Ulvac PMB100D Скачать руководство пользователя страница 38

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YK11-0016-DI-002-08

2.3 System Flow

Cooling water and power supply is required.
And you prepare wiring, safety circuit and exhaust processing equipment, etc.

Fig. 10 Location of vacuum pump in host device

：

In the case of air cooling

specification, it is unnecessary.

Содержание PMB100D

Страница 1: ...AL BOOSTER PUMP PMB100D PMB300D1 PMB600D 1 PMB1200D 1 PMB2400D 1 1 IE3 motor adoption Before using this product be sure to read this operation manual Keep this manual with care to use at any time ULVA...

Страница 2: ......

Страница 3: ...Declaration of Conformity...

Страница 4: ...ensured if any of the devices put together did not conform to same regulations or the product itself was modified ULVAC shall be not liable to guarantee performance and safety in such cases above Any...

Страница 5: ...ed as illustrated below 0 2 Meanings of Safety Symbol Marks DANGER If the user makes a mistake in handling it indicates an imminent possibility that the user is subject to death or heavy injury WARNIN...

Страница 6: ...or combustion susceptible gas other than inactive gas is not allowed as there is a risk of leakage of the gas from the Pump unit if it was exhausted by the vacuum pump DANGER Use of the toxic combusti...

Страница 7: ...edge that specifications and or price of the product and description of the Instruction Manual are subject to change without prior notice for improvement Any change shall update the version number at...

Страница 8: ...own when attempted unreasonable operation or machinery setup was not sufficient You are strictly restricted to enter beneath the Pump Transfer WARNING You have a risk of giving damage to your back as...

Страница 9: ...g the operation Power Supply wiring Mounting WARNING Check and ensure that any of hazardous energy is blocked before starting the operation Entitled staff should conduct the wiring operation Erroneous...

Страница 10: ...value of the Pump shall be 0 03MPaG 0 3kg cm2 G Gauge pressure WARNING Do not operate the Pump in hazardous area where there is a risk of creating hazardous atmosphere by explosive gas It might cause...

Страница 11: ...sed by over heat CAUTION Ensure to flow the cooling water during operation Required Cooling water shall be Cooling water volume PMB100D air cooling PMB300D 2 L min or more PMB600D 2 L min or more PMB1...

Страница 12: ...Inlet and outlet piping remains very hot while after having stopped the Pump Be sure to take it off after the Pump has sufficiently cooled down Make airtight completely the Pump exhaust outlet with a...

Страница 13: ...ture Ensured pressure value of the Pump shall be 0 03MPaG 0 3kg cm2G Gauge pressure Do not run the Pump on blocking the Exhaust outlet or putting any device that might hamper gas passage onto the outl...

Страница 14: ...02 08 xi 6 PMB100D multi motor specification only Before starting the pump check first that the connection is matched to used voltage Refer to 3 5 Electrical Connection Fig 1 Warning Label 1 PMB300D P...

Страница 15: ...or Motor Operated Air Compressors Vacuum Pumps and Painting Equipment by replacing the warning label according to the figure below Fig 3 Warning Label replacement 1 PMB1200D PMB2400D Hazardous voltage...

Страница 16: ...K11 0016 DI 002 08 xiii Fig 4 Warning Label replacement 2 Hazardous voltage Hot heating part present There is a risk of explosion Checkup after storage for a long period Installation location attentio...

Страница 17: ...asonable operation or machinery setup was not sufficient You are strictly restricted to enter beneath the Pump Upon delivery of the product check first that the delivered is exactly what you have orde...

Страница 18: ...lift up the Pump or load it on the pallet and fix it and run the Pallet truck for its transfer Never try to enter beneath the Pump unit when lifted it up Use sling belts to load unload the unit Do not...

Страница 19: ...shall be no corrosion behavior or explosive gas b There shall be no freeze or dew formation c There shall be no dust d It shall be in house e Another pump shall not be put on the Pump The Pump shall...

Страница 20: ...ion of the pipe to the PMB 100Dserves as the installation of the pump The pipe should be able to support the weight of the pump example the pipe is welded to the rack The pump has four tapped holes at...

