-2-
1.1.3
Bursting
Primary causes
Avoidance and actions to be taken
Increased internal pressure, with
consequent bursting of the pump.
⇒
Internal pressure limit is 0.03 MPa (gauge
pressure).
If measurement of the pump exhaust
pressure shows a value of 0.03 MPa (gauge
pressure), check and remove obstructions to
the passage of gas in the exhaust. When
using an oil mist trap, ensure that the
passage is clear by replacing or cleaning it.
1.1.4
High temperature
Primary causes
Avoidance and actions to be taken
Burns due to high temperatures.
⇒
(1) The pump becomes hot during operation.
Pump body
→
40-80ºC
Motor
→
40-80ºC
(2) High temperatures of the pump surfaces
bring a danger of burns if the pump is
touched by accident. Do not touch the
pump while it is in operation. Ensure that
the pump is stopped, and wait until it has
cooled, before commencing inspection.
1.2
Safety data sheet (SDS)
The attached “Safety Data Sheet (SDS)” shows chemical materials which may be
used or touched when operating the pump. Read the SDS carefully in order to
understand the harmful properties of these materials.
Contact us before using chemical materials (vacuum pump oil) other than those
mentioned in this instruction manual.
The SDS is provided as reference information for safe use of dangerous and toxic
chemicals. Persons handling pump oil are, on their own responsibility, required to
implement the necessary safety measures in use. The SDS is therefore not to be
considered as a guarantee of safety.
Warning
Caution
Caution