－
ii
－
Table of Contents
1. Before Using This Product ................................................................................................. 1
1.1 Warning Label Types and Display Positions ................................................................ 2
1.2 Warning Label Display Positions .................................................................................. 2
2. General Description ............................................................................................................ 3
2.1 Features ........................................................................................................................ 3
2.2 Specifications ................................................................................................................ 3
2.3 Dimensional Drawings ...................................................................................................... 4
2.4 Structure ........................................................................................................................ 6
3. Method of use ..................................................................................................................... 7
3.1 Examination .................................................................................................................. 7
3.2 Installation to the Pump ................................................................................................ 7
3.3 Ducting .......................................................................................................................... 7
3.4 How to Handle Trapped Oil .......................................................................................... 7
3.5 Oil return mechanism (Option) ..................................................................................... 8
4. Inspection and Maintenance ............................................................................................. 11
4.1 Periodical Inspection .................................................................................................... 11
4.2 Replacement of Filter Element .................................................................................... 11
4.2.1 Dismounting a Filter Element ................................................................................ 11
4.2.2 Mounting of a Filter Element ................................................................................. 11
4.2.2 Continuity check of the filter element ................................................................... 13
5. Caution ............................................................................................................................. 14
5.1 Clogging of Filter Element .......................................................................................... 14
5.2 Pressure-releasing Device ......................................................................................... 14
5.3 Exhaust of Inflammable Gas and Gas having property of increase the susceptibility of substances
to bum ................................................................................................................................ 14
6. Warranty ........................................................................................................................... 15
7. Major Replacement Parts ................................................................................................. 16
Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination
SERVICE CENTER
