9
Prepare the following tools, and refer to photographs, before replacing components and
cleaning. Contact the manufacturer's service division if the required tools are not available.
* Tools
・
Hexagonal Allen wrench 4 mm diameter across flats
・
Phillips screw driver
・
Torque wrench 4 mm diameter across flats Wrench which can fasten at 5 N
･
m
・
Torque driver (+) Driver which can be fastened at 0.8 N
･
m and 3 N
･
m
・
Sealing/anti-loosening agent for screws
Replacing Cup packing
：
NK-4
or
LOCTITE 242
or
LOCTITE 243
Replacing suction and exhaust valves
：
LOCTITE 242
or
LOCTITE 243
・
Vacuum grease
1) Replacing Gaskets
Remove the four hexagonal socket bolts (M5×20)
⑯
from the pump head covers
②
(total of 8
bolts).
There is one black gasket
⑪
inside each of the pump head covers. Remove these and
replace with new gaskets.
Tighten the M5×20 bolts orthogonally to fix the pump head covers back in place at torque of
5.0 N
･
m.
* Make sure the gaskets are securely inside the pump head cover gasket grooves and that
there is no biting between the pump head covers and plates.
2) Replacing O Rings (S-67
・
P-10)
Remove pump head plates
③
according to the procedure provided for gasket replacement.
Replace the O-rings (S-67)
⑩
are inserted into the top of cylinders
④
.
In addition, there are 2 O-rings (P-10) in each of the
Connecting tubes
which connect the
pump head covers to each other. (
*80S
：
4 O-rings,
40D
：
2 O-rings) Replace with new O-rings
(P-10) coated with vacuum grease using a cloth.
Tighten the M5×20 bolts orthogonally to fix the pump head covers back in place at torque of
5.0N
･
m.
* When attaching the
Connecting tubes
to the pump head covers, make sure the O-rings are
coated with vacuum grease, and be careful not to damage the O-rings when inserting.
Photo 1: Pump head cover removal
Photo 2: Gasket removal
Photo 4: O-ring (S-67) attachment
Photo 3: O-ring (S-67) removal
Photo 5: O-ring (P-10) removal
Photo 6: O-ring (P-10) attachment
