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6

ULVAC CRYOGENICS INCORPORATED

2. Component Description

Figure 2-1

MP-300K Front

Figure 2-2

MP-300K Operation panel

非常停止スイッチ

操作パネル

ＲＥ

ＳＥＴ

ＲＥ

ＡＤＹ

Ｓ

ＵＰＰ

ＬＹ

ＳＴ

ＡＲＴ

ＳＴＯ

Ｐ

Ｃ

Ｏ

Ｍ

Ｐ．

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Ｌ

ＡＲ

Ｍ

％

０

４

０

２

０

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０

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０

１

００

Ｎ

２

　

ＧＡ

Ｓ

　

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Ｒ

Ｍ

ＭＡ

ＮＵＡ

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Ｍ

ＡＮＵ

ＡＬ

Ａ

ＵＴＯ

ＡＵＴ

Ｏ

ＲＵＮ

／ＳＴ

ＯＰ

Ｄ

ＥＷＥ

Ｒ　Ｌ

Ｎ

２

液化窒素取り出し口

ＲＥＳＥＴ

ＲＥＡＤＹ

ＳＵＰＰＬＹ

ＳＴＡＲＴ

ＳＴＯＰ

ＣＯＭＰ．ＡＬＡＲＭ

％

０

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１００

Ｎ２　ＧＡＳ　ＡＬＡＲＭ

ＭＡＮＵＡＬＭＡＮＵＡＬ

ＡＵＴＯ

ＡＵＴＯ

ＲＵＮ／ＳＴＯＰ

ＤＥＷＥＲ　ＬＮ

２

LN

2

Manual

dispense port

Emergency off

button

Operation

panel

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Содержание MP-300K

Страница 1: ...al sensors the cryocooler falls under row 6 A 2 d 2 of the control list established by The Wassenaar Arrangement which is equal to row 10 2 of appended table 1 of Japan s Export Trade Control Order Cu...

Страница 2: ......

Страница 3: ...manual close at hand so that you can use for reference during operation If you purchased our other products and or optional devices with this product read relevant instruction manuals carefully Genera...

Страница 4: ...unsafe practices which could result in severe injury or loss of life A caution describes safety hazards or unsafe practices which could result in personal injury or equipment damage Toxic gas or chemi...

Страница 5: ...gure 2 3 10 2 4 MP 300K Electrical circuit Figure 2 4 10 2 5 MP 300K Top Figure 2 5 11 2 6 UW701N Front Figure 2 6 13 2 7 UW701N Status display Figure 2 7 13 3 Flow Sheet 14 4 Specifications 15 4 1 Li...

Страница 6: ...1 Connecting liquid nitrogen supply port 29 9 2 Dispense liquid nitrogen 29 9 3 Disconnecting Manual Dispense Flexible Hoses 30 10 Automatic Supply of Liquid Nitrogen 31 10 1 Inspections before autom...

Страница 7: ...e the oxygen concentration of 18 or below is defined as an oxygen depleted state Choose a well ventilated and good air circulated location to install the present unit or install a ventilator with a ca...

Страница 8: ...danger of burns if it is touched directly When performing maintenance or repair work etc wait for at least 30 minutes after the unit is shutdown In this system high pressure helium gas is filled When...

Страница 9: ...at and or throw into fire The adsorber may explode For safe disposal of an adsorber follow the procedures below 1 Depressurize the high pressure helium gas in the adsorber to an ambient atmospheric pr...

Страница 10: ...4 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 11: ...l 1 2 Helium gas compressor UW701N This unit is in the right side of MP 300K compress Helium gas to supply to the cold head to provide cryogenic temperatures It is automatically turned on and off by t...

Страница 12: ...6 ULVAC CRYOGENICS INCORPORATED 2 Component Description Figure 2 1 MP 300K Front Figure 2 2 MP 300K Operation panel LN2 Manual dispense port Emergency off button Operation panel...