Страница 21: ...D The pump has four holes The pump is fixed with four bolts More than M12 x 20mm Kurashiki Kako Ltd Model KLB 8030 PMB2400D The pump has four holes The pump is fixed with four bolts More than M16 x 20...

Страница 22: ...t equipped with the protective device Put an overload protective device to connect through the motor with the Power Supply Refer to 3 5 Electrical Connection to select the overload protective device I...

Страница 23: ...rous materials 1 1 1 2 Warning Transfer of heavy material 1 1 1 3 Warning Electric shock 1 1 1 4 Warning Explosion 2 1 1 5 Caution High temperature 2 1 1 6 Caution Leakage of hot cooling water 2 1 2 C...

Страница 24: ...inverter optional 46 5 5 Motor control equipment air cooled type with atmospheric pressure operating specification inverter 52 5 6 Separate Evacuation of Lubricating Chamber 53 5 6 1 Preparation 54 5...

Страница 25: ...6 3 Checkup after storage for a long period 70 6 4 Overhaul 70 6 5 Trouble shooting 71 7 Removal transport 81 7 1 Operation procedure 81 8 Disposal 82 9 Warranty Clauses 83 9 1 Warrantable Items 83 9...

Страница 26: ...0D 300D 600D Standard 18 Fig 17 Pumping speed curves MODEL PMB1200D 2400D Standard 18 Fig 18 Pumping speed curves MODEL PMB300D 600D 19 Fig 19 Pumping speed curves MODEL PMB1200D 2400D 19 Fig 20 Pumpi...

Страница 27: ...e 6 Oil level gauge 26 Table 7 Rated current value of the standard motor 34 Table 8 Optional parts 53 Table 9 Troubleshooting 71 Table 10 Main displacement parts list for PMB100D 85 Table 11 Main disp...

Страница 28: ...rning Transfer of heavy material Factors Avoidance methods and measures Getting injured on transferring the pump Pump weight PMB100D 26kg PMB300D 51kg PMB600D 82kg PMB1200D 115kg PMB2400D 260kg Only t...

Страница 29: ...e surface temperature is high you have a risk of getting burnt by accidentally touching it with the hand or the like Refrain from touching the pump during operation Wait until the temperature sufficie...

Страница 30: ...with attention to acknowledge the toxic characteristics described on the SDS Please do not use the chemical material except the above mentioned chemical material vacuum pump oil CAUTION SDS is posted...

Страница 31: ...other while maintaining a very small clearance between them by a timing gear The rotors and the casing are constructed in such a manner that the rotors can rotate while maintaining a small clearance...

Страница 32: ...losed fan cooled Multi rated Motor Overseas 220 240V 50Hz 208 240V 60Hz 380 415V 50Hz 380 460V 60Hz 200 240V 50 60Hz 380 480V 50 60Hz PMB300 600 1200 2400D IE3 motor 2 Motor Destination Corresponding...

Страница 33: ...460 kg 26 51 82 115 260 VD40 VD60 9 VD90 9 VS2401 VS650 PKS 070 0 05 CE cTUVus 5 30 Inlet port VG80 Cooling water Cooling method 5 Air cooled Water cooled Primary side pressure 0 3 43 5 Inlet outlet d...

Страница 34: ...the inverter for water cooled operation More than 1 hour operation in 300Pa 4000Pa range could be cause of damage in the case of the PMB600D 1200D and 2400D Select water cooled type in that case 6 Mak...

Страница 35: ...Induction Motor 0 75 2 RATED CURRENT A RATED VOLTAGE V the connection inside the terminal box 15 kW poles delta star delta star 12 7A 200V 50Hz 12 0A 220V 50Hz 12 4A 240V 50Hz 12 6A 200V 60Hz 12 2A 2...

Страница 36: ...to the instruction manual of the inverter please be prepared by the customer the necessary parts Structure of the Mechanical seal would allow a slight oil leak even the sealing was correct In case yo...

