ULVAC CRYOGENICS INCORPORATED
17
Figure 5-1
Allowable range of cooling water for MP-300K
5.3 Power supply for GN-20i
Voltage
: AC100V±10% (50/60Hz) single-phase
Power capacity
: 15A or above
Power consumption
: 0.7 / 0.8kW (50/60Hz)
Connection
: Grounded outlet
Pre
s
s
u
re
d
ro
p
[M
P
a
]
C
ool
ing
w
a
te
r i
n
let
t
em
per
at
u
re[
°
C
]
30
°
C
Temp. upper limit
Water flow
upper limit
Temp.
lower limit
Water flow
lower limit
Allowable
range
Flow rate [L/hr]
Flow rate [L/hr]
Use D-type earth ground for safety.
CAUTION
