Ulvac CRYO-U Series, Инструкция по эксплуатации

Страница: 61 / 106

CRYO-U ® Cryopump Instruction Manual
◇
Regeneration through assisted warm-up
Ⅰ
Ⅰ．
Warm-up
Start up regeneration
Close the main valve (V1) and shut off the
cryopump.
Then, open the purge gas introduction valve (GV1)
to introduce the purge gas into the cryopump.
Power the heater (option) at the same time.
The assisted warm-up starts. Make sure the
preset temperature of the heater is 300K.
Ⅱ．
Discharge (desorption) of captured gas
When the pressure inside of the cryopump reaches
atmospheric pressure, open the purge gas exhaust
valve (GV2) to exhaust the gas from the cryopump.
When the temperatures at 80K shield, 80K baffle
and 15K cryopanel reach room temperature,
close the purge gas introduction and exhaust
valves (GV1, GV2).
NOTE: When flammable gas, explosive gas or
oxygen is discharged, refer to Paragraph
6.Regeneration after pumping flammable,
explosive, or combustion enhancing gas in the
Safety section.
※１
：
The amount of gas captured in the cryopump
depends on your process.
Set up the timer according to the process.
Ⅲ． Pressure buildup check
Open the roughing valve (RV1), and rough
pump cryopump to 40Pa. When it reaches 40Pa
or less, turn OFF the heater (optional).
Then, close the roughing valve (RV1) and check
the buildup of pressure in the cryopump. If the
pressure buildup value stayed less than 6.5Pa
Close main valve (V1)
Shut off cryopump
Open purge gas introduction valve(GV1)
Power ON heater (option)
No
Ⅲ
Rough pump to 40 Pa
Yes
Ⅱ
Atmospheric pressure
No
Open purge gas exhaust valve (GV2)
to exhaust gas from the cryopump
Timer reaches at the set
period
※
1
of gas exhaust
No
Close purge gas introduction and
exhaust valves (GV1,GV2)
Yes
Open roughing valve (RV1)
80K shield, 80K baffle,15K cryopanel
warming up to room temperature
Yes
ULVAC CRYOGENICS INCORPORATED 6-5