Ulvac GI-M2 Скачать руководство пользователя страница 56

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Fig. 9-6 LOG output

1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00 1.0E+01

t V

tage

)

Pressure (Pa)

Содержание GI-M2

Страница 1: ...AL Components Division ULVAC Inc 2500 Hagisono Chigasaki City Kanagawa Prefecture Japan 253 8543 http www ulvac co jp This manual is for the ion gauges of serial numbers GI M2 S N 32000G GI D7 S N 320...

Страница 2: ...I...

Страница 3: ...afety symbols are used throughout this instruction manual to call the operator s attention to safety The terminology used in safety symbols is classified below Indicate status of urgency of danger whe...

Страница 4: ...f power Turn off the power before replacing a fuse If it is replaced with the power turned on you may get electric shock Turn off power Before installing the gauge unplug the power cable Use fuse of s...

Страница 5: ...ounding temperature the shorter the life It is recommended to replace the aluminum electrolytic capacitor cooling fan once every three years or at the time or repair or overhaul to prevent components...

Страница 6: ...f GI TL3 Compatibility added May 12 2009 03 Correction of errors Sep 15 2010 04 Added fuse type Jun 25 2012 05 Correction of errors Apr 5 2013 06 GI M2 Added LOG output Sep 18 2013 07 Correction of er...

Страница 7: ...8 4 SELECTING THE SENSITIVITY FACTOR FUNCTION 28 8 5 SETTING THE SENSITIVITY FACTOR FUNCTION 28 8 6 SETTING OF SET POINT 1 2 29 8 7 SELECTION OF RANGE CHANGEOVER FUNCTION 30 8 8 SETTING OF RANGE HOLD...

Страница 8: ...gnal 68 11 4 6 Setting the sensitivity 68 11 4 7 Setting and reading the set point 68 11 4 8 Setting analog output 68 11 4 9 Reading the measured pressure value and action status 69 11 5 CAUTIONS IN O...

Страница 9: ...l power supply 63 Fig 10 5 External control using external power supply 63 Fig 10 6 Method of External Control 64 Fig 17 1 Dimensional drawing panel cut drawing 85 Fig 17 2 Sensor heas GI M2 86 Fig 17...

Страница 10: ...ue outputs 51 Table 9 11 Measurement value outputs 53 Table 9 12 Measurement value outputs 55 Table 10 1 A list of EXT I O functions 59 Table 13 1 Relative Sensitivity Factor of Ion Gauge for Each Gas...

Страница 11: ...o 7 40 10 2 Torr The sensor head cable becomes the 150 degrees Celsius heat resistance specifications by default Ionization Vaccum GI D7 It is a hot cathode ionization gauge to use a sensor head for u...

Страница 12: ...00 10 1 Pa 2 00 10 3 Torr 6 60 10 1 Pa 6 60 10 3 Torr Degassing function Direct electrical heating of grid Direct electrical heating of grid Electron bombardment system 500V 5mA Normal mode Operates...

Страница 13: ...se a tungsten filament it is necessary to do pressure protection of a set point of functioning in 9 9 10 3 Pa 5 Available under a pressure of 1 3 10 4 Pa or less 2 2 Standard Accessories External inpu...

Страница 14: ...after a preset time when used in the auto OFF mode Functionkey F1 GI N8Only Changes over the emission current 0 5 5 mA Set at 0 5 mA when measurement is started Can be changed over to 5 mA at 5 0 10...

Страница 15: ...ssion state lamp 10 A GI M2 Lit when emission current is 10 A GI N8 Lit when emission current is 0 5 mA GI D7 Not used Emission state lamp 1mA GI M2 Lit when emission current is 1 mA GI N8 Lit when em...

Страница 16: ...Set Value Indicator Fig 3 3 Front panel measurement value display set value indicator Status Function When in the measurement mode Displays the pressure measurement value When in the program set mode...

