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6.3
Pump oil change
Deterioration of the pump oil can lead to an increase in the vacuum device pressure.
Close the pump intake, and change the pump oil if the specified ultimate pressure
cannot be achieved. If volatile substances (moisture, solvents, etc.) are mixed with
the pump oil or there is sludge at the bottom of the pump, changing the pump oil
once may not be sufficient to return the ultimate pressure to its specified value. In
this case, change the pump oil several times. Deterioration of the pump oil is not only
caused by contamination due to intake gases, but is also caused by normal pump
operation over time.
We recommend that you periodically change the oil as shown in Table 5.
If the pump has been used to exhaust toxic gases, the pump itself, and the pump oil
will also be toxic. Pay sufficient attention.
(1) Wear rubber gloves and protective eyewear, etc.
(2) Read “1.2 Safety data sheet (SDS)” before adding oil.
If pump oil accidentally comes in contact with your hands, or gets in your eyes, use
the first aid measures described in “1.2 Safety data sheet (SDS)”.
Do not use any pump oils other that those specified by Ulvac. Using other oils may
cause the pump performance to be reduced and its lifetime to be shortened.
Danger
Caution
Attention
