Ulvac CRYO-U Series, Инструкция по эксплуатации, Страница: 65 / 106

CRYO-U
®
Cryopump Instruction Manual
MA07001E,2010AT01 ULVAC CRYOGENICS INCORPORATED 7-1
CAUTION
CAUTION
7. DISCONNECTION and STORAGE
7.1 Disconnecting Flexible Hose ······································· 7-1
7.2 Storage ··································································· 7-2
7.1 Disconnecting Flexible Hose
When disconnecting flexible hoses, be sure to use two single open end spanners with
width across flat 26mm and 30mm.
.
1. Shut down the compressor unit.
2. After the cryopump has been w om temperature, disconnect
the flexible hoses.
armed up to ro
・
If removing the flexible hoses before the refrigerator reaches room temperature, helium
gas shut up into the refrigerator increases pressure with the rise of temperature, and
may blow off from a pressure relief valve finally. It might cause a helium leakage
also.
・
However, only when carrying out heli ontamination procedures for the
refrigerator unit, disconnect the flexible hoses from helium gas supply and return
connectors at the compressor unit side right after shutdown. Refer to Section 8.5 for
more details.
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