Страница 17: ...unication connector RS 232C Connector for communication D sub 9 pin pin connector Heat radiation fan Fan for radiating blowing out the heat in the gauge Power inlet connector AC100V Connector for conn...

Страница 18: ...TA A E b0E OUT PUT 14 PRESSURE DATA A E b3E OUT PUT 39 PRESSURE DATA A E b1E OUT PUT 15 PRESSURE DATA A E b0E OUT PUT 40 PRESSURE DATA A E b2E OUT PUT 16 41 17 DEGAS A EONE A OFF IN PUT 42 IN PUT 18 E...

Страница 19: ...cannot be changed 6 7 8 External input switching jumper Jumper for selecting whether the internal power supply 5 V or the external power supply is to be used to pull up the external input photocouple...

Страница 20: ...radiation correct pressure measurement may not be made 4 3 2 78B Installing the sensor head Install the sensor hrad in such a way that the sensor head mounting opening is parallel with the flow of ga...

Страница 21: ...place and that of the sensor head installation place due to connection of the connector screw and sensor head setscrew measurement error may arise In that event install either of them afloat using an...

Страница 22: ...ble temperature or humidity is high The standard operating temperature for the sensor head cable is 150 C Pressure can be measured during baking with the cable connected to the sensor head 4 4 2 Conne...

Страница 23: ...head name WIT Cable name FIlament F 2x places F places F F2 F1 F2 One set with each 2 WIT is only F1 Glit G places G places G One set with each 2 Collector Non sign P 2places C Connect a Co axial cabl...

Страница 24: ...n Fig 4 8 WIB N3 WIN N Connection The shell flange is attached to the sensor head cable A gasket for port installation the M6 bolt please prepare to separately Gauge port UFC070 Gasket UFC070 M6 bolt...

Страница 25: ...mission current GI N8 only 23 Set point 1and 2 setting 29 Range changeover selection 30 When pressure protection is activated 24 Range changeover setting 30 When EXT PROTECT is activated 24 selection...

Страница 26: ...pleted The portion in the left figure lights GI D7 dose not turn on Em Lo Ezm Hi GI M2 10 is displayed on the segment indicator GI D7 SnS1 WIT setting 7 is displayed on the segment indicator GI D7 SnS...

Страница 27: ...t flowing normally the lamp above the FIL key blinks About 4 sec Pressure is displayed on the segment indicator when in the measurement status Example Display in the left figure 5 00 10 4 Pa Turning o...

Страница 28: ...Auto OFF mode Turning ON DEGAS lights the LED marked with in the left figure and the DEG status is set up after displaying on the segment indicator DEGAS is automatically turned off when the time set...

Страница 29: ...mA A second press on the key sets the emission current to 0 5 mA The emission current is indicated on the 0 5mA or 5 0mA lamp on the front panel The emission current 5 0 mA cannot be changed over unl...

Страница 30: ...ted as measurement value To make measurement again press the ENT key to set up the MESU status and check pressure by a Pirani gauge or other and turn on the filament again Refer to STANDARD SPECIFICAT...

Страница 31: ...he setting is not changed press the PRG key If the change of the set point is saved press the ENTER key to transfer control to the next To exit the setting mode hold down the PRG key for 2 seconds or...

Страница 32: ...En 1 6 00 2 8 00 2 1 53 1 SETPOINT 1 SEt 1 1 00 0 5 00 3 1 00 3 SETPOINT 2 SEt 2 1 00 1 5 00 4 1 00 4 Range changeover set value rAn 1 8 7 8 Degas auto OFF set value dGS 1 01 01 01 Filament FIL FIL 1...

Страница 33: ...gure blinks after the segment indicator displays for about 1 second Each time the key is pressed the portion in the left figure displays cyclically When WIT is used press the ENTER key with the select...

Страница 34: ...trol to the SET1 status CAUTION When setting a sensitivity factor the set point action may change over depending on the set value the moment the N2 setting is changed over to Ar setting or OTHER setti...