Страница 37: ...ig 8 Electrical wiring diagram Fig 9 Terminal box internal wiring diagram WARNING Before wiring please check the power supply voltage to be used Check the power supply voltage to be used please do the...

Страница 38: ...ow Cooling water and power supply is required And you prepare wiring safety circuit and exhaust processing equipment etc Fig 10 Location of vacuum pump in host device 1 1 1 1 1 In the case of air cool...

Страница 39: ...YK11 0016 DI 002 08 12 2 4 Dimensional drawing Fig 11 Dimensional drawing PMB100D...

Страница 40: ...YK11 0016 DI 002 08 13 Fig 12 Dimensional drawing PMB300D...

Страница 41: ...YK11 0016 DI 002 08 14 Fig 13 Dimensional drawing PMB600D...

Страница 42: ...YK11 0016 DI 002 08 15 Fig 14 Dimensional drawing PMB1200D...

Страница 43: ...YK11 0016 DI 002 08 16 Fig 15 Dimensional drawing PMB2400D...

Страница 44: ...normal condition 2 5 2 Pumping Speed The pumping speed of the mechanical booster pump changes depending on the inlet pressure Also the pumping speed of the mechanical booster pump fluctuates dependin...

Страница 45: ...100 1000 10000 100000 Pumping Speed m3 h Pressure Pa PMB300 60Hz VD60 60Hz PMB300 50Hz VD60 50Hz PMB600 50Hz VD90 50Hz PMB100 50Hz VD40 50Hz PMB600 60Hz VD90 60Hz PMB100 60Hz VD40 60Hz 0 500 1000 150...

Страница 46: ...2400D Water cooled specification with inverter optional 0 100 200 300 400 500 600 700 0 1 1 10 100 1000 10000 100000 Pumping Speed m3 h Pressure Pa PMB300 60Hz VD60 60Hz PMB300 60Hz VD60 50Hz PMB600...

Страница 47: ...B1200D 2400D Air cooled specification with inverter optional Rotational speed of the mechanical booster pump with inverter is 60Hz 0 100 200 300 400 500 600 700 0 1 1 10 100 1000 10000 100000 Pumping...

Страница 48: ...verloaded at an intake pressure of more than the maximum intake pressure Refer to the Table 2 Specifications and the pump generates a large amount of heat causing motor burn out and pump seizure There...

Страница 49: ...e vacuum chamber is small in size that is when a long time can be spent for rough pumping Since the mechanical booster pump does not operate when rough pumping is under way the gas to be exhausted is...

Страница 50: ...d which can be interlocked with a vacuum switch The vacuum switch is available in two types mechanical and electrical It is installed on the vacuum chamber or near the intake port of the mechanical bo...

Страница 51: ...t consult with our company Furthermore this pump guarantees reliability by the operation frequency 50Hz and 60Hz 2 9 Motor control equipment air cooled type with atmospheric pressure operating specifi...

Страница 52: ...n Be sure to clear any energy sources e g electricity coolant and so on of the product before installing or removing the product 3 1 Storage Installation Install the machine horizontal to a place wher...

Страница 53: ...he upper limit level Table 6 Oil level gauge MODEL Place In oiling During operating PMBD Series Oil level gauge on the Cover of gear side Put the oil up to the upper limit level Oil level shall be ava...

Страница 54: ...over lubricated so as to match the upper level Be sure to check the oil level under operation stop on the room temperature around 20 Oil level might get higher during operation due to the oil tempera...

Страница 55: ...e on the bearing gear and shaft sealing and result in leak noise motor overload and operation stop Structure of the Mechanical seal would allow a slight oil leak even the sealing was correct In case y...

Страница 56: ...earance to keep rotation and easily gets impossible to rotate by any foreign substance entered inside Clear the sand completely after having sand blasted the vacuum chamber Pay attention not to give d...

Страница 57: ...e gas and substance other than inactive gas is not allowed as there is a risk of causing fire or explosion inside the Pump unit if it was exhausted by the vacuum pump It is not allowed to use any corr...

