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1. Before Using This Product 

 

Thank you for purchasing the oil mist trap (hereafter, "this trap") made by ULVAC (hereinafter, "we"). 
To ensure safety, upon receiving the trap, confirm that it matches the details of your order and has not 
been damaged in transit or for another reason. 
 
This  instruction  manual  (hereinafter,  "this  document")  describes  appropriate  handling  and 
maintenance procedures to safely use this trap and to maximize its performance. Read this document 
in advance to properly use this trap. 
 
Install  and  operate  this  trap  according  to  the  safety-related  laws  and  regulations  (such  as  fire 
prevention laws and electrical wiring regulations) in your country or region. To this end, you must first 
attend a publicly recognized general safety training (including on electrical and loading safety topics) 
in your country or region. Never handle this trap without first undergoing safety training. The operator 
must  attend  such  training.  The  operator  must  have  expertise,  skills,  and  certifications  related  to 
electricity, machinery, loading, vacuum usage, and other fields. 
 
This  trap  has  been  designed  to  conform  to  the  rules  in  place  when  this  document  was  created. 
Conformity is not guaranteed because the applicable standards may change in the future. 
 
Performance and safety may not be ensured if equipment connected to this trap does not conform to 
the same rules or if the trap is altered. In such cases, we cannot guarantee (take responsibility for) 
performance or safety. Product alterations made  by the customer are not covered by the warranty, 
and we cannot take responsibility for them. 
 
Before  installing  or  removing  this  trap,  separate  all  energy  sources  (including  power  and  cooling 
water) from the product. 
None  of  this  trap's  parts  may  continue  to  be  used  permanently  while  maintaining  the  performance 
upon  delivery.  Performance  inevitably  degrades  after  a  certain  amount  of  time  elapses,  thus 
increasing the likelihood of product problems even in assumed common usage scenarios. We ask that 
our  customers  perform  preventive  maintenance  to  avoid  problems  in  accordance  with  their  usage 
scenarios. 
By performing preventive maintenance measures, you can lower the probability of problems with this 
trap due to parts failures caused by parts becoming worn out as well as the probability of other risks, 
such as downtime caused by trap problems, fire, or effects on other processes. 
From the viewpoint of preventive maintenance, we also ask our customers to prepare maintenance 
and inspection plans and to replace parts and perform overhauls according to such plans. 
 
If you have any questions about handling or other matters, please contact our nearest sales office or 

dealer. 

Содержание TM-2

Страница 1: ...4 INSTRUCTION MANUAL OIL MIST TRAP CARTRIDGE FILTER ELEMENTS MODEL TM 2 TM 3 TM 4 TM 4S ULVAC Inc Components Division http www ulvac co jp Read this manual before operation and keep it at your hand fo...

Страница 2: ...chanism Option 8 4 Inspection and Maintenance 11 4 1 Periodical Inspection 11 4 2 Replacement of Filter Element 11 4 2 1 Dismounting a Filter Element 11 4 2 2 Mounting of a Filter Element 11 4 2 2 Con...

Страница 3: ...stallation PKS 9 Fig 8 Oil return mechanism C installation VD 10 Fig 9 Oil return mechanism C installation VS 10 Fig 10 Exploded view of filter element 12 Fig 11 Continuity check of the filter element...

Страница 4: ...the future Performance and safety may not be ensured if equipment connected to this trap does not conform to the same rules or if the trap is altered In such cases we cannot guarantee take responsibi...

Страница 5: ...The trap s internal pressure may rise causing the casing or level gauge to rupture oil leakage or motor overload Explosive or flammable gas gas that increases the susceptibility of substances to fire...

Страница 6: ...ble 1 Specifications Model TM 2 TM 3 TM 4 TM 4S Adopted filter element TM 2E TM 3E TM 4E TM 4SE Maximum procession flow m3 h 1 L min 96 1600 180 3000 420 7000 420 7000 Connecting parts dia 2 Pump side...

Страница 7: ...4 2 3 Dimensional Drawings Fig 1 TM 2 TM 3 TM 4 TM 4S dimensional drawing...

Страница 8: ...5 Fig 2 TM 2F TM 3F TM 4F dimensional drawing...

Страница 9: ...from the outlet 2 This unit has a pressure releasing device Clogging of a filter element may cause hazardous pressure rise at start up or during evacuation of a vacuum chamber A pressure releasing de...

Страница 10: ...3 and 4 has a shade as a standard equipment When ducting detach it and use an internal thread For TM 2F 3F 4F and 4S a JIS ducting flange JIS vacuum flange is useful Note When ducting be careful not...

Страница 11: ...case Only when the pump is operated under no load or at stop Oil return mechanism B Oil returns into the pump compression process through the gas ballast port CAUTION Oil return mechanism B shall caus...

Страница 12: ...on Fig 4 Oil return mechanism A installation VD VS Fig 5 Oil return mechanism A installation PKS Fig 6 Oil return mechanism B installation VD VS Fig 7 Oil return mechanism B installation PKS Parts lis...

Страница 13: ...10 Fig 8 Oil return mechanism C installation VD Fig 9 Oil return mechanism C installation VS Parts list Parts list...

Страница 14: ...leasing device if any Also check the operation of the pressure releasing device that the valve is lifted when pushed with a finger If it does not operate properly if not lifted replace the filter hold...

Страница 15: ...12 Fig 10 Exploded view of filter element...

Страница 16: ...ith the lower lid of the main body to prevent static electricity After replacing the filter element check the continuity between the following parts with a tester 1 Filter holding plate Main body lowe...

Страница 17: ...perates it is dangerous to keep the pump running In such cases stop the pump immediately and change the filter element Also while this device is operating oil mist exhausted from the pump will not be...

Страница 18: ...e is 10 40 b Evacuation gas is dry air or dry nitrogen 0 40 c Operation is done according to this instruction manual 3 However the fol1o ling is not covered by this warranty a Failure due to force maj...

Страница 19: ...ription Material Q ty Remarks 1 Filter element 1 TM 3E 2 O ring G300 NBR 1 JIS B 2401 3 Seal washer M10 1 DT 1 10 Table 5 Major replacement parts list TM 4 No Description Material Q ty Remarks 1 Filte...

Страница 20: ...period Table 7 Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Body Element indicating that content of the...

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