Страница 35: ...ft figure blinks after S is displayed for about 1 second Each time the is pressed the numeric value of the blinking portion changes When a desired value is displayed press the ENTER key to transfer co...

Страница 36: ...n in the left figure displays cyclically To use range AUTO HOLD press the ENTER key with 1 selected to transfer control to the DGS status 8 8 Setting of Range HOLD Refer to 38 Setting of range HOLD Th...

Страница 37: ...NTER key with selected to transfer control to the FIL status To use DEGAS AUTO press the ENTER key with selected to transfer control to the DGS status 8 10 Setting of DEGAS Function Refer to 39 Set th...

Страница 38: ...segment indicator displays for about 1 second Each time the key is pressed the portion of the segment indicator in the left figure displays cyclically To use filament 1 press the ENTER key with selec...

Страница 39: ...displays cyclically To use recorder LIN LOG press the ENTER key with selected to transfer control to the BPS status To use analog REC HOLD press the ENTER key with selected to transfer control to the...

Страница 40: ...status If filament activating action valid ON is specified here exit the set mode press the Fil key to perform activating action A second press on the Fil key stops activation Activation will automat...

Страница 41: ...nsitivity constant K of the ULVAC sensor head M type for nitrogen by the relative sensitivity Srj for various types of gases where the sensitivity for nitrogen is given as 1 This gauge is available wi...

Страница 42: ...02 CH4 9 48E 02 GI D7 0 083 Pa Molecule Input value Molecule Input value Molecule Input value He 1 83E 02 NH3 5 35E 02 H2S 1 83E 01 Ne 2 97E 02 H2O 1 04E 01 HCl 1 37E 01 Ar 1 11E 01 CO 7 89E 02 CO2 1...

Страница 43: ...he settable values are as follows GI M2 GI D7 GI N8 Setting range WIT selection WIB selection When the input of an invalid value the value is not updated is displayed on the segment indicator only in...

Страница 44: ...he form of 10 The settable values are as follows GI M2 GI D7 GI N8 Setting range When the input of an invalid value the value is not updated is displayed on the segment indicator only in the front pan...

Страница 45: ...m of minutes Settable values are as follows 01 to 99 min When the input of an invalid value the value is not updated is displayed on the segment indicator only in the front panel setting Inputs can be...

Страница 46: ...rvals of several seconds At this time discharge is taking place in the sensor head and the protection of the degas control circuit is actuated at intervals of several seconds The ON OFF intervals prol...

Страница 47: ...s follows GI M2 GI D7 GI N8 Setting range Selecting the sensitive factor When it was input appointment or the sensitivity setup anything other than N2 of the sensitivity factor the above setting range...

Страница 48: ...e recorder output LOG mode or read the analog output of the mantissa part in the linear mode and at the same time read the exponent pat of the digital output BCD output In this case however the value...

Страница 49: ...50 1 00 10 7 1 10 1 00 10 3 5 10 5 00 10 8 0 50 Displayed pressure value Torr Output voltage V Displayed pressure value Torr Output voltage V 5 00 10 2 8 99 1 00 10 6 4 10 1 00 10 2 8 10 5 00 10 7 3...

Страница 50: ...e Torr V Measured output voltage V E V from which decimal point is rounded down V GI M2 P 10 V E 10 E Torr 0 1 2 3 4 5 6 7 8 9 10 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 0...

Страница 51: ...10 1 00x10 3 6 10 5 00x10 7 2 50 5 00x10 4 5 50 1 00x10 7 2 10 1 00x10 4 5 10 5 00x10 8 1 50 5 00x10 5 4 50 1 00x10 8 1 10 1 00x10 5 4 10 5 00x10 9 0 50 5 00x10 6 3 50 1 30x10 9 0 13 Table 9 6 Hystere...

Страница 52: ...owing equation P Pressure value Torr V Measured output voltage V E V from which decimal point is rounded down V GI D7 P 10 V E 10 E Torr 0 1 2 3 4 5 6 7 8 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E...