Страница 13: ...uring normal operation and flickers when in error state RESET This switch is used to reset the MP 300K error AUTO READY Press this button to use optional auto supply function When you wish to auto sup...

Страница 14: ...plays liquid nitrogen level in the dewar COMP ALARM Turns on red when the UW701N stops due to an error The RUN STOP button blinks at the same time N2 GAS ALARM Red light illuminates when the nitrogen...

Страница 15: ...Attached with rotation through 45 degrees Temperature meter Pressure meter LN2 Dewar Electrical circuit Nitrogen gas pressure regulator 1 Nitrogen gas flow meter 1 Nitrogen gas flow control valve 1 C...

Страница 16: ...e the dewar Temperature meter is not equipped depending on the condition of installation 1 Nitrogen gas pressure regulator flow meter and flow control valve are mounted only on the models with nitroge...

Страница 17: ...ok coupling to connect the line for LN2 Optional auto supply Note that the coupling is in extremely low temperature during and immediately after dispensing LN2 Supply signal connector Port to connect...

Страница 18: ...ED Figure 2 6 UW701N Front Figure 2 7 UN701N Status display Status display Elapsed time meter Helium gas pressure meter Helium charge valve Inside the panel Helium charge port Inside the panel Power l...

Страница 19: ...used to charge helium gas Do not touch except when necessary to prevent helium leakage Elapsed time meter The meter records the number of hours the UW701N compressor has been operating Use the record...

Страница 20: ...Cryogenic Solenoid Valve Auto 2 LN2 Supply Line Cryogenic Solenoid Valve Manual LN2 Dispense Flexible Hose Pressure Regulator Normal Temperature Solenoid Valve Control Circuit Temperature Indicator TI...

Страница 21: ...ss Non condensation other than LN2 dispense port MP 300K is intended for indoor use only Do not use the equipment in the atmosphere with organic solvents or corrosive gases 4 2 PSA system nitrogen gas...

Страница 22: ...ter for MP 300K Recommended flow rate 6 7 L min 400L hr Recommended pressure 0 04 MPa Recommended temperature 20 C Water quality Tap water equivalent Check the water quality on a regular basis Use D t...

Страница 23: ...0 60Hz single phase Power capacity 15A or above Power consumption 0 7 0 8kW 50 60Hz Connection Grounded outlet Pressure drop MPa Cooling water inlet temperature C 30 C Temp upper limit Water flow uppe...

Страница 24: ...OGENICS INCORPORATED 5 4 Nitrogen gas for MP 300K for systems with N2 gas supply Supply pressure 0 3 0 99 MPa Flow rate 20NL min or more Purity 99 or above Dew point 60 C or below NOTE Supply N2 gas c...

Страница 25: ...be located nearby 2 Install the equipment at a well ventilated place where the ambient temperature is 10 35 C and humidity is 80 or less 3 Secure the following spaces for maintenance NOTE Spaces othe...

Страница 26: ...ection Supply Voltage 190 220 VAC 50Hz three phase 200 230VAC 60Hz three phase Power capacity 30 A or more Power consumption 4 3kW 5 2kW 50 60 Hz 1 Check that the power supply voltage is within the ra...

Страница 27: ...g water hose to the water supply side and the MP 300K water IN connector and water discharge side and MP 300K water OUT connector 4 When the connections are made open the main valve of cooling water s...

Страница 28: ...lve of customers preparation 6 3 4 Connection of nitrogen gas generator remote cable Connect the nitrogen gas generator remote cable to the remote connector located inside the MP 300K and the signal c...

Страница 29: ...V NF PWS PLC E S F 1 2 3 LDC ELB R1 PBL1 4 PB1 2 PL1 2 LI CN1 TIC T T TIC 3 7 19 11 12 DC DC 24V 0V Compressor unit Remote response Earth bar Compressor unit NF PWS PLC E S F 1 2 3 LDC ELB R1 PBL1 4 P...

Страница 30: ...o Supply Target Level Gauge Converter GN Operation Signal COMP Operation Signal Main Level Sensor Upper Limit Main Level Sensor 100 Main Level Sensor 75 Main Level Sensor 50 Main Level Sensor 25 Main...