Страница 58: ...of the motor CAUTION Wash sufficiently inside the Vacuum chamber pipes Vacuum valve and so on to connect them to the Pump If dirty unit were connected it would cause a trouble such like raise the ulti...

Страница 59: ...mined by considering the voltage drop of the wire WARNING Install and operate the product in compliance with the laws and regulations relating to the safety e g Fire Defense Law Electric wiring regula...

Страница 60: ...or less 380V 460V Ground to 10 ohm or less Use a safety circuit which keeps the motor from starting a fire which is caused by over current Install a safety circuit suitable for the capacity of the mo...

Страница 61: ...0 98A 0 98A 415V 50Hz 415V 50Hz 0 88A 0 88A 380V 60Hz 380V 60Hz 0 85A 0 85A 460V 60Hz 460V 60Hz 3 10A 3 10A 200V 50Hz 200V 50Hz 3 00A 3 00A 220V 50Hz 220V 50Hz 3 10A 3 10A 240V 50Hz 240V 50Hz 3 10A 3...

Страница 62: ...YK11 0016 DI 002 08 35...

Страница 63: ...80V 60Hz 4 20A 4 20A 460V 60Hz 460V 60Hz 12 7A 12 7A 200V 50Hz 200V 50Hz 12 0A 12 0A 220V 50Hz 220V 50Hz 12 4A 12 4A 240V 50Hz 240V 50Hz 12 6A 12 6A 200V 60Hz 200V 60Hz 12 2A 12 2A 208V 60Hz 208V 60Hz...

Страница 64: ...V 50Hz 380V 50Hz 13 8A 13 8A 415V 50Hz 415V 50Hz 13 5A 13 5A 380V 60Hz 380V 60Hz 11 9A 11 9A 460V 60Hz 460V 60Hz For Japan For America For Europe and China PMB2400D 7 5 Motor Multi rated delta 40 8mm2...

Страница 65: ...YK11 0016 DI 002 08 38...

Страница 66: ...he Coolant and cause the interlock so that the Pump stops if the cooling water flows less than specified volume When the operation stopped in winter the water piping and the pump have a risk of breaki...

Страница 67: ...the floor around the Pump We recommend you to put the Leak sensor on the floor beneath the Pump and engage it with the interlock system of the equipment Close the Coolant supply valve HWSV immediately...

Страница 68: ...Shortage of the cooling water might give damage on the bearing gear and shaft sealing which results in contact of the rotor and casing and operation stop CAUTION Never fail to lubricate the machine I...

Страница 69: ...e opening in 3 5 sec after stopping the motor for the pump drive do connection so that it gangs with the motor 4 2 Operation Start 4 2 1 Test run Follow the procedure 1 4 below to start operation of t...

Страница 70: ...g the Oil level gauge to check the rotation direction Gear rotation shown in the Fig 15 is correct Refer to the pump s nameplate too If it rotated reverse check the motor wire connection The Motor is...

Страница 71: ...damage to the Pump Further the oil might flow back to the vacuum chamber if used the Oil rotation pump as the backing pump If failed in closing the Vacuum valve the vacuum might leak from the Exhaust...

Страница 72: ...YK11 0016 DI 002 08 45...

Страница 73: ...Air cooled J25F Fluorine based synthetic oil Chemically stable and resistant to heat I will not produce a solid such as degradation products 5 4 Motor control equipment water cooled type with atmosph...

Страница 74: ...N Since not meet the entry requirements of the motor and inverter as approved will be handled as a single pump not apply CE marking and certification NRTL Mounting dimensions refer to Section 5 6 Opti...

Страница 75: ...ol wiring for the inverter configuration and start up S1 SC please do not change so we are at the time of shipment Please However if you activate the remote operation under the control of the input of...

Страница 76: ...H2 03 Terminal P2 Function Selection open collector 2 Speed Agree 1 12 A2 12 User Parameter H3 09 Terminal A2 Signal Level Selection Sets the input signal level for terminal A2 2 4 to 20mA 13 A2 13 Us...

Страница 77: ...flowing prescribed amount To PMB100D it does not have this switching function 5 If you want to use the analog input command please ON 6 Please be ON when you reset the inverter fault 7 S5 or I will s...