Страница 53: ...e pressure that increased and decreased Increae Decrease Displayed pressure value Pa Output voltage V Displayed pressure value Pa Output voltage V 1 00 10 1 9 10 1 00 10 1 9 10 0 90 10 1 9 09 9 00 10...

Страница 54: ...V respectively but above the specified range of REC HOLD it is outputted as FULL 10 V and below the specified range the action is the same as when range hold is activated in the LIN range Example When...

Страница 55: ...70 5 00 10 2 6 70 1 00 10 6 2 00 1 00 10 2 6 00 5 00 10 7 1 70 5 00 10 3 5 70 1 00 10 7 1 00 1 00 10 3 5 00 5 00 10 8 0 70 5 00 10 4 4 70 Displayed pressure value Torr Output voltage V Displayed pres...

Страница 56: ...50 Fig 9 6 LOG output 0 1 2 3 4 5 6 7 8 9 10 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 Output Voltage V Pressure Pa...

Страница 57: ...3 50 1 30x10 5 0 13 1 00x10 2 3 10 5 00x10 3 2 50 1 00x10 3 2 10 5 00x10 4 1 50 Displayed pressure value Torr Output voltage V Displayed pressure value Torr Output voltage V 9 99x10 3 4 99 1 00x10 6...

Страница 58: ...following equation P Pressure value Torr V Measured output voltage V E V from which decimal point is rounded down V P 10 V E 10 5 E Torr 0 1 2 3 4 5 6 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00...

Страница 59: ...rr V 2 00x10 3 5 20 1 00x10 6 2 10 1 00x10 3 5 10 5 00x10 7 1 50 5 00x10 4 4 50 1 00x10 7 1 10 1 00x10 4 4 10 5 00x10 8 0 50 5 00x10 5 3 50 1 30x10 8 0 13 1 00x10 5 3 10 5 00x10 6 2 50 The measurement...

Страница 60: ...essure value using the following equation P Pressure value Torr V Measured output voltage V E V from which decimal point is rounded down V P 10 V E 10 6 E Torr 0 1 2 3 4 5 6 1 0E 08 1 0E 07 1 0E 06 1...

Страница 61: ...56 2 00x10 4 2 60 4 00x10 2 7 20 1 00x10 4 2 00 2 00x10 2 6 60 6 00x10 5 1 56 1 00x10 2 6 00 4 00x10 5 1 20 6 00x10 3 5 56 2 00x10 5 0 60 4 00x10 3 5 20 1 00x10 5 0 00 Displayed pressure value Torr O...

Страница 62: ...d output voltage V P 10 V 2 7 Torr 0 1 2 3 4 5 6 7 8 9 10 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 Output Voltage V Pressure Pa 0 1 2 3 4 5 6 7 8 9 10 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1...

Страница 63: ...t 2 Operation X Ray operation can be entered from the front panel or external I O connector X Ray 3 Notice The X Ray function is not actuated unless pressure comes down to below 3 0 10 5 Pa 2 0 10 10...

Страница 64: ...ct_1 invalid 9 8 3 What is filament activation The standard sensor head for this gauge uses a tungsten wire filament hot cathode Tungsten is an excellent material for filaments and is widely used in a...

Страница 65: ...ION VALID A EOKE A NG Out Validity of emission current DATA VALID A ELoE A Hi Out It works during output data update PRESSURE DATA A E EA Out The pressure value output BCD outut PRESSURE DATA A E b3E...

Страница 66: ...value GI N8 FILAMENT A E E A In A control input of filament 1 2 REC HOLD A EONE A OFF X RAY In The control input of the REC HOLD function GI M2 D7 A control input of a X RAY function GI N8 GND for con...

Страница 67: ...ted to outside as digital signals negative logic The output form is the open collector output Output rating is 24VMAX 50mAMAX saturation voltage 1V The standard setting of emitter common is pin 5 EXT...

