Ulvac GI-M2, Инструкция по эксплуатации

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47
GI-
Ｎ８
Pseudo-LOG OUTPUT
Table. 9-7
Measured Pressure Value Table (GI-N8)
Displayed pressure
value (Pa)
Output voltage
(V)
Displayed pressure
value (Pa)
Output voltage
(V)
6.60
×
10
-1
9.66 1.00
×
10
-5
5.10
1.00
×
10
-1
9.10
5.00
×
10
-5
4.50
5.00
×
10
-2
8.50
1.00
×
10
-6
4.10
1.00
×
10
-2
8.10
5.00
×
10
-7
3.50
5.00
×
10
-3
7.50
1.00
×
10
-7
3.10
1.00
×
10
-3
7.10
5.00
×
10
-8
2.50
5.00
×
10
-4
6.50
1.00
×
10
-8
2.10
1.00
×
10
-4
6.10
4.00
×
10
-9
1.40
5.00
×
10
-5
5.50
Table. 9-8
Hysteresis by the pressure that increased and decreased
Increae Decrease
Displayed pressure
value (Pa)
Output voltage
(V)
Displayed pressure
value (Pa)
Output voltage
(V)
1.00
×
10
-1
9.10 1.00
×
10
-1
9.10
0.90
×
10
-1
9.09
9.00
×
10
-2
8.90
0.80
×
10
-1
9.80
8.00
×
10
-2
8.80
The measurement output voltage can be converted to a pressure value using the following
equation.
P: Pressure value
（
Pa
）
V: Measured output voltage
（
V
）
E: V from which decimal point is rounded down
（
V
）
GI-N8:
P=10(V-E)
×
10
-(
１０
-E)
（
Pa
）
Fig. 9-4 Supplementary explanation of output voltage (GI-N8)
0
1
2
3
4
5
6
7
8
9
10
1.0E-09 1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00
O
u
tp
u
t V
ol
tage
(V
)
Pressure (Pa)