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RF0040E-18

High-Frequency Power Supply

RF Generator

Matching Box

Model:

Control Panel

RFP-N

RF Generator

RFS-1305N

RFS-1310N

RFS-1330N

RFS-1350N

Matching Box

MBX-1305N

MBX-1310N

MBX-1330N

MBX-1350N

Revised 18th Edition 2023/07/19

ULVAC Inc.

* Read this manual before using the system.

Store this manual carefully so that it can be used at anytime.

Содержание RFP-N

Страница 1: ...nerator Matching Box Model Control Panel RFP N RF Generator RFS 1305N RFS 1310N RFS 1330N RFS 1350N Matching Box MBX 1305N MBX 1310N MBX 1330N MBX 1350N Revised 18th Edition 2023 07 19 ULVAC Inc Read...

Страница 2: ...ation page 1 Read and understand the information in these sections before using the system Carefully store this manual near the system When the system s installation location is changed always include...

Страница 3: ...intenance and inspection work Never try to operate the system before carefully reading and understanding the content related to system operation inspection and maintenance 3 Warnings and precautions a...

Страница 4: ...f minor injury to the operator damage to the system or the system may require adjustment There is no direct danger but this symbol notes content you should understand to work safely and to use the sys...

Страница 5: ...h the system check the symptoms and the malfunction In order to avoid losses due to misunderstandings or misjudgments and to quickly perform repairs please give us your cooperation so we can clarify t...

Страница 6: ...rs from force majeure events such as war 3 Malfunction or failure caused by inattention during handling or mistaken usage 4 A system modified disassembled or repaired without ULVAC s approval 5 Malfun...

Страница 7: ...essories 19 3 2 RF generator installation 20 3 2 1 RF generator mounting structure 21 3 2 2 RF Generator installation environment 22 3 3 Matching box installation 23 3 3 1 Matching box installation me...

Страница 8: ...6 2 1 Adjusting the number of coil short circuits MBX 1305N MBX 1310N 72 6 2 2 Adjusting the number of coil short circuits MBX 1330N MBX 1350N 73 6 2 3 Adding a fixed capacitor 75 6 3 Matching box pow...

Страница 9: ...nual Danger In order to prevent electric shock always ground the cases of this equipment and ground the wiring before energizing the system In order to prevent electric shock from ground leakage do no...

Страница 10: ...olvents If a label is damaged missing or illegible contact ULVAC or an exclusive dealer A nameplate has also been attached to the top of the RF generator Take special care to ensure the nameplate is a...

Страница 11: ...akes external control by a PLC possible 2 2 Features Saves energy through a construction with an RF circuit featuring good power conversion efficiency Maintainability has been markedly improved by cre...

Страница 12: ...stem configuration is shown in Figure 2 1 Figure 2 2 System configuration The basic configuration requires the equipment below RF generator RFS N Matching box MBX N Control panel RFP N Not used in ext...

Страница 13: ...F Generator RFS 1330N 13 56 MHz 3000 W RF Generator RFS 1350N 13 56 MHz 5000 W RF Generator MBX N MBX 1305N 13 56 MHz 500 W matching box MBX 1310N 13 56 MHz 1000 W matching box MBX 1330N 13 56 MHz 300...

Страница 14: ...n sulfide H2S 0 05 ppm or lower Dissolved solids 50 ppm or lower Turbidity 2 degrees or lower Mixture Must pass through a 50 mesh filter not form deposits or scale in a water temperature of 60 C Total...

Страница 15: ...ess of rated output Coaxial output connector N type receptacle Cooling Cooling method Forced air cooling by fan Operation mode Controllable by the control panel and external command signal Insulation...

Страница 16: ...oaxial output connector N type receptacle Cooling Cooling method Forced air cooling by fan Operation mode Controllable by the control panel and external command signal Insulation resistance 50 M or mo...

Страница 17: ...oling method Forced air cooling by fan water cooling 4 l min Connector Rc1 4 PT1 4 female Water pressure 0 5MPa See page 6 for water quality Operation mode Controllable by the control panel and extern...