Страница 31: ...ights green when it starts up normally 2 Nitrogen gas supply starts after six minutes of GN 20i startup along with the rise of the ball in flow meter in the center When nitrogen gas supply starts N2 G...

Страница 32: ...as supply stops LN2 production also stops The cold head right after stopping the operation is at extremely low temperature and likely to cause water condensation or freezing Therefore when moisture in...

Страница 33: ...up The internal temperature error of UW701N has occurred Contact us STS 4 8 light up The cooling water system error of UW701N has occurred Check the cooling water pressure and flow rate Wait about 30...

Страница 34: ...N2 pressure is above 0 3MPa 3 Adjust the pressure regulator inside the MP 300L front door to 0 25MPa or above turn off the N2 GAS ALARM light and then adjust to 0 2MPa Check that the flow rate is 20NL...

Страница 35: ...press MANUAL START buttons again to extend the operation for another 10 minutes Press MANUAL STOP buttons to stop dispending LN2 production stops during the manual dispense operation When nitrogen ga...

Страница 36: ...of connecting Push down the outer ring of the MP 300K side joint and pull out the flexible hose to disconnect CAUTION When disconnecting flexible hoses make sure that they return to room temperature...

Страница 37: ...also stops by the following conditions 1 The MP 300K RUN STOP or AUTO READY is turned OFF 2 The remaining LN2 in MP 300K is 0 3 Nitrogen gas supply stops Manual dispense cannot be started while automa...

Страница 38: ...40 000Hr 1 year 2 years 5 years Coldhead cylinder 2 units 1 Adsorber Compressor Helium line coupling GN 20i air compressor GN 20i filter 2 GN 20i solenoid valve 3 Check the total operation time of the...

Страница 39: ...ore performing the maintenance work WARNING Since helium is filled in this equipment as well as in the maintenance parts cold head oil adsorber do not disassemble these parts When you have to disassem...

Страница 40: ...The emergency stop switch is pressed Reset the emergency stop switch by turning it to the right and restart 2 LN2 production fails to start even if the RUN STOP switch is turned on The RUN STOP switch...

Страница 41: ...ress RESET of MP 300K Helium gas pressure is declining STS5 8 of UW701N lights up Check helium gas pressure Add helium gas and reset the system When it occurs again contact us Cold head motor protecti...

Страница 42: ...trogen level display is 0 Wait until the liquefied nitrogen is accumulated The level sensor is incorrect operating under the influence of ice and frost generated inside the container Contact us Soleno...

Страница 43: ...sufficient Check the purity of the nitrogen gas 10 AUTO READY button flickers The level sensor in the supply destination is in error state Contact us The level sensor cable in the supply destination...

Страница 44: ...m Cooling water hose 2 5m Cooling water joint 2 Screw size R1 2 Nitrogen gas tube 1 5m Wrench 1 Glass fuse 3 2A x 3 Instruction manual 1 This book GN 20i N2 generator remote cable 1 5m Instruction man...

Страница 45: ...ents and on site visits for the following seven conditions In those cases the cost shall be your own expense even though the product is within the warranty period 1 Breakdowns due to improper storage...

Страница 46: ...urred to your company or your customers by failures of ULVAC CRYOGENICS products and compensation for damages to products other than ULVAC CRYOGENICS products and other services are not covered under...

Страница 47: ...Chigasaki Kanagawa 253 0085 Japan Sales Tel 81 467 85 8884 Service Engineering Division Tel 81 467 85 9366 Fax 81 467 83 4838 ULVAC CRYOGENICS KOREA INC www ulvac cryo co kr 107 Hyeongoksandan ro Che...

Страница 48: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Страница 49: ...ULVAC CRYOGENICS INCORPORATED R 1 Revision History Date Revision No Contents 2017 1 25 2019 3 14 2017 01 2019MH01 First edition Full fledged revision...

Страница 50: ...R 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

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