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5. Caution 

5.1 Clogging of Filter Element 

Clogged filter elements will raise the pressure inside the pump, and cause damage to pump parts 
or filter elements. The pressure must be watched with a pressure gauge (option) in usage such 
as; 

(3)  When  making  the  pump  operate  under  high  intake  pressure,  or  evacuating  high 

temperature gas continuously.   

Such  usage  raise  the  pump  temperature  and  deteriorate  the  oil  to  sludge.  Sludgy  oil 

adheres to the filter element and causes clogging. Moreover, in continuous usage under 

such conditions, a great amount of oil mist will be trapped in the filter element and make 

an oil film on its fibers and cause being clogged even with non-deteriorated oil. 

(4)  When evacuating high-viscosity Liquid at· fine particles in normal temperature. 

(5)  When there is a reaction product. 

 
To control the timing of filter element change, we recommend installation of pressure gauge 
for other usage, too. Moreover, frequent need for filter element change suggests the use of an 
oil mist trap one rank higher. 

 

5.2 Pressure-releasing Device 

The Pressure-releasing devices are designed to prevent rapid pressure rise inside a pump. If this 
device constantly  operates,  it is  dangerous  to keep  the  pump  running.  In  such cases,  stop  the 
pump  immediately  and  change  the  filter  element.  Also,  while  this  device  is  operating,  oil  mist 
exhausted from the pump will not be trapped in the filter element, but be exhausted directly from 
the air outlet of the oil mist trap. 

 

5.3 Exhaust of Inflammable Gas and Gas having property of increase the susceptibility of substances to bum 

In case of the process for the inflammable gas such as hydrogen or the gas having a property of 
increase the susceptibility of substances to burn such as the oxygen, following countermeasure 
shall be taken. Otherwise, oil mist trap explosion may occur. 

(1)  Please  use  duct  piping  made  of  electrically  conductive  materials  (electricity  conducting) 

without exception. If non-electrically conductive materials are used, static electricity shall 

be generated when the exhaust gas passes that results in an origin of ignition by charged 

electricity and generation of sparks. Ground the duct piping appropriately. 

(2)  The exhaust outlet shall be in a flammable status by filling oil mist at atmospheric pressure. 

Please fill dilution gas from the space between the pump and the oil mist trap. 

(3)  Please  flow  dilution  gas  from'  the  aspiration  side,  if  necessary.  (Decide  the  volume  of 

dilution  gas  by  confirming  the  pump  performance  because  it  may  decline  the  pump 

performance. ) 

Содержание TM-2

Страница 1: ...4 INSTRUCTION MANUAL OIL MIST TRAP CARTRIDGE FILTER ELEMENTS MODEL TM 2 TM 3 TM 4 TM 4S ULVAC Inc Components Division http www ulvac co jp Read this manual before operation and keep it at your hand fo...

Страница 2: ...chanism Option 8 4 Inspection and Maintenance 11 4 1 Periodical Inspection 11 4 2 Replacement of Filter Element 11 4 2 1 Dismounting a Filter Element 11 4 2 2 Mounting of a Filter Element 11 4 2 2 Con...

Страница 3: ...stallation PKS 9 Fig 8 Oil return mechanism C installation VD 10 Fig 9 Oil return mechanism C installation VS 10 Fig 10 Exploded view of filter element 12 Fig 11 Continuity check of the filter element...

Страница 4: ...the future Performance and safety may not be ensured if equipment connected to this trap does not conform to the same rules or if the trap is altered In such cases we cannot guarantee take responsibi...

Страница 5: ...The trap s internal pressure may rise causing the casing or level gauge to rupture oil leakage or motor overload Explosive or flammable gas gas that increases the susceptibility of substances to fire...

Страница 6: ...ble 1 Specifications Model TM 2 TM 3 TM 4 TM 4S Adopted filter element TM 2E TM 3E TM 4E TM 4SE Maximum procession flow m3 h 1 L min 96 1600 180 3000 420 7000 420 7000 Connecting parts dia 2 Pump side...

Страница 7: ...4 2 3 Dimensional Drawings Fig 1 TM 2 TM 3 TM 4 TM 4S dimensional drawing...

Страница 8: ...5 Fig 2 TM 2F TM 3F TM 4F dimensional drawing...

Страница 9: ...from the outlet 2 This unit has a pressure releasing device Clogging of a filter element may cause hazardous pressure rise at start up or during evacuation of a vacuum chamber A pressure releasing de...

Страница 10: ...3 and 4 has a shade as a standard equipment When ducting detach it and use an internal thread For TM 2F 3F 4F and 4S a JIS ducting flange JIS vacuum flange is useful Note When ducting be careful not...

Страница 11: ...case Only when the pump is operated under no load or at stop Oil return mechanism B Oil returns into the pump compression process through the gas ballast port CAUTION Oil return mechanism B shall caus...

Страница 12: ...on Fig 4 Oil return mechanism A installation VD VS Fig 5 Oil return mechanism A installation PKS Fig 6 Oil return mechanism B installation VD VS Fig 7 Oil return mechanism B installation PKS Parts lis...

Страница 13: ...10 Fig 8 Oil return mechanism C installation VD Fig 9 Oil return mechanism C installation VS Parts list Parts list...

Страница 14: ...leasing device if any Also check the operation of the pressure releasing device that the valve is lifted when pushed with a finger If it does not operate properly if not lifted replace the filter hold...

Страница 15: ...12 Fig 10 Exploded view of filter element...

Страница 16: ...ith the lower lid of the main body to prevent static electricity After replacing the filter element check the continuity between the following parts with a tester 1 Filter holding plate Main body lowe...

Страница 17: ...perates it is dangerous to keep the pump running In such cases stop the pump immediately and change the filter element Also while this device is operating oil mist exhausted from the pump will not be...

Страница 18: ...e is 10 40 b Evacuation gas is dry air or dry nitrogen 0 40 c Operation is done according to this instruction manual 3 However the fol1o ling is not covered by this warranty a Failure due to force maj...

Страница 19: ...ription Material Q ty Remarks 1 Filter element 1 TM 3E 2 O ring G300 NBR 1 JIS B 2401 3 Seal washer M10 1 DT 1 10 Table 5 Major replacement parts list TM 4 No Description Material Q ty Remarks 1 Filte...

Страница 20: ...period Table 7 Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Body Element indicating that content of the...

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