Страница 68: ...cant bit of the four digit numeral Data of D is outputted by the BCD code at the output terminals of D b0 to D b3 where D b0 is the least significant bit of the four digit numeral Data valid of the di...

Страница 69: ...open collector Fig 10 4 External control using internal power supply If power is supplied from the outside in the internal power setting it will break down When external 5V or 24V power supply is used...

Страница 70: ...tion simultaneously If inputted simultaneously either operation may not be actuated Provide a time difference between actions Fig 10 6 Method of External Control 10 5 External Protect Input EXT PROTEC...

Страница 71: ...1 Output signal connector Output connector Dsub 9S female screw size M2 6 Signal and assignment complies with RS 232C standard Pin No Signal identification Receive data RD Transmit data TD Ground for...

Страница 72: ...mA GI N8 or Selects emission current 0 5mA GI N8 SA OK or NG Sets sensitivity factor N2 SB OK or NG Sets sensitivity factor Ar SE X XXE XX OK or NG Sets sensitivity factor R1 X XXE XX Reads data of se...

Страница 73: ...O OK or NG Turns OFF filament F1 OK or NG Turns ON filament FA OK or NG Selects filament 1 FB OK or NG Selects filament 2 Turning ON OFF the filament When it dose not appoint filament 1 2 it turns on...

Страница 74: ...d reading the set point Refer to 37 Command Parameter Response Explanation of function R1 X XXE XX Reads data of set point 1 R2 X XXE XX Reads data of set point 2 S1 X XXE XX OK or NG Sets set point 1...

Страница 75: ...utions in Operation 1 Operation from the front panel is not accepted after the remote status is set up by RS 232C communication 2 Operation from an external input is not accepted after the remote stat...

Страница 76: ...overcurrent is flowing for other cause it will blow out again Locate the real cause of trouble from other items The power line in the controller is disconnected Disconnection or short has occurred in...

Страница 77: ...re is verified replace the sensor head The sensor head cable is disconnected or insulation failure has occurred Check insulation between electrodes of the sensor head using a Megger Also check the con...

Страница 78: ...ge the sensor head with another one and check the symptom If OK with another sensor head the sensor head is faulty Replace the sensor head The filament is turned OFF immediately after it is turned ON...

Страница 79: ...repair it Insulation failure has occurred between electrodes of the sensor head resulting in leakage current Check insulation between electrodes of the sensor head and outside wall by a Megger The Me...

Страница 80: ...ot be ionized normally and the ion current generated will apparently be on the same order as that when pressure is low Thus the filament protecting function is not activated GND potential is fluctuati...

Страница 81: ...nsor head with a new one Erroneous wiring or broken wire of the EXT I O connector Correct the wiring and check continuity using a circuit tester See page 12 Control operation from I O connector cannot...

Страница 82: ...f the gauge to the minus side of the power supply and each signal to the plus side If an inverse voltage is applied the internal element may fail Line voltage connected is not correct 100VAC power is...

Страница 83: ...are correct See page 65 When a terminal CR is not set definitely a command is not received An error is displayed Possible cause Corrective action The filament is broken during DEGAS 4 is displayed Us...

Страница 84: ...sensor head Poor contact or burnout of sensor head cable Re connect or replace cable Failure of power supply circuit in controller Repair controller Basic conditions under which emission current flow...

Страница 85: ...nt Ii and density of gas molecules pressure P Ii S Ie P 1 Ii Ion current A S Sensitivity Pa 1 Ie Emission current A P Pressure Pa In the equation above sensitivity S depends on various conditions such...

Страница 86: ...Sensitivity of nitrogen gas Pa 1 r Specific sensitivity factor Substituting this equation in Eq 1 we obtain the following equation Ii S N2 r Ie P 3 Here given that Ii N2 is the ion current for nitroge...

