Ulvac TM-2, Инструкция по эксплуатации

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7. Major Replacement Parts
Table.3 Major replacement parts list (TM-2)
No. Description Material Q'ty Remarks
1 Filter element 1 TM-2E
2 O-ring (G240) NBR 1 JIS B 2401
3
Seal washer (M10) 1 DT-1-10
Table.4 Major replacement parts list (TM-3)
No. Description Material Q'ty Remarks
1 Filter element 1 TM-3E
2 O-ring (G300) NBR 1 JIS B 2401
3
Seal washer (M10) 1 DT-1-10
Table.5 Major replacement parts list (TM-4)
No. Description Material Q'ty Remarks
1 Filter element 1 TM-4E
2 O-ring (V380) NBR 1 JIS B 2401
3
Seal washer (M12) 1 DT-1-12
Table.6 Major replacement parts list (TM-4S)
No. Description Material Q'ty Remarks
1 Filter element 1 TM-4SE
2 Flange gasket Non-asbestos 1
3
Seal washer (M12) 1 DT-1-12