YK11-0016-DI-002-09
INSTRUCTION MANUAL
MECHANICAL BOOSTER PUMP
PMB100D
PMB300D
1)
PMB600D
1)
PMB1200D
1)
PMB2400D
1)
1)
IE3 motor adoption
Before using this product, be sure to read this operation manual.
Keep this manual with care to use at any time.
ULVAC, Inc.
Components Division
http://www.ulvac.co.jp/
Содержание PMB100D
Страница 2: ......
Страница 3: ...Declaration of Conformity...
Страница 39: ...YK11 0016 DI 002 08 12 2 4 Dimensional drawing Fig 11 Dimensional drawing PMB100D...
Страница 40: ...YK11 0016 DI 002 08 13 Fig 12 Dimensional drawing PMB300D...
Страница 41: ...YK11 0016 DI 002 08 14 Fig 13 Dimensional drawing PMB600D...
Страница 42: ...YK11 0016 DI 002 08 15 Fig 14 Dimensional drawing PMB1200D...
Страница 43: ...YK11 0016 DI 002 08 16 Fig 15 Dimensional drawing PMB2400D...
Страница 62: ...YK11 0016 DI 002 08 35...
Страница 65: ...YK11 0016 DI 002 08 38...
Страница 72: ...YK11 0016 DI 002 08 45...
Страница 83: ...YK11 0016 DI 002 08 56 5 7 Optional attachment figure Fig 27 PMB100D Optional attachment figure...
Страница 84: ...YK11 0016 DI 002 08 57 Fig 28 PMB300D Optional attachment figure...
Страница 85: ...YK11 0016 DI 002 08 58 Fig 29 PMB600D Optional attachment figure...
Страница 86: ...YK11 0016 DI 002 08 59 Fig 30 PMB1200D Optional attachment figure...
Страница 88: ...YK11 0016 DI 002 08 61 Fig 32 PMB2400D Optional attachment figure If you have installed the inlet ISO K flange...
Страница 89: ...YK11 0016 DI 002 08 62 Fig 33 Dimensional drawing PMB2400D Horizontal exhaust model...
Страница 99: ...YK11 0016 DI 002 08 72...
Страница 105: ...YK11 0016 DI 002 08 78...
Страница 119: ......
