Ulvac GHD-101A, Инструкция по эксплуатации

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Contents-1
Contents
0
．
Introduction
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01
0.1 Before using the vacuum pump
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01
0.2 Safety icons
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02
0.3 Safety cautions
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03
0.4 Receiving and storing the pump
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05
0.4.1 Receiving the pump
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05
0.4.2 Surroundings during storage, mounting, and operation ・・・・・・・ 05
0.5 Protective Equipment ・・・・・・・・・・ 06
1
．
Using the pump safely
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1
1.1 Dangers unique to the pump, and safety measures ・・・・・・・ 1
1.1.1 Leakage of dangerous gases and substances ・・・ 1
1.1.2 Electric shock ・・・・・・・・・・ 1
1.1.3 Bursting ・・・・・・・・・・ 2
1.1.4 High temperature ・・・・・・・・・・ 2
1.2 Safety data sheet (SDS) ・・・・・・・・・・ 2
2 ． Pump description ・・・・・・・・・・ 3
2.1 Performance details ・・・・・・・・・・ 3
2.2 Dimension drawings ・・・・・・・・・・ 4
3 ． Installation ・・・・・・・・・・ 5
3.1 Installation ・・・・・・・・・・ 5
3.2 Establishing an exhaust
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6
3.3 Vacuum piping ・・・・・・・・・・ 7
3.4 Wiring ・・・・・・・・・・ 8
3.5
Fluctuations in the power supply voltage and frequency
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11
DANGER
WARNING
WARNING
CAUTION