Страница 18: ...ooling method Forced air cooling by fan water cooling 6 l min Connector Rc1 4 PT1 4 female Water pressure 0 5MPa See page 6 for water quality Operation mode Controllable by the control panel and exter...

Страница 19: ...R_CURRENT Stops the output power when there is RF amplifier overcurrent VPP_OVER Stops the output power when VPP voltage has exceeded the rating INTERLOCK Stops the output power when the external inte...

Страница 20: ...PANEL REMOVED By a panel operation when the panel has been removed during RF ON DC SOURCE ERROR When an error has occurred in the AC DC unit AMP DRIVER ERROR When an error has occurred in the RF ampl...

Страница 21: ...n When the cause of the warning goes away the warning name display disappears 2 7 Individual controller specifications Table 2 10 RFP N specifications Item Specification value RFP N Indicator display...

Страница 22: ...al reflected wave power 10 W or lower when matching or a value 0 3 or lower of input traveling wave power whichever is greater Variable capacitors Variable capacitor capacitance TUNE 1500 pF MATCH 500...

Страница 23: ...er 10 W or lower when matching or a value 0 3 or lower of input traveling wave power whichever is greater Variable capacitors Variable capacitor capacitance TUNE 1500 pF MATCH 500 pF Coil Adjustment m...

Страница 24: ...e power whichever is greater Variable capacitors Variable capacitor capacitance TUNE 1500 pF MATCH 500 pF Coil Adjustment method Change inductance by changing the coil taps Standard coil 4 taps Coolin...

Страница 25: ...ve power whichever is greater Variable capacitors Variable capacitor capacitance TUNE 1500 pF MATCH 500 pF Coil Adjustment method Change inductance by changing the coil taps Standard coil 4 taps Cooli...

Страница 26: ...VPP scale VDP 13HU 0 to 2500 V 0 to 10000 V VDP 13HH 0 to 2500 V 0 to 5000 V VDP 13HM 0 to 2500 V 0 to 2500 V VDP 13MM 0 to 1000 V 0 to 2500 V VDP 13ML 0 to 1000 V 0 to 1000 V Table 2 16 Standard equi...

Страница 27: ...ontrol connector D sub 50 female Connector model DD 50SF N JAE This accessory is shorted between pin 16 and 17 1 Table 3 2 MBX 1305N RFS 1310N standard accessories Name Remarks Quantity 1 ERU 1310N 1T...

Страница 28: ...spike voltage or momentary power failures If a lightning surge spike voltage or momentary power failure is input from the power receiving facilities the system may be damaged or malfunction Use the sy...

Страница 29: ...Also provide ample clearance in the area around the RF Generator for air intake When using the RF Generator in a rack mount ensure there can be ample ventilation so the temperature inside the rack do...

Страница 30: ...ted panels for ventilation in the front and back and create a structure for the back that does not trap heat For methods other than the one listed above create a structure that can move air in and out...

Страница 31: ...ork before starting the work and implement all measures to prevent danger In order to reliably shutoff hazardous energy please use LOTO lockout tagout Caution Ensure that the matching box connections...

Страница 32: ...zards occurring Ensure that a cooling water flow rate monitoring mechanism and a cooling water interlock are installed on the customer equipment side of the system for the matching box s cooling water...

Страница 33: ...y ensuring clearance of 10 mm or more 3 3 2 In the case of connector output On the standard MBX 1305N MBX 1310N output is from the base by an output busbar but connector output can be selected through...

Страница 34: ...Maximum of 1 m Caution When RF is output by an HN connector and there is a load error no electrical discharge or an electrode short an automatic matching operation may cause the input electric power t...

Страница 35: ...chamber and the GND wiring yourself Ground the RF generator with Class D grounding Ground the matching box with Class A grounding The RFP N and CONT N cables are not used for the built in controller...

Страница 36: ...AWG AC 200V INPUT AC05 N 5 m customer side terminal is not prepared 10 AWG GND Prepare this separately yourself Class D grounding or Class A grounding RF cable RF01 N N type plug RF cable RF03 N HN t...