Страница 78: ...100D you do not have a water cooled specification Control wiring for the inverter configuration and start up S1 SC please do not change so we are at the time of shipment Please However if you activate...

Страница 79: ...more pressure held in a pressure range of 300 4000Pa Setting and control wiring for starting S1 SC please do not change so we are at the time of shipment However if you be started by remote control p...

Страница 80: ...osition of the exhaust port of rooms lubrication refer to Section 5 6 Optional attachment figure Table 8 Optional parts Description Function Oil trap flange Oil trap plug Allows pumping of the lubrica...

Страница 81: ...o the intake port 2 Run the pump for evacuating the lubricating chamber to evacuate the lubricating chamber of the mechanical booster pump Then run the backing pump to evacuate the mechanical booster...

Страница 82: ...of the mechanical booster pump Then start the backing pump to evacuate the mechanical booster pump and piping 2 Open the main valve above the inlet side of the mechanical booster pump to evacuate the...

Страница 83: ...YK11 0016 DI 002 08 56 5 7 Optional attachment figure Fig 27 PMB100D Optional attachment figure...

Страница 84: ...YK11 0016 DI 002 08 57 Fig 28 PMB300D Optional attachment figure...

Страница 85: ...YK11 0016 DI 002 08 58 Fig 29 PMB600D Optional attachment figure...

Страница 86: ...YK11 0016 DI 002 08 59 Fig 30 PMB1200D Optional attachment figure...

Страница 87: ...YK11 0016 DI 002 08 60 Fig 31 PMB2400D Optional attachment figure If you have installed the intake and exhaust ports ISO F flange...

Страница 88: ...YK11 0016 DI 002 08 61 Fig 32 PMB2400D Optional attachment figure If you have installed the inlet ISO K flange...

Страница 89: ...YK11 0016 DI 002 08 62 Fig 33 Dimensional drawing PMB2400D Horizontal exhaust model...

Страница 90: ...following points at least once per three days while you continue operation In the high load operating raise the frequency of confirmation 1 Whether the Vacuum oil pump oil volume is between two level...

Страница 91: ...Erroneous wiring work might cause a fire Conduct the wiring operation correctly in compliance with laws and rules concerning the safety e g Fire Defense Law Electric Equipment Technology standard Int...

Страница 92: ...ecommended to replace the first pump oil within 10 days after operation start and see how it got dirty to determine the oil replacement cycle Proceed as follows Refer to 3 2 1 Shut down the pump and o...

Страница 93: ...reatment described on the SDS CAUTION Ensure to use the vacuum pump oil designated by ULVAC Operation using oil other than designated shall be out of our scope of guarantee as it might impair the pump...

Страница 94: ...e be sure to stop running the Pump and return the Mechanical booster inside to the atmospheric pressure However a deterioration of the mechanical seal may be considered if the lubrication oil pooled 0...

Страница 95: ...Trouble check list Should the condition was not recovered after having checked points indicated there please contact the closest Service center 6 2 8 Check the Rotor and Casing Stop the mechanical boo...

Страница 96: ...r cable of the motor 2 To remove the bolts form the motor And remove the motor from the pump 3 Now you can check the spider of the coupling Replace the spider with a new one Put the new coupling spide...

Страница 97: ...ice Center close to you listed at the end of the document as for the overhaul Do not forget to fill and submit the Contamination certificate enclosed in the end of the document WARNING We would be obl...

Страница 98: ...of the Casing Rotor Cover and so on 6 4 5 Reactive agent accumulated inside the Pump while the Pump was stopped after having exhausted the reactive gas Any deposits on the rotor surface Conduct the o...

Страница 99: ...YK11 0016 DI 002 08 72...

Страница 100: ...ump have burnt out Conduct the overhaul 6 4 14 The oil is not supplied by the specified volume a Oil flow to outside of pump b Oil flow to inside of casing c Oil flow from mechanical seal Control the...