Страница 87: ...0 44 1 03 28 14 CO 0 95 1 06 0 03 28 14 N2 1 00 1 00 30 15 NO 1 17 0 11 1 24 32 16 O2 0 879 0 96 0 07 Air 0 97 0 1 0 75 34 18 H2S 2 20 0 02 2 03 0 20 36 18 HCl 1 65 0 21 1 61 0 02 44 22 CO2 1 35 1 39...

Страница 88: ...ULVAC representatives for repair Return charge shall be paid by Buyer Disclaimer 1 Failure occurred after expiration of warranty period 2 Failure caused by force majeure such as fire storm and flood...

Страница 89: ...arks Contaminant Check an applicable box I guarantee that above returned item s is not contaminated with harmful substances Above returned item s is contaminated with the following harmful substances...

Страница 90: ...e product warranty period Table Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Printed Circuit Board Chas...

Страница 91: ...85 17 16BRELATED DRAWINGS 17 1 73BIon gauge Fig 17 1 Dimensional drawing panel cut drawing Front panel Side panel Panel cut Rack mount Fan or Rear panel Max dimension Main body Main body...

Страница 92: ...d GI M2 Sensor head model name Tie in with vacuum M 11 18 Pipe end M 12 15 Pipe end M 13 UFC034 flange M 14 NW 16 flange M 15 NW 25 flange Fig 17 2 Sensor heas GI M2 Fig 17 3 Sensor head electrode and...

Страница 93: ...del name Tie in with vacuum Pipe end Pipe end Pipe end Pipe end Flange Fig 17 4 Sensor head GI D7 18 15 0 3 157 3 80 2 17 1 50 4 1 G G P P F F A 77 113 2 13 1 70 2 F F G S F F G 57 1 17 1 18 15 0 3 Do...

Страница 94: ...N N2 WIN N3 Sensor head model name Tie in with vacuum Flange Flange Fig 17 5 Sensor head GI N8 Dotted lines show minimum clearance around the gauge UFC070 CMS 6 6 8 Dotted lines show minimum clearance...

Страница 95: ...ure from connector fit side Pin Uses Pin Uses 1 Shield GND 1 GRID 150V 2 FIL 1a 2 3 FIL 1com 3 GRID DEGAS 4 GRID DEGAS 4 Shield GND 5 FIL 2com 5 6 FIL 2a 6 7 Shield GND 7 FIL 1a 8 GRID 150V 8 FIL 1com...

Страница 96: ...long cable side A junction box and interconnecting cable are added for cables 20 m or longer Sensor side cable 2m Controller side cable 2m Long cable 2x2m Junction 70x70x95mm Fig 17 8 Long cable GI M2...

Страница 97: ...cable installation 100mm or less R 1 0 0 m m o r l e s s If the weight of the cable is applied to the probe this may cause leaks It is recommended to fix the cable at 1 m or less so that the weight of...

Страница 98: ...collector 6 1 2 Fil 1 Shell 16 17 Shield Fig 17 9 Sensor head cable connection diagram GI D7 WIT socket 17 4 2 135BWIB socket type GI D7 4 10 15 20 25 Sensor head side Pin Control side Pin Uses 1 14...

Страница 99: ...l 1 2 18 19 GRID DEGAS 3 NC 4 14 15 GRID 150V 5 5 6 Fil Com 6 BNC Ion collector Shell 16 17 Shield Fig 17 11 Sensor head cable connection diagram GI D7 WIB N3 socket type Sensor head side Pin Control...

Страница 100: ...Red GRID 150V G2 18 19 Yellow GRID DEGAS IC BNC Ion collector It is available with both WIT and WIB Fig 17 13 Sensor head cable connection diagram GI D7 Pin socket type Sensor head side Pin Contorl si...

Страница 101: ...ox and interconnecting cable are added for cables 30m 15m or longer GI D7 30 35 40 50 GI N8 15 20 25 30 Sensor side cable 2m Long cable 2x2m Control side cable 2m The figure is a constitution example...

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