Страница 37: ...tor and then connect the opposite side Table 3 6 RFS 1305N RFS 1310N RF Generator input terminal wiring Connector type DCA3106F16 10S D BSN 0 DDK Table 3 7 RFS 1330N RFS 1350N RF Generator input termi...

Страница 38: ...3 4 3 Connecting the earth terminal Danger High voltages several kilovolts are generated by resonance in the matching box There is a risk of electric shock if the system is not properly ground Always...

Страница 39: ...xial connector section Matching box RF input coaxial connector section Matching box maintenance panel section For EXT CONT pins 16 17 the included jumper connector short circuits pins 16 and 17 when s...

Страница 40: ...of RF generator functions 4 1 1 Descriptions of front panel functions Figure 4 1 RFS 1305N RFS 1310N front panel example Figure 4 2 RFS 1330N RFS 1350N front panel example built in controller type Fi...

Страница 41: ...LED Turns green when RF output is on Turns off when RF output is off AMC AUTO LED Turns green when the matching box control mode is AUTO mode Turns off when panel mode INTERLOCK LED Turns off when the...

Страница 42: ...supply is turned off when the switch is moved to the OFF side After shutting off the power wait 30 seconds or more supplying the power again INPUT connector Connects the 200 VAC power input cable 1 2...

Страница 43: ...control Input the RF ON OFF signal from the equipment Connect the included JAE DD 50SF N or an equivalent product Set screw M2 6 FG The protective ground terminal for the RF Generator M5 stud bolt Pa...

Страница 44: ...RF POWER SUPPLY and MATCHINGBOX 4 Functions 36 Cooling water OUTLET joint The cooling water discharge joint Rc1 4 PT1 4 female connector...

Страница 45: ...TUNE UP Operates TUNE in the up direction TUNE DOWN Operates TUNE in the down direction MATCH UP Operates MATCH in the up direction MATCH DOWN Operates MATCH in the down direction This increases or d...

Страница 46: ...OFF Stops traveling wave power if the matching box output terminal voltage exceeds the rated value ARC Pf shut off Shuts off traveling wave power if the reflected wave power momentarily exceeds the r...

Страница 47: ...CLOSE Reset ALARM CLOSE while RF ON RF OFF DI 26 25 COM TUNE limit TUNE variable capacitor position upper lower limit CLOSE DO 27 Program select signal 0 LSB0 Short 27 31 H OPEN L DI 28 Program select...

Страница 48: ...Manual response 26 25 TUNE limit 38 MATCH limit 25V 20mA max 25V 20mA max 25V 20mA max NO NO NO 40 BUSY signal NO 25V 20mA max 42 ACK signal NO 25V 20mA max 48 Preset operation end signal NO 25V 20mA...

Страница 49: ...F EXT CONT 1 2 Power Setting EXT CONT 12 9 Pf Monitor EXT CONT 10 9 Motor Strobe EXT CONT 32 31 TUNE MATCH Analog Preset EXT CONT 18 19 13 TUNE MATCH Position Monitor EXT CONT 44 45 46 47 ON OFF 0V 0V...

Страница 50: ...rogram No selection SELECT NO 0 1 2 3 PROGRAM NO 0 OPEN OPEN OPEN OPEN 1 CLOSE OPEN OPEN OPEN 2 OPEN CLOSE OPEN OPEN 3 CLOSE CLOSE OPEN OPEN 4 OPEN OPEN CLOSE OPEN 5 CLOSE OPEN CLOSE OPEN 6 OPEN CLOSE...

Страница 51: ...RF POWER SUPPLY and MATCHINGBOX 4 Functions 43 4 2 Descriptions of Matching Box Figure 4 11 MBX 1305N MBX 1310N external connectors Figure 4 12 MBX 1330N external connectors...

Страница 52: ...ot correctly attached the interlock will operate and RF cannot be output Cooling water OUTLET joint The cooling water discharge joint Rc3 8 PT3 8 female connector Cooling water INLET joint The cooling...

Страница 53: ...5 0 Figure 4 15 Main screen P1 Item Parameter details Pf Displays the current value for the traveling wave power left and configures the setting right When the Pf setting value is less than 10 W this...