Страница 101: ...ntered the pump Conduct the overhaul Clean the pump to eliminate foreign matter 6 2 8 6 4 4 Components inside the pump have burnt out Conduct the overhaul 6 4 5 Coolant does not flow Specified volume...

Страница 102: ...r 2 6 5 Metal mesh at the inlet is clogged Remove the pipe above the inlet and wash the mesh 4 6 2 6 6 The oil is not supplied by the specified volume Control the oil level Supply the oil by the speci...

Страница 103: ...seal 3 2 2 6 4 15 Is the ultimate pressure of backing pump normal Pressure is over the prescribed value of the mechanical booster pump Check the backing pump Replacement of the backing pump 2 2 16 Coo...

Страница 104: ...around the Pump is enclosed Make the ventilation available 0 5 3 6 High temperature Please use it in environment with the air conditioning 0 5 3 7 There is a leak in the pipe connecting with the Pump...

Страница 105: ...YK11 0016 DI 002 08 78...

Страница 106: ...position and stop it 2 6 4 The rotor is in contact with each other Conduct the overhaul 6 4 2 Pressure is over the maximum pumping pressure Check pressure on intake and exhaust sides Check the backing...

Страница 107: ...se voltage Check the power supply 3 5 2 Oil is dirty Replace with new oil Conduct the overhaul Inside cleaning 3 2 6 2 1 6 2 2 6 2 3 3 Foreign substance entered inside the Pump impaired the Motor rota...

Страница 108: ...only the entitled person for special gas handling should be in charge of the removal work Keep applying a plate displaying the name of exhausted gas on a place easily seen on the Pump WARNING You hav...

Страница 109: ...any toxic gas Note that you are requested to bear the cost and charges relating to the disposal WARNING You should ask a special disposal agency for the disposal particularly if the Pump has exhausted...

Страница 110: ...n Japan Product which has damage caused by a failure on delivery Products not satisfying the standard specifications although the product is used under the service conditions described in this documen...

Страница 111: ...roduct deficiency or secondary damnification occurred to Buyer from law suit to ULVAC by third party for patent infringement 9 The reason of the failure deemed below the specified usage condition by U...

Страница 112: ...n seal For PMB100D FPM 2 Bearing 6203 P5 SUJ 2 O ring AS568 258 FPM 1 Mechanical seal For PMB100D SUS 1 Oil level gauge For PMB100D Polycarbonate 1 O ring G50 1 FPM 1 O ring P9 1 FPM 1 O ring P30 1 FP...

Страница 113: ...ring S12 2 FPM 1 Teflon seal VCF30405 FPM 2 Bearing 6205 P5 SUJ 2 O ring AS568 268 FPM 1 Mechanical seal For PMB300D SUS 1 Oil level gauge For PMB300D Polycarbonate 1 O ring G65 1 FPM 1 O ring P9 1 FP...

Страница 114: ...FPM 1 O ring S12 2 FPM 1 Teflon seal For PMB600D FPM 2 Bearing 6206 P5 SUJ 2 O ring AS568 276 FPM 1 Mechanical seal For PMB600D SUS 1 Oil level gauge For PMB600D Polycarbonate 1 O ring G75 1 FPM 1 O...

Страница 115: ...ring AS568 278 FPM 1 O ring AS568 278 FPM 2 O ring V120 1 FPM 1 O ring P16 1 FPM 1 Mechanical seal For PMB1200D SUS 1 Oil level gauge For PMB1200D Polycarbonate 1 O ring G85 1 FPM 1 O ring P32 1 FPM 1...

Страница 116: ...O ring AS568 384 FPM 1 O ring AS568 384 FPM 2 O ring V225 1 FPM 1 O ring P22 1 FPM 1 Mechanical seal For PMB2400D SUS 1 Oil level gauge For PMB2400D Polycarbonate 1 O ring G105 1 FPM 1 O ring V55 1 F...

Страница 117: ...ty period Table Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Body indicating that content of the hazard...

Страница 118: ...ion Remarks Contaminant Check an applicable box I guarantee that above returned item s is not contaminated with harmful substances Above returned item s is contaminated with the following harmful subs...

Страница 119: ......

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