13
4-2 Film formation .......................................................... 13