Страница 54: ...es an external oscillation source EXO 13 PHS 24N etc AMOP Sets the matching box operation method PANEL Operates from the control panel ANALOG Operates from the EXT CONT connector Analog preset method...

Страница 55: ...variable capacitor preset point PM Sets the MATCH variable capacitor preset point MPS Performs a manual preset Press the ENT button to perform the preset operation when the setting is ON PSCNT Display...

Страница 56: ...ils ASTOP Sets the Pf shutoff time at arc detection AMASK The Pf shutoff operation is not performed for this set time after recovering from arc shutoff Set this to 200 s or higher ASr Performs the Pf...

Страница 57: ...toff operation perform the arc shutoff operation regardless of the AMASK or other setting P r O L 1 0 0 W V p O L 1 0 0 P r O T 3 0 s P r 0 M 5 s P L 1 0 0 0 Figure 4 22 Limit configuration screen P8...

Страница 58: ...rt of operation of the TUNE variable capacitor TST Not used May not be displayed depending on the software version THS The speed setting maximum of the TUNE variable capacitor MLS The speed setting in...

Страница 59: ...ring the variable capacitor limiter operation Not normally set LMVM Sets the range that the MATCH variable capacitor operates during the variable capacitor limiter operation Not normally set The limit...

Страница 60: ...PrMADJ Performs fine adjustments of the Pr external analog monitor voltage Not normally set VpMADJ Performs fine adjustments of the Vpp external analog monitor voltage Not normally set VdMADJ Performs...

Страница 61: ...ication error occurs during RF ON when using EtherCAT communication Y ERROR judgment enable setting Stops output with ERROR when communication is abnormal N ERROR judgment invalid setting does not sto...

Страница 62: ...count per revolution Not normally modified TO TUNE variable capacitor pulse offset count Not normally modified MO MATCH variable capacitor pulse offset count Not normally modified TS TUNE variable cap...

Страница 63: ...isplayed It is displayed if the system is not powered for two weeks or longer after the breaker is turned off L O G 0 1 0 D E C 0 2 1 4 1 2 O V E R H E A T f 5 5 0 W T 5 0 V p 2 0 0 V r 2 0 W M 6 0 V...

Страница 64: ...ter details M Impedance sensor value M motor value threshold gain Z Impedance sensor value Z motor value threshold gain O Impedance sensor value O motor value threshold gain r Displays the reflected w...

Страница 65: ...30W 100W 100W ARr 10W 10W 10W 10W ASDLY 1s 1s 1s 1s ACNT 0 0 0 0 ASr2 150W 150W 500W 500W ASr3 400W 400W 5000W 5000W PrOL 100W 100W 100W 100W VPOL 100 100 100 100 PrOT 30s 30s 30s 30s PrOM 5s 5s 5s 5s...

Страница 66: ...ons 58 Parameters RFS 1305N RFS 1310N RFS 1330N RFS 1350N TS 8 00r 8 00r 8 00r 11 20r MS 8 00r 8 00r 8 00r 11 20r M 3000 G 10 3000 G 10 3000 G 10 3000 G 10 Z 1475 G 10 1475 G 10 1475 G 10 1475 G 10 O...

Страница 67: ...it Parity check None Stop bit length 1bit X parameter None Table 4 7 Connector pin layout D sub 9 pin Pin No Signal name Function 2 RXD Received data 3 TXD Transmitted data 5 GND Signal ground RF Gene...

Страница 68: ...power PFSET_XXXX CR Specify in watts Response when setting reflected CR Response when setting could not be reflected N CR Check output setting power PFSET CR Returned in watts Response XXXX CR zero su...

Страница 69: ...esponse when command accepted CR Response when command not accepted N CR PROGRAM PRESET MPS_ON CR Move to the PRESET position with the selection program number Response when command accepted CR Respon...

Страница 70: ...he breaker is turned on the current time configuration screen may be displayed If the breaker is off unpowered state for two or more weeks the current time configuration screen is displayed Figure 5 1...

