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3. Method of use 

3.1 Examination 

The products are delivered with maximum care, but for reassurance, confirm the followings after 
unpacking. 

(1)  That the product is what you have ordered. 

(2)  That it has proper accessories (an instruction manual, other ordered parts, etc.) 

(3)  That  there  was  no  damage,  or  loosening  of  screws  or  nuts  during  the  transportation.  If 

there was any problem, contact our sales department or the specified dealer. 

 
3.2 Installation to the Pump 

To install the unit to the pump: 

(1)  Confirm that there is no flaw or adhesion of dusts on flanges of the pump and the TM, or 

on the O-ring ditch. 

(2)  Attach an O-ring to the O-ring ditch of the flange at the lower part of the TM, and fasten it 

to the outlet port of the pump with a hexagon bolt. 

 
3.3 Ducting 

The exhaust side of nl-2, 3, and 4 has a shade as a standard equipment. When ducting, detach it 
and use an internal thread. For TM-2F, 3F, 4F, and 4S, a JIS ducting flange (JIS vacuum flange) is 
useful. 
(Note) When ducting, be careful not to put too much force on the main body of the oil mist trap. 

Too much force may damage the product. 

 

3.4 How to Handle Trapped Oil 

TM-series products structurally exhaust trapped oil out of the main body through an oi I returning 
port.  Conned a  nylon  hose  to  the  oil  returning  port  and  collect  the  exhausted oil  in  a  separate 
container. You can return it to the pump from the oil filler port when the pump is operating without 
load or not operating at all. However, oil contaminated with water, dust, or some agent such as 
acid that deteriorates the oil may cause mechanical troubles, and hence shall not be returned to 
the pump. 
(Note) Do not connect the oil returning port and the pressure monitor installation port with a nylon 

hose, etc. Oil mist will not be trapped under such condition. 

 

 

Содержание TM-2

Страница 1: ...4 INSTRUCTION MANUAL OIL MIST TRAP CARTRIDGE FILTER ELEMENTS MODEL TM 2 TM 3 TM 4 TM 4S ULVAC Inc Components Division http www ulvac co jp Read this manual before operation and keep it at your hand fo...

Страница 2: ...chanism Option 8 4 Inspection and Maintenance 11 4 1 Periodical Inspection 11 4 2 Replacement of Filter Element 11 4 2 1 Dismounting a Filter Element 11 4 2 2 Mounting of a Filter Element 11 4 2 2 Con...

Страница 3: ...stallation PKS 9 Fig 8 Oil return mechanism C installation VD 10 Fig 9 Oil return mechanism C installation VS 10 Fig 10 Exploded view of filter element 12 Fig 11 Continuity check of the filter element...

Страница 4: ...the future Performance and safety may not be ensured if equipment connected to this trap does not conform to the same rules or if the trap is altered In such cases we cannot guarantee take responsibi...

Страница 5: ...The trap s internal pressure may rise causing the casing or level gauge to rupture oil leakage or motor overload Explosive or flammable gas gas that increases the susceptibility of substances to fire...

Страница 6: ...ble 1 Specifications Model TM 2 TM 3 TM 4 TM 4S Adopted filter element TM 2E TM 3E TM 4E TM 4SE Maximum procession flow m3 h 1 L min 96 1600 180 3000 420 7000 420 7000 Connecting parts dia 2 Pump side...

Страница 7: ...4 2 3 Dimensional Drawings Fig 1 TM 2 TM 3 TM 4 TM 4S dimensional drawing...

Страница 8: ...5 Fig 2 TM 2F TM 3F TM 4F dimensional drawing...

Страница 9: ...from the outlet 2 This unit has a pressure releasing device Clogging of a filter element may cause hazardous pressure rise at start up or during evacuation of a vacuum chamber A pressure releasing de...

Страница 10: ...3 and 4 has a shade as a standard equipment When ducting detach it and use an internal thread For TM 2F 3F 4F and 4S a JIS ducting flange JIS vacuum flange is useful Note When ducting be careful not...

Страница 11: ...case Only when the pump is operated under no load or at stop Oil return mechanism B Oil returns into the pump compression process through the gas ballast port CAUTION Oil return mechanism B shall caus...

Страница 12: ...on Fig 4 Oil return mechanism A installation VD VS Fig 5 Oil return mechanism A installation PKS Fig 6 Oil return mechanism B installation VD VS Fig 7 Oil return mechanism B installation PKS Parts lis...

Страница 13: ...10 Fig 8 Oil return mechanism C installation VD Fig 9 Oil return mechanism C installation VS Parts list Parts list...

Страница 14: ...leasing device if any Also check the operation of the pressure releasing device that the valve is lifted when pushed with a finger If it does not operate properly if not lifted replace the filter hold...

Страница 15: ...12 Fig 10 Exploded view of filter element...

Страница 16: ...ith the lower lid of the main body to prevent static electricity After replacing the filter element check the continuity between the following parts with a tester 1 Filter holding plate Main body lowe...

Страница 17: ...perates it is dangerous to keep the pump running In such cases stop the pump immediately and change the filter element Also while this device is operating oil mist exhausted from the pump will not be...

Страница 18: ...e is 10 40 b Evacuation gas is dry air or dry nitrogen 0 40 c Operation is done according to this instruction manual 3 However the fol1o ling is not covered by this warranty a Failure due to force maj...

Страница 19: ...ription Material Q ty Remarks 1 Filter element 1 TM 3E 2 O ring G300 NBR 1 JIS B 2401 3 Seal washer M10 1 DT 1 10 Table 5 Major replacement parts list TM 4 No Description Material Q ty Remarks 1 Filte...

Страница 20: ...period Table 7 Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Body Element indicating that content of the...

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