Страница 71: ...g To change the Pf setting and AMC setting move the cursor to it press the ENT key and change the setting Press the and keys to increase and decrease the digit flashing in the Pf setting You can move...

Страница 72: ...auto matching operation is set and the auto matching operation is performed when RF is turned on The variable capacitors cannot be moved in this state The AMC setting can be changed regardless of whe...

Страница 73: ...ges detected at the matching box output section are displayed When matching is achieved the Pr monitor value roughly converges to around 0 W After matching is complete check whether or not the plasma...

Страница 74: ...Output settings Input external command voltage via the RF generator s EXT CONT connector After the above voltage has been input RF with the set power is output by inputting the RF ON command via the E...

Страница 75: ...s to RFOP ANALOG and AMOP SELECT While RF is off change the program number with the program strobe signal and input the motor strobe signal to perform a preset operation Set the one shot signal pulse...

Страница 76: ...Special command details Item Parameter details MAINTE mode While simultaneously pressing the and keys on the TLIFE screen press the ON key Clear EXT INTERLOCK display On the EXT INTERLOCK screen whil...

Страница 77: ...rator s output impedance of 50 by these variable capacitors thereby becoming able to efficiently supply power to the load 6 1 2 Matching adjustment Turn on RF output and increase the setting value unt...

Страница 78: ...hort circuits L is too small Increase the coil turns Adjust the taps replace the coil etc TUNE variable capacitor at minimum Pr at minimum The R component of the load impedance is too large Add a capa...

Страница 79: ...retain a charge You may get an electric shock or die by contact with high voltages so when touching the coil or variable capacitors inside the matching box discharge the electricity to ground with a...

Страница 80: ...N 0T Coil all turns shorted ULVAC ERU 1310N 1T 1 turn coil ULVAC ERU 1310N 2T 2 turn coil ULVAC ERU 1310N 3T 3 turn coil ULVAC ERU 1310N 4T 4 turn coil ULVAC ERU 1310N 5T 5 turn coil ULVAC ERU 1310N 6...

Страница 81: ...e or decrease the number of coil turns for the MBX 1330N and MBX 1350N open the matching box s maintenance panel and change the number of coil taps Location to add the fixed capacitor Coil taps Figure...

Страница 82: ...number of taps can be changed in six types from tap 1 to tap 6 Table 6 4 MBX 1330N MBX 1350N supplementary capacitor Capacitor model Capacitance Withstand voltage 13 56 MHz Withstand current 13 56 MH...

Страница 83: ...ate box and the ground When the fixed capacitor is added to Add location the capacitor will become the load and matching may occur without discharge occurring so please confirm that discharge is occur...

Страница 84: ...1000 1000 750 510 350 250 70 1000 1000 1000 1000 1000 1000 1000 740 500 350 250 60 1000 1000 1000 1000 1000 1000 1000 730 500 340 240 50 1000 1000 1000 1000 1000 1000 1000 710 490 340 240 40 1000 1000...

Страница 85: ...1000 1000 1000 980 690 490 360 270 00 1000 1000 1000 1000 1000 680 470 330 240 170 130 TUNE MATCH MBX 1305N MBX 1310N 3T Table 6 9 MBX 1310N MBX 1305N coils 4 turn coil 00 10 20 30 40 50 60 70 80 90 9...

Страница 86: ...1000 1000 870 690 10 1000 1000 1000 1000 1000 1000 1000 990 750 570 460 00 1000 1000 1000 1000 1000 880 640 470 360 280 220 TUNE MATCH MBX 1305N MBX 1310N 7T Table 6 13 MBX 1310N MBX 1305N coils 8 tur...

Страница 87: ...g Adjustment 79 When making adjustments such as adding a fixed capacitor the deratings will differ from the above derating table The above derating tables are different when the matching box is change...

Страница 88: ...200 930 750 10 3000 3000 3000 3000 2130 1530 1110 840 630 480 390 00 3000 3000 2370 1530 1020 720 510 390 300 210 180 TUNE MATCH MBX 1330N 2T Table 6 17 MBX 1330N 3 taps 00 10 20 30 40 50 60 70 80 90...

Страница 89: ...00 3000 3000 3000 3000 2850 1860 1290 930 690 540 450 TUNE MATCH MBX 1330N 5T Table 6 20 MBX 1330N 6 taps 00 10 20 30 40 50 60 70 80 90 99 99 3000 3000 3000 3000 3000 2130 1380 960 690 540 450 90 3000...

Страница 90: ...0 700 10 5000 5000 5000 5000 5000 4450 2800 1800 1100 700 450 00 5000 5000 5000 4850 2950 1850 1150 700 450 300 200 TUNE MATCH MBX 1350N 2T Table 6 23 MBX 1350N 3 taps 00 10 20 30 40 50 60 70 80 90 99...

Страница 91: ...900 600 00 5000 5000 5000 5000 5000 5000 3500 2300 1450 900 600 TUNE MATCH MBX 1350N 5T Table 6 26 MBX 1350N 6 taps 00 10 20 30 40 50 60 70 80 90 99 99 5000 5000 5000 5000 4000 2100 1200 650 400 150...

Страница 92: ...al auxiliary power supply 4 years 5 Flow meter 4 years 6 Water cooling fins 4 years 7 Water cooling piping 4 years 8 Breaker 4 years 9 Display screen 4 years 10 EMC filter 7 years The recommended usag...

Страница 93: ...me for an overhaul always use ULVAC If you replace parts yourself or have parts replaced by another manufacturer without the permission of ULVAC repairs will be performed for a fee regardless of the w...

Страница 94: ...e life The speed of degradation for these products greatly differs according to the frequency of equipment use and the usage conditions The service life of the vacuum variable capacitor is dependent o...

Страница 95: ...nnot be turned on Pins 16 and 17 of EXT CONT the external control connector are not short circuited The matching box interlock is not released 4 The interlock and alarm are reset cleared but RF cannot...

Страница 96: ...t No discharge due to the gas pressure distance between ES or substrate load conditions 3 Variable capacitors not operating in manual mode A RF Generator internal control element has broken Mechanical...

Страница 97: ...ing RFS 1310N Outline drawing RFS 1330N built in controller type Outline drawing RFS 1330N standalone controller type Outline drawing RFS 1350N built in controller type Outline drawing RFS 1350N stand...

Страница 98: ...RF POWER SUPPLY and MATCHINGBOX 9 Reference Materials 90 Figure 9 1 RFP N outline drawing...

Страница 99: ...RF POWER SUPPLY and MATCHINGBOX 9 Reference Materials 91 Figure 9 2 RFS 1305N RFS 1310N outline drawing A A...

Страница 100: ...RF POWER SUPPLY and MATCHINGBOX 9 Reference Materials 92 Figure 9 3 RFS 1330N RFS 1350N outline drawing built in controller type A A...

Страница 101: ...RF POWER SUPPLY and MATCHINGBOX 9 Reference Materials 93 Figure 9 4 RFS 1330N RFS 1350N outline drawing standalone controller type A A...

Страница 102: ...RF POWER SUPPLY and MATCHINGBOX 9 Reference Materials 94 Figure 9 5 MBX 1305N MBX 1310N outline drawing 4 M4 10 M6 10 M6_Depth_10mm...

Страница 103: ...RF POWER SUPPLY and MATCHINGBOX 9 Reference Materials 95 Figure 9 6 MBX 1330N outline drawing 10 M6 4 M4 10 M6_Depth_10mm...

Страница 104: ...RF POWER SUPPLY and MATCHINGBOX 9 Reference Materials 96 Figure 9 7 MBX 1350N outline drawing 16 6 3 n6...

Страница 105: ...RF POWER SUPPLY and MATCHINGBOX 9 Reference Materials 97 CE Declaration of Conformity...

Страница 106: ...RF POWER SUPPLY and MATCHINGBOX 9 Reference Materials 98...

Страница 107: ...es coil Options cable Pb Lead Hg Mercury Cd Cadmium Cr6 Hexavalent chromium PBB Polybrominated biphenyl PBDE Polybrominated diphenyl ether SJ T11364 This table is prepared according to the provisions...

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